WO2009125776A1

WO2009125776A1 - Temperature and humidity regulating apparatus and temperature and humidity regulating system

Info

Publication number: WO2009125776A1
Application number: PCT/JP2009/057148
Authority: WO
Inventors: 浩一太田; 雅俊寺島; 正一小林
Original assignee: オリオン機械株式会社
Priority date: 2008-04-10
Filing date: 2009-04-07
Publication date: 2009-10-15
Also published as: JP2013167437A; JP5343231B2; TW200949175A; CN101990617A; JPWO2009125776A1; KR101516772B1; TWI468632B; KR20110016861A; CN101990617B

Abstract

Disclosed is a temperature and humidity regulating apparatus for resolving the problems of energy waste and an inability to regulate the temperature of a gas stream such as an air stream across a broad range and to regulate the humidity thereof, which are problems in conventional temperature regulating apparatuses. The temperature and humidity regulating apparatus comprises a heating flow passage for supplying part of a first heat medium compressed by a compressor (18) to a heater (14), a cooling flow passage for condensing, adiabatically expanding, cooling, and then supplying the remaining part of the first heat medium to a cooler (16), and an atomizing nozzle group (15) provided between the heater (14) and the cooler (16) for supplying a predetermined quantity of moisture to air, and the air passing through the heater (14) and the cooler (16) is set to a predetermined temperature. The humidity and temperature regulating apparatus further comprises a three-way proportional valve (20) able to alter the distribution ratio of the first heat medium to the cooling flow passage and the heating flow passage, a heat pump means for increasing the heating capacity of the heating flow passage, a temperature controller (22) for controlling the three-way proportional valve (20) and regulating the distribution ratio of the first heating medium to control the air passing through the heater (14) and the cooler (16) to a predetermined temperature, and a humidity controller (27) for controlling the quantity of water supplied to the atomizer nozzle group (15) in such a way that the air that has passed through the heater (14) and the cooler (16) is controlled to a predetermined humidity.

Description

Temperature / humidity adjusting device and temperature / humidity adjusting method

The present invention relates to a temperature / humidity adjusting device and a temperature / humidity adjusting method.

Usually, in the precision processing field such as the manufacturing process of semiconductor devices, most of them are installed in a clean room in which temperature and humidity are controlled.
However, in recent years, in the precision processing field, processes requiring precision processing with higher processing accuracy than before have been emerging.
In a process that requires such high precision processing, it is usually required that the temperature change environment is smaller than that of a clean room. For this reason, a process requiring high precision processing or the like is provided in a space unit in which precise temperature management is performed.
As a temperature adjusting device used for adjusting the temperature of such a space unit, for example, Japanese Patent Application Laid-Open No. 51-97048 describes a temperature adjusting device shown in FIG.
The temperature control apparatus shown in FIG. 13 includes a compressor 100, a three-way valve 102, a condenser 104, an expansion valve 106, a cooler 108, and a heater 110, and a cooling flow path including the cooler 108 and heating. And a heating channel provided with a vessel 110.
The cooler 108 and the heater 110 adjust the temperature of the air flow to be adjusted from the fan 112.
In the temperature adjusting device shown in FIG. 13, the high-temperature heat medium compressed by the compressor 100 is distributed to the cooling channel and the heating channel by the three-way valve 102. The high-temperature heat medium distributed to the cooling channel side is cooled by the condenser 104. The cooled heat medium is adiabatically expanded and cooled by the expansion valve 106, and is supplied to the cooler 108. In the cooler 108, the heat medium that has been heated to absorb the temperature while cooling the air flow to be temperature-adjusted blown from the fan 112 is supplied to the compressor 100.
On the other hand, the high-temperature heat medium distributed to the heating flow path side is supplied to the heater 110, and the air flow to be temperature-adjusted cooled by the cooler 108 is heated and adjusted to a desired temperature. As described above, the heating medium that is radiated and cooled while heating the air flow to be temperature adjusted in the heater 110 passes through the expansion valve 106 and the cooler 108 and is supplied to the compressor 100.

In the temperature adjusting device shown in FIG. 13, the entire amount of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. The amount of cooling energy for cooling the air stream to be temperature-adjusted blown out from the air is constant.
On the other hand, by adjusting the flow rate of the high-temperature heat medium distributed to the heating flow path side by the three-way valve 102, the heating amount in the heater 110 with respect to the air flow to be temperature-adjusted cooled by the cooler 108 can be adjusted.
Therefore, it is possible to adjust the temperature of the air flow to be temperature-adjusted that passes through the cooler 108 and the heater 110, and to manage the temperature in the space unit in a narrow temperature range.
However, in the temperature adjusting device shown in FIG. 13, the entire amount of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. The temperature adjustment for the air flow to be adjusted from the fan 112 is performed by reheating the high-temperature heat medium compressed by the compressor 100 supplied to the heater 110 exclusively.
As described above, in the temperature control method employed in the temperature adjusting device shown in FIG. 13, the heat medium used for heating is also passed through the cooling flow path, so that the amount of heat that can be heated is only the amount of heat generated by the power of the compressor. And it is difficult to cope with load fluctuations on the heater 110.
For this reason, when the set temperature of the air flow subject to temperature adjustment passing through the cooler 108 and the heater 110 is significantly increased, the temperature of the air flow subject to temperature adjustment does not reach the set temperature or reaches the set temperature. It may take a long time to complete.
Further, in the temperature adjusting device shown in FIG. 13, there is no humidity adjusting function for adjusting the humidity of the air flow to be temperature adjusted passing through the cooler 108 and the heater 110, and the air flow is adjusted for humidity. I can't.
Therefore, the present invention solves the problems of the conventional temperature adjustment device in which the temperature adjustment range of the gas flow such as the air flow is narrow and the humidity adjustment cannot be performed and the energy is wasted. An object of the present invention is to provide a temperature / humidity adjustment apparatus and a temperature / humidity adjustment method that can perform energy adjustment and have a wide range in which temperature adjustment and humidity adjustment can be performed simultaneously.
In order to solve the above problems, the present inventors provide a cooling flow path and a heating flow path, and a cooling amount for the air to be adjusted in temperature and humidity that passes through the cooling means of the cooling flow path and the heating means of the heating flow path. Providing distribution means that can change the heating amount, providing heat pump means that can transfer heat from a low temperature part to a high temperature part to improve the heating capacity of the heating flow path, and in the gas flow path It has been found that it is effective to provide humidity adjusting means.
That is, as means for solving the above-described problem, a heating flow path in which a part of the high-temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and the remaining portion of the high-temperature first heat medium A cooling channel that is adiabatically expanded by the first expansion unit after being cooled by the condensing unit, and further cooled and supplied to the cooling unit; and the heating channel through which the high-temperature first heat medium is distributed And a circulation circuit in which the first heat medium that has passed through each of the cooling flow paths is re-supplied to the compressor, and the temperature and humidity adjustment target gas that passes through the heating means and the cooling means is a predetermined temperature and humidity. A temperature / humidity adjusting device that distributes a part of the high-temperature first heat medium discharged from the compressor to the heating flow path side, and cools a remaining portion of the high-temperature first heat medium. High temperature first heat distributed to the road side and distributed to the heating flow path and the cooling flow path Distributing means capable of changing the body distribution ratio, and further, after being cooled by releasing heat by the heating means and further adiabatically expanded by the second expansion means so as to improve the heating capacity of the heating channel. The cooled first heat medium is a heat pump means having heat absorption means for absorbing heat from the second heat medium, which is an external heat source, and a high temperature that controls the distribution means and is distributed to the heating flow path and the cooling flow path. Adjusting a distribution ratio of the first heat medium to control a temperature / humidity adjustment target gas passing through the heating unit and the cooling unit to a predetermined temperature, and a gas passing through the heating unit and the cooling unit It is possible to provide a temperature / humidity adjusting device provided with humidity control means for controlling the temperature to a predetermined humidity.
Further, as means for solving the above-mentioned problems, a heating means for directly supplying a part of the high-temperature first heat medium compressed and heated by a compressor, and a remaining part of the first heat medium is cooled by a condensing means. Then, the first heat is distributed to the heating means and the cooling means for the temperature / humidity adjustment target gas that sequentially passes through the cooling means that is adiabatically expanded by the first expansion means, and further cooled and supplied. The distribution ratio of the medium is changed, the gas is adjusted to a predetermined temperature, the gas is adjusted to a predetermined humidity by humidity control means provided in a flow path through which the gas to be temperature and humidity is adjusted, and the heating is performed. The first heat medium that has passed through the means is adiabatically expanded by the second expansion means, cooled, and passed through the heat pump means that includes the heat absorption means that absorbs heat from the second heat medium that is an external heat source. A first heat medium that has passed through the cooling means; Both can provide a temperature and humidity adjusting method for returning to the compressor.
In the means for solving the problems provided by the present inventors, the following preferred embodiments can be raised.
As the humidity control means, a moisture supply means for supplying a predetermined amount of moisture to the gas subject to temperature / humidity adjustment is used, and droplets in the moisture supplied from the moisture supply means are directly heated by the heating means or by the gas heated by the heating means. Humidity can be adjusted by providing the moisture supply means on the gas inlet side or outlet side of the heating means so as to evaporate by heating.
As the water supply means, a water spray nozzle for injecting water, a control valve provided in a water supply pipe for supplying water to the water spray nozzle, and adjusting the control valve to adjust the amount of water supplied to the water spray nozzle Humidity control can be easily performed by using a moisture supply means including a humidity control unit to be controlled.
Alternatively, water vapor generating means for generating water vapor with a heater can be used as the humidity adjusting means.
This water vapor generating means can be easily controlled by providing a humidity control unit that controls the amount of water vapor generated by adjusting the heating amount of the heater.
The cooling medium that is supplied to the condensing means of the cooling flow path to cool the first heat medium and the second heat medium that is supplied to the heat absorbing means of the heat pump means are the same heat medium, and the same heat medium is supplied to the condensing means Then, by supplying the heat absorption means, the heat of the high temperature first heat medium removed by the condensation means can be effectively used.
As the second heat medium, it is effective from the viewpoint of energy saving to use the second heat medium supplied without being heated or cooled from the outside.
In addition, a rotational speed control means for controlling the rotational speed of the compressor is provided, and the distribution ratio of the high-temperature first heat medium controlled by the temperature control unit is determined by the heating amount applied to the temperature / humidity adjustment target gas by the heating means. Compression that changes the rotational speed of the compressor via the rotational speed control means so that a distribution ratio that can reduce the amount of heat that cancels each other out of the cooling amount that is applied to the temperature and humidity adjustment target gas by the cooling means. By providing the machine control unit, it is possible to reduce the amount of heat that cancels each other out of the amount of heat applied to each of the heating means and the cooling means, so that further energy saving is achieved in combination with the provision of the heat pump means. Can do.
In such a compressor control unit, when the distribution ratio of the high temperature first heat medium is the heating side where the gas to be adjusted in temperature and humidity is heated, 95 to 85% of the high temperature first heat medium is distributed to the heating means. On the other hand, in the case of the cooling side where the temperature / humidity adjustment target gas is cooled so that 5 to 15% of the remaining high-temperature first heat medium is distributed to the cooling means, the high-temperature first heat Rotation of the compressor via the rotational speed control means so that 95 to 85% of the medium is distributed to the cooling means and 5 to 15% of the remaining hot first heat medium is distributed to the heating means. By controlling the number, it is possible to stably operate the temperature / humidity adjusting device while saving energy of the temperature / humidity adjusting device. As this rotation speed control means, an inverter can be suitably used.
Further, the first heat medium that has passed through each of the heating flow path and the cooling flow path is merged and re-supplied to the compressor. By providing the flow path including the heating flow path and the flow path including the cooling flow path independently, the temperature adjustment range of the temperature / humidity adjustment target gas can be widened.
As the distribution means for distributing the high temperature first heat medium to the heating flow path and the cooling flow path, the distribution ratio of the high temperature first heat medium distributed to the heating flow path and the cooling flow path is substantially continuous. By using the changeable distribution means, the temperature adjustment of the temperature / humidity adjustment target gas can be adjusted more accurately.
As such distribution means, by using a distribution means that can substantially continuously change the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, the temperature and humidity adjustment target gas can be changed. The temperature can be adjusted even more precisely.
This “substantially changeable distribution means” means that a two-way valve or a proportional three-way valve is used as the distribution means, and when the two-way valve or the proportional three-way valve is driven by step control, This means that the three-way valve or the proportional three-way valve is microscopically driven stepwise, but includes a case where it is driven continuously as a whole.
As the distribution means, the total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side is equal to the amount of the high temperature first heat medium discharged from the compressor. As described above, by using the proportional three-way valve that proportionally distributes the high-temperature first heat medium, the distribution ratio of the high-temperature first heat medium discharged from the compressor can be changed smoothly.
Further, as the distribution means, a two-way valve provided in each of the branch pipes branching the high temperature first heat medium into the heating channel side and the cooling channel side, and the temperature control unit includes the heating channel and the cooling channel. The distribution ratio of the high-temperature first heat medium distributed to the heating device is adjusted to control the temperature / humidity adjustment target gas passing through the heating unit and the cooling unit to a predetermined temperature, and the high temperature distributed to the heating channel side Each of the two-way valves is configured such that the total amount of the first heat medium and the high-temperature first heat medium distributed to the cooling channel side is equal to the high-temperature first heat medium discharged from the compressor. The distribution ratio of the high-temperature first heat medium discharged from the compressor can also be changed smoothly by using a temperature control unit that adjusts the opening.
Furthermore, the cooling medium supplied to the condensing means of the cooling channel is a liquid medium, and the refrigerant for controlling the supply amount of the liquid medium supplied to the condensing means so that the pressure on the discharge side of the compressor is kept constant. By providing the control means, the temperature / humidity adjusting device can be operated stably, and the liquid medium can be prevented from being supplied to the condensing means more than necessary.

[Advantageous Effects of Invention] In the temperature / humidity adjusting apparatus and temperature / humidity adjusting method provided by the present inventors, high-temperature first heat discharged from the compressor is supplied to each of the heating means of the heating flow path and the cooling means of the cooling flow path. Medium is supplied. Furthermore, by changing the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, the heating amount and the cooling amount for the temperature / humidity adjustment target gas passing through the heating means and the cooling means are changed. The temperature of the gas passing through the heating means and the cooling means can be adjusted to a predetermined temperature.
Moreover, since the humidity control means for controlling the gas that has passed through the heating means and the cooling means to a predetermined humidity is provided, the humidity of the gas that has passed through the heating means and the cooling means can be adjusted to the predetermined humidity at the same time.
Moreover, the temperature / humidity adjusting apparatus and the temperature / humidity adjusting method provided by the present inventors are provided with heat pump means. Since this heat pump means is a means capable of transferring heat from a low-temperature part to a high-temperature part, among the high-temperature first heat medium (the high-temperature part) heated by being compressed by the compressor, the heat flow path The first heat medium which has been cooled by releasing heat by the heating means and then further adiabatically expanded by the second expansion means and further cooled by the heat absorption means constituting the heat pump means (the second heat medium (external heat source)) It is possible to absorb heat from the low temperature part), raise the temperature, vaporize it, and return it to the compressor. For this reason, the heating capacity per unit power can be greatly increased, and energy saving can be achieved.
Therefore, in this temperature / humidity adjusting device and temperature / humidity adjusting method, the high-temperature first heat medium (high temperature part) discharged from the compressor is supplied with the compression power energy by the compressor, and the heat pump means supplies the first heat source. Energy absorbed from two heat media (low temperature part) can be added, and the heating capability of the heating means to which the high temperature first heat medium is supplied can be improved.
In such a temperature / humidity adjusting apparatus and temperature / humidity adjusting method, the minute load fluctuation of the gas subject to temperature / humidity adjustment passing through the heating means and the cooling means is a high temperature first distributed to the heating flow path and the cooling flow path. It is possible to respond quickly by finely adjusting the distribution ratio of the heat medium, and it is also possible to quickly respond to changes in the humidity of the gas due to load fluctuations by the humidity control means, and to adjust the temperature and humidity for the temperature / humidity adjustment target gas be able to.
Further, in the temperature / humidity adjusting device and the temperature / humidity adjusting method provided by the present inventors, even when the set temperature of the temperature / humidity adjustment target gas passing through the heating means and the cooling means is significantly increased, By greatly increasing the distribution ratio of the heat medium distribution to the heating flow path rather than the cooling flow path, the temperature / humidity adjustment target gas can be adjusted to a predetermined temperature, and the temperature / humidity adjustment target gas temperature adjustment The width can be increased.
In this case, the humidity of the gas subject to temperature and humidity adjustment can also be maintained at a predetermined humidity by the humidity control means.
As described above, the temperature / humidity adjusting device and the temperature / humidity adjusting method provided by the present inventors are not possible with the conventional temperature adjusting device shown in FIG. 13 or the temperature adjusting method using this temperature adjusting device. The humidity adjustment target gas can be adjusted to a predetermined temperature and humidity, and energy can be saved.

It is the schematic explaining an example of the temperature / humidity adjustment apparatus which the present inventors provided. It is explanatory drawing explaining the internal structure of the control valve 40 used for the temperature / humidity adjustment apparatus shown in FIG. 3A to 3D are explanatory diagrams for explaining the arrangement of the heater 14, the cooler 16, and the spray nozzle group 15 shown in FIG. It is explanatory drawing explaining the other distribution means which can be used with the temperature / humidity adjustment apparatus shown in FIG. It is a graph which shows the flow volume characteristic of the two-way valve used with the distribution means shown in FIG. 6A and 6B are explanatory diagrams for explaining the principle of energy saving in the temperature / humidity adjusting apparatus shown in FIG. 1 when it is on the cooling side. 7A and 7B are explanatory views for explaining the principle of energy saving in the temperature / humidity adjusting apparatus shown in FIG. 1 when it is on the heating side. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which the present inventors provided. It is a flowchart for demonstrating the control procedure by the temperature control part 22 and the COMP control part 44 of the temperature / humidity adjustment apparatus shown in FIG. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which the present inventors provided. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which the present inventors provided. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which the present inventors provided. It is the schematic explaining the conventional temperature control apparatus.

A schematic diagram illustrating an example of a temperature and humidity adjusting apparatus provided by the present inventors is shown in FIG. In the temperature / humidity adjusting apparatus shown in FIG. 1, the temperature and humidity of air as the temperature / humidity adjustment target gas sucked by the fan 12 in the space unit 10 installed in the clean room where the temperature and humidity are adjusted. A heating flow path, a cooling flow path to be adjusted, and moisture supply means as humidity control means are provided.
A heater 14 as a heating means constituting the heating flow path and a cooler 16 as a cooling means constituting the cooling flow path are provided, and after the air in the clean room passes through the cooler 16 and is dehumidified, A cooler 16 and a heater 14 are disposed so as to pass through the heater 14.
Between the cooler 16 and the heater 14, a spray nozzle group 15 constituting a moisture supply device is disposed, and a predetermined amount of water is sprayed on the air dehumidified by the cooler 16. The spray nozzles 15a, 15a,... Constituting the spray nozzle group 15 are supplied with pure water stored in the water tank 17 via a pump 19 and a control valve 23 provided in the water supply pipe 21. . Further, compressed air for spraying the supplied pure water is also supplied to the spray nozzles 15a, 15a,.
The water tank 17 stores pure water obtained by supplying normal water supplied via the pipe 33 to the pure water device 35. The amount of pure water stored in the water tank 17 is kept constant by a control valve 39 provided in the pure water supply pipe 37.
As the spray nozzle 15a, a known spray nozzle, for example, a two-fluid nozzle that sprays air and water at the same time to bring the water into a mist state can be used. Alternatively, one two-fluid nozzle can be used in place of the spray nozzle group 15.
In the temperature and humidity control apparatus shown in FIG. 1, the first heat medium discharged from the compressor 18 is distributed to a heating flow path including the heater 14 and a cooling flow path including the cooler 16, A circulation circuit is provided in which the first heat medium that has passed through each of the cooling flow paths is re-supplied to the compressor 18.
As the first heat medium, for example, hydrocarbons such as propane, isobutane and cyclopentane, chlorofluorocarbons, ammonia and carbon dioxide gas can be used. The first heat medium is supplied, and the air in the clean room is heated and cooled by vaporization and liquefaction of the first heat medium to adjust to a predetermined temperature.
Such a first heat medium is compressed and heated by the compressor 18 and discharged in the form of a gas at a high temperature (for example, 70 ° C.). The high-temperature first heat medium discharged from the compressor 18 is distributed to the heating channel side provided with the heater 14 and the cooling channel side provided with the cooler 16 by the proportional three-way valve 20 serving as a distribution unit. .
In this proportional three-way valve 20, the total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side is the high temperature first heat medium discharged from the compressor 18. Distribute to equal the amount.
The proportional three-way valve 20 is controlled by the temperature control unit 22. In this temperature control unit 22, the measured temperature measured by the temperature sensor 24 provided at the air outlet of the space unit 10 is compared with the set temperature, and heating is performed so that the measured temperature matches the set temperature. The distribution ratio of the high-temperature first heat medium distributed to the flow path side and the cooling flow path side is changed substantially continuously to adjust the air sucked into the space unit 10 to a predetermined temperature.
This “substantially continuously changing” means that when the proportional three-way valve 20 is driven by step control, the proportional three-way valve 20 is microscopically driven stepwise, but is continuously continuous as a whole. This includes the case where it is driven.
The set temperature set in the temperature control unit 22 may be arbitrarily set. Further, although the temperature sensor 24 shown in FIG. 1 is installed on the discharge side of the fan 12, it may be installed on the suction side of the fan 12, or may be provided on the discharge side and suction side of the fan 12.
The amount of pure water sprayed from the spray nozzle group 15 is controlled by the humidity control unit 27. The humidity control unit 27 compares the measured humidity measured by the humidity sensor 29 provided at the air outlet of the space unit 10 with the set set humidity, and controls the control valve 23 so that the measured humidity matches the set humidity. The air sucked into the space unit 10 is adjusted to a predetermined humidity.
The set humidity set in the humidity control unit 27 may be arbitrarily set. Further, the humidity sensor 29 shown in FIG. 1 is installed on the discharge side of the fan 12, but may be installed on the suction side of the fan 12, or may be provided on the discharge side and suction side of the fan 12.
The high-temperature first heat medium distributed to the heating channel side by the proportional three-way valve 20 is directly supplied to the heater 14, sucked into the space unit 10, and cooled by the cooler 16 and the spray nozzle group 15. The water sprayed from is heated and adjusted to a predetermined temperature. At that time, the high-temperature first heat medium is radiated and cooled to become the first heat medium containing the condensate.
On the other hand, the high temperature first heat medium distributed to the cooling flow path side is cooled by the condenser 26 as the condensing means and then expanded adiabatically by the expansion valve 28 as the first expansion means, and further cooled (for example, Cooled to 10 ° C.). The cooled first heat medium is supplied to the cooler 16 and vaporized to cool the air flow sucked into the space unit 10.
The second heat medium supplied to the condenser 26 without being heated or cooled from the outside via the piping 30 for cooling the high-temperature first heat medium distributed to the heater 14 side. As the cooling water is supplied. The cooling water is heated to about 30 ° C. by the first heat medium of about 70 ° C. in the condenser 26 and is discharged from the pipe 31. The cooling water discharged from the pipe 31 is supplied as a heat source to a heat absorber 32 as a heat absorption unit of the heat pump unit.
The heat absorber 32 is supplied with a first heat medium at about 10 ° C. which is adiabatic expansion of the first heat medium radiated by the heater 14 by an expansion valve 34 as a second expansion means and further cooled. Yes. Therefore, in the heat absorber 32, the first heat is based on the temperature difference between the cooling water that has absorbed heat in the condenser 26 and raised to about 30 ° C., and the first heat medium that has been cooled to about 10 ° C. by vaporization. The medium can absorb heat from the cooling water.
The first heat medium that has been heated from the cooling water by the heat absorber 32 and heated up and vaporized is supplied to the compressor 18 via the accumulator 36. The accumulator 36 is also supplied with a first heat medium that is supplied to the cooler 16 and absorbed and vaporized from the air flow sucked into the space unit 10.
Since the accumulator 36 is a type of accumulator that can store the liquid component and re-supply only the gas component to the compressor 18, it can reliably supply only the gas component of the first heat medium to the compressor 18.
As this accumulator 36, an accumulator type accumulator can be used.
Further, the cooling water discharged from the heat absorber 32 may be supplied to the pure water device 35 and sprayed from the spray nozzle 15 a of the spray nozzle group 15. When the temperature of the cooling water discharged from the heat absorber 32 is higher than that of the cooling water supplied from the pipe 33, the latent heat of vaporization of the water sprayed from the spray nozzle 15a is small, so the temperature drop of the air flow is reduced. it can.
Even if the accumulator 36 is not installed, the heat absorber 32 absorbs heat from the air flow and is heated and vaporized and the gas supplied to the cooler 16 and sucked into the space unit 10 absorbs heat. It is only necessary that the evaporated heat medium can be merged and re-supplied to the compressor 18.
By the way, the first heat medium radiated by the heater 14 is adiabatically expanded and cooled by the expansion valve 34, but in the cooling by the adiabatic expansion in the expansion valve 34, the first heat medium is between the first heat medium and the outside. There is no exchange of heat. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water as the second heat medium supplied from the outside to the heat absorber 32 via the condenser 26.
Therefore, energy absorbed from the cooling water supplied from the outside by the heat absorber 32 of the heat pump means can be added to the compression power energy by the compressor 18 to the high temperature first heat medium discharged from the compressor 18. . The heat absorption by the heat absorber 32 can be performed only by the driving energy of the compressor 18 that circulates the first heat medium.
Furthermore, in the temperature / humidity adjusting apparatus shown in FIG. 1, the cooling water supplied from the outside is supplied to the heat absorber 32 via the condenser 26. For this reason, part of the energy from the high-temperature first heat medium removed by the condenser 26 can also be added to the high-temperature first heat medium discharged from the compressor 18, thereby improving the heating capacity of the heating channel. it can. For this reason, in addition to the energy absorbed by the heat absorber 32 of the heat pump means, part of the energy from the high temperature first heat medium removed by the condenser 26 is also converted into the high temperature first heat medium discharged from the compressor 18. As a result, the heating capacity of the heating channel can be improved. As a result, the temperature adjustment range of the air flow can be expanded, and significant energy saving can be achieved.
Moreover, since the heater 14 can greatly increase not only the heating capacity for the air flow but also the heating capacity of the water sprayed from the spray nozzle 15a and the humidification capacity, the humidity adjustment range of the air flow can be greatly increased. Can also be expanded.
In this way, the heat pump means also against a decrease in the air flow temperature due to the spraying of a predetermined amount of pure water from the spray nozzle group 15 provided on the air supply side of the heater 14 with improved heating capacity. It is possible to have a heating capacity capable of raising the air flow temperature to a predetermined temperature by the endothermic heat.
Here, when the humidity adjustment is attempted by installing the spray nozzle group 15 without providing the heat pump means, a situation where the air flow cannot be adjusted to a predetermined temperature or a situation where it takes a long time to adjust the air flow to the predetermined temperature occurs. There is a fear.
That is, the amount of heating in the heater 14 to which a part of the high-temperature first heat medium discharged from the compressor 18 is supplied in response to a decrease in the air flow temperature due to the water sprayed from the spray nozzle group 15. It is necessary to increase.
However, the first heat medium supplied to the heater 14 is only the amount of heat applied by the compressor 18.
Therefore, when the amount of moisture supplied from the spray nozzle group 15 for humidity adjustment increases rapidly, a sufficient amount of heat for raising the air flow to a predetermined temperature cannot be immediately supplied to the heater 14.
Thus, in the temperature / humidity adjusting apparatus shown in FIG. 1, since the heating capacity of the heating channel can be improved by the installation of the heat pump means, the heating capacity and humidification capacity per predetermined power can be greatly increased, and Energy saving can be achieved.
In the temperature / humidity adjusting apparatus shown in FIG. 1, the distribution ratio between the high-temperature first heat medium distributed to the heating flow path side and the high-temperature first heat medium distributed to the cooling flow path side by the proportional three-way valve 20 It can be changed substantially continuously depending on the temperature within 10.
For this reason, in the temperature / humidity adjusting apparatus shown in FIG. 1, the high temperature 1st heat medium is always supplied to the heating flow path and the cooling flow path, and the heater 14 of the heating flow path and the cooler 16 of the cooling flow path are The minute load fluctuation of the air flow of the temperature / humidity adjustment target passing through the air flow is quickly adjusted by immediately adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path by the proportional three-way valve 20. Can improve responsiveness.
Further, as in the temperature and humidity adjusting device shown in FIG. 1, pure water is sprayed from the spray nozzle provided on the air inlet side of the heater 14, and the humidity in the air can be maintained at a predetermined value. Further, when the air in the clean room is circulated, the circulating air is heated by the fan 12 or the like, but heat is removed by the spray of pure water from the spray nozzle group 15, so that the load on the cooler 16 can be reduced.
As a result, the temperature and humidity of the air flow to be adjusted for temperature and humidity passing through the cooler 16, the spray nozzle group 15 and the heater 14 in the heating channel can be controlled with high accuracy with respect to the set value, and the space shown in FIG. The temperature change and humidity change of the unit 10 can be reduced, and a process requiring precision machining can be installed.
In the temperature / humidity adjusting apparatus shown in FIG. 1, as described above, the heating capacity of the heating channel is improved, and cooling is performed from the proportional three-way valve 20 serving as a distribution unit among the channels including the heating channel and the cooling unit. Each of the flow path including the heating flow path and the flow path including the cooling flow path until the first heat medium that has passed through each of the cooler 16 and the heat absorber 32 is joined by the accumulator 36 is independent of the flow path. Is provided. For this reason, the first heat medium having different temperatures is not mixed, and the temperature adjustment range of the temperature / humidity adjustment target can be widened.
Even when the set temperature of the air flow to be adjusted for temperature and humidity passing through the heater 14 and the cooler 16 is significantly increased, the proportional three-way valve 20 allows the distribution ratio of the high-temperature first heat medium to be higher than that of the cooling flow path. In addition, the distribution ratio distributed to the heating flow path can be significantly increased, and the air flow for temperature and humidity adjustment can be quickly adjusted to a predetermined temperature.
When adjusting the temperature of the air flow, the humidity controller 27 adjusts the amount of pure water sprayed from the spray nozzle group 15 so that the humidity of the air flow is adjusted to the set humidity.
Furthermore, in the temperature / humidity adjusting apparatus shown in FIG. 1, the heating capacity of the heating channel is improved, and it is not necessary to use other moisture supply means or heating means such as a heating steam generator, so that significant energy saving is achieved. Can do.
In the temperature / humidity adjusting apparatus shown in FIG. 1, the temperature control unit 22 and the humidity control unit 27 independently adjust the temperature / humidity. However, even when the set temperature or the set humidity is changed, the air flow Temperature and humidity reach the set temperature and set humidity in a relatively short time.
As described above, in the temperature / humidity adjusting apparatus shown in FIG. 1, the control valve 40 as the refrigerant control means is provided in the pipe 30 for supplying the cooling water to the condenser 26. The control valve 40 is controlled so that the discharge pressure of the compressor 18 is constant. As shown in FIG. 2, the control valve 40 is provided with a rod-like portion including a valve body 40 b that opens and closes an opening of a valve portion 40 a provided in the cooling water flow path. The rod-like portion is biased in a direction in which the valve body 40b closes the opening of the valve portion 40a by a spring 40c with which the tip end surface abuts. Further, the other end surface of the rod-shaped portion is in contact with the bellows 40d to which the pressure of the first heat medium discharged from the compressor 18 is supplied, and the rod-shaped portion is opened against the urging force of the spring 40c. The valve body 40b is urged in the direction to open the valve.
For this reason, when the discharge pressure of the compressor 18 becomes equal to or greater than the urging force of the spring 40 c, the valve body 40 d is moved by the bellows 40 d in a direction to open the opening of the valve portion 40 a and the cooling supplied to the condenser 26 is performed. The amount of water increases and the cooling capacity of the condenser 26 is improved. Thus, the cooling capacity of the condenser 26 is improved, and the discharge pressure of the compressor 18 is reduced.
On the other hand, when the discharge pressure of the compressor 18 becomes equal to or less than the biasing force of the spring 40c, the valve body 40d moves in the direction of closing the opening of the valve portion 40a, and the amount of cooling water supplied to the condenser 26 decreases. The cooling capacity of the condenser 26 is reduced. For this reason, the discharge pressure of the compressor 18 becomes high.
In this way, by keeping the discharge pressure of the compressor 18 constant, the temperature and humidity adjusting device can be stably operated. Moreover, it can adjust so that the amount of cooling water may be supplied to the condenser 26 more than needed, and it may not discharge | emit out of the system.
The control valve 40 is provided with a valve 41 in the bypass piping of the control valve 40 as shown in FIG. The valve 41 absorbs heat when the control valve 40 fails or when the supply amount of the high-temperature first heat medium supplied to the heater 14 increases, the discharge pressure of the compressor 18 decreases, and the supply water is insufficient. This is for forcibly supplying water to the condenser 26 and the heat absorber 32 when the condenser 32 substantially does not function.
In the temperature / humidity adjusting apparatus shown in FIG. 1, a spray nozzle group 15 for spraying pure water is disposed between the cooler 16 and the heater 14, but as shown in FIG. The spray nozzle group 15 may be disposed on the air outlet side. In this way, even if the spray nozzle group 15 is disposed on the air outlet side of the heater 14, water droplets sprayed from the spray nozzle group 15 can be heated by the heater 14 and heated by the air flow to be evaporated.
Further, as shown in FIG. 3B, the cooler 16 and the heater 14 are arranged so that air is supplied to the heater 14 and then supplied to the cooler 16. A spray nozzle group 15 may be disposed between the two. Also in this case, water droplets sprayed from the spray nozzle group 15 can be heated by the heater 14 and heated by the air flow to evaporate.
Furthermore, it is arrangement | positioning with the heater 14 and the cooler 16 which are shown to FIG. 3B, Comprising: You may arrange | position the spray nozzle group 15 in the inlet side of the air of the heater 14, as shown to FIG. 3C. In this case, water droplets sprayed from the spray nozzle group 15 can be directly heated by the heater 14 and evaporated.
However, for example, when the heater 14 and the cooler 16 shown in FIG. 3A are arranged, and when the spray nozzle group 15 is arranged on the air inlet side of the cooler 16 as shown in FIG. Since the water droplets sprayed from the spray nozzle group 15 are removed from the air flow without being condensed and evaporated in the cooler 16, it is difficult to adjust the air flow to a predetermined humidity.
3B and 3C, when the spray nozzle group 15 is provided upstream of the heater 16 or the cooler 14, the heater 16 or cooler downstream of the spray nozzle group 15 is provided. 14 also functions as an eliminator for water droplets sprayed from the spray nozzle group 15, and the size of the water droplets contained in the air flow that has passed through the downstream heater 16 or cooler 14 can be made constant.
Instead of the proportional three-way valve 20 as the distribution means used in the temperature and humidity adjusting apparatus shown in FIG. 1, two two-way valves 38a and 38b as two two-way valves can be used as shown in FIG. Each of the two two-way valves 38 a and 38 b is controlled by the temperature control unit 22. The temperature control unit 22 adjusts the opening degree of each of the two-way valves 38a and 38b, and converts the gaseous first high-temperature heat medium compressed and heated by the compressor 18 into a heating channel and a cooling channel. The distribution ratio to be distributed is adjusted substantially continuously, and the air flow passing through the heater 14 and the cooler 16 is controlled to a predetermined temperature. At that time, the total amount of the high temperature first heat medium amount distributed to the heater 14 side and the high temperature first heat medium amount distributed to the cooler 16 side is the first high temperature discharged from the compressor 18. The opening of the two-way valves 38a and 38b is adjusted so as to be equal to the amount of heat medium, and is continuously proportionally distributed.
At that time, the relationship between the valve opening and the flow rate of each of the two-way valves 38a and 38b is not linear as shown in FIG. For this reason, the temperature control unit 22 holds the flow rate characteristic data for each of the two-way valves 38a and 38b shown in FIG. 5, and the temperature control unit 22 determines the flow rate characteristics of the two-way valves 38a and 38b. An opening signal is transmitted to each two-way valve 38a, 38b.
Here, “to adjust the distribution ratio distributed to the heating flow path and the cooling flow path substantially continuously” or “to adjust the distribution ratio substantially continuously” means that the two-way valves 38a and 38b are stepped. When driven by control and adjusting the distribution ratio between the heating channel and the cooling channel, the opening degree of the two-way valves 38a, 38b is microscopically driven and adjusted, It is meant to include the case of being continuously driven and adjusted as a whole.
In the temperature / humidity adjusting apparatus shown in FIG. 1, in the temperature / humidity adjustment of the air flow as the temperature / humidity adjustment target by the heater 14 and the cooler 16, for example, when it is on the heating side with respect to the air flow of the temperature / humidity adjustment target In the operation state where the air temperature is stable, the air flow cooled by the cooler 16 is heated by the heater 14 as shown in FIG. 6A. In the operation state shown in FIG. 6A, the energy heated by the heater 14 may be larger than the energy A required to heat the airflow. In this case, as shown in FIG. 6B, if the overlapping energy between the heater 14 and the cooler 16 can be reduced as much as possible, energy saving can be achieved.
On the other hand, when it is on the cooling side with respect to the air flow to be adjusted for temperature and humidity, in the operation state where the temperature of the air flow is stable, the air heated by the heater 14 is cooled by the cooler 16 as shown in FIG. 7A. ing. In the operation state shown in FIG. 7A, the energy to be cooled by the cooler 16 may be larger than the energy B required to cool the airflow. In this case, as shown in FIG. 7B, if the overlapping energy between the cooler 16 and the heater 14 can be reduced, energy saving can be achieved.
However, if the supply of the high-temperature first heat medium to the heater 14 and the cooler 16 is turned on and off in order to reduce the amount of heat that cancels each other, the operation of the temperature / humidity adjusting device becomes unstable and the air flow It takes time to stabilize at a predetermined temperature. For this reason, to the extent that the temperature / humidity adjusting device can be stably operated, it is necessary that the amount of heat that cancels each other out of the amount of heating applied to the heater 14 and the amount of cooling applied to the cooler 16 must be present at a minimum. .
The minimum necessary amount of heat that cancels each other differs somewhat depending on the temperature / humidity adjusting device, and is preferably obtained experimentally.
In this way, in the temperature and humidity adjusting apparatus shown in FIG. 8, the amount of heating applied to the heater 14 and the amount of cooling added to the cooler 16 can be reduced so that the overlapping energy between the cooler 16 and the heater 14 can be reduced. Among them, a compressor control unit 44 (hereinafter referred to as a COMP control unit 44) is connected via an inverter 42 as a rotation speed control unit that controls the rotation speed of the compressor 18 so as to reduce the amount of heat canceling each other as much as possible. Control).
8, the same members as those of the temperature / humidity adjusting device shown in FIG. 1 are denoted by the same reference numerals as those in FIG. 1, and detailed description thereof is omitted. .
The COMP control unit 44 cooperates with the temperature control unit 22 that controls the proportional three-way valve 20 to calculate the amount of heat that cancels each other out of the heating amount applied to the heater 14 and the cooling amount applied to the cooler 16. Control air temperature and humidity while reducing as much as possible.
The control of the proportional three-way valve 20 by the temperature control unit 22 and the control of the rotation speed of the compressor 18 by the COMP control unit 44 are shown in the flowchart of FIG.
When the temperature / humidity adjusting apparatus shown in FIG. 8 was trial run, when operating on the cooling side with respect to the air flow, the amount of heat applied to the heater 14 was increased by the proportional three-way valve 20 to the heater 14 side. It has been found from the standpoint of stable operation that the distribution ratio of one heat medium is 5 to 15% (the distribution ratio of the high temperature first heat medium to the cooler 16 side by the proportional three-way valve 20 is 95 to 85%). did.
On the other hand, when operating on the heating side with respect to the air flow, as a heating amount applied to the heater 14 side, the distribution ratio of the high-temperature first heat medium to the heater 14 side by the proportional three-way valve 20 is 95 to 85. % (The distribution ratio of the high-temperature first heat medium to the cooler 16 side by the proportional three-way valve 20 is 5 to 15%) from the viewpoint of stable operation.
For this reason, in the control shown in the flowchart of FIG. 9, the amount of heating applied to the heater 14 side, specifically, the distribution ratio of the high-temperature first heat medium to the heater 14 side by the proportional three-way valve 20, In contrast, when operating on the cooling side, the rotational speed of the compressor 18 is controlled so as to be 5 to 15%, and when operating on the heating side with respect to the air flow, a distribution ratio of 95 to 85% is obtained. Thus, the rotational speed of the compressor 18 is controlled.
In the flowchart shown in FIG. 9, after starting the compressor 18 in step S10, based on the temperature signal measured by the temperature sensor 24 provided in the space unit 10 so that the air flow is set to a predetermined temperature in step S12. Thus, the distribution ratio of the high temperature first heat medium distributed to the heater 14 side and the cooler 16 side by the proportional three-way valve 20 is continuously changed, and the air flow sucked into the space unit 10 is set to a predetermined temperature. adjust.
In step S14, it is determined whether the air flow reaches a predetermined temperature and is stable. If the temperature of the air flow is not stable, the process returns to step S12 and the heater 14 side and the cooler by the proportional three-way valve 20 are returned. The distribution ratio of the high-temperature heat medium distributed to the 16 side is continuously changed. Steps S12 and S14 are performed by the temperature control unit 22.
On the other hand, when the air flow in the space unit 10 reaches a predetermined temperature and is stable, the distribution ratio of the high-temperature first heat medium distributed to the heater 14 in steps S16 to S22 is within a predetermined range. It is determined whether or not. Steps S16 to S22 are performed by the COMP control unit 44.
The average distribution rate of the high-temperature first heat medium shown in FIG. 9 varies depending on the distribution ratio of the high-temperature first heat medium distributed to the heater 14 side. A value obtained by averaging the distribution ratio of the medium, and may be simply referred to as an average distribution ratio of the first heat medium.
First, in step S16 and step S18, it is determined whether or not the average distribution ratio of the first heat medium to the heater 14 side is within 5 to 15% when it is assumed that the air flow is on the cooling side. To do.
Here, when the average distribution ratio of the first heat medium to the heater 14 side is within 5 to 15%, it is on the cooling side with respect to the air flow and within the range where the operation of the temperature and humidity control device is stable. Therefore, it passes through step S16 and returns from step S18 to step S16.
On the other hand, when the average distribution ratio of the first heat medium to the heater 14 side is less than 5%, the average distribution ratio of the first heat medium to the heater 14 side is too low. Driving tends to be unstable. For this reason, in order to increase the average distribution ratio of the first heat medium to the heater 14 side, the process proceeds from step S16 to step S24, and the rotational speed of the compressor 18 is increased. In step S <b> 24, an increase signal for increasing the rotational speed of the compressor 18 set in the inverter 42 by a minimum change amount is transmitted from the COMP control unit 44 to the inverter 42. This is because the temperature and humidity adjustment device can be stably operated by increasing the rotation speed of the compressor 18 with the minimum change amount.
Since the minimum change amount for changing the rotation speed of the compressor 18 varies depending on the temperature and humidity adjusting device, it is preferable to obtain it experimentally. However, when the rotation speed of the compressor 18 is 2000 to 5000 rpm, the minimum change amount is preferred. The amount is preferably in the range of 3 to 10%.
When the average distribution ratio of the first heat medium to the heater 14 side exceeds 15%, it is determined that the air flow is not on the cooling side through steps S16 and S18. The process proceeds to S20 and step S22. In step S20 and step S22, when it is assumed that the air flow is on the heating side, it is determined whether or not the average distribution ratio of the first heat medium to the heater 14 side is within 95 to 85%.
Here, when the average distribution ratio of the first heat medium to the heater 14 side is within 85 to 95%, the air flow is on the heating side, and the operation of the temperature and humidity control device is within a stable range. Therefore, it passes through step S20 and returns from step S22 to step S16.
On the other hand, when the average distribution ratio of the first heat medium to the heater 14 side exceeds 95%, the average distribution ratio of the first heat medium to the heater 14 side is too high, and the temperature and humidity adjustment device Driving tends to be unstable. For this reason, in order to reduce the average distribution ratio of the first heat medium to the heater 14 side, the process proceeds from step S20 to step S24, and the rotational speed of the compressor 18 is increased. In step S <b> 24, an increase signal for increasing the rotational speed of the compressor 18 set in the inverter 42 by a minimum change amount is transmitted from the COMP control unit 44 to the inverter 42.
When the average distribution ratio of the first heat medium to the heater 14 side is less than 85%, in step S22, the air flow is applied to the heater 14 in a state that is neither the heating side nor the cooling side. Of the heating amount and the cooling amount applied to the cooler 16, it is determined that the amount of heat canceling each other is large. For this reason, it transfers to step S26 and the rotation speed of the compressor 18 is reduced. In step S <b> 26, a reduction signal that lowers the rotation speed of the compressor 18 set in the inverter 42 by the minimum change amount is transmitted from the COMP control unit 44 to the inverter 42. This is because the rotation speed of the compressor 18 is reduced by the minimum change amount and the air flow is shifted to the heating side or the cooling side.
Next, the process proceeds to step S28 after passing through step S24 or step S26, and it is determined whether or not the compressor 18 is in operation. If the compressor 18 is in operation, the process returns to step S14. In step S14, in step S24 or step S26, it is determined whether the air flow in the space unit 10 reaches a predetermined temperature and is stable in a state where the rotation speed of the compressor 18 is increased or decreased by the minimum change amount. . When the air flow in the space unit 10 reaches a predetermined temperature and is stable, the average distribution ratio of the first heat medium to the heater 14 side is within the predetermined range again in steps S16 to S26. Judge whether or not.
On the other hand, if it is determined in step S14 that the temperature of the air flow in the space unit 10 is not stable, the process returns to step S12, and the proportional three-way valve 20 distributes the heater 14 side and the cooler 16 side. 1 The distribution ratio of the heat medium is continuously changed. After the air flow in the space unit 10 reaches a predetermined temperature and stabilizes, the process proceeds to steps S16 to S26.
In step S28, when the compressor 18 is not in the operating state, the control by the temperature control unit 22 and the COMP control unit 44 is stopped.
In the flowchart shown in FIG. 9 described above, the temperature control unit 22 controls the first heat medium to the heater 14 side while paying attention to the average distribution ratio to the heater 14 side. You may control paying attention to the average distribution rate of a heat carrier.
Further, an input unit for inputting the set temperature and set humidity, a display unit for displaying the operation state, and the like may be provided integrally or separately from the temperature control unit 22 and the humidity control unit 27.
In the temperature / humidity adjusting apparatus shown in FIGS. 1 to 9, the condenser 26 and the heat absorber 32 use water as cooling water or a heating source. However, as shown in FIG. A system in which room air is blown by the fan 50 may be used as the cooling source and the heating source.
Among the constituent members constituting the temperature and humidity adjusting device shown in FIG. 10, the same members as those of the temperature and humidity adjusting device shown in FIG. 1 are assigned the same reference numerals as in FIG. .
In addition, in the temperature / humidity adjusting apparatus shown in FIGS. 1 to 9, the spray nozzle group 15 for spraying water is provided as the humidity control means. However, as shown in FIG. A steam generator 52 may be disposed in the flow path. The steam generator 52 is a device that supplies moisture to the air flow through the heater 14 and the cooler 16, and generates steam by heating the pure water stored in the container 54 by the heater 56. . The heater 56 is controlled by the humidity control unit 27.
That is, the humidity control unit 27 adjusts the heating amount of the heater 56 of the steam generator 52 in accordance with the difference between the humidity in the airflow discharged from the fan 12 and the target humidity, and discharges from the fan 12. Adjust the humidity in the airflow to the target humidity.
Thus, even if the steam generator 52 is used as the humidity control means, the temperature and humidity adjustment apparatus shown in FIG. 11 can save energy.
That is, the air flow is heated by the heater 14 whose heating capacity is increased by installing the heat pump means, the dew point in the air flow is increased, and a large amount of moisture can be contained in the air flow.
Among the constituent members constituting the temperature / humidity adjusting apparatus shown in FIG. 11, the same members as those of the temperature / humidity adjusting apparatus shown in FIG. To do.
Furthermore, as shown in FIG. 12, water may be supplied to the condenser 26 and the heat absorber 32 through separate piping. For example, the condenser 26 may be supplied via a pipe 33 and the heat absorber 32 may be supplied via a pipe 32a. Both water that has passed through the condenser 26 and the heat absorber 32 are discharged out of the system.
Among the components constituting the temperature and humidity adjusting device shown in FIG. 12, the same members as those of the temperature and humidity adjusting device shown in FIG. To do.
Further, the water supplied to the condenser 26 and the water supplied to the pure water device 35 may be supplied by separate pipes. For example, normal water may be supplied to the condenser 26 and pure water may be supplied to the pure water device 35.
Incidentally, as the humidity control means used in the temperature / humidity adjusting apparatus shown in FIGS. 1 to 12, dry air dried from the air to be temperature / humidity adjusted is used in combination with the moisture supply means or instead of the moisture supply means. Means for blowing into the air flow channel may be used.
In the temperature / humidity adjustment method of the temperature / humidity adjustment target that employs the temperature / humidity adjustment device shown in FIGS. 1 to 12 described above, the temperature and humidity of the gas flow adjusted by the temperature / humidity adjustment device are simultaneously adjusted. The range which can be performed is wide, and it can enjoy the effect | action and effect that energy saving can be aimed at.
In this temperature and humidity adjustment method, the heater 14 that directly supplies a part of the high-temperature first heat medium compressed and heated by the compressor 18, and the remaining part of the first heat medium is cooled by the condenser 26, The three-way valve 20 or the two-way valve 38a, which distributes the cooler 16 which is adiabatically expanded by the expansion valve 28 and further cooled and supplied to the heater 14 and the cooler 16 with respect to the sequentially passing air flow. The distribution ratio of the first heat medium is changed by 38b to adjust the air flow to a predetermined temperature, and the air flow is adjusted to a predetermined humidity by humidity control means provided in a flow path through which the air flow passes.
Further, the first heat medium that passed through the heater 14 was adiabatically expanded by the expansion valve 34 to be cooled, and passed through a heat pump means including a heat absorber 32 that absorbs heat from water or air as an external heat source. Then, it returns to the compressor 18 together with the first heat medium that has passed through the cooler 16.
The temperature / humidity adjustment apparatus and temperature / humidity adjustment method described above are used for temperature / humidity adjustment of clean rooms in the precision processing field such as the manufacturing process of semiconductor devices. Of course, it can be used for temperature and humidity adjustment.
In addition, the temperature / humidity adjustment apparatus and temperature / humidity adjustment method that have been described are applicable to other fields, such as painting booths, painting booths, solar simulators, printed circuit board stockers, electron microscopes, tablet presses, three-dimensional measuring machines, chromatographs, drafts In fields such as chambers, exposure equipment, spin coaters, liquid crystal glass substrates, screen printers, diagnostic imaging equipment, cement curing, molding dies, injection molding machines, cell culture, plant cultivation, food storage and ripening, DNA immobilization, etc. It can also be used for temperature and humidity adjustment.

Claims

A heating flow path in which a part of the high temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and a first portion after the remaining portion of the high temperature first heat medium is cooled by the condensation means. A cooling flow path that is adiabatically expanded by the expansion means and is further cooled and supplied to the cooling means; and the high-temperature first heat medium is distributed and passed through each of the heating flow path and the cooling flow path. A circulation circuit in which one heat medium is re-supplied to the compressor,
A temperature / humidity adjusting device for adjusting a temperature / humidity adjustment target gas passing through the heating means and the cooling means to a predetermined temperature and humidity,
A portion of the high temperature first heat medium discharged from the compressor is distributed to the heating flow path side, and the remaining portion of the high temperature first heat medium is distributed to the cooling flow path side, and the heating flow path and A distribution means capable of changing a distribution ratio of the high-temperature first heat medium distributed to the cooling flow path;
In order to improve the heating capacity of the heating flow path, the first heat medium, which is cooled by releasing heat by the heating means and then adiabatically expanded by the second expansion means, is further cooled by an external heat source. Heat pump means comprising heat absorption means for absorbing heat from a certain second heat medium;
Controlling the distribution means, adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, and passing through the heating means and the cooling means to adjust the temperature and humidity A temperature control unit for controlling the temperature to a predetermined temperature;
Humidity control means for controlling the gas passing through the heating means and cooling means to a predetermined humidity is provided.
The humidity control means is a moisture supply means for supplying a predetermined amount of moisture to the temperature / humidity adjustment target gas, and droplets in the moisture supplied from the moisture supply means are heated directly or by the heating means by the heating means. The temperature / humidity adjusting device according to claim 1, wherein the moisture supply means is provided on an inlet side or an outlet side of the gas of the heating means so as to be heated and evaporated by the gas.
The water supply means includes a water spray nozzle for injecting water, a control valve provided in a water supply pipe for supplying water to the water spray nozzle, and an amount of water supplied to the water spray nozzle by adjusting the control valve. The temperature / humidity adjusting device according to claim 2, further comprising a humidity control unit to be controlled.
The temperature / humidity adjusting device according to claim 1, wherein the humidity adjusting means is water vapor generating means for generating water vapor by a heater.
The temperature / humidity adjusting device according to claim 4, wherein the water vapor generating means is provided with a humidity control unit that controls the amount of water vapor generated by adjusting the heating amount of the heater.
The cooling medium that is supplied to the condensing means of the cooling flow path to cool the first heat medium and the second heat medium that is supplied to the heat absorbing means of the heat pump means are the same heat medium, and the same heat medium is the condensing means. The temperature / humidity adjusting device according to any one of claims 1 to 5, wherein the temperature and humidity adjusting device is supplied to the heat absorbing means after being supplied to the heat absorbing means.
The temperature and humidity adjusting device according to claim 6, wherein the second heat medium is a second heat medium supplied without being heated or cooled from the outside.
A rotation speed control means for controlling the rotation speed of the compressor is provided, and the distribution ratio of the high-temperature first heat medium controlled by the temperature control section is determined by the heating amount and the cooling applied to the temperature / humidity adjustment target gas by the heating means. Compressor that changes the rotational speed of the compressor via the rotational speed control means so as to obtain a distribution ratio that can reduce the amount of heat that cancels each other out of the amount of cooling that is applied to the gas subject to temperature and humidity adjustment by the means The temperature / humidity adjusting device according to any one of claims 1 to 7, further comprising a control unit.
In the compressor control unit, when the distribution ratio of the high temperature first heat medium is on the heating side where the temperature / humidity adjustment target gas is heated, 95 to 85% of the high temperature first heat medium is distributed to the heating means and On the other hand, in the case of the cooling side where the temperature / humidity adjustment target gas is cooled so that 5 to 15% of the remaining high temperature first heat medium is distributed to the cooling means, the high temperature first heat medium The rotation speed of the compressor is set via the rotation speed control means so that 95 to 85% is distributed to the cooling means and 5 to 15% of the remaining hot first heat medium is distributed to the heating means. The temperature / humidity adjusting device according to claim 8 for controlling the temperature.
The temperature / humidity adjusting device according to claim 8 or 9, wherein the rotation speed control means is an inverter.
Of the flow paths of the first heat medium that the first heat medium that has passed through each of the heating flow path and the cooling flow path merge and are re-supplied to the compressor, the first heat medium is merged from the distribution means. The temperature / humidity adjusting device according to any one of claims 1 to 10, wherein each of the flow path including the heating flow path and the flow path including the cooling flow path is provided independently as a flow path. .
The distribution means is a distribution means capable of changing the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path substantially continuously. Temperature and humidity control device.
The total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side by the distribution means becomes equal to the high temperature first heat medium amount discharged from the compressor. The temperature / humidity adjusting device according to any one of claims 1 to 12, which is a proportional three-way valve that proportionally distributes the high-temperature first heat medium.
The distribution means is a two-way valve provided in each of the branch pipes for branching the high-temperature first heat medium into the heating channel side and the cooling channel side,
The temperature control unit adjusts the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path so that the temperature / humidity adjustment target gas passing through the heating means and the cooling means is a predetermined temperature. And the total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side is discharged from the compressor. The temperature / humidity adjusting device according to any one of claims 1 to 13, which is also a temperature control unit that adjusts the opening degree of each of the two-way valves so as to be equal to the amount.
The cooling medium supplied to the condensing means of the cooling channel is a liquid medium, and the supply amount of the liquid medium supplied to the condensing means is set so that the pressure on the discharge side of the compressor is kept constant. The temperature / humidity adjusting device according to any one of claims 1 to 14, further comprising a refrigerant control means for controlling.
A heating unit that directly supplies a part of a high-temperature first heat medium that has been compressed and heated by a compressor, and a remaining part of the first heat medium is cooled by a condensing unit and then adiabatically expanded by a first expansion unit. And the cooling means to be further cooled and supplied to the gas to be adjusted for temperature and humidity, the distribution ratio of the first heat medium distributed to the heating means and the cooling means is changed, and the gas Is adjusted to a predetermined temperature,
The gas is adjusted to a predetermined humidity by humidity control means provided in a flow path through which the gas subject to temperature and humidity adjustment passes,
The first heat medium that has passed through the heating means is adiabatically expanded by the second expansion means, cooled, and passed through a heat pump means having a heat absorption means for absorbing heat from the second heat medium that is an external heat source. Thereafter, the temperature and humidity adjustment method is characterized by returning to the compressor together with the first heat medium that has passed through the cooling means.