CN101990617B - Temperature and humidity regulating apparatus and temperature and humidity regulating system - Google Patents

Abstract

Disclosed is a temperature and humidity regulating apparatus for resolving the problems of energy waste and an inability to regulate the temperature of a gas stream such as an air stream across a broad range and to regulate the humidity thereof, which are problems in conventional temperature regulating apparatuses. The temperature and humidity regulating apparatus comprises a heating flow passage for supplying part of a first heat medium compressed by a compressor (18) to a heater (14), a cooling flow passage for condensing, adiabatically expanding, cooling, and then supplying the remaining part of the first heat medium to a cooler (16), and an atomizing nozzle group (15) provided between the heater (14) and the cooler (16) for supplying a predetermined quantity of moisture to air, and the air passing through the heater (14) and the cooler (16) is set to a predetermined temperature. The humidity and temperature regulating apparatus further comprises a three-way proportional valve (20) able to alter the distribution ratio of the first heat medium to the cooling flow passage and the heating flow passage, a heat pump means for increasing the heating capacity of the heating flow passage, a temperature controller (22) for controlling the three-way proportional valve (20) and regulating the distribution ratio of the first heating medium to control the air passing through the heater (14) and the cooler (16) to a predetermined temperature, and a humidity controller (27) for controlling the quantity of water supplied to the atomizer nozzle group (15) in such a way that the air that has passed through the heater (14) and the cooler (16) is controlled to a predetermined humidity.

Description

Temp and humidity regulator and temperature and humidity regulation method

Technical field

The present invention relates to temp and humidity regulator and temperature and humidity regulation method.

Background technology

Usually, in the Precision Machining fields such as manufacturing process of semiconductor device, nearly all be arranged in the controlled dust free room of temperature and humidity.

But, in recent years, even in the Precision Machining field, the operation of Precision Machining that machining accuracy is higher than in the past machining accuracy etc. also appears constantly requiring.

In the operation of the higher Precision Machining of above-mentioned requirements etc., usually, require the environment of the variations in temperature less than the variations in temperature of dust free room.Therefore, the operation of the Precision Machining of having relatively high expectations etc. is located in the space cell of implementing accurate temperature treatment.

As the thermoregulator temperature-adjusting device that is applied to this space cell, for example in the clear 51-97048 communique of Japanese Patent Laid-Open, record temperature-adjusting device shown in Figure 13.

In temperature-adjusting device shown in Figure 13, be provided with compressor 100, triple valve 102, condenser 104, expansion valve 106, cooler 108 and heater 110, and be provided with the cooling flowing path with cooler 108 and the heating channel with heater 110.

Utilize above-mentioned cooler 108 and heater 110 to regulate the temperature of the air stream of the temperature adjusting object blown out from fan 112.

In this temperature-adjusting device shown in Figure 13, utilize triple valve 102 to be assigned to cooling flowing path and heating channel by the thermal medium of the high temperature after compressor 100 compressions.The thermal medium that is assigned to the high temperature of the cool stream trackside device 104 that is condensed is cooling.This thermal medium be cooled is inflated valve 106 adiabatic expansions and is cooling, and is fed into cooler 108.In cooler 108, the air stream of the temperature adjusting object that will blow out from fan 112 is cooling, and will absorb heat and the thermal medium that heats up supplies to compressor 100.

On the other hand, the thermal medium that is assigned to the high temperature of heating channel side is supplied to heater 110, heating be cooled the cooling temperature adjusting object of device 108 air stream and be adjusted to the temperature of expectation.Like this, in heater 110, the thermal medium of the air stream of heating-up temperature controlled plant and heat release cooling is by expansion valve 106 and cooler 108, and is fed into compressor 100.

Summary of the invention

In temperature-adjusting device shown in Figure 13, the thermal medium of the high temperature compressed by compressor 100 whole are by expansion valve 106 and adiabatic expansion is cooling, and be fed into cooler 108, therefore, will from fan 112 blow out the cooling cooling energy of air stream of temperature adjusting object be certain.

On the other hand, utilize triple valve 102 to regulate and distribute the flow of thermal medium of the high temperature of heating channel side, thereby can be adjusted in the heat that adds of the interior air stream to the cooling temperature adjusting object of device 108 that is cooled of heater 100.

Therefore, the temperature of the air stream of the temperature adjusting object of passing through cooler 108 and heater 110 can be regulated, the temperature treatment in space cell can be in narrower temperature range, carried out.

But, in temperature-adjusting device shown in Figure 13, it is cooling that the thermal medium of the high temperature compressed by compressor 100 whole be adiabatic expansion by expansion valve 106, and be fed into cooler 108, therefore, specially the adjustment to the air stream of the temperature adjusting object that blows out from fan 112 is carried out in the heating again of the thermal medium of the high temperature compressed by compressor 100 by supplying to heater 110.

Like this, in the temperature control mode that temperature-adjusting device shown in Figure 13 adopts, for the thermal medium heated, also flow into cooling flowing path, therefore, heat that can heating only becomes the heat that the power of compressor produces, and is difficult corresponding to the load change of cooler 108 and heater 110.

Therefore, in the situation that increase substantially the design temperature of the air stream of the temperature adjusting object by cooler 108 and heater 110, the temperature that sometimes has the air stream of temperature adjusting object does not reach design temperature or reaches the very time taking situation of design temperature.

In addition, in temperature-adjusting device shown in Figure 13, be not provided with the humidity adjusting function that the humidity of the air stream of the temperature adjusting object by cooler 108 and heater 110 is regulated, can not carry out humidity regulation to air stream.

Therefore, the object of the present invention is to provide temp and humidity regulator and temperature and humidity regulation method, this temp and humidity regulator and temperature and humidity regulation method can solve following thermostatic technical problem in the past: the thermoregulator scope that can carry out the gas flows such as air stream is narrow, can not carry out humidity regulation, and there is energy dissipation, the scope that this temp and humidity regulator and temperature and humidity regulation method can be carried out the adjustment of gas flow and humidity regulation simultaneously is large, and can realize saving the energy.

The present inventor has been found to be and has solved the problems of the technologies described above, cooling flowing path and heating channel are set, and arrange and can change for the amount of cooling water of the air of the temperature and humidity regulation object of the heater of the cooling device by cooling flowing path and heating channel and add the distributor of heat, in order to improve the heating efficiency of heating channel, the heat pump assembly that heat can be moved towards the high part of temperature from the part of low temperature is set, and humidity control apparatus to be located in the stream of gas flow be effective.

That is, as the device solved the problems of the technologies described above, provide a kind of temp and humidity regulator, it comprises: will be supplied to by the part of the first thermal medium of the high temperature of compressor compression heating the heating channel of heater, utilize condensing unit to make the nubbin of the first thermal medium of above-mentioned high temperature cooling, then utilize the first expansion gear to make its adiabatic expansion and further cooling, and it is supplied to the cooling flowing path of cooling device, and the first thermal medium that distributes above-mentioned high temperature, and will by the first thermal medium of above-mentioned heating channel and cooling flowing path, be re-supplied to respectively the closed circuit of compressor, to the temperature of regulation and the temp and humidity regulator of humidity by the gas regulation of the temperature and humidity regulation object by above-mentioned heater and cooling device, in this temp and humidity regulator, be provided with distributor, heat pump assembly, temperature control part and humidity conditioner, wherein, the part of the first thermal medium of the high temperature that above-mentioned distributor can be discharged from above-mentioned compressor is assigned to above-mentioned heating channel side, and the nubbin of the first thermal medium of above-mentioned high temperature is assigned to the cool stream trackside, and can change the allotment ratio of the first thermal medium of the high temperature that is assigned to above-mentioned heating channel and cooling flowing path, above-mentioned heat pump assembly has heat sink, in this heat sink, in above-mentioned heater, emit heat and be cooled then by the second expansion gear adiabatic expansion and further cooling the first thermal medium from external heat source namely the second thermal medium absorb heat, to improve the heating efficiency of above-mentioned heating channel, the said temperature control part is controlled above-mentioned distributor, adjusting is assigned to the allotment ratio of the first thermal medium of the high temperature of above-mentioned heating channel and cooling flowing path, and the gas of the temperature and humidity regulation object by above-mentioned heater and cooling device is controlled to set point of temperature, above-mentioned humidity conditioner will be controlled at set point of temperature by the gas of above-mentioned heater and cooling device.

In addition, as the method solved the problems of the technologies described above, a kind of temperature and humidity regulation method is provided, to directly be supplied to heater by the part of the first thermal medium of the high temperature of compressor compression heating, after utilizing condensing unit to make the nubbin of above-mentioned the first thermal medium cooling, utilize the first expansion gear to make its adiabatic expansion and further cooling, and it is supplied to cooling device, for the gas of the temperature and humidity regulation object by heater and cooling device successively, change the apportionment ratio of above-mentioned the first thermal medium that is assigned to above-mentioned heater and cooling device, above-mentioned gas is adjusted to set point of temperature, and utilize the humidity conditioner in the stream that the gas be located at above-mentioned temperature and humidity regulation object passes through, above-mentioned gas is adjusted to specified humidity, and it is cooling to utilize the second expansion gear to make by the first thermal medium adiabatic expansion of above-mentioned heater, by having from external heat source namely after the heat pump assembly of the heat sink of the second thermal medium heat absorption, make it together with the first thermal medium by above-mentioned cooling device, turn back to above-mentioned compressor.

In the technical scheme of the technical solution problem that the present inventor provides, the optimal way that can be listed below.

As humidity conditioner, use supplies to the moisture of ormal weight the moisture feedway of the gas of temperature and humidity regulation object, and by above-mentioned moisture feedway being located to entrance side or the outlet side of the gas of heater, to utilize heater directly to heat or to utilize with the gas after the heater heating and come heating evaporation from the drop the moisture that above-mentioned moisture feedway is supplied with, thereby can carry out humidity regulation.

As this moisture feedway, use comprises: the water spray mouth of ejection water; Be located at towards the control valve of above-mentioned water spray mouth for the water supplying tubing of feedwater; And regulate above-mentioned control valve, and control the moisture feedway of the humidity control part of the water yield that supplies to above-mentioned water spray mouth, can easily carry out humidity control.

Perhaps, as humidity control apparatus, can use the water vapour generation device that utilizes heater to produce water vapour.

In this water vapour generation device, by the humidity control part that heat is controlled the water vapour generation that adds of regulating heater is set, can easily carry out humidity control.

Using the second thermal medium of heat sink of being fed into the cooling medium of the condensing unit of cooling flowing path cooling the first thermal medium and supplying to heat pump assembly as identical thermal medium, and above-mentioned identical thermal medium is supplied to condensing unit, then supply to above-mentioned heat sink, thereby can effectively utilize the heat of the first thermal medium of the high temperature that the device that is condensed removes.

As this second thermal medium, with can, by external heat or cooling the second thermal medium that comes supplied with, be not effective from the viewpoint of saving the energy.

In addition, by the revolution speed control device of the rotating speed of controlling compressor is set, and compressor control section is set, this compressor control section changes the rotating speed of compressor via above-mentioned revolution speed control device, so that becoming, the allotment ratio of the first thermal medium of the high temperature of being controlled by temperature control part can make adding heat and utilizing cooling device to be applied in the amount of cooling water of gas of temperature and humidity regulation object of the gas that utilizes heater to be applied to the temperature and humidity regulation object, the allotment ratio that the heat of offsetting each other reduces, can reduce in the heat that heater and cooling device apply respectively, the heat of offsetting each other, therefore, with the mutually auxiliary ground of the situation that heat pump assembly is set, can further realize saving the energy.

In the above-mentioned compressor control part, via revolution speed control device, control the rotating speed of compressor, with in the situation that the gas of temperature and humidity regulation object is positioned at heated heated side, make the allotment ratio of the first thermal medium of high temperature be in 95～85% 5～15% being assigned in the scope of cooling device of the first thermal medium that are assigned to heater and remaining high temperature of the first thermal medium of high temperature, on the other hand, in the situation that the gas of above-mentioned temperature and humidity regulation object is in the cold side be cooled, make above-mentioned allotment ratio be in 95～85% 5～15% being assigned in the scope of heater of the first thermal medium that are assigned to cooling device and remaining high temperature of the first thermal medium of high temperature, can realize the saving energy of temp and humidity regulator, and runs steadily temp and humidity regulator.As this revolution speed control device, can preferably use inverter.

In addition, by independent the first thermal medium made respectively by heating channel and cooling flowing path that arranges on stream, collaborate and be re-supplied in the stream of the first thermal medium of compressor, from distributor to the stream that comprises above-mentioned heating channel that above-mentioned the first thermal medium is collaborated and the stream that comprises cooling flowing path, can enlarge the adjustment amplitude of the gas of temperature and humidity regulation object.

As the first thermal medium of high temperature being assigned to the distributor of this heating channel and cooling flowing path, the distributor of the allotment ratio by using the first thermal medium can continuously change in fact the high temperature that is assigned to heating channel and cooling flowing path, can further critically carry out the adjustment of the gas of temperature and humidity regulation object.

As above-mentioned distributor, the distributor of the allotment ratio by using the first thermal medium can continuously change in fact the high temperature that is assigned to heating channel and cooling flowing path, can further critically carry out the adjustment of the gas of temperature and humidity regulation object.

Should " distributor that can continuously change in fact " refer to as distributor use two-way valve or ratio triple valve, the driven control of mode that two-way valve or ratio triple valve are controlled with substep, on microcosmic, two-way valve or ratio triple valve are driven step by step, but on the whole by the meaning of Continuous Drive.

As distributor, the ratio triple valve that distributes the first thermal medium of above-mentioned high temperature by usage ratio, so that be assigned to first thermal medium of high temperature of heating channel side and the total amount of the first thermal medium that is assigned to the high temperature of cool stream trackside equates with the first thermal medium amount of the high temperature of discharging from compressor, and can change reposefully from the allotment ratio of the first thermal medium of the high temperature of compressor discharge.

In addition, as distributor, use and be located at respectively the two-way valve that the first thermal medium of high temperature is branched off into to branch's pipe arrangement of heating channel side and cool stream trackside, temperature control part adopts the temperature control part of minute other aperture of regulating above-mentioned two-way valve, allotment ratio with the first thermal medium of the high temperature that regulates and distributes above-mentioned heating channel and cooling flowing path, the gas of the temperature and humidity regulation object by heater and cooling device is controlled to set point of temperature, and make to be assigned to first thermal medium of high temperature of above-mentioned heating channel side and the total amount of the first thermal medium that is assigned to the high temperature of cool stream trackside equates with the first thermal medium amount of high temperature from the compressor discharge, also can change reposefully the allotment ratio of the first thermal medium of the high temperature of discharging from compressor.

In addition, the cooling medium that supplies to the condensing unit of cooling flowing path adopts liquid medium, by the refrigerant controller of the quantity delivered of controlling the above-mentioned liquid medium that supplies to above-mentioned condensing unit is set, pressure with the discharge side by compressor keeps certain, thereby energy runs steadily temp and humidity regulator, and can prevent from supplying with towards condensing unit the situation that surpasses the liquid medium needed.

The invention effect

In the temp and humidity regulator and temperature and humidity regulation method that the present inventor provides, the first thermal medium of the high temperature that will discharge from compressor supplies to respectively the cooling device of the heater of heating channel and cooling flowing path.In addition, change the allotment ratio of the first thermal medium of the high temperature that is assigned to heating channel and cooling flowing path, can easily regulate for the gas of the temperature and humidity regulation object by heater and cooling device add heat and amount of cooling water, and the adjustment of gas that can be by heater and cooling device is to set point of temperature.

And, owing to being provided with the humidity conditioner that the gas by above-mentioned heater and cooling device is controlled to specified humidity, therefore, also the humidity of the gas by heater and cooling device can be adjusted to specified humidity simultaneously.

In addition, in the temp and humidity regulator and temperature and humidity regulation method that the present inventor provides, has heat pump assembly.This heat pump assembly is the device that heat can be moved towards the high part of temperature from the part of low temperature, therefore, utilize the heat sink that forms heat pump assembly, can make by first thermal medium (part that temperature is high) of the high temperature of compressor compression heating, in the heater of heating channel, heat is emitted and cooling the second expansion gear adiabatic expansion cooling the first thermal medium again that then utilizes, from the second thermal medium (part that temperature is low) heat absorption of external heat source, heat up and gasify and return to compressor.Therefore, the heating efficiency of unit of electrical energy can be increased considerably, and the energy can be realized saving.

So, in this temp and humidity regulator and temperature and humidity regulation method, first thermal medium (part that temperature is high) of the high temperature of discharging from compressor, the energy that the second thermal medium (part that temperature is low) that utilizes heat pump assembly from external heat source can be absorbed heat is applied to the compression kinetic energy of compressor, and can improve the heating efficiency of the heater of supplying with the first thermal medium that high temperature is arranged.

In such temp and humidity regulator and temperature and humidity regulation method, can be assigned to by minor adjustments the allotment ratio of the first thermal medium of the high temperature of heating channel and cooling flowing path, carry out the small load change of the gas of corresponding temperature and humidity regulation object by heater and cooling device rapidly, and also can utilize humidity conditioner rapidly the humidity of the corresponding gas produced because of load change change, can realize the temperature of the gas of temperature and humidity regulation object and the adjusting of humidity.

In addition, in the temp and humidity regulator and temperature and humidity regulation method that the present inventor provides, even in the situation that increase substantially the design temperature of the gas of the temperature and humidity regulation object by heater and cooling device, compared with the allotment ratio that is assigned to cooling flowing path, the first thermal medium that increases substantially high temperature is assigned to the allotment ratio of heating channel, also the gas regulation of temperature and humidity regulation object can be arrived to the temperature of regulation, and can enlarge the temperature regulating range of the gas of temperature and humidity regulation object.

In this case, also can utilize humidity conditioner that the humidity of the gas of temperature and humidity regulation object is remained on to specified humidity.

Like this, in the temp and humidity regulator and temperature and humidity regulation method that the present inventor provides, can be by temperature and the humidity of the gas regulation of temperature and humidity regulation object to regulation, and can realize saving the energy, this is impossible at temperature-adjusting device in the past shown in Figure 13, in using this thermostatic temperature control method.

The accompanying drawing explanation

Fig. 1 is the skeleton diagram of an example of the temp and humidity regulator that provides of explanation present inventor.

Fig. 2 is the key diagram that the internal structure of the control valve 40 used in temp and humidity regulator shown in Figure 1 is described.

Fig. 3 A～Fig. 3 D is the key diagram that the configuration to heater shown in Figure 1 14, cooler 16 and spray nozzle group 15 describes.

Fig. 4 is the key diagram that explanation can be used in other distributors in temp and humidity regulator shown in Figure 1.

Fig. 5 means the chart of the discharge characteristic that is used in the two-way valve in distributor shown in Figure 4.

Fig. 6 A and Fig. 6 B are positioned to temp and humidity regulator shown in Figure 1 the key diagram that the principle of the saving energy of cold side describes.

Fig. 7 A and Fig. 7 B are positioned to temp and humidity regulator shown in Figure 1 the key diagram that the principle of the saving energy of heated side describes.

Fig. 8 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.

Fig. 9 is the flow chart be used to the control step of the temperature control part 22 that temp and humidity regulator shown in Figure 8 is described and compressor control section 44.

Figure 10 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.

Figure 11 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.

Figure 12 is the skeleton diagram of other examples of the temp and humidity regulator that provides of explanation present inventor.

Figure 13 is the thermostatic skeleton diagram illustrated in the past.

The specific embodiment

The skeleton diagram that has meaned an example of the temp and humidity regulator that the explanation present inventor provides in Fig. 1.In temp and humidity regulator shown in Figure 1, in the dust free room of the adjusting of carrying out temperature and humidity in set space cell 10, be provided with heating channel, cooling flowing path and as the moisture feedway of humidity conditioner, this heating channel, cooling flowing path and moisture feedway are regulated temperature and the humidity of the air of the gas as the temperature and humidity regulation object sucked by fan 12.

Be provided with as the heater 14 of the heater that forms above-mentioned heating channel with as the cooler 16 of the cooling device that forms cooling flowing path, cooler 16 and heater 14 be set so that the air in dust free room dehumidified by cooler 16 after by heater 14.

Between this cooler 16 and heater 14, be provided with the spray nozzle group 15 that forms the moisture feedway, the air ejection after the water of ormal weight is dehumidified towards the device 16 that is cooled.The pure water of storing in water tank 17 is fed into spray nozzle 15a, the 15a that forms this spray nozzle group 15 via the control valve 23 of being located at pump 19 and water supplying tubing 21 ...In addition, for the compressed air that will supply with the pure water ejection come, also via pipe arrangement 25, be fed into spray nozzle 15a, 15a ...

In above-mentioned water tank 17, have the pure water that will supply to water purifior 35 via the common water that pipe arrangement 33 is supplied with and obtain.The control valve 39 that the storage capacity of the pure water of this water tank 17 is located at pure water supplying tubing 37 remains necessarily.

As this spray nozzle 15a, can use well-known spray nozzle, for example spray simultaneously empty G&W and make water form two vaporific fluid mouths.Perhaps, can substitute spray nozzle group 15 with two fluid mouths.

In temp and humidity regulator shown in Figure 1, be provided with closed circuit, this closed circuit will be assigned to the heating channel with heater 14 and have the cooling flowing path of cooler 16 from the first thermal medium that compressor 18 is discharged, and the first thermal medium that flows through respectively heating channel and cooling flowing path is re-supplied to compressor 18.

As this first thermal medium, such as using hydrocarbon, freon class, ammonia and the carbon dioxide such as propane, iso-butane, pentamethylene.Supply with above-mentioned the first thermal medium, and utilize the gasification of the first thermal medium/liquefaction heat/air in cooling dust free room to be to be adjusted to set point of temperature.

The first thermal medium is like this become the gas shape of high temperature (for example 70 ℃) and is discharged from by compressor 18 compressions/heating.Utilization is as the ratio triple valve 20 of distributor, and the first thermal medium of the high temperature that will discharge from compressor 18 is assigned to the heating channel side that is provided with heater 14 and is provided with the cool stream trackside of cooler 16.

In this ratio triple valve 20, be assigned to first thermal medium of high temperature of heating channel side and the total amount of the first thermal medium that is assigned to the high temperature of cool stream trackside and equate with the first thermal medium amount of high temperature from compressor 18 discharges.

Aforementioned proportion triple valve 20 is controlled by temperature control part 22.In this temperature control part 22, the temperature sensor 24 of the Air blowing mouth of being located at space cell 10 the mensuration temperature of measuring and the design temperature set are compared, continuously change in fact the allotment ratio of the first thermal medium of the high temperature that is assigned to heating channel side and cool stream trackside, so that it is consistent with design temperature to measure temperature, thereby set point of temperature is arrived in the air conditioning that will be drawn in space cell 10.

Should " continuously changing in fact " refer to that on microcosmic, ratio triple valve 20 was driven according to step when the mode of controlling with substep drives ratio triple valve 20, but on the whole by Continuous Drive.

Also can at random set the design temperature that said temperature control part 22 sets.In addition, temperature sensor 24 shown in Figure 1 is arranged at the discharge side of fan 12, but can be arranged at the suction side of fan 12, also can be arranged at discharge side and the suction side of fan 12.

In addition, from the pure water amount of spray nozzle group 15 ejections, controlled by humidity control part 27.In this humidity control part 27, the humidity sensor 29 of the Air blowing mouth of being located at space cell 10 the mensuration humidity of measuring and the setting humidity set are compared, adjusting control valve 23, so that it is consistent with setting humidity to measure humidity, thereby specified humidity is arrived in the air conditioning that will be drawn in space cell 10.

Also can at random set the setting humidity that above-mentioned humidity control part 27 sets.In addition, humidity sensor 29 shown in Figure 1 is arranged at the discharge side of fan 12, but can be arranged at the suction side of fan 12, also can be located at discharge side and the suction side of fan 12.

The first thermal medium that is assigned to the high temperature of heating channel side by ratio triple valve 20 is directly supplied to heater 14, and the air stream that heating attracted in space cell 10 and the device 16 that is cooled is cooling and from the moisture of spray nozzle group 15 ejections, thereby it is adjusted to set point of temperature.Now, the first thermal medium heat release of high temperature and being cooled, become the first thermal medium that contains condensate liquid.

On the other hand, it is cooling that the first thermal medium that is assigned to the high temperature of cool stream trackside is used as the condenser 26 of condensing unit, then is used as expansion valve 28 adiabatic expansions of the first expansion gear, thereby further cooling (for example, being cooled to 10 ℃).The first thermal medium be cooled is fed into cooler 16 and gasifies, with the cooling air stream be drawn in space cell 10.

In above-mentioned condenser 26, supply with have via pipe arrangement 30, not by external heat or cooling supply with come, as the cooling water of the second thermal medium, this cooling water is for cooling the first thermal medium that is assigned to the high temperature of heater 14 sides.Above-mentioned cooling water is heated to 30 ℃ of left and right and discharges from pipe arrangement 31 at interior the first thermal medium by 70 ℃ of left and right of condenser 26.The cooling water of discharging from this pipe arrangement 31 is fed into the heat dump 32 as the heat sink of heat pump assembly as heating source.

In this heat dump 32, supply with the favourable expansion valve 34 that is used as the second expansion gear and make the first thermal medium adiabatic expansion after the interior heat release of heater 14 and further the first thermal medium of cooling 10 ℃ of left and right that obtain.Therefore, in heat dump 32, according to the cooling water that is warmed up to 30 ℃ of left and right in the interior heat absorption of condenser 26 with by gasification, be cooled to the temperature difference of the first thermal medium of 10 ℃ of left and right, the first thermal medium can absorb heat from cooling water.

The first thermal medium that heats up and gasify from the cooling water heat absorption in heat dump 32, be fed into compressor 18 via storage heater 36.In this storage heater 36, also supply with to have from the air stream that is fed into cooler 16 and be inhaled in space cell 10 and absorb heat and the first thermal medium of gasification.

Above-mentioned storage heater 36 is energy storing liquid composition and the storage heater that only gas componant is re-supplied to compressor 18 types, therefore, can only the gas componant of the first thermal medium be supplied to compressor 18 reliably.

As this storage heater 36, can use the storage heater of accumulator by type.

In addition, also the cooling water of discharging from heat dump 32 can be supplied to water purifior 35, and spray from the spray nozzle 15a of spray nozzle group 15.In the situation that the temperature of the cooling water of discharging from heat dump 32 is higher than the temperature of the cooling water of supplying with from pipe arrangement 33, because the evaporation of water latent heat from spray nozzle 15a ejection is less, therefore, the temperature that can reduce air stream reduces.

Even storage heater 36 is not set, the thermal medium of the gasification that heats up and be fed into cooler 16 and the thermal medium of evaporation collaborates from being inhaled into the gas heat absorption space cell 10 in as long as can make in heat dump 32 from the air stream heat absorption, and it is re-supplied to compressor 18 gets final product.

Yet, utilize expansion valve 34 to make the first thermal medium adiabatic expansion after the interior heat release of heater 14 and cooling, but the adiabatic expansion in expansion valve 34 produces cooling in, there is no the heat exchange between the first thermal medium and outside.Therefore, insulated the first cooling thermal medium, can be from being fed in cooling water heat dump 32, as the second thermal medium and absorbing heat via condenser 26 by outside.

Therefore, the first thermal medium of the high temperature of discharging from compressor 18, can will utilize the heat dump 32 of heat pump assembly from from outside, supplying with the compression kinetic energy that the energy absorbed next cooling water is applied to compressor 18.Can only utilize the driving-energy of the compressor 18 that makes the first thermal medium circulation, carry out the heat absorption of this heat dump 32.

In addition, in temp and humidity regulator shown in Figure 1, the cooling water of supplying with from outside is fed into heat dump 32 via condenser 26.Therefore, the part of the energy of the first thermal medium from high temperature that also use condenser 26 can be removed is applied to from the first thermal medium of the high temperature of compressor 18 discharges, thereby can improve the heating efficiency of heating channel.Therefore, except the energy that the heat dump 32 that utilizes heat pump assembly absorbs, the part of the energy of the first thermal medium from high temperature that use condenser 26 can also be removed is applied to from the first thermal medium of the high temperature of compressor 18 discharges, thereby can improve the heating efficiency of heating channel, consequently, the temperature regulating range of air stream can be enlarged, and the energy can be realized significantly saving.

And, above-mentioned heater 14 can not only increase considerably the heating efficiency to this air stream, can also increase considerably the heating efficiency to the moisture from spray nozzle 15a ejection, and can increase considerably the humidification ability, therefore, also can enlarge the humidity regulation scope of air stream.

Like this, even because of the pure water of the spray nozzle group 15 ejection ormal weights of the supply side of being located at air, cause the reduction of the airflow temperature of the heater 14 that heating efficiency improved, also have and can airflow temperature be warmed up to the heating efficiency of set point of temperature by the heat absorption of heat pump assembly.

At this, in the situation that heat pump assembly is not set, spray nozzle group 15 is set and attempts humidity regulation, may occur air stream can not being adjusted to set point of temperature situation, air stream is adjusted to the situation that set point of temperature will take a long time.

That is, the reduction of the airflow temperature caused for the water because of from spray nozzle group 15 ejection, the heater 14 of the part of the first thermal medium of the high temperature of discharging from compressor 18 of need to increasing supply add heat.

Yet, be fed in the first thermal medium of heater 14 and only have the heat that compressor 18 applies.

Therefore, this is because in the situation that in order to regulate humidity, increase rapidly the amount of moisture of supplying with from spray nozzle group 15, can not towards heater 14, supply with air stream is warmed up to the required enough heats of set point of temperature at once.

Like this, in temp and humidity regulator shown in Figure 1, can therefore, the heating efficiency of regulation electric energy and humidification ability be increased considerably by the heating efficiency that arranges to improve this heating channel of heat pump assembly, and can realize saving the energy.

In addition, in temp and humidity regulator shown in Figure 1, can continuously change in fact according to the temperature in space cell 10 allotment ratio of the first thermal medium and the first thermal medium of the high temperature that is assigned to the cool stream trackside that proportion of utilization triple valve 20 is assigned to the high temperature of heating channel side.

Therefore, in temp and humidity regulator shown in Figure 1, in heating channel and cooling flowing path, supply with all the time the first thermal medium that high temperature is arranged, proportion of utilization triple valve 20 comes minor adjustments at once to be assigned to the allotment ratio of the first thermal medium of the high temperature of heating channel and cooling flowing path, thereby can tackle rapidly the small load change of air stream of temperature and humidity regulation object of the cooler 16 of heater 14 by heating channel and cooling flowing path, can improve response.

In addition, temp and humidity regulator as shown in Figure 1 is such, and pure water is from the spray nozzle ejection of the air intake side of being located at heater 14, thereby airborne humidity can be maintained to setting.In addition, during air circulation in dust free room, circulated air is by fan 12 heating such as grade, but, due to the spraying heat extraction of the pure water by from spray nozzle group 15, therefore, can reduce the load to cooler 16.

Consequently, can be with respect to temperature and the humidity of the air stream that sets value the temperature and humidity regulation object of controlling accurately the cooler 16, spray nozzle group 15 and the heater 14 that pass through heating channel, variations in temperature and the humidity that can reduce space cell shown in Figure 1 10 change, thereby the desired operation of Precision Machining can be set.

In temp and humidity regulator shown in Figure 1, as mentioned above, improved the heating efficiency of heating channel, and on stream, be respectively equipped with independently in the stream that comprises heating channel and cooling device, from the ratio triple valve 20 as distributor to the first thermal medium by cooler 16 and heat dump 32 respectively the stream that comprises heating channel till storage heater 36 interflow and comprise the stream of cooling flowing path.Therefore, the first thermal medium that temperature is different can not mix, and can enlarge the temperature regulating range of temperature and humidity regulation object.

In addition, even in the situation that increase substantially the design temperature of the air stream of the temperature and humidity regulation object by heater 14 and cooler 16, compared with proportion of utilization triple valve 20, the first thermal medium of high temperature is assigned to the allotment ratio of cooling flowing path, increase substantially the allotment ratio that is assigned to heating channel, also the air stream of temperature and humidity regulation object can be adjusted to rapidly to set point of temperature.

Even when regulating the temperature of above-mentioned air stream, humidity control part 27 also can be regulated the spray amount from the pure water of spray nozzle group 15, arrive and set humidity with the humidity regulation by air stream.

In addition, in temp and humidity regulator shown in Figure 1, improve the heating efficiency of heating channel, and do not needed to use other moisture feedway, the heater such as heating steam generation device, therefore, can realize significantly saving the energy.

In temp and humidity regulator shown in Figure 1, temperature control part 22 and humidity control part 27 are regulated temperature/humidity independently, even but in the situation that change design temperature, set humidity, the temperature/humidity of air stream also can reach design temperature/setting humidity in the short period of time.

In temp and humidity regulator shown in Figure 1 described above, on the pipe arrangement 30 that cooling water is supplied to condenser 26, be provided with the control valve 40 as refrigerant controller.Control this control valve 40, so that the discharge pressure of compressor 18 is certain.As shown in Figure 2, be provided with bar-shaped section in above-mentioned control valve 40, this bar-shaped section has the spool 40b of the peristome that opens and closes the 40a of valve section in the stream of being located at cooling water.This bar-shaped by the direction application of force of the spring 40c with its front end face butt towards the peristome of the spool 40b shut off valve 40a of section.In addition, the other end of bar-shaped section and the bellows 40d butt of supplying with the pressure that first thermal medium of discharging from compressor 18 is arranged, make bar-shaped section overcome the active force of spring 40c, and towards the direction of the peristome of opening the 40a of valve section to the spool 40b application of force.

Therefore, when the discharge pressure of compressor 18 becomes the active force of spring 40c when above, utilize bellows 40d that spool 40d is moved towards the direction of opening the peristome of the 40a of valve section, the cooling water inflow of the condenser 26 of increasing supply, thereby the cooling capacity of raising condenser 26.Like this, improve the cooling capacity of condenser 26, and reduced the discharge pressure of compressor 18.

On the other hand, when the discharge pressure of compressor 18 becomes the active force of spring 40c when following, spool 40d moves towards the direction of the peristome of the 40a of shut off valve section, reduces the cooling water inflow that supplies to condenser 26, thereby reduces the cooling capacity of condenser 26.Therefore, improved the discharge pressure of compressor 18.

Like this, remain necessarily by the discharge pressure by compressor 18, can the runs steadily temp and humidity regulator.In addition, towards condenser 26, supply with and surpass the cooling water inflow needed, and can regulate so that cooling water is not discharged outside system.

As shown in Figure 1, for above-mentioned control valve 40, be provided with valve 41 on the shunting pipe arrangement of control valve 40.This valve 41 in the situation that control valve 40 break down, the increase supply quantity delivered of the first thermal medium of high temperature of heater 14, reduce the discharge pressure of compressor 18, in the situation that, because the deficiency for feedwater makes the inoperative in fact grade of heat dump 32, supply feedwater towards condenser 26 and heat dump Final 32 system.

In temp and humidity regulator shown in Figure 1, between cooler 16 and heater 14, be provided with the spray nozzle group 15 of ejection pure water, but as shown in Figure 3A, also can spray nozzle group 15 be set at the outlet side of the air of heater 14.Like this, even spray nozzle group 15 is located to the outlet side of the air of heater 14, also can utilize heated air stream in heater 14 to heat and evaporate from the water droplet of spray nozzle group 15 ejections.

In addition, as shown in Figure 3 B, cooler 16 and heater 14 also can be set, after at air, being fed into heater 14, again it be supplied to cooler 16, and spray nozzle group 15 is located between cooler 16 and heater 14.In this case, also can utilize heated air stream in heater 14 to heat and evaporate from the water droplet of spray nozzle group 15 ejections.

In addition, as shown in Figure 3 C, also can adopt the heater 14 shown in Fig. 3 B and the setting of cooler 16, and spray nozzle group 15 is located to the entrance side of the air of heater 14.In this case, can utilize heater 14 directly heat and evaporate from the water droplet of spray nozzle group 15 ejections.

But, for example, as shown in Figure 3 D, in the setting of adopting the heater 14 shown in Fig. 3 A with cooler 16, and spray nozzle group 15 is located in the situation of entrance side of air of cooler 16, because the water droplet from 15 ejections of spray nozzle group is condensed and is not evaporated in cooler 16, can not be from air stream, removing, therefore, the humidity that air stream is adjusted to regulation is difficult.

As shown in Fig. 3 B and Fig. 3 C, in the situation that spray nozzle group 15 is located to the upstream side of heater 16 or cooler 14, than spray nozzle group 15, be positioned at downstream, heater 16 or cooler 14 works as the separator of the water droplet from 15 ejections of spray nozzle group, and can make the size of water droplet contained in the air stream of heater 16 by downstream or cooler 14 certain.

As shown in Figure 4, can use 2 two-way valves is two-way valve 38a, 38b, replaces the ratio triple valve 20 as the distributor used in temp and humidity regulator shown in Figure 1.Two two-way valve 38a, 38b are controlled by temperature control part 22 respectively.Utilize said temperature control part 22 to regulate each the aperture of two-way valve 38a, 38b, regulate in fact continuously by the first thermal medium of the gasiform high temperature of compressor 18 compressions/heating and be assigned to the allotment ratio of heating channel and cooling flowing path, and will be controlled at set point of temperature by the air stream of heater 14 and cooler 16.Now, regulate the aperture of two-way valve 38a, 38b and regulate continuously pro rate, so that be assigned to the first thermal medium amount of high temperature of heater 14 sides and the total amount of the first thermal medium amount that is assigned to the high temperature of cooler 16 sides equates with the first thermal medium amount of high temperature from compressor 18 discharges.

Now, as shown in Figure 5, minute other valve opening of two-way valve 38a, 38b and the relation of flow are not linearities.Therefore, in temperature control part 22, keep shown in Figure 5 and two-way valve 38a, 38b relevant discharge characteristic data respectively, according to each discharge characteristic of two-way valve 38a, 38b, towards each two-way valve 38a, 38b, send the aperture signal from temperature control part 22.

At this, " regulate and distribute in fact continuously the allotment ratio of heating channel and cooling flowing path " or " regulating and distributing in fact continuously ratio " refers to and drive two-way valve 38a, 38b utilizing substep to control, while regulating the allotment ratio of heating channel and cooling flowing path, the aperture of two-way valve 38a, 38b is driven and regulates by substep on microcosmic, but is driven and regulate continuously on the whole.

In temp and humidity regulator shown in Figure 1, utilizing during 16 pairs of air streams as the temperature and humidity regulation object of heater 14 and cooler carry out temperature and humidity regulation, for example, in the situation that heater 14 and cooler 16 are positioned at heated side with respect to the air stream of temperature and humidity regulation object, under the stable operating condition of air themperature, as shown in Figure 6A, use 14 pairs of the heaters cooled air stream of device 16 that is cooled to heat.Under the operating condition shown in Fig. 6 A, have following situation: needed energy A compares with heated air flow, uses the energy quantitative change of heater 14 heating large.In this case, as shown in Figure 6B, if can reduce as far as possible the energy of the repetition of heater 14 and cooler 16, can realize saving the energy.

On the other hand, in the situation that heater 14 and cooler 16 are positioned at cold side with respect to the air stream of temperature and humidity regulation object, under the operating condition of the temperature stabilization of air stream, as shown in Figure 7 A, use 16 pairs of air after heater 14 heating of cooler to carry out cooling.Under the operating condition shown in Fig. 7 A, have following situation: needed energy B compares with cooling-air stream, uses the cooling energy quantitative change of cooler 16 large.In this case, as shown in Figure 7 B, if can reduce as far as possible the energy of the repetition of cooler 16 and heater 14, can realize saving the energy.

But, in the supply of on-off control towards the first thermal medium of the high temperature of heater 14 and cooler 16, so that the heat of offsetting each other is while being zero, the running of temp and humidity regulator becomes unstable, and air stream reaches in set point of temperature, and to stablize the required time longer.Therefore, for can steady running temp and humidity regulator, the Min. of the heat that adds in the amount of cooling water that heat and cooler 16 apply, offsets each other that need to arrange that heater 14 applies.

The minimal heat of offsetting each other of this necessity is different slightly different because of temp and humidity regulator, therefore, preferably comes by experiment to obtain in advance.

Like this, in temp and humidity regulator shown in Figure 8, utilize compressor control section 44 (below, sometimes also referred to as compressor control section 44), inverter 42 via the rotating speed control part of the rotating speed as controlling compressor 18 is controlled, with the heat that adds in the amount of cooling water that heat and cooler 16 applied, offsets each other that reduces as much as possible that heater 14 applied, thereby can reduce the energy of cooler 16 and the repetition of heater 14.

In the structural elements that forms temp and humidity regulator shown in Figure 8, member mark with the symbol of Fig. 1 identical symbol identical to the structural elements of the temp and humidity regulator with shown in Figure 1, and description is omitted.

Temperature control part 22 interactions of above-mentioned compressor control part 44 and control ratio triple valve 20, the heat that adds in the amount of cooling water that heat and cooler 16 apply, offsets each other that reduces as far as possible that heater 14 applies, the Temperature and Humidity Control of the line space of going forward side by side air-flow.

By the control of the ratio triple valve 20 that utilizes temperature control part 22 to carry out with utilize the control of the rotating speed of the compressor 18 that compressor control section 44 carries out to be shown in the flow chart of Fig. 9.

As can be known after test running temp and humidity regulator shown in Figure 8, in the situation that temp and humidity regulator is positioned at the cold side running with respect to air stream, from in steady running, preferably will as heater 14 apply add heat, to be ratio triple valve 20 be made as 5～15% (ratio triple valve 20 is made as to 95～85% towards the apportionment ratio of the first thermal medium of the high temperature of cooler 16 sides) towards the apportionment ratio of the first thermal medium of the high temperature of heater 14 sides.

As can be known on the other hand, in the situation that temp and humidity regulator is positioned at the heated side running with respect to air stream, from in steady running, preferably will as heater 14 apply add heat, to be ratio triple valve 20 be made as 95～85% (ratio triple valve 20 is made as to 5～15% towards the apportionment ratio of the first thermal medium of the high temperature of cooler 16 sides) towards the apportionment ratio of the first thermal medium of the high temperature of heater 14 sides.

Therefore, in the control shown in the flow chart of Fig. 9, in the situation that temp and humidity regulator is positioned at the cold side running with respect to air stream, control the rotating speed of compressor 18, so that heater 14 apply add heat, particularly ratio triple valve 20 is 5～15% towards the apportionment ratio of the first thermal medium of the high temperature of heater 14 sides, in the situation that temp and humidity regulator is positioned at the heated side running with respect to air stream, control the rotating speed of compressor 18, so that above-mentioned apportionment ratio is 95～85%.

In flow chart shown in Figure 9, after in step S10, starting compressor 18, the temperature signal of measuring according to the temperature sensors 24 of being located in space cell 10, change continuously the allotment ratio of the first thermal medium that proportion of utilization triple valve 20 is assigned to the high temperature of heater 14 sides and cooler 16 sides, in step S12, to make air stream become set point of temperature, thereby the air stream that will be drawn in space cell 10 is adjusted to set point of temperature.

In step S14, judge whether above-mentioned air stream arrives set point of temperature stable, in the unsettled situation of the temperature of air stream, return to step S12, change continuously the allotment ratio that proportion of utilization triple valve 20 is assigned to the high temperature thermal medium of heater 14 sides and cooler 16 sides.Above-mentioned steps S12 and step S14 carry out in temperature control part 22.

On the other hand, in the situation that the air stream in space cell 10 arrives set point of temperature stable, in step S16～S22 judgement be assigned to heater 14 sides high temperature the first thermal medium allotment ratio whether within the limits prescribed.This step S16～S22 carries out in compressor control section 44.

Because there is deviation in the allotment ratio of the first thermal medium of the high temperature that is assigned to heater 14 sides, therefore, the mean allocation rate of the first thermal medium of high temperature shown in Figure 9 is the average value of the apportionment ratio of the first thermal medium in the stipulated time, below, sometimes referred to as the mean allocation rate of the first thermal medium.

At first, in step S16 and step S18, while supposing that temp and humidity regulator is positioned at cold side with respect to air stream, judgement towards the mean allocation rate of the first thermal medium of heater 14 sides whether in 5～15%.

At this, towards the mean allocation rate of the first thermal medium of heater 14 sides in the situation that in 5～15%, because temp and humidity regulator is positioned at cold side with respect to air stream, and be in the stable scope of temp and humidity regulator running, therefore, by step S16, and turn back to step S16 from step S18.

On the other hand, in the situation of the mean allocation rate less than 5% of the first thermal medium of heater 14 sides, because the mean allocation rate of the first thermal medium towards heater 14 sides is too low, therefore, it is unstable that the running of temp and humidity regulator easily becomes.Therefore, enter step S24 from step S16, increase the rotating speed of compressor 18, to increase towards the mean allocation rate of the first thermal medium of heater 14 sides.In step S24,42 send the increase signal that increases the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control section 44 towards inverter.By with minimum change, increasing the rotating speed of compressor 18, can the runs steadily temp and humidity regulator.

Make the minimum change of rotation speed change of compressor 18 different because of temp and humidity regulator, therefore, preferably obtain by experiment, but when the rotating speed of compressor 18 is 2000～5000rpm, as preferably, minimum change is located in 3～10% scope.

In addition, in the situation that surpass 15% towards the mean allocation rate of the first thermal medium of heater 14 sides, by step S16 and step S18, be judged as air stream not in cold side, and enter step S20 and step S22.In step S20 and step S22, while supposing that air stream is positioned at heated side, judgement towards the mean allocation rate of the first thermal medium of heater 14 sides whether in 95～85%.

At this, towards the mean allocation rate of the first thermal medium of heater 14 sides in the situation that in 85～95%, air stream is positioned at heated side, and be in the stable scope of the running of temp and humidity regulator, therefore, by step S20 and from step S22, turn back to step S16.

On the other hand, surpass in 95% situation towards the mean allocation rate of the first thermal medium of heater 14 sides, too high towards the mean allocation rate of the first thermal medium of heater 14 sides, it is unstable that the running of temp and humidity regulator easily becomes.Therefore, enter step S24 from step S20, increase the rotating speed of compressor 18, to reduce towards the mean allocation rate of the first thermal medium of heater 14 sides.In step S24,42 send the increase signal that increases the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control section 44 towards inverter.

In addition, in the situation that towards the mean allocation rate less than 85% of the first thermal medium of heater 14 sides, in step S22, be judged as air stream neither in heated side also not at the state of cold side, be adding in the amount of cooling water that heat and cooler 16 apply of applying of heater 14, the more state of heat of offsetting each other.Therefore, enter step S26, reduce the rotating speed of compressor 18.In step S26,42 send the reduction signal that reduces the rotating speed of the compressor 18 that inverter 42 sets with minimum change from compressor control section 44 towards inverter.With minimum change, reduce the rotating speed of compressor 18, make air stream transfer to heated side or cold side.

Then, enter step S28 by step S24 or step S26, judge whether compressor 18 is on-stream, if compressor 18 is on-stream, return to step S14.In step S14, judgement is in step S24 or step S26, and under the state of the rotating speed that increases or reduce compressor 18 with minimum change, whether the air stream in space cell 10 reaches set point of temperature stable.In the situation that the air stream in space cell 10 reaches set point of temperature stable, by step S16～step S26, again judge towards the mean allocation rate of the first thermal medium of heater 14 sides whether in prescribed limit.

On the other hand, in step S14, in the unsettled situation of the temperature of the air stream in being judged as space cell 10, return to step S12, continuously change the allotment ratio that proportion of utilization triple valve 20 is assigned to the first thermal medium of heater 14 sides and cooler 16 sides.Air stream in space cell 10 reach set point of temperature and stable after, enter step S16～S26.

In step S28, in the situation that compressor 18, not in operating condition, stops the control of temperature control part 22 and compressor control section 44.

In flow chart shown in Figure 9 described above, in temperature control part 22, pay close attention to towards the mean allocation rate of the first thermal medium of heater 14 sides and control, but also can pay close attention to towards the mean allocation rate of the first thermal medium of cooler 16 sides, control.

In addition, also can will input design temperature, set the input unit of humidity, the display unit of demonstration operating condition etc. and temperature control part 22, humidity control part 27 one or split setting.

In the temp and humidity regulator of Fig. 1～shown in Figure 9, in condenser 26 and heat dump 32, as cooling water, heating source, used water, but as shown in figure 10, as cooling source and the heating source of condenser 26 and heat dump 32, also can adopt the mode of using fan 50 to blow room air.

In the structural elements that forms temp and humidity regulator shown in Figure 10, for the identical member of the structural elements of the temp and humidity regulator with shown in Figure 1, mark the symbol identical with the symbol of Fig. 1, detailed.

In addition, in the temp and humidity regulator of Fig. 1～shown in Figure 9, as humidity conditioner, be provided with the spray nozzle group 15 of ejection water, but as shown in figure 11, also can steam generator 52 be set in the stream of air stream and replace spray nozzle group 15.Steam generator 52 is to make moisture by heater 14, cooler 16, supply to the device of air stream, utilizes heater 56 heating to be stored in the pure water in container 54 and to produce steam.This heater 56 is controlled by humidity control part 27.

That is, in humidity control part 27, poor according to the humidity the air stream of discharging from fan 12 and target humidity, the heater 56 of steam regulation generator 52 add heat, thereby will be from the humidity regulation the air stream of fan 12 discharges to target humidity.

Like this, even use steam generator 52 as humidity conditioner, also can in temp and humidity regulator shown in Figure 11, realize saving the energy.

That is, the heater 14 that utilizes setting because of heat pump assembly to improve heating efficiency carrys out heated air flow, can improve the dew point in air stream, and more moisture is entered in air stream.

For in the structural elements that forms temp and humidity regulator shown in Figure 11, the member identical with the structural elements of temp and humidity regulator shown in Figure 1, mark the symbol identical with the symbol of Fig. 1, detailed.

In addition, as shown in figure 12, also can use other pipe arrangements to supply water to condenser 26 and heat dump 32.For example, can supply water to condenser 26 via pipe arrangement 33, supply water to heat dump 32 via pipe arrangement 32a.Water by above-mentioned condenser 26 and heat dump 32 all is discharged to outside system.

For in the structural elements that forms temp and humidity regulator shown in Figure 12, the member identical with the structural elements of temp and humidity regulator shown in Figure 1, mark the symbol identical with the symbol of Fig. 1, detailed.

In addition, also can use other pipe arrangements to supply to the water and the water that supplies to water purifior 35 of condenser 26.For example, common water can be supplied to condenser 26, pure water is supplied to water purifior 35.

The humidity conditioner used in temp and humidity regulator as Fig. 1～shown in Figure 12, can use and will be blown into than air dried dry air of temperature and humidity regulation object device and moisture feedway the use of the stream of air stream, or replace the moisture feedway.

In the temperature and humidity regulation method of the air stream of the temperature and humidity regulation object of the temp and humidity regulator that adopts Fig. 1 described above～shown in Figure 12, embodied that temp and humidity regulator plays, the scope of the temperature and humidity of adjustments of gas stream is large and can realize the effect/effect of the saving energy simultaneously.

In above-mentioned temperature and humidity regulation method, air stream for the heater 14 passed through successively and cooler 16, utilization is assigned to the first thermal medium triple valve 20 or the two-way valve 38a of heater 14 and cooler 16, 38b changes the apportionment ratio of the first thermal medium, thereby air stream is adjusted to set point of temperature, and utilize the humidity conditioner be located in the stream that air stream passes through that air stream is adjusted to specified humidity, wherein, in heater 14, directly supply with the part of the first thermal medium that the high temperature that is compressed by compressor 18 and heat is arranged, in cooler 16, supply with have condenser 26 interior cooling after, in the interior adiabatic expansion of the expansion valve 28 and further remainder of the first cooling thermal medium.

In addition, utilize expansion valve 34 to make by the first thermal medium adiabatic expansion of heater 14 cooling, and make it by after comprising and being the heat pump assembly of heat dump 32 of water or air heat absorption from external heat source, together with the first thermal medium by cooler 16, turn back to compressor 18.

Temp and humidity regulator described above and temperature and humidity regulation method be for the temperature and humidity regulation purposes of the dust free room in the Precision Machining fields such as manufacturing process of semiconductor device, but certainly also can be for the temperature and humidity regulation purposes of the dust free room that uses at other field.

In addition, the temp and humidity regulator of above-mentioned explanation and temperature and humidity regulation method, also can be as other field, for example be coated with tankage, be coated with tankage, solar simulator (solar simulator), the printed circuit board (PCB) storage cabinet, electron microscope, tablet press machine, three-dimensional measuring machine, chromatograph, draft chamber, exposure device, equal glue machine, liquid crystal glass base, screen process press, image diagnosing system, cement conservation, molding die, emission forming machine, cell is cultivated, plant culture, the preservation of food and maturation, the temp and humidity regulator in the fields such as DNA immobilization with and use.

Claims (3)

1. temp and humidity regulator comprises:

To be supplied to by the part of the first thermal medium of the high temperature of compressor compression heating the heating channel of heater;

Utilize condensing unit to make the nubbin of the first thermal medium of described high temperature cooling, then utilize the first expansion gear to make its adiabatic expansion and further cooling, and it is supplied to the cooling flowing path of cooling device; And

The first thermal medium that distributes described high temperature, will be re-supplied to respectively the closed circuit of compressor by the first thermal medium of described heating channel and cooling flowing path,

By temperature and the humidity of the gas regulation of the temperature and humidity regulation object by described heater and cooling device to regulation,

It is characterized in that,

Be provided with distributor, heat pump assembly, temperature control part and humidity conditioner, wherein,

The part of the first thermal medium of the high temperature that described distributor will be discharged from described compressor is assigned to described heating channel side, and the nubbin of the first thermal medium of described high temperature is assigned to the cool stream trackside, and can change the allotment ratio of the first thermal medium of the high temperature that is assigned to described heating channel and cooling flowing path

Described heat pump assembly has heat sink, this heat sink make to emit heat in described heater and be cooled, then by the second expansion gear adiabatic expansion and further cooling the first thermal medium from external heat source namely the second thermal medium absorb heat, to improve the heating efficiency of described heating channel

Described temperature control part is controlled described distributor, adjusting is assigned to the allotment ratio of the first thermal medium of the high temperature of described heating channel and cooling flowing path, and the gas of the temperature and humidity regulation object by described heater and cooling device is controlled to set point of temperature

Described humidity conditioner will be controlled at specified humidity by the gas of described heater and cooling device,

Be provided with the revolution speed control device of the rotating speed of controlling compressor, and be provided with compressor control section, this compressor control section changes the rotating speed of compressor via described revolution speed control device, can make adding heat and utilizing the allotment ratio that cooling device is applied in the amount of cooling water of gas of temperature and humidity regulation object, the heat of offsetting each other reduces of the gas that utilizes heater to be applied to the temperature and humidity regulation object so that the allotment ratio of the first thermal medium of the high temperature of being controlled by temperature control part becomes.

2. temp and humidity regulator as claimed in claim 1, is characterized in that,

In compressor control section, via revolution speed control device, control the rotating speed of compressor, with in the situation that the gas of temperature and humidity regulation object is positioned at heated heated side, make the allotment ratio of the first thermal medium of high temperature be in high temperature the first thermal medium 95～85% be assigned to heater and the first thermal medium of remaining 5～15% high temperature is assigned in the scope of cooling device, on the other hand, in the situation that the gas of described temperature and humidity regulation object is positioned at the cold side be cooled, make described allotment ratio be in high temperature the first thermal medium 95～85% be assigned to cooling device and the first thermal medium of remaining 5～15% high temperature is assigned in the scope of heater.

3. temp and humidity regulator as claimed in claim 1 or 2, is characterized in that,

Revolution speed control device is inverter.

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