JP2010236700A - Temperature and humidity control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature and humidity control device the which discharges a gas the temperature and humidity of which are controlled. <P>SOLUTION: The temperature and humidity control device is equipped with: a heating circuit side having a heater 14; a cooling circuit side having a cooler 16 to which a heating medium adiabatically expanded by an automatic expansion valve 28 and cooled is supplied; and a heat pump means. The temperature and relative humidity control device further is equipped with: a temperature adjustment control part 22 for controlling two-way valves 20a, 20b for distributing a heating medium compressed by a compressor 18 and heated into the heating circuit side and the cooling circuit side and adjusting air as a target of temperature and humidity control to target temperature; and a humidity control part 27 for controlling supply amount of dry air from a dry gas nozzle 64 provided to supply dry air with lower humidity than target humidity to inside of a gas flow passage 10 so that air passed through the heater 14 and the cooler 16 arranged in the gas flow passage 10 is adjusted to the target humidity. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a temperature and humidity adjusting device.

Usually, in the precision processing field such as the manufacturing process of semiconductor devices, most of them are installed in a clean room in which temperature and humidity are controlled.
However, in recent years, in the precision processing field, processes requiring precision processing with higher processing accuracy than before have been emerging.
In a process that requires such high precision processing, it is usually required that the temperature change environment is smaller than that of a clean room. For this reason, a process requiring high precision processing or the like is provided in a space unit in which precise temperature management is performed.
As a temperature adjusting device used for adjusting the temperature of such a space unit, for example, Patent Document 1 shown below proposes a temperature adjusting device shown in FIG.
8 includes a heating flow path in which a part of the high-temperature heat medium compressed and heated by the compressor 100 is supplied to the cooler 102, and the remainder of the high-temperature heat medium is the condenser 104. And a cooling flow path that is adiabatically expanded by the first expansion valve 106 and further cooled and supplied to the heater 108, and is a temperature adjustment target sucked into the space unit 110 by the fan 112. So that the air passes through the cooler 102 and the heater 108 and is adjusted to a predetermined temperature, the high-temperature heat medium is distributed to the heating flow path and the cooling flow path, and the heating flow path and the cooling flow path 2 is a temperature adjusting device in which the heat medium that has passed through each of these is re-supplied to the compressor 100.
In this temperature adjusting device, a part of the high-temperature heat medium discharged from the compressor 100 is distributed to the heating flow path side, and the remaining portion of the high-temperature heat medium is distributed to the cooling flow path side, and the heating flow path and the cooling channel are cooled. The proportional three-way valve 114 capable of changing the distribution ratio of the high-temperature heat medium distributed to the flow path and the cooling device 102 after releasing the heat and cooling so as to improve the heating capacity of the heating flow path. The heat medium that is adiabatically expanded by the two expansion valve 116 and further cooled is controlled by the heat pump means including the heat absorber 118 that absorbs heat from water as an external heat source, the proportional three-way valve 114, and the heating flow path and cooling. A control unit 120 is provided that adjusts the distribution ratio of the high-temperature heat medium distributed to the flow path to control the temperature adjustment target air passing through the cooler 102 and the heater 108 to a predetermined temperature. .

International Publication No. 2008/078525 Pamphlet

In the temperature adjusting device shown in FIG. 8, the temperature of the space unit 110 can be controlled with an accuracy of ± 0.1 ° C. with respect to the target temperature, and energy saving can also be achieved.
By the way, in the temperature adjusting device shown in FIG. 8, since the air to be adjusted passes through the cooler 102, the air discharged from the temperature adjusting device to the space unit 110 is more dehumidified than the air sucked into the temperature adjusting device. Has been.
However, the humidity of the air discharged from the temperature adjustment device is not adjusted. For this reason, the humidity of the air discharged from the temperature control device varies.
Therefore, the problem of the present invention is to solve the problem of the conventional temperature adjustment device in which the humidity of the discharged temperature-adjusted gas is not adjusted, and to provide a temperature / humidity adjustment device that can discharge the gas whose temperature and humidity are adjusted. It is to provide.

In order to solve the above problems, the present inventors have supplied dry air dehumidified and dried by a dehumidifier into the air flow path through which the air to be temperature adjusted passes in the temperature adjusting device shown in FIG. However, the present inventors have found that the humidity in the air discharged from the fan 112 can be adjusted, and reached the present invention.
That is, the present invention provides a heating flow path in which a part of the high-temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and the remaining portion of the high-temperature first heat medium is the condensation means. A cooling passage that is adiabatically expanded by the first expansion means after being cooled and further cooled and supplied to the cooling means, the heating means and the cooling means are disposed, and the adjustment gas to be adjusted for temperature and humidity is provided. A part of the high-temperature first heat medium discharged from the compressor is distributed to the heating channel side so that the passing gas channel and the adjustment gas passing through the gas channel are adjusted to a target temperature. And a distribution means capable of distributing the remaining portion of the high temperature first heat medium to the cooling flow path side and changing a distribution ratio of the high temperature first heat medium distributed to the heating flow and the cooling flow path. In order to improve the heating capacity of the heating channel, heat is released by the heating means and cooled. And a heat pump means including a heat absorption means for absorbing heat from the second heat medium, which is an external heat source, after the first heat medium that has been adiabatically expanded by the second expansion means and further cooled is provided, The temperature and humidity adjusting device is such that the first heat medium that has passed through each of the cooling flow path and the heat pump means is re-supplied to the compressor, and the adjusted gas passes through the heating means and the cooling means to reach the target from the gas flow path. A dry gas nozzle for supplying a dry gas having a humidity lower than the target humidity into the gas flow path so as to be adjusted to the humidity, and the distribution means; and the heating flow path and the cooling flow path, The temperature control unit that adjusts the distribution ratio of the high-temperature first heat medium distributed to the target and controls the adjusted gas that has passed through the heating unit and the cooling unit to a target temperature, and has passed through the heating unit and the cooling unit. The adjusted gas is adjusted to the target humidity. As described above, the humidity control apparatus is provided with a humidity control unit that controls a supply amount of the dry gas supplied from the dry gas nozzle.

In the present invention, the gas discharged from the gas flow path can be easily controlled to the target humidity by supplying the dry gas nozzle with the dry gas dehumidified to be lower than the target humidity by the dehumidifier.
By supplying a dry gas having a pressure higher than the atmospheric pressure to the dry gas nozzle, the humidity of the dry gas is further reduced when the dry gas is released into the gas flow path at a substantially atmospheric pressure. The amount of dry gas supplied can be reduced as compared with the case of supplying.
In addition, by providing a moisture supply means for supplying moisture to the passing gas in the gas channel, it is possible to improve the humidity adjustment width and accuracy of the gas discharged from the outlet of the gas channel.

According to the temperature and humidity control apparatus of the present invention, the heating means and the cooling means are provided in the gas flow path through which the adjustment gas passes, and the high temperature first heat medium supplied to the heating means and the cooling means by the temperature control unit is provided. While adjusting the distribution ratio and adjusting the temperature of the adjustment gas passing through the gas flow path, the adjustment gas can be dehumidified by the cooling means.
Furthermore, the supply amount of the dry gas dehumidified below the target humidity supplied from the dry gas nozzle into the gas flow path is adjusted by the humidity adjusting unit.
As a result, the temperature and humidity of the gas discharged from the gas flow passage can be adjusted to target values.
In addition, since the heat pump means is employ | adopted for the temperature / humidity adjustment apparatus which concerns on this invention, energy saving can be aimed at.

It is the schematic explaining an example of the temperature / humidity adjustment apparatus which concerns on this invention. It is a graph which shows the flow volume characteristic of two-way valve 20a, 20b shown in FIG. It is a schematic sectional drawing explaining the internal structure of the water control valve 40 shown in FIG. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which concerns on this invention. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which concerns on this invention. It is explanatory drawing explaining arrangement | positioning of the heater 14, the cooler 16, and the two-fluid nozzle 15 which are shown in FIG. It is the schematic explaining the other example of the temperature / humidity adjustment apparatus which concerns on this invention. It is the schematic explaining the conventional temperature control apparatus.

FIG. 1 is a schematic diagram for explaining an example of a temperature and humidity adjusting apparatus according to the present invention. The temperature / humidity adjusting apparatus shown in FIG. 1 is a temperature / humidity adjusting apparatus for obtaining air whose humidity is adjusted to a target humidity and whose temperature is adjusted to a target temperature.
The temperature / humidity adjusting apparatus shown in FIG. 1 is connected to a unit U adjusted to a predetermined temperature and humidity. In addition to the air inlet and outlet of the temperature and humidity adjustment device to the temperature and humidity adjustment device, this unit U has a relief valve that opens the valve and discharges the internal air when the pressure inside the unit U is increased to atmospheric pressure or higher. 60 is provided.
The temperature / humidity adjusting device is provided with a gas flow path 10 for discharging an air flow sucked in by the fan 12 from the filter 70 into the unit U. In the gas flow path 10, a heater 14 as a heating means for forming a heating flow path and a cooler 16 as a cooling means for forming a cooling flow path are provided. The air for adjusting the temperature and humidity sucked from the unit U by the fan 12 passes into the gas flow path 10 through the heater 14 and the cooler 16.

The heater 14 and the cooler 16 are supplied with a first heat medium such as hydrocarbons such as propane, isobutane and cyclopentane, chlorofluorocarbons, ammonia and carbon dioxide. By such vaporization and liquefaction of the first heat medium, the air flow passing through the heater 14 and the cooler 16 is heated and cooled to be adjusted to a predetermined temperature.
Such a first heat medium is compressed and heated by the compressor 18 and discharged in the form of a gas at a high temperature (for example, 70 ° C.). The high-temperature first heat medium discharged from the compressor 18 is distributed to the heating channel side provided with the heater 14 and the cooling channel side provided with the cooler 16 by the two-way valves 20a and 20b as distribution means. Is done.

The high-temperature first heat medium distributed to the heating flow path side by the two-way valves 20a and 20b is directly supplied to the heater 14, and is sucked from the unit U into the gas flow path 10 and cooled by the cooler 16. The stream is heated and adjusted to a predetermined temperature. At that time, the high-temperature first heat medium is radiated and cooled to become the first heat medium containing the condensate.
On the other hand, the high-temperature first heat medium distributed to the cooling channel side is cooled by the condenser 26 as the condensing means and then adiabatically expanded by the first expansion valve 28 to be further cooled (for example, cooled to 10 ° C.). ) The cooled first heat medium is supplied to the cooler 16 to cool the air flow sucked from the unit U into the gas flow path 10.
The second heat medium supplied to the condenser 26 without being heated or cooled from the outside via the piping 30 for cooling the high-temperature first heat medium distributed to the heater 14 side. As the cooling water is supplied. The cooling water is heated to about 30 ° C. by the first heat medium of about 70 ° C. in the condenser 26 and is discharged from the pipe 31. The cooling water discharged from the pipe 31 is supplied as a heat source to a heat absorber 32 as a heat absorption unit of the heat pump unit.

The heat absorber 32 is supplied with a first heat medium at about 10 ° C. which is adiabatically expanded by the second expansion valve 34 and further cooled by the first heat medium radiated by the heater 14. For this reason, in the heat absorber 32, based on the temperature difference between the cooling water that has absorbed heat in the condenser 26 and has been heated to about 30 ° C., and the first heat medium that has been cooled to about 10 ° C., Can absorb heat from cooling water.
The first heat medium that has been heated by absorbing heat from the cooling water by the heat absorber 32 is supplied to the compressor 18 via the accumulator 36. The accumulator 36 is also supplied with a first heat medium that is supplied to the cooler 16 and absorbs heat from the air flow in the gas flow path 10. Since the accumulator 36 is a type of accumulator that can store the liquid component and re-supply only the gas component to the compressor 18, it can reliably supply only the gas component of the first heat medium to the compressor 18.
As this accumulator 36, an accumulator type accumulator can be used.
Even if the accumulator 36 is not installed, the heat medium that has been heated by absorbing heat from the air flow by the heat absorber 32 and the heat that has been absorbed from the gas that has been supplied to the cooler 16 and sucked into the gas flow path 10. It is sufficient that the medium is merged and re-supplied to the compressor 18.

In the temperature and humidity adjusting apparatus shown in FIG. 1, the two-way valves 20 a and 20 b that distribute the high-temperature first heat medium discharged from the compressor 18 to the heating channel side and the cooling channel side are controlled by the temperature control unit 22. ing.
In the temperature control unit 22, the two-way valves 20 a and 20 b are set so that the measured temperature measured by the temperature sensor 24 that measures the temperature of the air flow discharged from the gas flow path 10 matches the set target temperature. Each opening is changed substantially continuously.
By changing the respective opening degrees of the two-way valves 20a and 20b, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path side and the cooling flow path side is changed substantially continuously. The air flow sucked in can be adjusted to the target temperature.
In each of the two-way valves 20a and 20b, the relationship between the valve opening and the flow rate is not linear as shown in FIG. For this reason, the temperature control unit 22 holds flow characteristic data for each of the two-way valves 20a and 20b shown in FIG. Therefore, the temperature control unit 22 transmits an opening degree signal to each of the two-way valves 20a and 20b based on the flow characteristics of the two-way valves 20a and 20b.

Here, “substantially continuously change” means that the opening degree of the two-way valves 20a and 20b is adjusted by step control and the high temperature first heat medium is distributed to the heating flow path and the cooling flow path. In addition, although the opening degree of the two-way valves 20a and 20b is microscopically changed in a stepwise manner, the distribution ratio of the high-temperature first heat medium to the heating flow path and the cooling flow path as a whole is continuous. It means to include the case where it is changed.
The target temperature set in the temperature control unit 22 may be arbitrarily set. Further, although the temperature sensor 24 shown in FIG. 1 is installed on the discharge side of the fan 12, it may be installed on the suction side of the fan 12, or may be provided on the discharge side and suction side of the fan 12.
If the measured temperature and the set temperature are still different from each other by changing the opening degree of the two-way valves 20a and 20b, the rotation speed of the compressor 18 is determined by a signal from the temperature control unit 22 to the inverter 62. It may be changed step by step.

In the temperature and humidity control apparatus shown in FIG. 1, since the air flow sucked into the gas flow path 10 is dehumidified by the cooler 16, it is dehumidified more than the air in the unit U. 16 varies depending on the amount of the first heat medium supplied to 16. Therefore, the humidity in the air flow discharged from the gas flow path 10 is likely to vary.
For this reason, in the temperature / humidity adjusting apparatus shown in FIG. 1, the dry gas nozzle 64 is supplied with dry air that is dehumidified by the dehumidifying apparatus 66 and has a humidity lower than the target humidity of the temperature / humidity adjustment target air. Is provided. The amount of dry air supplied from the dry gas nozzle 64 is adjusted by a control valve 68 provided in the middle of a pipe 67 connecting the dehumidifying device 66 and the dry gas nozzle 64. The control valve 68 is controlled by the humidity control unit 27. In the humidity control unit 27, the opening degree of the control valve 68 is substantially continuous so that the measured value from the humidity sensor 29 that measures the humidity in the air flow discharged from the gas flow path 10 matches the target value. And change.
This “substantially continuously changing” means that when the opening degree of the control valve 68 is adjusted by step control, the opening degree of the control valve 68 is microscopically changed stepwise. It means to include the case of continuous changes as a whole.
Even if the amount of the first heat medium supplied to the cooler 16 changes by the humidity control unit 27, the supply amount of the dry air supplied from the dry gas nozzle 64 is adjusted, and the air discharged from the gas flow path 10. The humidity in the flow can be maintained at the target value.

As the dehumidifier 66 used here, a known dehumidifier, for example, a refrigeration dehumidifier, a membrane dehumidifier, or a dehumidifier using a hygroscopic agent can be used. Furthermore, these known dehumidifiers can be used singly or in combination.
Further, the dry gas nozzle 64 may be directly supplied with compressed air supplied for instrumentation or power at a factory or the like. This is because such compressed air is generally dehumidified.
Furthermore, it is preferable that the dry air supplied to the dry gas nozzle 64 has a pressure higher than the atmospheric pressure. This is because when the dry air having a pressure higher than the atmospheric pressure is supplied under the atmospheric pressure, the dew point of the dry air decreases (humidity decreases).
In the temperature / humidity adjusting apparatus shown in FIG. 1, the dry gas nozzle 64 is provided on the upstream side of the heater 14 and the cooler 16, but may be any part of the gas flow path 10.

In the temperature / humidity adjusting apparatus shown in FIG. 1, the first heat medium radiated by the heater 14 is adiabatically expanded and cooled by the second expansion valve 34, but is adiabatically expanded by the second expansion valve 34. In cooling, there is no exchange of heat between the first heat medium and the outside. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water as the second heat medium supplied from the outside to the heat absorber 32 via the condenser 26.
Therefore, energy absorbed from the cooling water supplied from the outside by the heat absorber 32 of the heat pump means can be added to the compression power energy by the compressor 18 to the high temperature first heat medium discharged from the compressor 18. . Further, in the temperature / humidity adjusting apparatus shown in FIG. 1, the cooling water supplied from the outside is supplied to the heat absorber 32 via the condenser 26 and is removed from the high-temperature first heat medium removed by the condenser 26. A part of the energy can also be added to the high-temperature first heat medium discharged from the compressor 18, and the heating capacity of the heating channel can be improved.

As described above, in the temperature / humidity adjusting apparatus shown in FIG. 1, the heating capacity of the heating channel can be improved by installing the heat pump means, and the high-temperature first heat medium distributed to the heating channel side by the two-way valves 20a and 20b. And the distribution ratio of the high-temperature first heat medium distributed to the cooling channel side can be changed substantially continuously according to the temperature in the space unit 10.
Further, the humidity of the air discharged from the gas flow path 10 can be dealt with by adjusting the amount of dry air supplied from the dry gas nozzle 64.
For this reason, in the temperature / humidity adjusting apparatus shown in FIG. 1, the high temperature 1st heat medium is always supplied to the heating flow path and the cooling flow path, and the heater 14 of the heating flow path and the cooler 16 of the cooling flow path are The minute load fluctuation of the air flow of the temperature / humidity adjustment target passing through the two-way valves 20a and 20b is caused by the distribution ratio of the high-temperature first heat medium distributed between the heating flow path and the cooling flow path and the dry gas nozzle 64. It is possible to respond quickly by finely adjusting the amount of dry air supplied and improve the responsiveness.

As described above, in the temperature / humidity adjusting apparatus shown in FIG. 1, the pipe 30 for supplying the cooling water to the condenser 26 is provided with the water control valve 40 as the cold water control means. The water control valve 40 is controlled so that the discharge pressure of the compressor 18 is constant. As shown in FIG. 3, the water control valve 40 is provided with a rod-like portion including a valve body 40 b that opens and closes an opening of a valve portion 40 a provided in the flow path of the cooling water. The rod-like portion is biased in a direction in which the valve body 40b closes the opening of the valve portion 40a by a spring 40c with which the tip end surface abuts. Further, the other end surface of the rod-shaped portion is in contact with the bellows 40d to which the pressure of the first heat medium discharged from the compressor 18 is supplied, and the rod-shaped portion is opened against the urging force of the spring 40c. The valve body 40b is urged in the direction to open the valve.
For this reason, when the discharge pressure of the compressor 18 becomes equal to or greater than the urging force of the spring 40 c, the valve body 40 d is moved by the bellows 40 d in a direction to open the opening of the valve portion 40 a and the cooling supplied to the condenser 26 is performed. The amount of water increases and the cooling capacity of the condenser 26 is improved. Thus, the cooling capacity of the condenser 26 is improved, and the discharge pressure of the compressor 18 is reduced.
On the other hand, when the discharge pressure of the compressor 18 becomes equal to or less than the biasing force of the spring 40c, the valve body 40d moves in the direction of closing the opening of the valve portion 40a, and the amount of cooling water supplied to the condenser 26 decreases. The cooling capacity of the condenser 26 is reduced. For this reason, the discharge pressure of the compressor 18 becomes high.
In this way, by keeping the discharge pressure of the compressor 18 constant, the temperature and humidity adjusting device can be stably operated. Moreover, it can adjust so that the amount of cooling water may be supplied to the condenser 26 more than needed, and it may not discharge | emit out of the system.

As described above, in the temperature / humidity adjusting apparatus shown in FIG. 1, the degree of dehumidification in the cooler 16 is insufficient, and the humidity in the air flow discharged from the gas flow path 10 is higher than the target humidity. Can be handled by supplying a predetermined amount of dry air from the dry gas nozzle 64.
However, when the degree of dehumidification in the cooler 16 is sufficient and the humidity in the airflow discharged from the gas flow path 10 is lower than the target humidity, there is no corresponding means and it cannot be handled.
Therefore, the humidity can be adjusted by disposing a dry gas nozzle 64 for supplying dry air and a steam generator 72 as water supply means in the gas flow path 10 as in the temperature and humidity adjusting device shown in FIG. Can be expanded.
The steam generator 72 is a device that supplies moisture to the air that passes through the gas flow path 10, and generates pure steam by heating the pure water stored in the container 74 by the heater 76. The heater 76 is controlled by the humidity control unit 27.
That is, in the humidity control unit 27, when the humidity in the air flow discharged from the gas flow path 10 is lower than the target humidity, a signal for turning on the heater 76 is transmitted to the steam generator 72 to generate steam. Then, the humidity in the air flow discharged from the gas flow path 10 is adjusted to the target humidity. In this case, a signal for closing the control valve 68 is transmitted from the humidity control unit 27 to the control valve 68 that supplies dry air to the dry gas nozzle 64.

On the other hand, when the humidity in the air flow discharged from the gas flow path 10 is higher than the target humidity, the humidity control unit 27 transmits a signal for opening the control valve 68 to a predetermined opening, and also to the steam generator 72. In response, a signal for turning off the heater is transmitted.
In the temperature / humidity adjusting apparatus shown in FIG. 4, the degree of dehumidification in the cooler 16 is insufficient, and the humidity in the air flow discharged from the gas flow path 10 is higher than the target humidity, and in the cooler 16. It is possible to cope with the case where the degree of dehumidification is sufficient and the humidity in the air flow discharged from the gas flow path 10 is lower than the target humidity. For this reason, the humidity adjustment width and accuracy of the air flow discharged from the gas flow path 10 can be improved.
In the temperature / humidity adjusting apparatus shown in FIG. 4, the steam generator 72 is installed on the downstream side of the heater 14 and the cooler 16, but it may be installed in any part of the gas flow path 10.
Note that, among the constituent members of the temperature / humidity adjusting device shown in FIG. 4, the same constituent members as those of the temperature / humidity adjusting device shown in FIG.

In the temperature / humidity adjusting apparatus shown in FIG. 4, the steam generator 72 as a water supply means is provided in the gas flow path 10. However, like the temperature / humidity adjusting apparatus shown in FIG. 5, two fluids spray water with compressed air. A nozzle 15 may be provided.
In the temperature / humidity adjusting apparatus shown in FIG. 5, water is sprayed between the cooler 16 and the heater 14 by the two-fluid nozzle 15. Pure water stored in the water tank 17 is supplied to the two-fluid nozzle 15 via a pump 19 and a control valve 23 provided in the water supply pipe 21. Further, compressed air for spraying the supplied pure water is also supplied to the two-fluid nozzle 15 via the pipe 25 and the control valve 50.
The water tank 17 stores pure water obtained by supplying normal water supplied via the pipe 33 to the pure water device 35. The amount of pure water stored in the water tank 17 is kept constant by a control valve 39 provided in the pure water supply pipe 37.

The amount of pure water sprayed from the two-fluid nozzle 15 is controlled by the humidity control unit 27. In this humidity control unit 27, when the humidity in the air flow discharged from the gas flow path 10 is lower than the target humidity, the control valves 23 and 50 are opened to a predetermined opening, and a predetermined amount of water is supplied from the two-fluid nozzle 15. It sprays between the cooler 16 and the heater 14, and the air flow discharged from the fan 12 is adjusted to predetermined humidity.
The water droplets sprayed between the cooler 16 and the heater 14 condition the air flow that has passed through the cooler 16 and are evaporated by the heater 14.
Since the heating capability of the heater 14 is improved by the heat pump means described above, water droplets being sprayed can be evaporated in the heater 14 and a predetermined amount of moisture can be reliably supplied into the air.
Note that, among the constituent members of the temperature / humidity adjusting apparatus shown in FIG. 5, the same constituent members as those of the temperature / humidity adjusting apparatus shown in FIG.

The two-fluid nozzle 15 used in the temperature / humidity adjusting device shown in FIG. 5 is provided between the heater 14 and the cooler 16, but as shown in FIG. 6A, the air outlet side of the heater 14. Alternatively, a two-fluid nozzle 15 may be disposed. Thus, even if the two-fluid nozzle 15 is disposed on the air outlet side of the heater 14, the water droplets sprayed from the two-fluid nozzle 15 can be heated and evaporated by the air flow heated by the heater 14.
Further, as shown in FIG. 6B, the cooler 16 and the heater 14 are arranged so that air is supplied to the heater 14 and then supplied to the cooler 16. A two-fluid nozzle 15 may be disposed between the heater 14 and the heater 14. Also in this case, the water droplets sprayed from the two-fluid nozzle 15 can be heated and evaporated by the air flow heated by the heater 14.
Further, the heater 14 and the cooler 16 shown in FIG. 6B are arranged, and as shown in FIG. 6C, the two-fluid nozzle 15 is arranged on the air inlet side of the heater 14. May be. In this case, water droplets sprayed from the two-fluid nozzle 15 can be directly heated by the heater 14 and evaporated.
However, for example, the heater 14 and the cooler 16 shown in FIG. 6A are arranged, and the two-fluid nozzle 15 is arranged on the air inlet side of the cooler 16 as shown in FIG. In this case, the water droplets sprayed from the two-fluid nozzle 15 are condensed in the cooler 16 and removed from the air flow, so that it is difficult to adjust the air flow to a predetermined humidity.
6B and 6C, when the two-fluid nozzle 15 is provided on the upstream side of the heater 16 or the cooler 14, the downstream side of the two-fluid nozzle 15 is provided. The heater 16 or the cooler 14 also functions as an eliminator for water droplets sprayed from the two-fluid nozzle 15, and the size of the water droplets contained in the air flow passing through the downstream heater 16 or the cooler 14 is constant. Can be.

In the temperature / humidity adjusting apparatus shown in FIGS. 1, 4 and 5, the condenser 26 and the heat absorber 32 are water-cooled using external water. However, as shown in FIG. In addition, an air cooling method using an air flow from the fan 52 for the heat absorber 32 may be used.
Moreover, in the temperature / humidity adjusting apparatus shown in FIGS. 1, 4, 5, and 7, the two-way valves 20a and 20b are used as the distributing means, but a proportional three-way valve may be used.
Furthermore, a capillary tube may be used as the first expansion valve 28 and the second expansion valve 34.

DESCRIPTION OF SYMBOLS 10 Gas flow path 14 Heater 15 Two-fluid nozzle 16 Cooler 18 Compressor 20a, 20b Two-way valve 22 Temperature control part 24 Temperature sensor 26 Condenser 27 Humidity control part 28 First expansion valve 29 Humidity sensor 32 Heat absorber 34 First 2 expansion valve 36 accumulator 40 water control valve 50 control valve 52 fan 62 inverter 64 dry gas nozzle 66 dehumidifier 68 control valve 72 steam generator U unit

Claims (4)

A heating flow path in which a part of the high-temperature first heat medium compressed and heated by the compressor is supplied to the heating means;
A cooling flow path in which the remaining portion of the high-temperature first heat medium is cooled by the condensing means and then adiabatically expanded by the first expansion means and further cooled and supplied to the cooling means;
The heating means and the cooling means are arranged, and a gas flow path through which the adjustment gas to be adjusted for temperature and humidity passes,
A part of the high-temperature first heat medium discharged from the compressor is distributed to the heating flow path side so that the adjustment gas passing through the gas flow path is adjusted to a target temperature, and the high-temperature first heat medium is distributed. Distributing means for distributing the remaining portion of the one heat medium to the cooling flow path side and changing a distribution ratio of the high temperature first heat medium distributed to the heating flow and the cooling flow path;
In order to improve the heating capacity of the heating flow path, the first heat medium that is cooled by releasing heat by the heating means and then adiabatically expanded by the second expansion means and further cooled is an external heat source. A heat pump means comprising a heat absorption means for absorbing heat from a second heat medium,
A temperature and humidity adjusting device in which the first heat medium that has passed through each of the heating channel, the cooling channel, and the heat pump means is re-supplied to the compressor,
A dry gas nozzle that supplies a dry gas having a humidity lower than the target humidity into the gas flow path so that the adjusted gas passes through the heating means and the cooling means and is adjusted and discharged from the gas flow path. When,
The distribution means is controlled to adjust the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, and the adjusted gas that has passed through the heating means and the cooling means is set to the target temperature. A temperature controller to control,
A humidity control unit that controls a supply amount of the dry gas supplied from the dry gas nozzle so that the adjusted gas that has passed through the heating unit and the cooling unit is adjusted to a target humidity; Temperature and humidity control device.   The temperature / humidity adjusting device according to claim 1, wherein the dry gas nozzle is supplied with dry gas dehumidified to a humidity lower than the target humidity by the dehumidifier.   The temperature and humidity adjusting apparatus according to claim 2, wherein the dry gas supplied to the dry gas nozzle is a dry gas having a pressure higher than atmospheric pressure.   The temperature / humidity adjusting device according to any one of claims 1 to 3, wherein a moisture supply means for supplying moisture to the passing gas is provided in the gas flow path.

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