TWI468632B - Temperature and humidity controller and method for controlling temperature and humidity - Google Patents

Description

Temperature and humidity control device and temperature and humidity control method

The present invention relates to temperature and humidity control devices and temperature and humidity control methods.

Generally, in the field of precision processing such as manufacturing of semiconductor devices, these devices are almost entirely installed in a clean room where temperature and humidity are controlled.

However, in recent years, in the field of precision machining, there has been a demand for precision processing industries that require higher processing accuracy than before.

In projects that require such a high degree of precision machining, it is often necessary to have a temperature change environment in which the temperature of the clean room is smaller. Therefore, projects requiring a high degree of precision machining are required to be placed in a space with precise temperature management.

As a temperature control device which is used for the space unit temperature control, as described in Japanese Laid-Open Patent Publication No. 51-97048, the temperature control device shown in Fig. 13 is used.

In the temperature control device shown in Fig. 13, a compressor 100, a three-way valve 102, a condenser 104, an expansion valve 106, a cooler 108, and a heater 110 are provided, and a cooling flow path having a cooler 108 is provided. There is a heating flow path of the heater 110.

The cooler 108 and the heater 110 are used to adjust the temperature of the air flow which is blown from the fan 112 as a temperature control target.

In the temperature control device shown in Fig. 13, the high-temperature heat medium compressed by the compressor 100 is distributed to the cooling flow path and the heating flow path via the three-way valve 102. The high-temperature heat medium distributed on the cooling flow path side is cooled by the condenser 104. The cooled heat medium is cooled by the expansion valve 106 by being thermally expanded, and then supplied to the cooler 108. While the cooler 108 cools the air flow which is blown by the fan 112 as the temperature control target, it absorbs heat and supplies the heated heat medium to the compressor 100.

On the other hand, the high-temperature heat medium distributed on the heating flow path side is supplied to the heater 110, and is heated to the air flow which is cooled by the condenser 108 as a temperature control target, and is adjusted to a desired temperature. In the heater 110 as described above, the hot air which is heated as the object of temperature control is heated, and the hot coal which is simultaneously released by the heat release is supplied to the compressor 100 through the expansion valve 106 and the cooler 108.

The conventional temperature adjustment device has an inherent defect that the temperature range of the gas flow such as the adjustable air is narrow, and the humidity control cannot be performed. The present invention can solve these problems.

In the temperature control device shown in Fig. 13, all of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is cooled by the thermal expansion, and is supplied to the cooler 108, so that the cooling is blown out from the fan 112 as temperature control. The cooling energy of the air flow of the object is constant.

On the other hand, by adjusting the flow rate of the high-temperature heat medium distributed to the heating flow path side of the three-way valve 102, the amount of heating by the cooler 108 as the temperature control target air flow in the heater 110 can be adjusted.

Therefore, the temperature of the air flow through the cooler 108 and the heater 110 as the temperature control object can be adjusted, and the temperature management in the space unit can be performed in a narrow temperature range.

However, in the temperature control device shown in Fig. 13, since all of the high-temperature heat medium compressed by the compressor 100 is cooled by the expansion and expansion of the expansion valve 106, and then supplied to the cooler 108, the temperature is blown from the fan 112. The temperature adjustment of the air flow of the controlled object is performed exclusively by reheating of the high temperature heat medium supplied to the heater 110 compressed in the compressor 100.

Thus, in the temperature control method of the temperature control device shown in Fig. 13, the heat medium used for heating also flows into the cooling flow path, and the heat that can be heated is only the heat generated by the compressor power, and the cooler 108 and the heater Difficulties arise in the correspondence of 110 load changes.

Therefore, when the temperature of the air temperature control target airflow is set to be greatly increased by the cooler 108 and the heater 110, the air flow temperature of the temperature adjustment target may not reach the set temperature, or may arrive for a long time. .

What is more, in the temperature control device shown in Fig. 13, the humidity control function for adjusting the humidity of the air flow through the cooler 108 and the heater 110 as the temperature control target is not provided, so that the humidity of the air flow cannot be implemented. control.

Accordingly, it is an object of the present invention to provide a temperature and humidity control device, and a temperature and humidity control method for solving a narrow temperature range in which a controllable temperature range of a gas flow such as an air flow is small, and at the same time, humidity control cannot be performed, and a previous temperature control for wasting energy is formed. The subject of the device is a temperature and humidity controller that can simultaneously carry out a wide range of energy saving.

The present inventors have found that in order to solve the above problems, an effective means is to provide a cooling flow path and a heating flow path, and to provide air for controlling the temperature and humidity of the heating means passing through the cooling means and the heating path of the cooling flow path. The distribution mechanism for changing the amount of cooling and the amount of heating is further provided with a heat pump mechanism to move the heat from the low temperature portion to the high temperature portion, thereby improving the heating ability of the heating flow path. Further, a humidity control mechanism is provided in the gas flow path.

That is, as a means for solving the above problems, a temperature and humidity control device is provided which is provided with a heating flow path for supplying a heating medium heated by a compressor to a high temperature first heat medium; a residual portion of a heat medium is cooled by a condensing mechanism, expanded by a first expansion mechanism in a heat-dissipating manner, and further cooled and supplied to a cooling flow path of the cooling mechanism; and the high-temperature first heat medium is distributed and passed through each of the heating The first heat medium of the flow path and the cooling flow path is re-supplied to the circulation circuit of the compressor, and the temperature and humidity adjusted by the heating mechanism and the cooling mechanism as the temperature and humidity control target are adjusted to a predetermined temperature and humidity. The device is provided with: distributing a portion of the high temperature first heat medium discharged from the compressor to the heating flow path side, and distributing the remaining portion of the high temperature first heat medium to the cooling flow path side, and is provided with a changeable a distribution mechanism assigned to the high temperature first heat medium distribution ratio of the heating flow path and the cooling flow path; in order to increase the heating capacity of the heating flow path, the heating mechanism releases heat and is cooled a first heat medium that is further cooled by the second expansion mechanism for thermal expansion, and a heat pump mechanism having a heat absorption function that absorbs heat from the second heat medium of the external heat source controls the distribution mechanism to adjust the heating flow path and the cooling flow path. a distribution ratio of the high temperature first heat medium; a temperature control unit that controls the temperature and humidity adjustment target of the heating mechanism to a predetermined temperature; and controls the gas passing through the heating mechanism and the cooling mechanism Humidity control mechanism for the specified humidity.

Moreover, in order to solve the problem, the present invention provides a temperature and humidity control method, which is a heating mechanism directly supplied by a part of a high temperature first heat medium compressed and compressed by a compressor, and the first After the residual portion of the heat medium is cooled by the condensing mechanism, the cooling mechanism supplied by the first expansion mechanism after being cooled by the thermal expansion is changed, and the temperature and humidity control target gas sequentially passed through the heating mechanism and the cooling mechanism are changed. a distribution rate of the heat medium to adjust the gas to a predetermined temperature, and the gas controlled by the temperature and humidity control object passes through the humidity control mechanism of the flow path, adjusts the gas to a predetermined humidity, and passes the heating mechanism a heat medium is cooled by thermal expansion and expansion by a second expansion mechanism, and is returned to the compression by a heat pump mechanism having a heat absorption mechanism that absorbs heat from a second heat medium of an external heat source, together with the first heat medium passing through the cooling mechanism. machine.

The means for solving the problems provided by the inventors of the present invention include the following preferred embodiments.

As a humidity control mechanism, a moisture supply mechanism for supplying a set amount of moisture to a temperature and humidity control target gas, and a droplet of moisture supplied from the moisture supply mechanism, directly heated by a heating mechanism, or heated by a heating mechanism The gas is heated to evaporate, and the moisture supply mechanism is provided on the gas inlet side or the outlet side of the heating mechanism to perform humidity control.

As the water supply mechanism, there is a water spray nozzle for water spray, a control valve provided in the water supply pipe of the water spray nozzle is supplied, and the control valve is adjusted to control supply to the water spray nozzle. The moisture supply mechanism of the humidity control unit of the water amount is easy to perform humidity control.

Alternatively, a water vapor generating mechanism that generates water vapor by means of a heater may be used as the humidity control mechanism.

This steam generating mechanism can adjust the amount of heating of the heater by setting the humidity control unit, thereby controlling the amount of water vapor generated, so that the humidity can be easily controlled.

The condensing mechanism supplied to the cooling flow path to supply the refrigerant of the first heat medium and the second heat medium supplied to the heat absorbing mechanism of the heat pump mechanism are supplied to the condensing mechanism, and then supplied to the heat absorbing mechanism. This effectively utilizes the heat of the high temperature first heat medium removed by the condensing mechanism.

The second heat medium supplied without external heating or cooling is effective as a second heat medium from the viewpoint of energy saving.

Further, a rotation speed control mechanism for controlling the number of revolutions of the compressor is provided, and the high-temperature first heat medium distribution ratio controlled by the temperature control unit can be added to the temperature of the gas heating amount applied by the heating mechanism to the temperature and humidity control target and the cooling mechanism. In the cooling amount of the humidity control target gas, the amount of heat that cancels each other is a small distribution ratio, and the compressor control unit for changing the compressor rotation speed is set by the rotation speed control means to achieve the addition of the heating mechanism and the cooling mechanism. The purpose of the heat that cancels each other is less, and the heat pump mechanism is added to save energy.

In the compressor control unit, the high temperature first heat medium distribution ratio is 90 to 85% of the high temperature first heat medium is distributed to the heating unit when the temperature and humidity control target gas is on the heating side, and the residual high temperature is first. 5 to 15% of the heat medium is distributed to the cooling mechanism, and when the temperature and humidity control target gas is on the cooling side, 95 to 85% of the high temperature first heat medium is distributed to the cooling mechanism, and the residual high temperature first heat 5 to 15% of the medium is distributed to the heating mechanism. If the above division can be distributed, the speed of the compressor can be controlled by the speed control mechanism, and on the one hand, the energy consumption of the temperature and humidity control device can be achieved, and on the other hand, the operating temperature and humidity control device can be stabilized. This speed control mechanism preferably uses an inverter.

Further, the first heat medium flow path that re-supplies the compressor through the heating flow path and the first heat medium of the cooling flow path includes the flow of the heating flow path from the distribution mechanism to the first heat medium combined flow. The road and the flow path including the cooling flow path are respectively set as independent flow paths, thereby expanding the temperature adjustment range of the temperature and humidity control target gas.

As a distribution mechanism that distributes the high-temperature first heat medium to the heating flow path and the cooling flow path, the high-temperature first heat medium distribution ratio that is distributed by the heating flow path and the cooling flow path can be substantially continuously changed. This allows for more precise adjustment of the gas temperature adjustment of the temperature and humidity control objects.

As such a distribution mechanism, the gas temperature adjustment of the temperature and humidity control target can be more precisely adjusted by substantially changing the distribution mechanism of the high-temperature first heat medium distribution ratio of the heating flow path and the cooling flow path.

This "distribution mechanism that can be changed continuously" uses a two-way valve or a proportional three-way valve as a distribution mechanism. When the two-way valve or the proportional three-way valve is driven by the step control, although the two-way valve or the proportional three-way valve is driven by the fine step, the whole means that the continuous drive is included.

The distribution mechanism intends to make the total amount of the high-temperature first heat mediums distributed on the heating flow path side and the cooling flow path side equal to the high-temperature first heat medium amount discharged from the compressor. The proportional three-way valve of the high-temperature first heat medium can be used to smoothly change the distribution ratio of the high-temperature first heat medium discharged from the compressor.

Further, the distribution mechanism may be a two-way valve provided on each of the branch pipes on which the high-temperature first heat medium is separated from the heating flow path side and the cooling flow path side, and the first high temperature is distributed between the heating flow path and the cooling flow path used by the temperature control unit. The heat medium distribution ratio is adjusted to control the temperature and humidity control target gas passing through the heating mechanism and the cooling mechanism to a predetermined temperature, and simultaneously adjust the opening degree of each of the two-way valves to distribute the high temperature to the heating flow path side and the cooling flow path side. The total amount of the first heat medium is equal to the high temperature first heat medium amount discharged by the compressor, so that the distribution ratio of the high temperature first heat medium discharged from the compressor can be smoothly changed.

Further, in order to make the refrigerant supplied to the condensing means of the cooling flow path a liquid medium, a refrigerant control mechanism for controlling the supply amount of the liquid medium supplied to the condensing means is provided to keep the pressure on the discharge side of the compressor constant. The temperature and humidity control device can be stably operated to prevent the supply of the liquid medium more than necessary to the condensing mechanism.

[Effects of the Invention] The temperature and humidity control device and the temperature and humidity control method provided by the present inventors supply a heating mechanism for a heating flow path and a cooling mechanism for a cooling flow path, and supply a high temperature first heat medium to a compressor. And changing the distribution ratio of the high temperature first heat medium distributed between the heating flow path and the cooling flow path, the heating amount and the cooling amount of the gas to be controlled by the temperature and humidity of the heating mechanism and the cooling mechanism can be easily adjusted, and the heating is adjusted by heating The gas temperature of the mechanism and the cooling mechanism is at a predetermined temperature.

Further, since the humidity control mechanism that controls the gas passing through the heating mechanism and the cooling mechanism to a predetermined humidity is provided, the humidity of the gas passing through the heating mechanism and the cooling mechanism can be simultaneously controlled to a predetermined humidity.

Further, the temperature and humidity control device and the temperature and humidity control method provided by the inventors of the present invention have a heat pump mechanism. The heat pump mechanism belongs to a mechanism that can move heat from a low temperature portion to a high temperature portion. Therefore, in the high temperature first heat medium (high temperature portion) compressed and heated by the compressor, the heating mechanism of the heating flow path is cooled and cooled. The first heat medium which is thermally expanded and cooled more by the expansion means is heated by the second heat medium (low temperature portion) of the external heat source to be returned to the compressor by the heat absorbing mechanism constituting the heat pump mechanism. Therefore, the heating capacity of the unit power can be greatly increased, and energy can be saved.

In the temperature and humidity control device and the temperature and humidity control method, the high temperature first heat medium (high temperature part) discharged from the compressor can be added to the compression kinetic energy of the compressor, and the heat pump mechanism is the second heat medium from the external heat source. The (low temperature part) heat absorption energy increases the heating capacity of the heating mechanism supplied by the high temperature first heat medium.

In such a temperature and humidity control device and a temperature and humidity control method, the temperature and humidity of the heating target and the cooling mechanism control the minute load fluctuation of the target gas, and the temperature of the heating flow path and the cooling flow path can be slightly adjusted by the slight adjustment. The heat medium distribution ratio can be quickly responded, and the gas humidity change caused by the load fluctuation can be quickly responded to by the humidity control mechanism, and the temperature and humidity control target gas can be adjusted for temperature and humidity.

Further, in the temperature and humidity control device and the temperature and humidity control method provided by the inventors of the present invention, when the set temperature of the temperature and humidity control target gas passing through the heating mechanism and the cooling mechanism is greatly increased, the heating flow path can be greatly increased. The high-pressure first heat medium distribution ratio of the cooling flow path is expanded to increase the temperature adjustment range of the temperature and humidity control target gas.

At this time, the humidity of the temperature and humidity control target gas may be maintained at a predetermined humidity by the humidity control mechanism.

Thus, the temperature and humidity control device and the temperature and humidity control method provided by the present inventors can adjust the temperature and the purpose of the previous temperature adjustment device shown in FIG. 13 and the temperature adjustment method using the device. The temperature and humidity of the humidity control target gas are achieved at a predetermined value, and energy can be saved.

Fig. 1 is a schematic view showing an example of a temperature and humidity control device according to the present invention. The temperature and humidity control device shown in Fig. 1 has a heating flow path and a cooling flow path provided in the space unit 10 in the clean room where the temperature and humidity are adjusted to adjust the temperature and humidity control target gas absorbed by the fan 12. Temperature and humidity, and as a moisture supply mechanism for the humidity control mechanism.

The heater 14 constituting the heating channel heating mechanism and the cooler 16 constituting the cooling channel cooling mechanism are provided, and the air in the clean room is dehumidified by the cooler 16 and then passed through the cooler 16 and the heater 14 disposed. Pass the heater 14.

Between the cooler 16 and the heater 14, a spray nozzle group 15 constituting a moisture supply device is disposed to spray the air after the dehumidification of the water meter 16 by a predetermined amount. The spray nozzles 15a, 15a, ‧ constituting the spray nozzle group 15 supply the pure water stored in the water tank 17 via the control valve 23 provided in the pump 19 and the water supply pipe 21. Further, in order to spray the supplied pure water compressed air, it is supplied to the spray nozzles 15a, 15a‧ through the piping 25.

Pure water obtained by supplying the normal water supplied through the pipe 33 to the water purifier 35 is stored in the water tank 17. The pure water storage amount of the water tank 17 is maintained at a constant value by the control valve 39 provided in the pure water supply pipe 37.

As the spray nozzle 15a, a conventional spray nozzle can be used, for example, a two-fluid nozzle that simultaneously sprays air and water to make water a mist. Instead of spraying the nozzle group 15, a two-fluid nozzle is used instead.

In the temperature and humidity control device shown in Fig. 1, the first heat medium discharged from the compressor 18 is distributed to the heating flow path including the heater 14 and the cooling flow path including the cooler 16, and passes through the heating flow path and the cooling flow path. The first heat medium is supplied to the compressor 18 via a circulating circuit.

As the first heat medium, for example, hydrocarbon such as propane, isobutane or cyclopentane can be used, and fluorides, ammonia, carbon dioxide or the like can also be used. The first heat medium is supplied, and because of its vaporization and liquefaction, the clean indoor air is heated or cooled and adjusted to a predetermined temperature.

Such a first heat medium is compressed by a compressor 18 and heated to a high temperature (for example, 70 ° C) gas to be discharged. The high-temperature first heat medium discharged from the compressor 18 is distributed to the heating flow path side where the heater 14 is provided and the cooling flow path side where the cooler 16 is provided by the proportional three-way valve 20 of the distribution mechanism.

In the proportional three-way valve 20, the high-temperature first heat medium distributed on the heating flow path side and the high-temperature first heat medium distributed on the cooling flow path side should be distributed equal to the high-temperature first heat discharged from the compressor 18. Media.

This proportional three-way valve 20 is controlled by the temperature control unit 22. In the temperature control unit 22, the measured temperature and the set temperature measured by the temperature sensor 24 provided in the air blowing port of the comparison unit are substantially continuously changed to the high temperature of the heating channel side and the cooling channel side in order to match the two temperatures. The distribution ratio of the first heat medium thus adjusts the air drawn into the space unit 10 at a set temperature.

This "substantially continuously changing" means that when the proportional three-way valve 20 is driven in steps, although the proportional three-way valve 20 is controlled by the fine step, it still has the meaning of being continuously driven as a whole.

The set temperature set in the temperature control unit 22 is set as desired. Further, the temperature sensor 24 shown in Fig. 1 is provided on the discharge side of the fan 12, but may be provided on the suction side of the fan 12, or both.

Moreover, the amount of pure water sprayed from the nozzle group 15 is controlled by the humidity control unit 27. The humidity control unit 27 compares the measured humidity measured by the humidity sensor 29 provided in the air outlet of the space unit 10 with the set humidity, and adjusts the control valve 23 to allow the air sucked into the space unit 10 to Set the humidity so that the measured humidity is consistent with the set humidity.

The set humidity set in the humidity control unit 27 can also be arbitrarily set. Further, the humidity sensor 29 shown in FIG. 1 is provided on the discharge side of the fan 12, but may be provided on the suction side of the fan 12 or on the discharge side and the suction side of the fan 12.

The high-temperature first heat medium distributed to the heating flow path side by the proportional three-way valve 20 is directly supplied to the heater 14, and is heated in the suction space unit 10 to be cooled by the cooler 16 and discharged from the spray nozzle group 15. The portion is adjusted to the set temperature. At this time, the high temperature first heat medium is exothermicly cooled to form a first heat medium containing the condensate.

On the other hand, the high-temperature first heat medium distributed on the cooling flow path side is cooled by the condenser 26 of the condensing mechanism, and then cooled by the expansion valve 28 of the first expansion mechanism to be further cooled (for example, cooled to 10 ° C). The cooled first heat medium is supplied to the cooler 16 to be vaporized to cool the air flow sucked into the space unit 10.

On the other hand, the condenser 26 is a cooling water which is supplied as a second heat medium, which is supplied to the high-temperature first heat medium pipe 30 on the heater 14 side by cooling, and is supplied without external heating or cooling. This cooling water is heated in the condenser 26 by a first heat medium at about 70 ° C to about 30 ° C to be discharged from the pipe 31. The cooling water discharged from the pipe 31 is used as a heat source to supply the heat sink 32 of the heat absorption mechanism of the heat pump mechanism.

The heat absorber 32 is supplied by the first heat medium, and after the heater 14 releases heat, it is cooled by the expansion valve 34 of the second expansion mechanism to be further cooled to about 10 °C. Therefore, in the heat absorber 32, the first heat medium can absorb heat from the cooling water based on the temperature difference between the cooling water heated to about 30 ° C by the heat of the condenser 26 and the first heat medium cooled to about 10 ° C by vaporization.

The first heat medium heated and vaporized from the cooling water in the heat absorber 32 is supplied to the compressor 18 via the accumulator 36. The accumulator 36 is also supplied with a first heat medium that is supplied to the cooler 16 and that absorbs heat and vaporizes the air stream sucked into the space unit 10.

The accumulator 36 is in the form of a storage liquid component and only supplies the gas component to the compressor 18, so that it is possible to supply only the gas component of the first heat medium to the compressor 18.

The accumulator 36 can take the form of an accumulator.

Further, the cooling water discharged from the heat absorber 32 is supplied to the water purifier 35, and may be ejected from the spray nozzle 15a of the spray nozzle group 15. When the temperature of the cooling water discharged from the heat absorber 32 is higher than the temperature of the cooling water supplied from the pipe 33, since the latent heat of vaporization of the water sprayed by the spray nozzle 15a is small, the temperature of the air flow can be reduced.

Further, the accumulator 36 is not provided, and the heat medium which is heated by the heat sink 32 and which is heated and vaporized by the heat sink 32 is re-supplied with the heat medium which is supplied to the cooler 16 and absorbs heat from the gas in the suction space unit 10 to evaporate. It is also possible to apply to the compressor 18.

However, although the first heat medium which radiates heat in the heater 14 is cooled by the expansion and expansion of the expansion valve 34, there is no heat exchange between the first heat medium and the outside. Therefore, the first heat medium cooled by the heat is absorbed from the outside by the condenser 26 and the heat of the heat sink 32 as the second heat medium absorbs heat.

Therefore, for the high temperature first heat medium discharged from the compressor 18, the compression kinetic energy of the compressor 18 can be added to the heat absorbed by the externally supplied cooling water by the heat absorber 32 of the heat pump mechanism. The heat absorption by the heat absorber 32 can be performed only by the driving energy of the compressor 18 that circulates the first heat medium.

Further, in the temperature and humidity control device shown in Fig. 1, externally supplied cooling water is supplied to the heat absorber 32 via the condenser 26. Therefore, a part of the energy from the high-temperature heat medium removed by the condenser 26 can also be added to the high-temperature first heat medium discharged from the compressor 18, thereby improving the heating ability of the heating flow path. Therefore, the energy absorbed by the heat absorber 32 of the heat pump mechanism, together with a part of the energy from the high temperature first heat medium removed by the condenser 26, can be added to the high temperature first heat medium discharged from the compressor 18 to improve the heating flow. As a result of the heating capacity of the road, the air flow temperature adjustment range can be widened, and energy is greatly saved.

Moreover, the heater 14 not only has the ability to heat the air flow, but also greatly increases the water spray heating capability of the spray nozzle 15a, and the humidification capability can be greatly increased, so that the air flow humidity adjustment range can be widened.

In this way, the quantitative pure water ejected from the spray nozzle group 15 provided on the air supply side of the heater 14 having improved heating capability can also increase the temperature of the air flow, and can also increase the temperature of the air flow by the heat absorption of the heat pump mechanism. Set the heating capacity of the temperature.

Here, when the heat pump mechanism is not provided and the spray nozzle group 15 is set to perform humidity control, there is a fear that the air flow cannot be adjusted to a predetermined temperature, and the air must be adjusted to a predetermined temperature for a long time.

That is, it is more necessary to increase the heating amount of the heater 14 which is caused by the water sprayed by the spray nozzle group 15 and to supply the heater 14 which is a part of the high temperature first heat medium discharged from the compressor 18.

However, the first heat medium supplied to the heater 14 is only the heat applied by the compressor 18.

Therefore, when the amount of water supplied from the spray nozzle group 15 for temperature control is sharply increased, sufficient heat cannot be immediately supplied to the heater 14 to raise the air flow to the set temperature.

As described above, in the temperature and humidity control device shown in Fig. 1, the heating capacity of the heating flow path can be improved by the arrangement of the heat pump mechanism, and the heating capacity and the humidifying ability of each predetermined electric power can be greatly increased, and energy can be saved.

Further, in the temperature and humidity control device shown in Fig. 1, the ratio of the high-temperature first heat medium distributed on the heating flow path side to the high-temperature first heat medium distributed on the cooling flow path side by the proportional three-way valve 20 is A substantially continuous change is made in accordance with the temperature of the space unit 10.

Therefore, in the temperature and humidity control device shown in Fig. 1, the heating flow path and the cooling flow path often have a supply of the high temperature first heat medium, and the heater 14 of the heating flow path and the cooler 16 of the cooling flow path The slight load fluctuation of the air flow of the temperature and humidity control target is immediately adjusted by the proportional three-way valve 20 to the minute ratio of the distribution ratio of the high-temperature first heat medium distributed between the heating flow path and the cooling flow path, so that the correspondence can be quickly improved.

Further, as shown in Fig. 1, the temperature and humidity control device discharges pure water from a spray nozzle provided on the air inlet side of the heater 14, thereby maintaining the humidity in the air at a set value. Further, although the circulating air circulating in the clean room is heated by the fan 12 or the like, the pure water discharged from the spray nozzle group 15 can be used to remove heat, and the load of the cooler 16 can be reduced.

As a result, the temperature and humidity of the air flow of the spray nozzle group 15 and the heater 14 can be controlled by the temperature of the cooler 16 of the heating nozzle, and the temperature and humidity of the spray nozzle group 15 can be controlled with high precision, and the space unit shown in Fig. 1 can be reduced. The temperature and humidity changes of 10 are beneficial to the setting of the engineering that requires precision machining.

As described above, in the temperature and humidity control device shown in Fig. 1, the heating ability of the heating flow path is improved, and the flow path including the heating flow path and the cooling mechanism is independently provided with the passage from the proportional three-way valve 20. The first heat medium of the cooler 16 and the heat sink 32 is combined with the heating flow path and the cooling flow path of the accumulator. Therefore, the first heat medium having a different temperature is not mixed, and the temperature adjustment range of the temperature and humidity adjustment target can be expanded.

Further, when the temperature setting of the temperature and humidity control target air flow by the heater 14 and the cooler 16 is greatly increased, the proportional three-way valve 20 can be greatly increased in temperature. The first heat medium is distributed to the heating flow path pair and distributed to the cooling flow. The ratio of the road, quickly adjust the temperature and humidity to adjust the target air flow to the set temperature.

When the air flow temperature is adjusted in this way, the humidity control unit 27 adjusts the pure water spray amount of the spray nozzle group 15 to adjust the air flow humidity to the set humidity.

Further, in the temperature and humidity control device shown in Fig. 1, the heating flow path heating ability is improved, so that it is not necessary to use another water supply means or heating means such as a heated water vapor generating device, and energy can be greatly saved.

Further, in the temperature and humidity control device shown in Fig. 1, the temperature control unit 22 and the humidity control unit 27 independently perform temperature and humidity adjustment, and even if the set temperature and the set humidity, the temperature and humidity of the air flow are changed, It will reach the set temperature and set humidity in a relatively short time.

In the temperature and humidity control device shown in Fig. 1 described above, the control valve 40 serving as a refrigerant control means is provided in the pipe 30 of the condenser 26 to supply the cooling water. This control valve 40 controls the discharge pressure of the compressor to be constant. As shown in Fig. 2, the control valve 40 has a rod-shaped valve body 40b for opening and closing the opening of the valve portion 40a provided in the cooling water flow path. The spring 40c that is in contact with the front end surface of the rod portion biases the valve body 40b in a direction in which the opening of the valve portion 40a is closed. Further, the other end surface of the rod portion is in contact with the telescopic bag 40d that supplies the pressure of the first heat medium to be supplied from the compressor 18, and the valve body 40b is energized in the opening direction of the opening of the valve portion 40a to make the rod portion The ability to counter the spring 40c.

When the discharge pressure of the compressor 18 becomes equal to or higher than the capacity of the spring 40c, the valve body 40b is moved in the opening direction of the opening of the valve portion 40a by the bellows 40d, and the amount of cooling water supplied to the condenser 26 is increased to increase the condenser 26. Cooling capacity. As a result, the cooling capacity of the condenser 26 is increased and the discharge pressure of the compressor 18 is lowered.

On the other hand, when the discharge pressure of the compressor 18 is equal to or lower than the capacity of the spring 40c, the valve body 40d moves in the direction of the opening of the closing valve portion 40a, and the amount of cooling water supplied to the condenser 26 is reduced to lower the cooling capacity. Therefore, the discharge pressure of the compressor 18 is increased.

In this way, by keeping the discharge pressure of the compressor 18 constant, the temperature and humidity control device can be stably operated. Further, it is possible to adjust to prevent the supply of cooling water of the condenser 26 from exceeding the required amount and draining outside the system.

As shown in Fig. 1, the control valve 40 is provided with a valve 41 in the short-circuit piping. The valve 41 is in a state where the control valve 40 is malfunctioning or the supply of the high-pressure first heat medium supplied to the heater 14 is increased, the discharge pressure of the compressor is lowered, and the heat sink 32 cannot perform a substantial function due to insufficient supply of water, etc. The condenser 26 and the heat absorber 32 are provided.

In the temperature and humidity control device shown in Fig. 1. A spray nozzle group 15 for spraying pure water is disposed between the cooler 16 and the heater 14, and the spray nozzle group 15 is disposed on the air outlet side of the heater 14 as shown in Fig. 3A. In this manner, the water droplets ejected from the spray nozzle group 15 can be directly heated by the heater 14 to be evaporated.

Further, as shown in FIG. 3B, the cooler 16 and the heater 14 are disposed, air is supplied to the heater 14, and then supplied to the cooler 16, and a spray nozzle group is disposed between the cooler 16 and the heater 14. 15. At this time, the water droplets sprayed from the spray nozzle group 15 can be heated by the heater and the air stream to evaporate.

Further, as shown in Fig. 3B, the heater 14 and the cooler 16 may be disposed as shown in Fig. 3C, and the spray nozzle group 15 may be disposed on the air inlet side of the heater 14. In this case, water droplets sprayed from the spray nozzle group 15 can be directly heated and evaporated by the heater 14.

However, for example, the heater 14 and the cooler 16 shown in FIG. 3A are disposed, and as shown in FIG. 3D, the spray nozzle group 15 is disposed on the air inlet side of the cooler 16, and the spray nozzle group 15 is provided. The ejected water droplets are condensed in the cooler 16 and cannot be evaporated and removed from the air stream. It is difficult to adjust the air flow to the set humidity.

Further, as shown in FIGS. 3B and 3C, when the spray nozzle group is provided on the upstream side of the heater 14 or the cooler 16, the heater 14 or the cooler 16 on the downstream side of the spray nozzle group 15 functions to remove the spray nozzle group 15 The function of the water droplets to be sprayed keeps the size of the water droplets contained in the air flow passing through the downstream side heater 14 or the cooler 14 constant.

The proportional three-way valve 20 of the distribution mechanism used in the temperature and humidity control device shown in Fig. 1 can be replaced by the two-way valve 38a, 38b as two two-way valves as shown in Fig. 4. Each of the two-way valves 38a, 38b is controlled by the temperature control portion 22. The temperature control unit 22 adjusts the opening degrees of the two-way valves 38a and 38b, and substantially continuously adjusts the distribution ratio of the gas-like high-temperature first heat medium compressed and heated by the compressor 18 to the heating flow path and the cooling flow path, and thus passes through The air flow of the heater 14 and the cooler 16 is controlled at a set temperature. At this time, the total amount of the high-temperature first heat medium distributed to the heater 14 side and the cooler 16 side is equal to the high-temperature first heat medium discharged from the compressor 18, and the opening degree of the two-way valves 38a, 38b can be adjusted. , for continuous proportional distribution.

As shown in Fig. 5, the relationship between the opening degree and the flow rate of each of the two-way valves 38a and 38b is not linear. Therefore, the temperature control unit 22 holds the flow rate characteristic data for each of the two-way valves 38a and 38b shown in Fig. 5. The temperature control unit 22 issues an opening degree signal to each of the two-way valves 38a and 38b in accordance with the flow rate characteristics of the two-way valves 38a and 38b.

The "allocation of the distribution ratio between the heating flow path and the cooling flow path is substantially continuously adjusted" or "the distribution ratio is substantially continuously adjusted" as used herein, meaning that the two-way valves 38a, 38b are driven in a stepwise manner. When adjusting the ratio of the heating flow path to the cooling flow path, it is apparent that the opening degrees of the two-way valves 38a, 38b seem to be driven in a stepwise manner, but there is also a case of continuous drive adjustment.

In the temperature and humidity control device shown in Fig. 1, the temperature and humidity of the target air flow are adjusted by the temperature and humidity performed by the heater 14 and the cooler 16, for example, when the target air flow is on the heating side, and the air temperature is at In the steady operation state, as shown in Fig. 6A, the air flow cooled by the cooler 16 is heated by the heater 14. In the operating state shown in Fig. 6A, the energy heated by the heater 14 may be larger than the energy A required for the heated air flow. As shown in Fig. 6B, energy can be saved if the energy of the heater 14 and the cooler 16 are repeated as much as possible.

On the other hand, when the temperature and humidity control target air flow is on the cooling side, the air heated by the heater 14 is cooled by the cooler 16 as shown in Fig. 7A when the air flow temperature is in a stable operation state. In the operating state shown in Fig. 7A, the energy cooled by the cooler 16 may be larger than the energy B required for the cooling air flow. As shown in Fig. 7B, energy can be saved by minimizing the energy of the cooler 16 and the heater 14 at this time.

However, in order to zero the heat intended to cancel each other, ON-OFF controls the supply of the high temperature first heat medium to the heater 14 and the cooler 16, that is, the operation of the temperature and humidity control device becomes unstable, and the air flow is stabilized at the predetermined The temperature takes time. Accordingly, in order to maintain the temperature and humidity control device in a stable operation state, it is necessary to minimize the amount of heat that is added to the heater 14 and the amount of cooling added to the cooler 16 to cancel each other.

Moreover, the minimum amount of heat required to cancel each other differs somewhat depending on the temperature and humidity control means, and is preferably determined experimentally.

Thus, in the temperature and humidity control apparatus shown in Fig. 8, in order to reduce the repetitive energy of the cooler 16 and the heater 14, the amount of heating added to the heater 14 and the amount of cooling added to the cooler 16 must be made. The heat that cancels each other is reduced as much as possible, and the inverter 42 of the number-of-turns control unit for controlling the number of revolutions of the compressor 18 is controlled by the compressor control unit 44 (hereinafter referred to as the COMP control unit 44).

The constituent members of the temperature and humidity control device shown in Fig. 8 are denoted by the same reference numerals as those of the first embodiment, and the detailed description thereof will be omitted.

The COMP control unit 44 cooperates with the temperature control unit 22 that controls the proportional three-way valve 20 to minimize the amount of heat that is added to the heater 14 and the amount of cooling added to the cooler 16 to control the air flow. Temperature and humidity.

The control of the proportional three-way valve 20 by the temperature control unit 22 and the control of the number of revolutions of the compressor 18 by the COMP control unit 44 will be described with reference to the flowchart of Fig. 9.

As a result of the temperature control device shown in Fig. 8, the amount of heating added to the heater 14 when the air flow is operated on the cooling side, that is, the high temperature first heat medium distribution distributed to the heater 14 side by the proportional three-way valve 20 The rate is preferably 5 to 15% (the ratio of the high-temperature first heat medium distribution ratio of the proportional three-way valve 20 to the cooler 16 side is 95 to 85%).

On the other hand, when the air flow is operated on the heating side, the heating amount added to the heater 14 side, that is, the high-temperature first heat medium distribution ratio which is distributed to the heater 14 side by the proportional three-way valve 20 is 95 to 85% ( When the proportional three-way valve 20 is distributed to the side of the cooler 16 at a high temperature first heat medium distribution ratio of 5 to 15%, it is preferable to operate stably.

Here, in the control of the flowchart shown in FIG. 9, the amount of heating added to the heater 14 side, specifically, the high-temperature first heat medium distribution ratio assigned to the heater 14 side by the proportional three-way valve 20, When the air flow is operated on the cooling side, the number of revolutions of the compressor 18 is controlled to be 5 to 15%. When the air flow is operated on the heating side, the number of revolutions of the compressor 18 is controlled to be 95 to 85%.

In the flowchart shown in FIG. 9, after the compressor 18 is started in S10, the temperature sensor 24 provided in the space unit 10 continuously changes the proportional three-way valve 20 to be heated in S12 based on the measured temperature signal. The ratio of the high temperature first heat medium to the side of the cooler 14 and the side of the cooler 16 adjusts the air flow sucked into the space unit 10 to a set temperature.

In S14, it is determined whether the air flow is stable at the predetermined temperature, and if the air flow temperature is not stabilized, the flow returns to S12, and the proportional three-way valve 20 is continuously changed to the high temperature heat of the heater 14 side and the cooler 16 side. The distribution ratio of the media. S12 and S14 are executed by the temperature control unit 22.

On the other hand, when the air flow in the space unit 10 reaches the set temperature and is stabilized, it is determined in S16 to S22 whether or not the high temperature first heat medium distribution ratio assigned to the heater 14 side is within the set range. S16 to S22 are executed by the COMP control unit 44.

In addition, the average distribution ratio of the high-temperature first heat medium shown in FIG. 9 is uneven due to the distribution ratio of the high-temperature first heat medium distributed to the heater 14 side, and is the average of the first heat-distribution rate obtained in a certain period of time. The value, hereinafter referred to as the first heat medium average distribution rate.

First, in S16 and S18, it is assumed that the air flow is on the cooling side, and it is judged whether or not the average distribution ratio of the first heat medium on the heater 14 side is within 5 to 15%.

Therefore, if the average heat distribution rate of the first heat medium on the heater 14 side is 5 to 15%, the air flow is on the cooling side, and is within the stable operation range of the temperature and humidity control device, and can be returned from S18 to S16 through S16. .

On the other hand, when the average distribution ratio of the first heat medium on the heater 14 side is less than 5%, the distribution ratio is too low, and the operation of the temperature and humidity control device is liable to be unstable. To this end, the average distribution ratio of the first heat medium on the heater 14 side should be increased, and the flow rate from S16 to S24 is increased to increase the number of revolutions of the compressor 18. In S24, the COMP control unit 44 transmits an increase signal set to the inverter 42 to increase the number of revolutions of the compressor 18 by the minimum amount of change from the COMP control unit 44. Thus, the operating temperature and humidity control device can be stabilized.

In addition, the minimum amount of change in the number of revolutions of the compressor 18 varies depending on the temperature and humidity adjustment device, and is preferably determined experimentally. However, when the number of revolutions of the compressor 18 is 2000 to 5000 rpm, the minimum variation is preferably 3 to 10. Within the range of %.

When the first heat medium average distribution ratio on the heater 14 side exceeds 15%, it is determined in S16 and S18 that the air flow is not on the cooling side, and the flow proceeds to S20 and S22. In S20 and S22, if it is assumed that the air flow is on the heating side, it is judged whether or not the average distribution ratio of the first heat medium on the heater 14 side is within 95 to 85%.

Here, if the average distribution rate of the first heat medium on the heater 14 side is within 85 to 95%, since the air flow is on the heating side and within the stability range in which the temperature and humidity control device operates, the S20 is passed from S22. Go back to S16.

On the other hand, when the average distribution ratio of the first heat medium on the heater 14 side exceeds 95%, the average distribution ratio of the first heat medium on the heater 14 side is too high, and the operation of the temperature and humidity control device is liable to be unstable. Therefore, the average distribution ratio of the first heat medium on the heater 14 side should be reduced and the flow rate from S2O to S24 should be increased to increase the number of revolutions of the compressor 18. In S24, the COMP control unit 44 sends an increase signal to the inverter 42 that increases the number of revolutions of the compressor 18 set in the inverter 42 with a minimum amount of change.

Further, when the average distribution ratio of the first heat medium on the heater 14 side is less than 85%, in S22, it is determined that the air flow is not on the heating side, nor is it on the cooling side, that is, the heating added to the heater 14. The amount and the amount of cooling added to the cooler 16 are excessively offset by the amount of heat. To this end, the process proceeds to S26 to reduce the number of revolutions of the compressor 18. In S26, the COMP control unit 44 sends a lowering signal to the inverter 42 that is set to the inverter 42 to reduce the number of revolutions of the compressor 18 with a minimum amount of change, so that the air flow is moved to the heating side or the cooling side. .

Next, the process proceeds to S28 via S24 or S26, and it is judged whether or not the compressor 18 is in operation. If the compressor 18 is in operation, the process returns to S14. In S14, it is judged in S24 or S26 that the number of revolutions of the compressor 18 is increased or decreased with a minimum amount of pressure change, and whether the air flow in the space unit 10 reaches the set temperature is stabilized. If so, according to S16 to S26, it is determined again whether or not the average distribution ratio of the first heat medium on the heater 14 side is within the set range.

On the other hand, if it is determined in S14 that the air flow temperature in the space unit 10 is not stabilized, that is, the process returns to S12, and the first heat medium distribution ratio of the proportional three-way valve 20 to the heater 14 side and the cooler 16 side is continuously changed. After the air flow in the space unit 10 reaches the set temperature and is stabilized, the flow proceeds to S16 to S26.

Further, in S28, when the compressor 18 is not in the operating state, the control by the temperature control unit 22 and the COMP control unit 44 is stopped.

In the flowchart shown in Fig. 9 described above, the temperature control unit 22 focuses on the first heat medium average distribution ratio on the heater 14 side, but may focus on the first heat medium on the cooler 16 side. The average distribution rate is controlled.

Further, the set temperature input input means and the indicator means indicating the operation state may be integrated with or separately from the temperature control unit 22 and the humidity control unit 27.

In the temperature and humidity control device shown in FIGS. 1 to 9, the condenser 26 and the heat absorber 32 use water as a cooling water and a heating source, but as shown in FIG. 10, the indoor air is blown by the fan 50. In the manner, the cooling source and the heating source of the condenser 26 and the heat absorber 32 are used.

In the components constituting the temperature and humidity control device shown in Fig. 10, the same components as those of the components of the temperature and humidity control device shown in Fig. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

Further, in the temperature and humidity control device shown in Figs. 1 to 9, the spray nozzle group 15 as the humidity control means is disposed, but as shown in Fig. 11, the spray nozzle group may not be provided. 15, and instead, a steam generator 52 is disposed in the air flow path. The steam generator 52 is a device for supplying moisture to the air flow through the heater 14 and the cooler 16, and the heated electric heater 56 heats the pure water stored in the container 54 to generate steam. This heater 56 is controlled by the temperature control unit 27.

That is, in the humidity controller 27, the amount of heating of the heater 56 of the steam generator 52 is adjusted by the difference between the humidity in the air flow discharged from the fan 12 and the target humidity, and the humidity in the air flow discharged from the fan 12 is adjusted to the target humidity.

Thus, the steam generator 52 as a humidity control means is used, and in the temperature and humidity control means shown in Fig. 11, energy can be saved.

That is, by using the arrangement of the heat pump mechanism, the heater 14 having improved heating capability is heated to the air flow to increase the dew point in the air flow and retain a large amount of moisture in the air flow.

In the components constituting the temperature and humidity control device shown in Fig. 11, the same components as those of the components of the temperature and humidity control device shown in Fig. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

Further, as shown in Fig. 12, the condenser 26 and the heat absorber 32 may be separately supplied and supplied with water. For example, the water is supplied to the condenser 26 via the pipe 33, and is supplied to the heat absorber 32 via the pipe 32a, and thus discharged through the condenser 26 and the water of the heat absorber 32 to the outside of the system.

In the components of the temperature and humidity control device shown in Fig. 12, the same components as those of the components of the temperature and humidity control device shown in Fig. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

Further, the condenser 26 and the water purifier 35 may be supplied with water through different pipes. For example, normal water is supplied to the condenser 26, and pure water is supplied to the water purifier 35.

In addition, the humidity control means used in the temperature and humidity control device shown in Figs. 1 to 12 can be used in combination with the water supply mechanism or the water supply mechanism instead of the moisture supply means. Dry air is blown into the air flow path.

The method for adjusting the temperature and humidity of the air flow to be used for the temperature and humidity adjustment by the temperature and humidity control device shown in Figs. 1 to 12 described above can adjust the temperature and humidity range at the same time, and has energy saving. The role and effect.

In such a temperature adjustment method, the heater 14 of the high-temperature first heat medium which is compressed and heated by the compressor 18 is directly supplied, and the remaining portion of the first heat medium is cooled by the condenser 26, and then the expansion valve 28 is broken. The air flow of the cooler 16 supplied by the thermal expansion is further cooled, and the distribution ratio of the heater 14 and the cooler 16 is changed by the three-way valve 20 or the two-way valves 38a and 38b to adjust the air flow to the predetermined temperature while borrowing The air flow is controlled by a humidity control mechanism of the flow path to adjust the air flow to a predetermined humidity.

Further, the first heat medium passing through the heater 14 is cooled and expanded by the expansion valve 34 to be cooled by a heat pump mechanism having a heat absorber 32 that absorbs heat from water or air of an external heat source, and then passed through the cooler 16 The first heat medium is returned to the compressor 18 in common.

The temperature and humidity control device and the temperature and humidity control method described above are used for temperature and humidity control in a clean room in the field of precision machining such as semiconductor device manufacturing engineering, but can of course be applied to clean rooms in other engineering fields. Temperature and humidity control.

The temperature and humidity control device and the temperature and humidity control method described above can also be applied to other fields, such as a painting room, a solar simulator, a printed substrate storage room, an electron microscope, a tableting machine, a three-dimensional measuring device, Chromatography, drawing room, exposure apparatus, spin coating apparatus, liquid crystal glass substrate, screen printing machine, image diagnostic apparatus, cement curing, mold, injection molding machine, cell culture, plant cultivation, food preservation and ripening, DNA fixation Temperature and humidity adjustment for fields such as chemistry.

10. . . Space unit

12. . . fan

14. . . Heater

15. . . Spray nozzle group

15a. . . Spray nozzle

16. . . Cooler

17. . . sink

18. . . compressor

19. . . Pump

20. . . Proportional three-way valve

twenty one. . . Supply water piping

twenty two. . . Temperature control department

twenty three. . . Control valve

twenty four. . . Temperature sensor

25. . . Piping

26. . . Condenser

27. . . Humidity control department

28. . . Expansion valve

29. . . Humidity sensor

30. . . First heat medium piping

31. . . Piping

32. . . Heat sink

32a. . . Piping

33. . . Piping

34. . . Expansion valve

35. . . Water purifier

36. . . Accumulator

37. . . Pure water supply piping

39. . . Control valve

40. . . Control valve

40a. . . Valve department

40b. . . Valve body

40c. . . spring

40d. . . Telescopic bag

38a, 38b. . . Two-way valve

41. . . valve

42. . . Inverter

44. . . COMP Control Department

50. . . fan

52. . . Steam generator

54. . . container

56. . . Heating electric heater

100. . . compressor

102. . . Three-way valve

104. . . Condenser

106. . . Expansion valve

108. . . Cooler

110. . . Heater

112. . . fan

Fig. 1 is a schematic view showing an example of a temperature and humidity control device of the present invention.

Fig. 2 is an explanatory view showing the internal structure of the control valve 40 used in the temperature and humidity control device shown in Fig. 1.

3A to 3D are explanatory views showing the arrangement of the heater 14, the cooler 16, and the spray nozzle group 15 shown in Fig. 1.

Fig. 4 is an explanatory view of another distribution mechanism usable for the temperature and humidity control device shown in Fig. 1.

Figure 5 is a graph showing the flow characteristics of the two-way valve used in the distribution mechanism shown in Figure 4.

Fig. 6A and Fig. 6B are explanatory diagrams of the principle of energy saving when the temperature and humidity control device shown in Fig. 1 is on the cooling side.

Fig. 7A and Fig. 7B are explanatory diagrams of the principle of energy saving when the temperature and humidity control device shown in Fig. 1 is on the heating side.

Figure 8 is a schematic view showing another embodiment of the temperature and humidity control device of the present invention.

Fig. 9 is a flow chart showing the control procedures of the temperature and humidity control device shown in Fig. 8 by the temperature control unit 22 and the COMP control unit 44.

Figure 10 is a schematic view showing another embodiment of the temperature and humidity control device of the present invention.

Figure 11 is a schematic view showing another embodiment of the temperature and humidity control device of the present invention.

Figure 12 is a schematic view showing another embodiment of the temperature and humidity control apparatus of the present invention.

Figure 13 is a schematic diagram of a conventional temperature and humidity control device.

10. . . Space unit

12. . . fan

14. . . Heater

15. . . Spray nozzle group

15a. . . Spray nozzle

16. . . Cooler

17. . . sink

18. . . compressor

19. . . Pump

20. . . Proportional three-way valve

twenty one. . . Supply water piping

twenty two. . . Temperature control department

twenty three. . . Control valve

twenty four. . . Temperature sensor

25. . . Piping

26. . . Condenser

27. . . Humidity control department

28. . . Expansion valve

29. . . Humidity sensor

30. . . First heat medium piping

31. . . Piping

32. . . Heat sink

33. . . Piping

34. . . Expansion valve

35. . . Water purifier

36. . . Accumulator

37. . . Pure water supply piping

39. . . Control valve

Claims (3)

A temperature and humidity control device comprising a heating flow path for supplying a preheating mechanism to a high temperature first heat medium compressed and heated by a compressor, wherein a residual portion of the high temperature first heat medium is cooled by a condensing mechanism The first expansion mechanism is expanded in a heat-dissipating manner, and further cooled and supplied to the cooling flow path of the cooling mechanism; and the high-temperature first heat medium is distributed and passes through the temperature and humidity control devices of the heating flow path and the cooling flow path. The first heat medium is re-supplied to the circulation circuit of the compressor; and the temperature and humidity adjustment device that adjusts the temperature and humidity control by the heating mechanism and the cooling mechanism to a predetermined temperature and humidity is provided in the device: One part of the first heat medium discharged from the compressor is distributed on the heating flow path side, and the remaining portion of the high temperature first heat medium is distributed on the side of the cooling flow path, and is provided with a changeable distribution to the heating flow path. a distribution mechanism for the high temperature first heat medium distribution ratio of the cooling flow path; to increase the heating capacity of the heating flow path, the heat is radiated by the heating mechanism, and after cooling, the second expansion mechanism is Adiabatic expansion of the further cooled first heat medium, the heat pump mechanism having a second heat absorbing function of the heat medium absorbs heat from an external heat source; Controlling the distribution mechanism to adjust a distribution ratio of the high temperature first heat medium to which the heating flow path and the cooling flow path are arranged, and controlling a temperature of the temperature and humidity adjustment target by the heating mechanism and the cooling mechanism to a temperature of a predetermined temperature a control unit; a humidity control mechanism that controls the gas passing through the heating mechanism and the cooling mechanism to a predetermined humidity; a rotation speed control mechanism that controls the rotation speed of the compressor; and a high temperature first heat medium distribution ratio controlled by the temperature control unit The amount of heating applied by the heating mechanism to the temperature and humidity control target gas and the cooling amount of the cooling mechanism applied to the temperature and humidity control target gas are offset by a small distribution ratio, and the rotation speed control mechanism is passed through the rotation speed control mechanism. Establish a compressor control unit for changing the compressor speed. The temperature and humidity control device according to claim 1, wherein in the compressor control unit, in order to set a high temperature first heat medium distribution ratio, when the temperature and humidity control target gas is on the heating side, the high temperature first heat medium 95~85% of the heat is distributed to the heating mechanism, and 5~15% of the residual high temperature first heat medium is distributed to the cooling mechanism. In addition, when the temperature and humidity control target gas is on the cooling side, there is 95 in the high temperature first heat medium. ~85% is distributed to the cooling mechanism, and 5~15% of the residual high temperature first heat medium is distributed to the heating mechanism, and the rotation speed control mechanism controls the rotation speed of the compressor. The temperature and humidity control device according to claim 1 or 2, wherein the rotation speed control mechanism is an inverter.