CN101990617A - Temperature and humidity regulating apparatus and temperature and humidity regulating system - Google Patents

Temperature and humidity regulating apparatus and temperature and humidity regulating system Download PDF

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Publication number
CN101990617A
CN101990617A CN2009801128851A CN200980112885A CN101990617A CN 101990617 A CN101990617 A CN 101990617A CN 2009801128851 A CN2009801128851 A CN 2009801128851A CN 200980112885 A CN200980112885 A CN 200980112885A CN 101990617 A CN101990617 A CN 101990617A
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China
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thermal medium
heater
humidity
temperature
high temperature
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CN2009801128851A
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CN101990617B (en
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太田浩一
寺岛雅俊
小林正一
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OLIAN MACHINERY CO Ltd
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OLIAN MACHINERY CO Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/0008—Control or safety arrangements for air-humidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/12—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air
    • F24F6/14—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air using nozzles

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Air Conditioning Control Device (AREA)
  • Air Humidification (AREA)
  • Central Air Conditioning (AREA)

Abstract

Disclosed is a temperature and humidity regulating apparatus for resolving the problems of energy waste and an inability to regulate the temperature of a gas stream such as an air stream across a broad range and to regulate the humidity thereof, which are problems in conventional temperature regulating apparatuses. The temperature and humidity regulating apparatus comprises a heating flow passage for supplying part of a first heat medium compressed by a compressor (18) to a heater (14), a cooling flow passage for condensing, adiabatically expanding, cooling, and then supplying the remaining part of the first heat medium to a cooler (16), and an atomizing nozzle group (15) provided between the heater (14) and the cooler (16) for supplying a predetermined quantity of moisture to air, and the air passing through the heater (14) and the cooler (16) is set to a predetermined temperature. The humidity and temperature regulating apparatus further comprises a three-way proportional valve (20) able to alter the distribution ratio of the first heat medium to the cooling flow passage and the heating flow passage, a heat pump means for increasing the heating capacity of the heating flow passage, a temperature controller (22) for controlling the three-way proportional valve (20) and regulating the distribution ratio of the first heating medium to control the air passing through the heater (14) and the cooler (16) to a predetermined temperature, and a humidity controller (27) for controlling the quantity of water supplied to the atomizer nozzle group (15) in such a way that the air that has passed through the heater (14) and the cooler (16) is controlled to a predetermined humidity.

Description

Temp and humidity regulator and humiture control method
Technical field
The present invention relates to temp and humidity regulator and humiture control method.
Background technology
Usually, in the Precision Machining fields such as manufacturing process of semiconductor device, nearly all be arranged in the controlled dust free room of temperature and humidity.
But, in recent years, even in the Precision Machining field, the operation of the machining accuracy Precision Machining higher than in the past machining accuracy etc. appears constantly also requiring.
In the operation of the higher Precision Machining of above-mentioned requirements etc., usually, require the environment of the variations in temperature littler than the variations in temperature of dust free room.Therefore, the operation that requires higher Precision Machining etc. is located in the space cell of implementing accurate temperature treatment.
As the thermoregulator temperature-adjusting device that is applied to this space cell, for example open in the clear 51-97048 communique and record temperature-adjusting device shown in Figure 13 the Japan Patent spy.
In temperature-adjusting device shown in Figure 13, be provided with compressor 100, triple valve 102, condenser 104, expansion valve 106, cooler 108 and heater 110, and be provided with cooling flowing path with cooler 108 and heating channel with heater 110.
Utilize above-mentioned cooler 108 and heater 110 to regulate the temperature of the air stream of the temperature adjusting object that blows out from fan 112.
In this temperature-adjusting device shown in Figure 13, utilize triple valve 102 to be assigned to cooling flowing path and heating channel by the thermal medium of the high temperature after compressor 100 compressions.The thermal medium that is assigned to the high temperature of cool stream trackside device 104 coolings that are condensed.This thermal medium that is cooled is inflated valve 106 adiabatic expansions and cools off, and is fed into cooler 108.In cooler 108, the air stream cooling of the temperature adjusting object that will blow out from fan 112, and will absorb heat and the thermal medium that heats up supplies to compressor 100.
On the other hand, the thermal medium that is assigned to the high temperature of heating channel side is supplied to heater 110, heating be cooled device 108 cooling temperature adjusting object air stream and be adjusted to desired temperatures.Like this, in heater 110, the thermal medium of the air of heating-up temperature controlled plant stream and heat release cooling is by expansion valve 106 and cooler 108, and is fed into compressor 100.
Summary of the invention
In temperature-adjusting device shown in Figure 13, whole adiabatic expansion coolings of the thermal medium of the high temperature that is compressed by compressor 100 by expansion valve 106, and be fed into cooler 108, therefore, will from fan 112 blow out the cooling energy of air stream cooling of temperature adjusting object be certain.
On the other hand, utilize triple valve 102 to regulate and distribute the flow of thermal medium of the high temperature of heating channel side, thereby can be adjusted in the heater 100 the heat that adds the air stream of the temperature adjusting object of device 108 coolings that are cooled.
Therefore, the temperature of the air stream of the temperature adjusting object of passing through cooler 108 and heater 110 can be regulated, the temperature treatment in the space cell can be in narrower temperature range, carried out.
But, in temperature-adjusting device shown in Figure 13, the whole of thermal medium of the high temperature that is compressed by compressor 100 are cooled off by adiabatic expansion by expansion valve 106, and be fed into cooler 108, therefore, specially adjustment to the air stream of the temperature adjusting object that blows out from fan 112 is carried out in the heating again of the thermal medium of the high temperature that is compressed by compressor 100 by supplying to heater 110.
Like this, in the temperature control mode that temperature-adjusting device adopted shown in Figure 13, the thermal medium that is used to heat also flows into cooling flowing path, therefore, the heat that power produced that can heating heat only becomes compressor is difficult corresponding to the load change of cooler 108 and heater 110.
Therefore, under the situation of the design temperature of the air stream that increases substantially the temperature adjusting object by cooler 108 and heater 110, the temperature that has the air stream of temperature adjusting object does not sometimes reach design temperature or reaches the very time taking situation of design temperature.
In addition, in temperature-adjusting device shown in Figure 13, be not provided with the humidity regulation function that the humidity of the air stream of the temperature adjusting object by cooler 108 and heater 110 is regulated, can not carry out humidity regulation air stream.
Therefore, the object of the present invention is to provide temp and humidity regulator and humiture control method, this temp and humidity regulator and humiture control method can solve following thermostatic technical problem in the past: the thermoregulator scope that can carry out gas streams such as air stream is narrow, can not carry out humidity regulation, and there is energy dissipation, the scope that this temp and humidity regulator and humiture control method can carry out the adjustment of gas stream and humidity regulation simultaneously is big, and can realize the saving energy.
The present inventor has been found to be and has solved the problems of the technologies described above, cooling flowing path and heating channel are set, and be provided with and change for the amount of cooling water of the air of the humiture controlled plant of the heater of cooling device by cooling flowing path and heating channel and add the distributor of heat, in order to improve the heating efficiency of heating channel, the heat pump assembly that heat can be moved towards the high part of temperature from the part of low temperature is set, and humidity control apparatus to be located in the stream of gas stream be effective.
That is, as the device that solves the problems of the technologies described above, provide a kind of temp and humidity regulator, it comprises: will be supplied to the heating channel of heater by the part of first thermal medium of the high temperature of compressor compression heating; Utilize condensing unit to make the nubbin cooling of first thermal medium of above-mentioned high temperature, utilize first expansion gear to make its adiabatic expansion then and further cooling, and it is supplied to the cooling flowing path of cooling device; And first thermal medium that distributes above-mentioned high temperature, and will be re-supplied to the closed circuit of compressor respectively by first thermal medium of above-mentioned heating channel and cooling flowing path, the gas regulation that is humiture controlled plant that will be by above-mentioned heater and cooling device is to the temperature of regulation and the temp and humidity regulator of humidity, in this temp and humidity regulator, be provided with distributor, heat pump assembly, temperature control part and humidity conditioner, wherein, the part of first thermal medium of the high temperature that above-mentioned distributor can be discharged from above-mentioned compressor is assigned to above-mentioned heating channel side, and the nubbin of first thermal medium of above-mentioned high temperature is assigned to the cool stream trackside, and can change the allotment ratio of first thermal medium of the high temperature that is assigned to above-mentioned heating channel and cooling flowing path, above-mentioned heat pump assembly has heat sink, in this heat sink, in above-mentioned heater, emit heat and be cooled then by the second expansion gear adiabatic expansion and further first thermal medium of cooling from i.e. second thermal medium heat absorption of external heat source, to improve the heating efficiency of above-mentioned heating channel, the said temperature control part is controlled above-mentioned distributor, adjusting is assigned to the allotment ratio of first thermal medium of the high temperature of above-mentioned heating channel and cooling flowing path, and the gas of humiture controlled plant that will be by above-mentioned heater and cooling device is controlled at set point of temperature, and above-mentioned humidity conditioner will be controlled at set point of temperature by the gas of above-mentioned heater and cooling device.
In addition, as the method that solves the problems of the technologies described above, a kind of humiture control method is provided, to directly be supplied to heater by the part of first thermal medium of the high temperature of compressor compression heating, after utilizing condensing unit to make the nubbin cooling of above-mentioned first thermal medium, utilize first expansion gear to make its adiabatic expansion and further cooling, and it is supplied to cooling device, for the gas of the humiture controlled plant by heater and cooling device successively, change the apportionment ratio of above-mentioned first thermal medium that is assigned to above-mentioned heater and cooling device, above-mentioned gas is adjusted to set point of temperature, and utilize humidity conditioner in the stream that the gas be located at above-mentioned humiture controlled plant passes through, above-mentioned gas is adjusted to specified humidity, and utilizing second expansion gear to make by the first thermal medium adiabatic expansion of above-mentioned heater cools off, by having behind the heat pump assembly of the heat sink of i.e. second thermal medium heat absorption of external heat source, make it turn back to above-mentioned compressor with first thermal medium by above-mentioned cooling device.
In the technical scheme of the technical solution problem that the present inventor provides, the optimal way that can be listed below.
As humidity conditioner, use supplies to the moisture of ormal weight the moisture feedway of the gas of humiture controlled plant, and by above-mentioned moisture feedway being located at the entrance side or the outlet side of the gas of heater, come the drop of heating evaporation from the moisture of above-mentioned moisture feedway supply with the gas after utilizing the direct heating of heater or utilizing the heating of use heater, thereby can carry out humidity regulation.
As this moisture feedway, use comprises: the water spray mouth of ejection water; Be located at the control valve of supplying with the water supplying tubing of water towards above-mentioned water spray mouth; And regulate above-mentioned control valve, and control the moisture feedway of the humidity control part of the water yield that supplies to above-mentioned water spray mouth, can easily carry out humidity control.
Perhaps, as humidity control apparatus, can use the water vapour generation device that utilizes heater to produce water vapour.
In this water vapour generation device,, can easily carry out humidity control by the humidity control part that heat is controlled the water vapour generation that adds of regulating heater is set.
With second thermal medium that is fed into the condensing unit of cooling flowing path and cools off the cooling medium of first thermal medium and the heat sink that supplies to heat pump assembly as identical thermal medium, and above-mentioned identical thermal medium supplied to condensing unit, supply to above-mentioned heat sink then, thereby can effectively utilize the heat of first thermal medium of the high temperature that the device that is condensed removes.
As this second thermal medium, do not use and can be supplied with second thermal medium of coming by external heat or cooling ground, be effective from the viewpoint of saving the energy.
In addition, by the revolution speed control device of the rotating speed of controlling compressor is set, and compressor control portion is set, this compressor control portion changes the rotating speed of compressor via above-mentioned revolution speed control device, so that becoming, the allotment ratio of first thermal medium of the high temperature of being controlled by temperature control part can make adding heat and utilizing cooling device to be applied in the amount of cooling water of gas of humiture controlled plant of the gas that utilizes heater to be applied to the humiture controlled plant, the allotment ratio that reduces of the heat of Di Xiaoing each other, can reduce in the heat that heater and cooling device applied respectively, the heat of Di Xiaoing each other, therefore, assist ground mutually with the situation that heat pump assembly is set, can further realize saving the energy.
In the above-mentioned compressor control part, rotating speed via revolution speed control device control compressor, be positioned at gas under the situation of heated heated side at the humiture controlled plant, make the allotment ratio of first thermal medium of high temperature be in 95～85% 5～15% being assigned in the scope of cooling device of first thermal medium that are assigned to heater and remaining high temperature of first thermal medium of high temperature, on the other hand, gas at above-mentioned humiture controlled plant is under the situation of the cold side that is cooled, make above-mentioned allotment ratio be in 95～85% 5～15% being assigned in the scope of heater of first thermal medium that are assigned to cooling device and remaining high temperature of first thermal medium of high temperature, can realize the saving energy of temp and humidity regulator, and the runs steadily temp and humidity regulator.As this revolution speed control device, can preferably use inverter.
In addition, by in the independent stream that first thermal medium that makes respectively first thermal medium interflow by heating channel and cooling flowing path and be re-supplied to compressor is set on stream, from distributor to the stream that comprises above-mentioned heating channel that makes above-mentioned first thermal medium interflow and comprise the stream of cooling flowing path, can enlarge the adjustment amplitude of the gas of humiture controlled plant.
As the distributor that first thermal medium of high temperature is assigned to this heating channel and cooling flowing path, the distributor of the allotment ratio by using first thermal medium can continuously change the high temperature that is assigned to heating channel and cooling flowing path in fact can further critically carry out the adjustment of the gas of humiture controlled plant.
As above-mentioned distributor, the distributor of the allotment ratio by using first thermal medium can continuously change the high temperature that is assigned to heating channel and cooling flowing path in fact can further critically carry out the adjustment of the gas of humiture controlled plant.
Should " distributor that can continuously change in fact " be meant as distributor use two-way valve or ratio triple valve, two-way valve or ratio triple valve are driven control in the mode of substep control, two-way valve or ratio triple valve are driven step by step on the microcosmic, but on the whole by the meaning of Continuous Drive.
As distributor, the ratio triple valve that distributes first thermal medium of above-mentioned high temperature by usage ratio, so that be assigned to first thermal medium of high temperature of heating channel side and the total amount of first thermal medium that is assigned to the high temperature of cool stream trackside equates with the first thermal medium amount of the high temperature of discharging from compressor, and can change reposefully from the allotment ratio of first thermal medium of the high temperature of compressor discharge.
In addition, as distributor, use and be located at the two-way valve that first thermal medium of high temperature is branched off into branch's pipe arrangement of heating channel side and cool stream trackside respectively, temperature control part adopts the temperature control part of other aperture of branch of regulating above-mentioned two-way valve, allotment ratio with first thermal medium of the high temperature that regulates and distributes above-mentioned heating channel and cooling flowing path, the gas of humiture controlled plant that will be by heater and cooling device is controlled at set point of temperature, and the total amount of first thermal medium that makes first thermal medium of the high temperature that is assigned to above-mentioned heating channel side and be assigned to the high temperature of cool stream trackside equates with the first thermal medium amount of the high temperature of discharging from compressor, also can change reposefully from the allotment ratio of first thermal medium of the high temperature of compressor discharge.
In addition, the cooling medium that supplies to the condensing unit of cooling flowing path adopts liquid medium, by the refrigerant controller of the quantity delivered of controlling the above-mentioned liquid medium that supplies to above-mentioned condensing unit is set, keep certain with pressure with the discharge side of compressor, thereby energy runs steadily temp and humidity regulator, and can prevent to supply with the situation that surpasses the liquid medium that needs towards condensing unit.
The invention effect
In the temp and humidity regulator and humiture control method that the present inventor provides, first thermal medium of the high temperature that will discharge from compressor supplies to respectively the cooling device of the heater of heating channel and cooling flowing path.In addition, change the allotment ratio of first thermal medium of the high temperature that is assigned to heating channel and cooling flowing path, can easily regulate for the gas of the humiture controlled plant by heater and cooling device add heat and amount of cooling water, and the adjustment of gas that can be by heater and cooling device is to set point of temperature.
And, owing to be provided with the humidity conditioner that the gas by above-mentioned heater and cooling device is controlled at specified humidity, therefore, also the humidity of the gas by heater and cooling device can be adjusted to specified humidity simultaneously.
In addition, in the temp and humidity regulator and humiture control method that the present inventor provides, has heat pump assembly.This heat pump assembly is the device that heat can be moved towards the high part of temperature from the part of low temperature, therefore, utilize the heat sink that constitutes heat pump assembly, can make and in first thermal medium (part that temperature is high) of the high temperature of compressor compression heating, in the heater of heating channel heat be emitted and cool off first thermal medium that utilizes the second expansion gear adiabatic expansion to cool off again then, from heat up gasification and return compressor of second thermal medium (part that temperature the is low) heat absorption of external heat source.Therefore, the heating efficiency of unit of electrical energy can be increased considerably, and the energy can be realized saving.
So, in this temp and humidity regulator and humiture control method, first thermal medium (part that temperature is high) of the high temperature of discharging from compressor, the energy that second thermal medium (part that temperature is low) that utilizes heat pump assembly from external heat source can be absorbed heat is applied to the compression kinetic energy of compressor, and can improve the heating efficiency of the heater of supplying with first thermal medium that high temperature is arranged.
In such temp and humidity regulator and humiture control method, can be assigned to the allotment ratio of first thermal medium of the high temperature of heating channel and cooling flowing path by minor adjustments, come the small load change of rapid correspondence by the gas of the humiture controlled plant of heater and cooling device, and also can utilize the humidity of the rapidly corresponding gas that produces because of load change of humidity conditioner to change, can realize the temperature of the gas of humiture controlled plant and the adjusting of humidity.
In addition, in the temp and humidity regulator and humiture control method that the present inventor provides, even under the situation of the design temperature of the gas that increases substantially the humiture controlled plant by heater and cooling device, compared with the allotment ratio that is assigned to cooling flowing path, first thermal medium that increases substantially high temperature is assigned to the allotment ratio of heating channel, also the gas regulation of humiture controlled plant can be arrived the temperature of regulation, and can enlarge the temperature regulating range of the gas of humiture controlled plant.
In this case, also can utilize humidity conditioner that the humidity of the gas of humiture controlled plant is remained on specified humidity.
Like this, in the temp and humidity regulator and humiture control method that the present inventor provides, the gas regulation of humiture controlled plant can be arrived the temperature and the humidity of regulation, and can realize saving the energy, this is impossible in temperature-adjusting device in the past shown in Figure 13, this thermostatic temperature control method of use.
Description of drawings
Fig. 1 is the skeleton diagram of an example of the temp and humidity regulator that provides of explanation present inventor.
Fig. 2 is the key diagram that the internal structure of the control valve 40 that uses in the temp and humidity regulator shown in Figure 1 is described.
Fig. 3 A～Fig. 3 D is the key diagram that the configuration to heater shown in Figure 1 14, cooler 16 and spray nozzle group 15 describes.
Fig. 4 is the key diagram that explanation can be used in other distributors in the temp and humidity regulator shown in Figure 1.
Fig. 5 is the chart that expression is used in the discharge characteristic of the two-way valve in the distributor shown in Figure 4.
Fig. 6 A and Fig. 6 B are positioned at the key diagram that the principle of the saving energy of cold side describes to temp and humidity regulator shown in Figure 1.
Fig. 7 A and Fig. 7 B are positioned at the key diagram that the principle of the saving energy of heated side describes to temp and humidity regulator shown in Figure 1.
Fig. 8 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.
Fig. 9 is the flow chart that is used to illustrate the control step of the temperature control part 22 of temp and humidity regulator shown in Figure 8 and compressor control portion 44.
Figure 10 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.
Figure 11 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.
Figure 12 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.
Figure 13 is the thermostatic skeleton diagram that illustrates in the past.
The specific embodiment
The skeleton diagram of in Fig. 1, having represented an example of the temp and humidity regulator that the explanation present inventor provides.In temp and humidity regulator shown in Figure 1, in the dust free room of the adjusting of carrying out temperature and humidity in the set space cell 10, be provided with heating channel, cooling flowing path and as the moisture feedway of humidity conditioner, this heating channel, cooling flowing path and moisture feedway are regulated temperature and the humidity as the air of the gas of humiture controlled plant that is sucked by fan 12.
Be provided with as the heater 14 of the heater that constitutes above-mentioned heating channel with as the cooler 16 of the cooling device that constitutes cooling flowing path, cooler 16 and heater 14 be set so that the air in the dust free room by cooler 16 by the dehumidifying back by heater 14.
Between this cooler 16 and heater 14, be provided with the spray nozzle group 15 that constitutes the moisture feedway, with the air ejection after device 16 dehumidifying that are cooled of the water of ormal weight.The pure water of being stored in the water tank 17 is fed into spray nozzle 15a, the 15a that constitutes this spray nozzle group 15 via the control valve 23 of being located at pump 19 and water supplying tubing 21 ...In addition, the compressed air that is used for the pure water ejection that will supply with also is fed into spray nozzle 15a, 15a via pipe arrangement 25 ...
In above-mentioned water tank 17, store the pure water that has the common water that to come via pipe arrangement 33 supplies to supply to water purifior 35 and obtain.The control valve 39 that the storage capacity of the pure water of this water tank 17 is located at pure water supplying tubing 37 remains necessarily.
As this spray nozzle 15a, can use well-known spray nozzle, for example spray empty G﹠W simultaneously and make water form two vaporific fluid mouths.Perhaps, can use one two fluid mouth to substitute spray nozzle group 15.
In temp and humidity regulator shown in Figure 1, be provided with closed circuit, this closed circuit will be assigned to the heating channel with heater 14 and have the cooling flowing path of cooler 16 from first thermal medium that compressor 18 is discharged, and first thermal medium that flows through heating channel and cooling flowing path respectively is re-supplied to compressor 18.
As this first thermal medium, for example can use hydrocarbon, freon class, ammonia and carbon dioxide such as propane, iso-butane, pentamethylene.Supply with above-mentioned first thermal medium, and utilize the gasification/liquefaction of first thermal medium to heat/cool off the interior air of dust free room to be adjusted to set point of temperature.
First thermal medium like this is discharged from by the gas shape of compressor 18 compression/heating becoming high temperature (for example 70 ℃).Utilization is as the ratio triple valve 20 of distributor, and first thermal medium of the high temperature that will discharge from compressor 18 is assigned to the heating channel side that is provided with heater 14 and is provided with the cool stream trackside of cooler 16.
In this ratio triple valve 20, be assigned to first thermal medium of high temperature of heating channel side and the total amount of first thermal medium that is assigned to the high temperature of cool stream trackside and equate with the first thermal medium amount from the high temperature of compressor 18 discharges.
Aforementioned proportion triple valve 20 is controlled by temperature control part 22.In this temperature control part 22, the temperature sensor 24 of the air blow-off outlet of being located at space cell 10 mensuration temperature of being measured and the design temperature that configures are compared, continuously change the allotment ratio of first thermal medium of the high temperature that is assigned to heating channel side and cool stream trackside in fact, so that it is consistent with design temperature to measure temperature, thereby set point of temperature is arrived in the air conditioning that will be drawn in the space cell 10.
Should " continuously changing in fact " be meant that when the mode with substep control drives ratio triple valve 20 ratio triple valve 20 is driven according to step on the microcosmic, but on the whole by Continuous Drive.
Also can at random set the design temperature that said temperature control part 22 sets.In addition, temperature sensor 24 shown in Figure 1 is arranged at the discharge side of fan 12, but can be arranged at the suction side of fan 12, also can be arranged at the discharge side and the suction side of fan 12.
In addition, controlled by humidity control part 27 from the pure water amount of spray nozzle group 15 ejections.In this humidity control part 27, the humidity sensor 29 of the air blow-off outlet of being located at space cell 10 mensuration humidity of being measured and the setting humidity that configures are compared, adjusting control valve 23, so that it is consistent with setting humidity to measure humidity, thereby specified humidity is arrived in the air conditionings that will be drawn in the space cell 10.
Also can at random set the setting humidity that above-mentioned humidity control part 27 sets.In addition, humidity sensor 29 shown in Figure 1 is arranged at the discharge side of fan 12, but can be arranged at the suction side of fan 12, also can be located at the discharge side and the suction side of fan 12.
First thermal medium that is assigned to the high temperature of heating channel side by ratio triple valve 20 is directly supplied to heater 14, and heating attracted in the space cell 10 and the air stream of device 16 coolings that are cooled reaches from the moisture of spray nozzle group 15 ejections, thereby it is adjusted to set point of temperature.At this moment, the first thermal medium heat release of high temperature and being cooled becomes first thermal medium that contains condensate liquid.
On the other hand, first thermal medium that is assigned to the high temperature of cool stream trackside is used as condenser 26 coolings of condensing unit, is used as expansion valve 28 adiabatic expansions of first expansion gear then, thus further cooling (for example, being cooled to 10 ℃).First thermal medium that is cooled is fed into cooler 16 and gasifies, and the air that is drawn in the space cell 10 with cooling flows.
In above-mentioned condenser 26, supply with have via pipe arrangement 30, not by external heat or cooling ground supply with come, as the cooling water of second thermal medium, this cooling water is used to cool off first thermal medium of the high temperature that is assigned to heater 14 sides.Above-mentioned cooling water is heated to about 30 ℃ by about 70 ℃ first thermal medium in condenser 26 and discharges from pipe arrangement 31.The cooling water of discharging from this pipe arrangement 31 is fed into heat dump 32 as the heat sink of heat pump assembly as heating source.
In this heat dump 32, supply with that the favourable expansion valve 34 that is used as second expansion gear makes the first thermal medium adiabatic expansion after the heat release in heater 14 and further about 10 ℃ first thermal medium obtaining of cooling.Therefore, in heat dump 32, according to heat absorption in condenser 26 be warmed up to about 30 ℃ cooling water be cooled to the temperature difference of first thermal medium about 10 ℃ by gasification, first thermal medium can absorb heat from cooling water.
First thermal medium that heats up and gasify from the cooling water heat absorption in heat dump 32 is fed into compressor 18 via storage heater 36.In this storage heater 36, also supply with to have and absorb heat and first thermal medium of gasification from the air stream that is fed into cooler 16 and be inhaled in the space cell 10.
Above-mentioned storage heater 36 is the storage heaters that can store liquid component and only gas componant is re-supplied to compressor 18 types, therefore, can be reliably only the gas componant of first thermal medium be supplied to compressor 18.
As this storage heater 36, can use the storage heater of accumulator with type.
In addition, also the cooling water of discharging from heat dump 32 can be supplied to water purifior 35, and spray from the spray nozzle 15a of spray nozzle group 15.Under the high situation of the temperature of the cooling water that the temperature ratio of the cooling water of discharging from heat dump 32 is supplied with from pipe arrangement 33, since less from the evaporation of water latent heat of spray nozzle 15a ejection, therefore, can reduce the temperature reduction of air stream.
Even storage heater 36 is not set, the thermal medium of the gasification that heats up and be fed into cooler 16 and the thermal medium of evaporation collaborates from being inhaled into the gas heat absorption space cell 10 in as long as can make in heat dump 32 from the heat absorption of air stream, and it is re-supplied to compressor 18 gets final product.
Yet, utilize expansion valve 34 to make the first thermal medium adiabatic expansion after the heat release in heater 14 and cool off, but in the cooling that adiabatic expansion produced in expansion valve 34, do not have the heat exchange between first thermal medium and the outside.Therefore, first thermal medium by adiabatic cooling can absorb heat from being fed into cooling water heat dump 32, as second thermal medium via condenser 26 by the outside.
Therefore, first thermal medium of the high temperature of discharging, can will utilize the heat dump 32 of heat pump assembly from supplying with the compression kinetic energy that the energy that absorbs the next cooling water is applied to compressor 18 from the outside from compressor 18.Can only utilize the driving energy of the compressor 18 that makes the circulation of first thermal medium, carry out the heat absorption of this heat dump 32.
In addition, in temp and humidity regulator shown in Figure 1, the cooling water of supplying with from the outside is fed into heat dump 32 via condenser 26.Therefore, also the part from the energy of first thermal medium of high temperature of using that condenser 26 remove can be applied to first thermal medium of the high temperature of discharging from compressor 18, thereby can improve the heating efficiency of heating channel.Therefore, except the energy that the heat dump 32 that utilizes heat pump assembly absorbs, the part from the energy of first thermal medium of high temperature of using that condenser 26 remove can also be applied to first thermal medium of the high temperature of discharging from compressor 18, thereby can improve the heating efficiency of heating channel, consequently, the temperature regulating range of air stream can be enlarged, and the energy can be realized significantly saving.
And, above-mentioned heater 14 can not only increase considerably the heating efficiency to this air stream, can also increase considerably the heating efficiency to the moisture that sprays from spray nozzle 15a, and can increase considerably the humidification ability, therefore, also can enlarge the humidity regulation scope of air stream.
Like this, even, also have the heating efficiency that can airflow temperature be warmed up to set point of temperature by the heat absorption of heat pump assembly because of the pure water of the spray nozzle group 15 ejection ormal weights of the supply side of being located at air causes the reduction of the airflow temperature of the heater 14 that heating efficiency improved.
At this, heat pump assembly not being set spray nozzle group 15 is set and attempts under the situation of humidity regulation, may occur air stream can not being adjusted to set point of temperature situation, air stream is adjusted to the situation that set point of temperature will take a long time.
That is, for the reduction of the airflow temperature that causes because of water from spray nozzle group 15 ejection, the heater 14 of the part of first thermal medium of the high temperature of discharging from compressor 18 of need increasing supply add heat.
Yet, be fed in first thermal medium of heater 14 and only have the heat that compressor 18 is applied.
Therefore, this is because under the situation that increases the amount of moisture of supplying with from spray nozzle group 15 in order to regulate humidity rapidly, can not supply with towards heater 14 at once air stream is warmed up to the required enough heats of set point of temperature.
Like this, in temp and humidity regulator shown in Figure 1, can improve the heating efficiency of this heating channel, therefore, the heating efficiency of regulation electric energy and humidification ability are increased considerably, and can realize saving the energy by being provided with of heat pump assembly.
In addition, in temp and humidity regulator shown in Figure 1, can continuously change the allotment ratio of first thermal medium and first thermal medium of the high temperature that is assigned to the cool stream trackside that proportion of utilization triple valve 20 is assigned to the high temperature of heating channel side in fact according to the temperature in the space cell 10.
Therefore, in temp and humidity regulator shown in Figure 1, in heating channel and cooling flowing path, supply with first thermal medium that high temperature is arranged all the time, proportion of utilization triple valve 20 comes minor adjustments at once to be assigned to the allotment ratio of first thermal medium of the high temperature of heating channel and cooling flowing path, thereby can tackle the small load change of air stream of humiture controlled plant of the cooler 16 of heater 14 by heating channel and cooling flowing path rapidly, can improve response.
In addition, temp and humidity regulator as shown in Figure 1 is such, and pure water is from the spray nozzle ejection of the air intake side of being located at heater 14, thereby airborne humidity can be maintained setting.In addition, during air circulation in dust free room, circulating air is by fan 12 heating such as grade, but owing to by the spraying heat extraction from the pure water of spray nozzle group 15, therefore, can reduce the load to cooler 16.
Consequently, can be with respect to setting value temperature and the humidity of control accurately by the air stream of the humiture controlled plant of cooler 16, spray nozzle group 15 and the heater 14 of heating channel, the variations in temperature and the humidity that can reduce space cell shown in Figure 1 10 change, thereby the desired operation of Precision Machining can be set.
In temp and humidity regulator shown in Figure 1, as mentioned above, improved the heating efficiency of heating channel, and on stream, be respectively equipped with independently in the stream that comprises heating channel and cooling device, from as the ratio triple valve 20 of distributor to first thermal medium by cooler 16 and heat dump 32 respectively till storage heater 36 interflow the stream that comprises heating channel and comprise the stream of cooling flowing path.Therefore, first thermal medium that temperature is different can not mix, and can enlarge the temperature regulating range of humiture controlled plant.
In addition, even under the situation of the design temperature of the air stream that increases substantially the humiture controlled plant by heater 14 and cooler 16, first thermal medium of high temperature is assigned to the allotment ratio of cooling flowing path compared with proportion of utilization triple valve 20, increase substantially the allotment ratio that is assigned to heating channel, also the air stream of humiture controlled plant can be adjusted to set point of temperature rapidly.
Even when regulating the temperature of above-mentioned air stream, humidity control part 27 also can be regulated the spray amount from the pure water of spray nozzle group 15, arrive setting humidity with humidity regulation with air stream.
In addition, in temp and humidity regulator shown in Figure 1, improve the heating efficiency of heating channel, and need not use and add other moisture feedway, heater such as hot water and steam generation device, therefore, can realize significantly saving the energy.
In temp and humidity regulator shown in Figure 1, temperature control part 22 and humidity control part 27 are regulated temperature/humidity independently, even but changing design temperature, setting under the situation of humidity, the temperature/humidity of air stream also can reach design temperature/setting humidity in the short period of time.
In the temp and humidity regulator shown in Figure 1 of above explanation, on the pipe arrangement 30 that cooling water is supplied to condenser 26, be provided with control valve 40 as refrigerant controller.Control this control valve 40, so that the discharge pressure of compressor 18 is certain.As shown in Figure 2, be provided with bar-shaped portion in above-mentioned control valve 40, this bar-shaped portion has the spool 40b of the peristome that opens and closes the 40a of valve portion in the stream of being located at cooling water.The spring 40c of this bar-shaped quilt and its front end face butt is towards the direction application of force of the peristome of the spool 40b shut off valve 40a of portion.In addition, the other end of bar-shaped portion and the bellows 40d butt of supplying with the pressure that first thermal medium of discharging from compressor 18 is arranged make bar-shaped portion overcome the active force of spring 40c, and towards the direction of the peristome of opening the 40a of valve portion to the spool 40b application of force.
Therefore, when the discharge pressure of compressor 18 becomes the active force of spring 40c when above, utilize bellows 40d that spool 40d is moved towards the direction of opening the peristome of the 40a of valve portion, the cooling water inflow of the condenser 26 of increasing supply, thereby the cooling capacity of raising condenser 26.Like this, improve the cooling capacity of condenser 26, and reduced the discharge pressure of compressor 18.
On the other hand, when the discharge pressure of compressor 18 becomes the active force of spring 40c when following, spool 40d moves towards the direction of the peristome of the 40a of shut off valve portion, reduces the cooling water inflow that supplies to condenser 26, thereby reduces the cooling capacity of condenser 26.Therefore, improved the discharge pressure of compressor 18.
Like this, remain necessarily by discharge pressure with compressor 18, can the runs steadily temp and humidity regulator.In addition, supply with above the cooling water inflow that needs towards condenser 26, and can regulate so that cooling water is not discharged outside system.
As shown in Figure 1, for above-mentioned control valve 40, on the shunting pipe arrangement of control valve 40, be provided with valve 41.This valve 41 is under the situation that control valve 40 breaks down, the increase supply quantity delivered of first thermal medium of high temperature of heater 14, reduce the discharge pressure of compressor 18, because of the deficiency of supplying with water makes under the situation of the inoperative in fact grade of heat dump 32, supply with water towards condenser 26 and heat dump Final 32 system.
In temp and humidity regulator shown in Figure 1, between cooler 16 and heater 14, be provided with the spray nozzle group 15 of ejection pure water, but as shown in Figure 3A, also can spray nozzle group 15 be set at the outlet side of the air of heater 14.Like this, even spray nozzle group 15 is located at the outlet side of the air of heater 14, can utilize also that heated air stream heats and evaporates from the water droplet of spray nozzle group 15 ejections in heater 14.
In addition, shown in Fig. 3 B, cooler 16 and heater 14 can be set also, to be fed into heater 14 at air after, again it be supplied to cooler 16, and spray nozzle group 15 is located between cooler 16 and the heater 14.In this case, also can utilize in heater 14 heated air stream to heat and evaporate from the water droplet of spray nozzle group 15 ejections.
In addition, shown in Fig. 3 C, also can adopt the heater 14 shown in Fig. 3 B and the setting of cooler 16, and spray nozzle group 15 is located at the entrance side of the air of heater 14.In this case, can utilize the water droplet that heater 14 directly heats and evaporation sprays from spray nozzle group 15.
But, for example, shown in Fig. 3 D, in the setting of adopting the heater 14 shown in Fig. 3 A with cooler 16, and spray nozzle group 15 is located under the situation of entrance side of air of cooler 16, owing in cooler 16, be condensed and be not evaporated, can not from air stream, remove from the water droplet of spray nozzle group 15 ejections, therefore, the humidity that air stream is adjusted to regulation is difficult.
Shown in Fig. 3 B and Fig. 3 C, under the situation of the upstream side of spray nozzle group 15 being located at heater 16 or cooler 14, be positioned at the downstream than spray nozzle group 15, heater 16 or cooler 14 works as the separator from the water droplet of spray nozzle group 15 ejections, and can make the size of the water droplet that is contained in the air stream of heater 16 by the downstream or cooler 14 certain.
As shown in Figure 4, can use 2 two-way valves is two-way valve 38a, 38b, replaces the ratio triple valve 20 as employed distributor in the temp and humidity regulator shown in Figure 1.Two two-way valve 38a, 38b are controlled by temperature control part 22 respectively.Utilize said temperature control part 22 to regulate each the aperture of two-way valve 38a, 38b, regulate the allotment ratio that is assigned to heating channel and cooling flowing path by first thermal medium of the gasiform high temperature of compressor 18 compression/heating in fact continuously, and air current control that will be by heater 14 and cooler 16 is in set point of temperature.At this moment, regulate the aperture of two-way valve 38a, 38b and regulate pro rate continuously, so that be assigned to the first thermal medium amount of high temperature of heater 14 sides and the total amount of the first thermal medium amount that is assigned to the high temperature of cooler 16 sides equates with the first thermal medium amount from the high temperature of compressor 18 discharges.
At this moment, as shown in Figure 5, the relation of other valve opening of the branch of two-way valve 38a, 38b and flow is not a linearity.Therefore, in temperature control part 22, keep the discharge characteristic data relevant respectively shown in Figure 5,, send the aperture signal towards each two-way valve 38a, 38b from temperature control part 22 according to each discharge characteristic of two-way valve 38a, 38b with two-way valve 38a, 38b.
At this, " regulate and distribute the allotment ratio of heating channel and cooling flowing path in fact continuously " or " regulating and distributing ratio in fact continuously " is meant and utilizing substep control to drive two-way valve 38a, 38b, when regulating the allotment ratio of heating channel and cooling flowing path, the aperture of two-way valve 38a, 38b is driven adjusting by substep on microcosmic, regulated but drive continuously on the whole.
In temp and humidity regulator shown in Figure 1, utilizing 16 pairs of air streams of heater 14 and cooler to carry out in the humiture adjusting as the humiture controlled plant, for example, be positioned under the situation of heated side at heater 14 and cooler 16 air stream with respect to the humiture controlled plant, under the stable operating condition of air themperature, as shown in Figure 6A, use 14 pairs of the heaters device 16 cooled air streams that are cooled to heat.Under the operating condition shown in Fig. 6 A, there is following situation: compare with heated air flow energy needed A, use the energy quantitative change of heater 14 heating big.In this case, shown in Fig. 6 B,, then can realize saving the energy if can reduce the energy of the repetition of heater 14 and cooler 16 as far as possible.
On the other hand, be positioned under the situation of cold side at heater 14 and cooler 16 air stream with respect to the humiture controlled plant, under the operating condition of the temperature stabilization that air flows, shown in Fig. 7 A, use 16 pairs of air after heater 14 heating of cooler to cool off.Under the operating condition shown in Fig. 7 A, have following situation: with cooling air stream energy needed B relatively, use the can quantitative change big of cooler 16 coolings.In this case, shown in Fig. 7 B,, then can realize saving the energy if can reduce the energy of the repetition of cooler 16 and heater 14 as far as possible.
But, in the supply of on-off control towards first thermal medium of the high temperature of heater 14 and cooler 16, so that when the heat of Di Xiaoing was zero each other, it is unstable that the running of temp and humidity regulator becomes, and air stream reaches in set point of temperature, and to stablize the required time longer.Therefore, for can steady running temp and humidity regulator, the Min. of the heat that adds in the amount of cooling water that heat and cooler 16 applied, offsets each other that need be provided with that heater 14 applied.
The minimal heat of offsetting each other of this necessity is different slightly different because of temp and humidity regulator, therefore, preferably comes by experiment to obtain in advance.
Like this, in temp and humidity regulator shown in Figure 8, utilize compressor control portion 44 (below, sometimes be also referred to as compressor control portion 44), control via the inverter 42 of rotating speed control part as the rotating speed of control compressor 18, with the heat that adds in the amount of cooling water that heat and cooler 16 applied, offsets each other that reduces as much as possible that heater 14 applied, thereby can reduce the energy of cooler 16 and the repetition of heater 14.
In the structural elements that constitutes temp and humidity regulator shown in Figure 8,, and omit its detailed description to member mark identical and the identical symbol of symbol of Fig. 1 with the structural elements of temp and humidity regulator shown in Figure 1.
Temperature control part 22 interactions of above-mentioned compressor control part 44 and control ratio triple valve 20, the heat that adds in the amount of cooling water that heat and cooler 16 applied, offsets each other that reduces as far as possible that heater 14 applied, the Temperature and Humidity Control of the line space of going forward side by side air-flow.
With the control of the ratio triple valve 20 that utilizes temperature control part 22 to carry out with utilize the control of the rotating speed of the compressor 18 that compressor control portion 44 carries out to be shown in the flow chart of Fig. 9.
Behind the test running temp and humidity regulator shown in Figure 8 as can be known, be positioned at respect to air stream at temp and humidity regulator under the situation of cold side running, from steady running, preferably will as heater 14 applied add heat, to be ratio triple valve 20 be made as 5～15% (ratio triple valve 20 is made as 95～85% towards the apportionment ratio of first thermal medium of the high temperature of cooler 16 sides) towards the apportionment ratio of first thermal medium of the high temperature of heater 14 sides.
On the other hand as can be known, be positioned at respect to air stream at temp and humidity regulator under the situation of heated side running, from steady running, preferably will as heater 14 applied add heat, to be ratio triple valve 20 be made as 95～85% (ratio triple valve 20 is made as 5～15% towards the apportionment ratio of first thermal medium of the high temperature of cooler 16 sides) towards the apportionment ratio of first thermal medium of the high temperature of heater 14 sides.
Therefore, in the control shown in the flow chart of Fig. 9, be positioned at respect to air stream at temp and humidity regulator under the situation of cold side running, the rotating speed of control compressor 18, so that heater 14 applied add heat, particularly ratio triple valve 20 is 5～15% towards the apportionment ratio of first thermal medium of the high temperature of heater 14 sides, be positioned at respect to air stream at temp and humidity regulator under the situation of heated side running, the rotating speed of control compressor 18 is so that above-mentioned apportionment ratio is 95～85%.
In flow chart shown in Figure 9, after in step S10, starting compressor 18, according to being located at the temperature signal that space cell 10 interior temperature sensors 24 are measured, change the allotment ratio of first thermal medium that proportion of utilization triple valve 20 is assigned to the high temperature of heater 14 sides and cooler 16 sides continuously, in step S12, to make air stream become set point of temperature, be adjusted to set point of temperature thereby will be drawn into space cell 10 interior air streams.
Judge in step S14 whether above-mentioned air stream arrives set point of temperature and stable, under the unstable temperature situation of air stream, return step S12, change the allotment ratio that proportion of utilization triple valve 20 is assigned to the high temperature thermal medium of heater 14 sides and cooler 16 sides continuously.Above-mentioned steps S12 and step S14 carry out in temperature control part 22.
On the other hand, the air in space cell 10 flows to and reaches under set point of temperature and the stable situation, in step S16～S22, judge the high temperature that is assigned to heater 14 sides first thermal medium allotment ratio whether within the limits prescribed.This step S16～S22 carries out in compressor control portion 44.
There is deviation owing to be assigned to the allotment ratio of first thermal medium of the high temperature of heater 14 sides, therefore, the mean allocation rate of first thermal medium of high temperature shown in Figure 9 is the average value of the apportionment ratio of first thermal medium in the stipulated time, below, abbreviate the mean allocation rate of first thermal medium sometimes as.
At first, in step S16 and step S18, when supposing that temp and humidity regulator is positioned at cold side with respect to air stream, judge towards the mean allocation rate of first thermal medium of heater 14 sides whether in 5～15%.
At this, under the situation of mean allocation rate in 5～15% of first thermal medium of heater 14 sides, because temp and humidity regulator is positioned at cold side with respect to air stream, and be in the stable scope of temp and humidity regulator running, therefore, by step S16, and turn back to step S16 from step S18.
On the other hand, under the situation of the mean allocation rate less than 5% of first thermal medium of heater 14 sides, because low excessively towards the mean allocation rate of first thermal medium of heater 14 sides, therefore, it is unstable that the running of temp and humidity regulator becomes easily.Therefore, enter step S24, increase the rotating speed of compressor 18, to increase towards the mean allocation rate of first thermal medium of heater 14 sides from step S16.In step S24,42 send the increase signal that increases the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control portion 44 towards inverter.By increase the rotating speed of compressor 18 with minimum change, can the runs steadily temp and humidity regulator.
Make the minimum change of rotation speed change of compressor 18 different, therefore, preferably obtain by experiment, but when the rotating speed of compressor 18 is 2000～5000rpm, as preferably, minimum change is located in 3～10% the scope because of temp and humidity regulator.
In addition, surpass under 15% the situation,, be judged as air stream not in cold side, and enter step S20 and step S22 by step S16 and step S18 in mean allocation rate towards first thermal medium of heater 14 sides.In step S20 and step S22, when supposing that air stream is positioned at heated side, judge towards the mean allocation rate of first thermal medium of heater 14 sides whether in 95～85%.
At this, under the situation of mean allocation rate in 85～95% of first thermal medium of heater 14 sides, air stream is positioned at heated side, and is in the stable scope of the running of temp and humidity regulator, therefore, turn back to step S16 by step S20 and from step S22.
On the other hand, surpass under 95% the situation towards the mean allocation rate of first thermal medium of heater 14 sides, too high towards the mean allocation rate of first thermal medium of heater 14 sides, it is unstable that the running of temp and humidity regulator becomes easily.Therefore, enter step S24, increase the rotating speed of compressor 18, to reduce towards the mean allocation rate of first thermal medium of heater 14 sides from step S20.In step S24,42 send the increase signal that increases the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control portion 44 towards inverter.
In addition, under the situation of the mean allocation rate less than 85% of first thermal medium of heater 14 sides, in step S22, be judged as air stream neither in heated side also not at the state of cold side, be adding in the amount of cooling water that heat and cooler 16 applied of being applied of heater 14, the more state of the heat of Di Xiaoing each other.Therefore, enter step S26, reduce the rotating speed of compressor 18.In step S26,42 send the reduction signal that reduces the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control portion 44 towards inverter.With the rotating speed of minimum change reduction compressor 18, make the air circulation move on to heated side or cold side.
Then, enter step S28, judge whether compressor 18 is on-stream,, then return step S14 if compressor 18 is on-stream by step S24 or step S26.In step S14, judge in step S24 or step S26 under the state of the rotating speed that increases or reduce compressor 18 with minimum change, whether the air stream in the space cell 10 reaches set point of temperature and stable.Whether the air stream in space cell 10 reaches under set point of temperature and the stable situation, by step S16～step S26, judge once more towards the mean allocation rate of first thermal medium of heater 14 sides in prescribed limit.
On the other hand, in step S14, under the unstable temperature situation of the air stream in being judged as space cell 10, return step S12, continuously change the allotment ratio that proportion of utilization triple valve 20 is assigned to first thermal medium of heater 14 sides and cooler 16 sides.Air stream in space cell 10 reach set point of temperature and stable after, enter step S16～S26.
In step S28, not under the situation in operating condition, stop the control of temperature control part 22 and compressor control portion 44 at compressor 18.
In the flow chart shown in Figure 9 of above explanation, in temperature control part 22, pay close attention to towards the mean allocation rate of first thermal medium of heater 14 sides and control, control but also can pay close attention to towards the mean allocation rate of first thermal medium of cooler 16 sides.
In addition, also can be with the input unit of input design temperature, setting humidity, the display unit of demonstration operating condition etc. and temperature control part 22, humidity control part 27 one or split setting.
In the temp and humidity regulator of Fig. 1～shown in Figure 9, in condenser 26 and heat dump 32, used water as cooling water, heating source, but as shown in figure 10, as the cooling source and the heating source of condenser 26 and heat dump 32, also can adopt the mode of using fan 50 to blow room air.
In the structural elements that constitutes temp and humidity regulator shown in Figure 10, for the identical member of structural elements of temp and humidity regulator shown in Figure 1, mark the symbol identical, detailed with the symbol of Fig. 1.
In addition, in the temp and humidity regulator of Fig. 1～shown in Figure 9,, be provided with the spray nozzle group 15 of ejection water, but as shown in figure 11, also can steam generator 52 be set in empty gas stream flow channel and replace spray nozzle group 15 as humidity conditioner.Steam generator 52 is to make moisture supply to the device that air flows by heater 14, cooler 16, utilizes heater 56 heating to be stored in the pure water in the container 54 and to produce steam.This heater 56 is by 27 controls of humidity control part.
That is, in humidity control part 27, poor according to the humidity the air stream of discharging and target humidity from fan 12, the heater 56 of steam regulation generator 52 add heat, thereby the humidity regulation will flowing from the air that fan 12 is discharged is to target humidity.
Like this, even use steam generator 52, also can in temp and humidity regulator shown in Figure 11, realize saving the energy as humidity conditioner.
That is, the heater 14 that utilizes setting because of heat pump assembly to improve heating efficiency comes heated air flow, can improve the dew point in the air stream, and more water is entered in the air stream.
For in the structural elements that constitutes temp and humidity regulator shown in Figure 11, with the identical member of structural elements of temp and humidity regulator shown in Figure 1, mark the symbol identical, detailed with the symbol of Fig. 1.
In addition, as shown in figure 12, also can use other pipe arrangements to supply water to condenser 26 and heat dump 32.For example, can supply water to condenser 26, supply water to heat dump 32 via pipe arrangement 32a via pipe arrangement 33.Water by above-mentioned condenser 26 and heat dump 32 all is discharged to outside the system.
For in the structural elements that constitutes temp and humidity regulator shown in Figure 12, with the identical member of structural elements of temp and humidity regulator shown in Figure 1, mark the symbol identical, detailed with the symbol of Fig. 1.
In addition, also can use other pipe arrangements to supply to the water and the water that supplies to water purifior 35 of condenser 26.For example, common water can be supplied to condenser 26, pure water is supplied to water purifior 35.
As employed humidity conditioner in the temp and humidity regulator of Fig. 1～shown in Figure 12, can use and to be blown into device and the moisture feedway and the usefulness of sky gas stream flow channel than air dried dry air of humiture controlled plant, or replace the moisture feedway.
In the humiture control method of the air stream of the humiture controlled plant of the temp and humidity regulator of Fig. 1 that adopts above explanation～shown in Figure 12, embodied that temp and humidity regulator plays, the scope of the temperature and humidity of adjustments of gas stream is big and can realize the effect/effect of the saving energy simultaneously.
In above-mentioned humiture control method, air stream for heater 14 that passes through successively and cooler 16, utilization is assigned to first thermal medium triple valve 20 or the two-way valve 38a of heater 14 and cooler 16,38b changes the apportionment ratio of first thermal medium, thereby air stream is adjusted to set point of temperature, and utilize the humidity conditioner in the stream of being located at circulation of air that air stream is adjusted to specified humidity, wherein, directly supply with the part of first thermal medium that the high temperature that is compressed by compressor 18 and heat is arranged in the heater 14, supply with in the cooler 16 have in condenser 26, cool off after, adiabatic expansion in expansion valve 28 and the further remainder of first thermal medium of cooling.
In addition, utilizing expansion valve 34 to make by the first thermal medium adiabatic expansion of heater 14 cools off, and make its by comprise be the heat pump assembly of heat dump 32 of water or air heat absorption from external heat source after, turn back to compressor 18 with first thermal medium by cooler 16.
More than Shuo Ming temp and humidity regulator and the humiture control method humiture of dust free room that is used for the Precision Machining fields such as manufacturing process of semiconductor device is regulated purposes, but also can be used for certainly regulating purposes in the humiture of the employed dust free room of other field.
In addition, the temp and humidity regulator of above-mentioned explanation and humiture control method, also can for example be coated with tankage as other field, be coated with tankage, solar simulator (solar simulator), the printed circuit board (PCB) storage cabinet, electron microscope, tablet press machine, three-dimensional measuring machine, chromatograph, the draft chamber, exposure device, equal glue machine, liquid crystal glass base, screen process press, image diagnosing system, cement conservation, molding die, emission forming machine, cell is cultivated, plant culture, the preservation of food and maturation, the temp and humidity regulator in fields such as DNA immobilization with and use.

Claims (16)

1. temp and humidity regulator comprises:
To be supplied to the heating channel of heater by the part of first thermal medium of the high temperature of compressor compression heating;
Utilize condensing unit to make the nubbin cooling of first thermal medium of described high temperature, utilize first expansion gear to make its adiabatic expansion then and further cooling, and it is supplied to the cooling flowing path of cooling device; And
First thermal medium that distributes described high temperature will be re-supplied to the closed circuit of compressor respectively by first thermal medium of described heating channel and cooling flowing path,
The gas regulation of humiture controlled plant that will be by described heater and cooling device is to the temperature and the humidity of regulation,
It is characterized in that,
Be provided with distributor, heat pump assembly, temperature control part and humidity conditioner, wherein,
The part of first thermal medium of the high temperature that described distributor will be discharged from described compressor is assigned to described heating channel side, and the nubbin of first thermal medium of described high temperature is assigned to the cool stream trackside, and can change the allotment ratio of first thermal medium of the high temperature that is assigned to described heating channel and cooling flowing path
Described heat pump assembly has heat sink, this heat sink make in described heater, emit heat and be cooled, then by the second expansion gear adiabatic expansion and further first thermal medium of cooling from i.e. second thermal medium heat absorption of external heat source, to improve the heating efficiency of described heating channel
Described temperature control part is controlled described distributor, adjusting is assigned to the allotment ratio of first thermal medium of the high temperature of described heating channel and cooling flowing path, and the gas of humiture controlled plant that will be by described heater and cooling device is controlled at set point of temperature
Described humidity conditioner will be controlled at specified humidity by the gas of described heater and cooling device.
2. temp and humidity regulator as claimed in claim 1 is characterized in that,
Humidity conditioner is a moisture feedway of supplying with the moisture of ormal weight towards the gas of humiture controlled plant, described moisture feedway is located at the entrance side or the outlet side of the described gas of heater, to utilize heater directly to heat or to utilize gas heating and the drop of evaporation from the moisture that described moisture feedway is supplied with that is heated by heater.
3. temp and humidity regulator as claimed in claim 2 is characterized in that,
The moisture feedway comprises:
The water spray mouth of ejection water;
Be located at towards described water spray mouth and supply with control valve on the water supplying tubing of water; And
Regulate described control valve, control supplies to the humidity control part of the water yield of described water spray mouth.
4. temp and humidity regulator as claimed in claim 1 is characterized in that,
Humidity control apparatus is to utilize heater to produce the water vapour generation device of water vapour.
5. temp and humidity regulator as claimed in claim 4 is characterized in that,
In the water vapour generation device, be provided with the humidity control part that heat is controlled the water vapour generation that adds of regulating heater.
6. as each described temp and humidity regulator in the claim 1～5, it is characterized in that,
Supply to the condensing unit of cooling flowing path and cool off the cooling medium of first thermal medium and second thermal medium of the heat sink that supplies to heat pump assembly is identical thermal medium, described identical thermal medium is supplied to condensing unit, supply to described heat sink then.
7. temp and humidity regulator as claimed in claim 6 is characterized in that,
Second thermal medium is can be by second thermal medium of external heat or the supply of cooling ground.
8. as each described temp and humidity regulator in the claim 1～7, it is characterized in that,
Be provided with the revolution speed control device of the rotating speed of control compressor, and be provided with compressor control portion, this compressor control portion changes the rotating speed of compressor via described revolution speed control device, can make adding heat and utilizing the allotment ratio that cooling device is applied in the amount of cooling water of gas of humiture controlled plant, the heat of offsetting each other reduces of the gas that utilizes heater to be applied to the humiture controlled plant so that the allotment ratio of first thermal medium of the high temperature of being controlled by temperature control part becomes.
9. temp and humidity regulator as claimed in claim 8 is characterized in that,
In compressor control portion, rotating speed via revolution speed control device control compressor, be positioned at gas under the situation of heated heated side at the humiture controlled plant, make the allotment ratio of first thermal medium of high temperature be in high temperature first thermal medium 95～85% be assigned to heater and first thermal medium of remaining 5～15% high temperature is assigned in the scope of cooling device, on the other hand, gas at described humiture controlled plant is positioned under the situation of the cold side that is cooled, make described allotment ratio be in high temperature first thermal medium 95～85% be assigned to cooling device and first thermal medium of remaining 5～15% high temperature is assigned in the scope of heater.
10. temp and humidity regulator as claimed in claim 8 or 9 is characterized in that,
Revolution speed control device is an inverter.
11. as each described temp and humidity regulator in the claim 1～10, it is characterized in that,
Make respectively first thermal medium interflow by heating channel and cooling flowing path and it is being re-supplied in the stream of first thermal medium of compressor, the stream that comprises described heating channel from distributor to described first thermal medium interflow and comprise stream independent setting on stream of cooling flowing path.
12. as each described temp and humidity regulator in the claim 1～11, it is characterized in that,
Distributor is the distributor of allotment ratio that can continuously change first thermal medium of the high temperature that is assigned to heating channel and cooling flowing path in fact.
13. as each described temp and humidity regulator in the claim 1～12, it is characterized in that,
Distributor is first thermal medium of the described high temperature of pro rate so that be assigned to the heating channel side high temperature first thermal medium and be assigned to the ratio triple valve that the total amount of first thermal medium of the high temperature of cool stream trackside equates with the first thermal medium amount from the high temperature of compressor discharge.
14. as each described temp and humidity regulator in the claim 1～13, it is characterized in that,
Distributor is to be located at the two-way valve that first thermal medium of high temperature is branched off into branch's pipe arrangement of heating channel side and cool stream trackside respectively,
Temperature control part also is following temperature control part, this temperature control part is regulated each aperture of described two-way valve, allotment ratio with first thermal medium of the high temperature that regulates and distributes described heating channel and cooling flowing path, the gas of humiture controlled plant that will be by heater and cooling device is controlled at set point of temperature, and the total amount of first thermal medium that makes first thermal medium of the high temperature that is assigned to described heating channel side and be assigned to the high temperature of cool stream trackside equates with the first thermal medium amount from the high temperature of compressor discharge.
15. as each described temp and humidity regulator in the claim 1～14, it is characterized in that,
The cooling medium that supplies to the condensing unit of cooling flowing path is a liquid medium, and be provided with refrigerant controller, this refrigerant controller control supplies to the quantity delivered of the described liquid medium of described condensing unit, so that the pressure of the discharge side of compressor keeps certain.
16. a humiture control method is characterized in that,
To directly be supplied to heater by the part of first thermal medium of the high temperature of compressor compression heating; After utilizing the nubbin cooling of condensing unit with described first thermal medium; Utilize first expansion gear to make its adiabatic expansion and further cooling; And it is supplied to cooling device; For the gas that passes through successively the temperature and humidity regulation object of described heater and described cooling device; Change the apportionment ratio of described first thermal medium that is assigned to described heater and cooling device; With described gas regulation to set point of temperature
And utilize humidity conditioner in the stream that gas passed through be located at described humiture controlled plant, with the humidity of described gas regulation to regulation,
And utilizing second expansion gear to make by the first thermal medium adiabatic expansion of described heater cools off, and make it by having from the heat pump assembly of the heat sink of i.e. second thermal medium heat absorption of external heat source, turn back to described compressor with first thermal medium then by described cooling device.
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