JP4865758B2 - Temperature and humidity control device - Google Patents

Description

  The present invention relates to a temperature and humidity adjusting device.

Usually, in the precision processing field such as a manufacturing process of a semiconductor device, most of them are installed in a clean room in which temperature and humidity are controlled.
However, in recent years, in the precision processing field, processes requiring precision processing with higher processing accuracy than before have been emerging.
In a process that requires such high precision processing, it is usually required that the temperature change environment is smaller than that of a clean room. For this reason, a process requiring high precision processing or the like is provided in a space unit in which precise temperature management is performed.

As a temperature adjusting device used for adjusting the temperature of such a space unit, for example, the temperature adjusting device shown in FIG.
35 is provided with a compressor 100, a three-way valve 102, a condenser 104, an expansion valve 106, a cooler 108, and a heater 110. And a heating channel provided with a vessel 110.
The cooler 108 and the heater 110 adjust the temperature of the air flow to be adjusted from the fan 112.

  35, the high-temperature heat medium compressed by the compressor 100 is distributed to the cooling flow path and the heating flow path by the three-way valve 102. The high-temperature heat medium distributed to the cooling channel side is cooled by the condenser 104. The cooled heat medium is adiabatically expanded and cooled by the expansion valve 106, and is supplied to the cooler 108. In the cooler 108, the heat medium that has been heated to absorb the temperature while cooling the air flow to be temperature-adjusted blown from the fan 112 is supplied to the compressor 100.

On the other hand, the high-temperature heat medium distributed to the heating flow path side is supplied to the heater 110, and the air flow to be temperature-adjusted cooled by the cooler 108 is heated and adjusted to a desired temperature. As described above, the heating medium that is radiated and cooled while heating the air flow to be temperature adjusted in the heater 110 passes through the expansion valve 106 and the cooler 108 and is supplied to the compressor 100.
JP-A 51-97048

In the temperature adjusting device shown in FIG. 35, the entire amount of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. The amount of cooling energy for cooling the air stream to be temperature-adjusted blown out from the air is constant.
On the other hand, by adjusting the flow rate of the high-temperature heat medium distributed to the heating flow path side by the three-way valve 102, the heating amount in the heater 110 with respect to the air flow to be temperature-adjusted cooled by the cooler 108 can be adjusted.

Therefore, it is possible to adjust the temperature of the air flow to be temperature adjusted that passes through the cooler 108 and the heater 110, and it is possible to perform temperature management in the space unit in a narrow temperature range.
However, in the temperature control apparatus shown in FIG. 35, the entire amount of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. The temperature adjustment for the air flow to be adjusted from the fan 112 is performed by reheating the high-temperature heat medium compressed by the compressor 100 supplied to the heater 110 exclusively.

As described above, in the temperature control method adopted in the temperature adjusting device shown in FIG. 35, the heat medium used for heating is also passed through the cooling flow path, so the amount of heat that can be heated is only the amount of heat by the power of the compressor, and In addition, it is difficult to cope with load fluctuations on the heater 110.
For this reason, when the set temperature of the air flow to be adjusted through the cooler 108 and the heater 110 is significantly increased, the temperature of the air flow to be adjusted does not reach the set temperature or reaches the set temperature. It may take a long time to complete.
Furthermore, in the temperature adjusting device shown in FIG. 35, there is no humidity adjustment function for adjusting the humidity of the air flow to be temperature adjusted that passes through the cooler 108 and the heater 110, and humidity adjustment is performed on the air flow. I can't.

  In order to compensate for the shortage of the heating amount of the temperature adjusting device shown in FIG. 35 and to adjust the humidity of the air flow, a plurality of heating is performed on the outlet side of the heater 110 as in the temperature and humidity adjusting device shown in FIG. It is conceivable to provide spray nozzles 114, 114,... For spraying steam, and to provide a heating steam generator for supplying heated steam to each of the spray nozzles 114.

However, in the temperature / humidity adjusting apparatus shown in FIG. 36, the energy for generating heated steam is wasteful in terms of energy.
Moreover, if the amount of heated water vapor that can compensate for the insufficient heating amount of the temperature / humidity adjusting device in FIG. 36 is ejected from the spray nozzles 114, 114,.
On the other hand, even if the amount of heated water vapor that can adjust the humidity of the air flow is ejected from the spray nozzles 114, 114,...
Therefore, the range in which the temperature and humidity of the air flow can be adjusted simultaneously by the temperature and humidity adjusting device shown in FIG. 36 is further narrowed.

  SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a temperature / humidity adjusting device that solves the above-described problems and can suitably perform temperature adjustment and humidity adjustment of an air flow at the same time and can save energy.

The temperature and humidity adjustment device according to the present invention is:
A: A part of the first heat medium sent out from the first compressor is distributed by the first distributor, and is circulated in the order of the first heater (condenser), the expansion valve, the evaporator, and the first compressor. 1 heat pump circuit and the remainder of the 1st heat carrier sent out from the 1st compressor are distributed by the 1st above-mentioned distributor, a condenser, an expansion valve, the 1st cooler (evaporator), and the 1st compressor in order A first cooling circuit to be circulated; and the first distributor is controlled to adjust a distribution ratio of a high-temperature first heat medium distributed to the first heat pump circuit and the first cooling circuit to thereby adjust the first heater. And a first control unit that controls the temperature / humidity adjustment target air passing through the first cooler to a set temperature;
B: A part of the second heat medium sent out from the second compressor is distributed by the second distributor, and is circulated in the order of the second heater (condenser), the expansion valve, the evaporator, and the second compressor. 2 heat pump circuit and the remaining portion of the second heat medium sent out from the second compressor are distributed by the second distributor, in the order of condenser, expansion valve, second cooler (evaporator), second compressor. Controlling the second cooling circuit to be circulated, a spray nozzle for spraying water for humidifying the passing air, a water amount control valve for adjusting the amount of water ejected from the spray nozzle, and the second distributor And adjusting the distribution ratio of the high-temperature second heat medium distributed to the second heat pump circuit and the second cooling circuit to change the temperature / humidity adjustment target air passing through the second heater and the second cooler. A humidifying / decreasing apparatus comprising a second control unit for controlling to a necessary required temperature;
C: a first temperature sensor that detects a temperature of the outlet air that has passed through the second cooler, the second heater, the first cooler, and the first heater;
D: a first humidity sensor that detects the humidity of the outlet air that has passed through the second cooler, the second heater, the first cooler, and the first heater;
Comprising
The air to be adjusted in temperature and humidity passes through the second cooler, the second heater, the first cooler, and the first heater, and the air that passes through the air is adjusted to the required temperature and moisture amount required by the humidifying / dehumidifying device of B. In addition to being adjusted, the temperature is adjusted to a desired temperature and humidity by the temperature adjusting device of A.

  And a second temperature sensor that detects the temperature of the air that has passed through the second cooler and the second heater, and an overall control unit, and the set humidity of the outlet air that is input by the overall control unit. And the humidity of the outlet air measured by the first humidity sensor, the water amount control valve is controlled so that the amount of water sprayed from the spray nozzle becomes a necessary amount of water, and the input outlet air setting The outlet air dew point temperature is calculated from the temperature and the input outlet air set humidity, and the calculated dew point of the set temperature of the air that has passed through the second heater and the second cooler is determined by experience in advance. The set dew point temperature shifted from the temperature is set, and the second controller adjusts the distribution ratio by the second distributor so that the temperature detected by the second temperature sensor becomes the set dew point temperature. , So that the temperature detected by the first temperature sensor is the set outlet temperature, and adjusting the distribution ratio by the first divider by the first control unit.

In addition, the moisture is dehumidified by the humidifying / dehumidifying device, and the moisture is humidified to a necessary amount by a spray nozzle.
The heat radiated by the condenser of the first cooling circuit is absorbed and used by the evaporator of the first heat pump circuit.
The heat radiated by the condenser of the second cooling circuit is absorbed and used by the evaporator of the second heat pump circuit.

The spray nozzle is a two-fluid nozzle that sprays water with compressed air.
In addition, a dehumidifying member that is cooled by the second cooler and condenses moisture in the ambient air to dehumidify is disposed in the second cooler of the second cooling circuit.
Further, the second cooler, the second heater, the first cooler, and the first heater are arranged in this order from the air inlet side.

Further, at least one of the first distributor and the second distributor has a high amount of the high-temperature heat medium distributed to the heater side and the high-temperature heat medium distributed to the cooler side that is discharged from the compressor. It is a proportional three-way valve that proportionally distributes a high-temperature heat medium so as to be equal to the amount of heat medium.
Alternatively, at least one of the first distributor and the second distributor is a two-way valve provided in each branch pipe that branches a high-temperature heat medium to the heater side and the cooler side. .

  In the temperature / humidity adjusting apparatus of the present invention, a heat pump circuit is employed as a heater in both the temperature adjusting apparatus and the humidifying / dehumidifying apparatus to effectively use an external heat source. Therefore, significant energy saving can be achieved as compared with the conventional method using an electric heater for temperature adjustment or an electric heater for humidification. In this case, by using the heat radiated on the cooling circuit side as an external heat source, the heat efficiency can be further improved and the heating capacity can be improved. In addition, a minute load fluctuation of the temperature adjustment target fluid passing through the heater and the cooler can be quickly adjusted by finely adjusting the distribution ratio of the high-temperature heat medium distributed to the heating circuit (heat pump circuit) and the cooling circuit. Therefore, precise temperature / humidity adjustment can be performed on the air to be adjusted.

A preferred embodiment of the temperature / humidity adjusting device 54 (FIG. 7) according to the present invention will be described below in detail with reference to the accompanying drawings.
First, a temperature adjustment device 50 having a basic configuration in the temperature and humidity adjustment device 54 will be described with reference to FIGS.
FIG. 1 is a schematic view of a temperature adjustment device 50.
The outline of the temperature adjusting device 50 is as follows. That is, a part of the first heat medium sent out from the first compressor 18 is distributed by the first distributor 20, and the first heater (condenser) 14, the expansion valve 34, the evaporator (heat absorber) 32, the first The first heat pump circuit circulated in the order of the first compressor 18 and the remaining portion of the first heat medium sent out from the first compressor 18 are distributed by the first distributor 20, and the condenser 26, the expansion valve 28, the second A first cooling circuit that is circulated in the order of one cooler (evaporator) 16 and the first compressor 18, and a high temperature that controls the first distributor 20 and is distributed to the first heat pump circuit and the first cooling circuit. A first control unit 22a that adjusts the distribution ratio of the first heat medium to control the temperature / humidity adjustment target air passing through the first heater 14 and the first cooler 16 to a set temperature.

Hereinafter, the temperature adjusting device 50 will be described in more detail.
The temperature adjustment device 50 shown in FIG. 1 includes a first heat pump circuit including a first heater (condenser) 14 that adjusts the temperature of air sucked from a humidifying / dehumidifying device, which will be described later, in the space unit 10 by a fan 12. A first cooling circuit including a first cooler (evaporator) 16 is provided.

A first heater 14 is disposed on the inlet side of the air flow sucked into the space unit 10, and a first cooler 16 is disposed downstream thereof. According to the arrangement of the first cooler 16 and the first heater 14 with respect to the air flow, the dehumidification of the air flow passing through the first heater 14 and the first cooler 16 can be further improved.
For example, hydrocarbons such as propane, isobutane, and cyclopentane, chlorofluorocarbons, ammonia, and carbon dioxide gas are supplied to the first heater 14 and the first cooler 16 as the first heat medium.

  Such a first heat medium is compressed and heated by the first compressor 18 and discharged in the form of a gas at a high temperature (for example, 70 ° C.). The high-temperature first heat medium discharged from the first compressor 18 is converted into a first heat pump circuit side provided with the first heater 14 and the first cooler 16 by a proportional three-way valve 20 as a first distributor. It distributes to the provided first cooling circuit side.

In this proportional three-way valve 20, the total amount of the high temperature first heat medium distributed to the first heat pump circuit side and the high temperature first heat medium distributed to the first cooling circuit side was discharged from the first compressor 18. Distribute so as to be equal to the amount of the first heat medium having a high temperature.
The proportional three-way valve 20 is controlled by the first controller 22a. The first control unit 22a compares the measured temperature measured by the outlet-side first temperature sensor 24 provided in the space unit 10 with the set temperature so that the measured temperature matches the set temperature. The distribution ratio of the high-temperature first heat medium distributed to the first heater 14 side and the first cooler 16 side is changed substantially continuously, and the air sucked into the space unit 10 is set to a predetermined temperature. adjust.

This “substantially continuously changing” means that when the proportional three-way valve 20 is driven by step control, the proportional three-way valve 20 is microscopically driven stepwise, but is continuously continuous as a whole. This includes the case where it is driven.
The set temperature set in the first control unit 22a may be arbitrarily set. Further, the first temperature sensor 24 shown in FIG. 1 is installed on the discharge side of the fan 12, but may be installed on the suction side of the fan 12, or may be provided on the discharge side and suction side of the fan 12. .

  The high temperature first heat medium distributed to the first heat pump circuit side is directly supplied to the first heater 14 and heats the air flow sucked into the space unit 10 to adjust to a predetermined temperature. At that time, the high-temperature first heat medium is radiated and cooled to become the first heat medium containing the condensate.

  On the other hand, the high temperature first heat medium distributed to the first cooling circuit side is cooled by the condenser 26 and then adiabatically expanded by the expansion valve 28 and further cooled (for example, cooled to 10 ° C.). The cooled first heat medium is supplied to the first cooler 16, and the air flow sucked into the space unit 10 and heated by the first heater 14 is cooled and adjusted to a predetermined temperature. In that case, the 1st heat medium supplied to the 1st cooler 16 absorbs heat from an air flow, and is heated up. Thus, by blowing the air flow that has been blown to the first heater 14 and heated to the first cooler 16, the accuracy of temperature adjustment of the air flow can be improved.

  The condenser 26 is supplied with cooling water via a pipe 30 for cooling the high-temperature first heat medium distributed to the first heater 14 side. The cooling water is heated to about 30 ° C. by the first heat medium of about 70 ° C. in the condenser 26 and is discharged from the pipe 31. The cooling water discharged from the pipe 31 is supplied as a heat source to a heat absorber (evaporator) 32 as a heat absorbing means.

  The heat absorber 32 is supplied with a first heat medium at about 10 ° C. that is adiabatic expansion of the first heat medium radiated by the first heater 14 by an expansion valve 34 and further cooling. For this reason, in the heat absorber 32, based on the temperature difference between the cooling water that has absorbed heat in the condenser 26 and has been heated to about 30 ° C., and the first heat medium that has been cooled to about 10 ° C., Can absorb heat from cooling water. That is, since the first heat medium on the heat pump circuit side is heated by the heat absorber 32 by the heat radiated from the condenser 26 of the first cooling circuit, the heat can be effectively used.

  The first heat medium that has been heated by absorbing heat from the cooling water in the heat absorber 32 is supplied to the first compressor 18 via the accumulator 36. The accumulator 36 is also supplied with a first heat medium that absorbs heat from the air flow supplied to the first cooler 16 and sucked into the space unit 10. Since this accumulator 36 is a type of accumulator that can store a liquid component and re-supply only the gas component to the first compressor 18, it can reliably supply only the gas component of the first heat medium to the first compressor 18.

As this accumulator 36, an accumulator type accumulator can be used.
Even if the accumulator 36 is not installed, the heat absorber 32 absorbs heat from the air flow by the heat sink 32 and the air flow supplied to the first cooler 16 and sucked into the space unit 10. It is only necessary that the heat medium that has been combined can be re-supplied to the first compressor 18.

  By the way, although the first heat medium radiated by the first heater 14 is adiabatically expanded and cooled by the expansion valve 34, in the cooling by the adiabatic expansion by the expansion valve 34, the first heat medium and the outside are cooled. There is no exchange of heat between the two. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water supplied to the heat absorber 32 via the condenser 26 from the outside.

  Therefore, energy absorbed from the cooling water supplied from the outside by the heat absorber 32 may be added to the compression power energy from the first compressor 18 to the high-temperature first heat medium discharged from the first compressor 18. it can. Further, in the temperature adjusting device shown in FIG. 1, the cooling water supplied from the outside is supplied to the heat absorber 32 via the condenser 26 and is removed from the high-temperature first heat medium removed by the condenser 26. Part of the energy can also be added to the high-temperature first heat medium discharged from the compressor 18, and the heating capacity of the heating flow path can be improved. As a result, it is not necessary to use other heating means such as an auxiliary heater.

  As described above, in the temperature adjusting device shown in FIG. 1, the heating capacity of the first heater 14 can be improved by installing the heat pump circuit, and the high-temperature first heat distributed to the first heat pump circuit side by the proportional three-way valve 20. The distribution ratio of the medium and the high-temperature first heat medium distributed to the first cooling circuit side can be changed substantially continuously according to the temperature in the space unit 10.

  For this reason, in the temperature control apparatus shown in FIG. 1, the high-temperature first heat medium is constantly supplied to the first heat pump circuit and the first cooling circuit, and passes through the first heater 14 and the first cooler 16. A minute load fluctuation of the air flow to be temperature-adjusted can be quickly dealt with by immediately finely adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path by the proportional three-way valve 20, Responsiveness can be improved.

  As a result, the temperature of the air flow subject to temperature adjustment passing through the first heater 14 and the first cooler 16 can be controlled with an accuracy of ± 0.1 ° C. or less with respect to the set temperature, and the temperature adjustment shown in FIG. The temperature change of the space unit 10 in which the apparatus is installed can be made smaller than, for example, the temperature change in a clean room, and a process requiring precision machining can be installed.

  Moreover, in the temperature control apparatus shown in FIG. 1, as mentioned above, the heating capacity of the first heater 14 of the first heat pump circuit is improved, and the first of the flow paths including the heating flow path and the cooling means. A flow including a heating flow path and a flow including a cooling flow path until the first heat medium having passed through each of the first cooler 16 and the heat absorber 32 from the proportional three-way valve 20 serving as a distributor is joined by the accumulator 36. Each of the paths is provided independently as a flow path.

For this reason, even when the set temperature of the air flow to be temperature adjusted passing through the first heater 14 and the first cooler 16 is significantly increased, the proportional three-way valve 20 allows the distribution ratio of the high-temperature first heat medium to be increased. The distribution ratio distributed to the heating channel rather than the cooling channel can be significantly increased, and the air flow to be temperature adjusted can be quickly adjusted to a predetermined temperature.
As a result, for example, in the temperature adjusting device shown in FIG. 35, the temperature setting range is about 20 to 26 ° C., but in the temperature adjusting device shown in FIG. 1, the temperature setting range is greatly expanded to 18 to 35 ° C. it can.

Furthermore, in the temperature adjusting device shown in FIG. 1, the heating capacity of the heating channel is improved, and it is not necessary to use other heating means such as an auxiliary heater. Therefore, the temperature adjusting device provided with the auxiliary heater 114 shown in FIG. Compared with, significant energy saving can be achieved.
For example, in the temperature control apparatus provided with the auxiliary heater 114 shown in FIG. 35, the breakdown of the total energy consumption is 18% for the compressor 100, 69% for the auxiliary heater 114, and 13% for the blower 112. In this regard, the temperature adjustment device shown in FIG. 1 can cut the energy consumption of the auxiliary heater 114.
For this reason, when the system of the temperature control apparatus shown in FIG. 35 is applied to a water-cooled air conditioner with a discharge rate of about 20 m 3 / min, the maximum power consumption was 11.7 KW, but the temperature shown in FIG. When the adjustment device method is applied, the maximum power consumption can be reduced to about 2.4 KW.

  As described above, in the temperature adjusting apparatus shown in FIG. 1, the control valve 40 as the refrigerant control means is provided in the pipe 30 for supplying the cooling water to the condenser 26. The control valve 40 is controlled so that the discharge pressure of the first compressor 18 is constant. As shown in FIG. 2, the control valve 40 is provided with a rod-like portion including a valve body 40 b that opens and closes an opening of a valve portion 40 a provided in the cooling water flow path. The rod-like portion is biased in a direction in which the valve body 40b opens the opening of the valve portion 40a by a spring 40c with which the tip end surface abuts. Further, the other end surface of the rod-shaped portion comes into contact with a bellows 40d to which the pressure of the first heat medium discharged from the first compressor 18 is supplied, and the rod-shaped portion resists the urging force of the spring 40c and the valve portion 40a. The valve body 40b is urged in the direction to close the opening.

For this reason, when the discharge pressure of the first compressor 18 becomes equal to or greater than the urging force of the spring 40c, the valve body 40b is moved in the direction of opening the opening of the valve portion 40a by the bellows 40d and supplied to the condenser 26. As a result, the cooling capacity of the condenser 26 is improved. For this reason, the discharge pressure of the 1st compressor 18 falls.
On the other hand, when the discharge pressure of the first compressor 18 becomes equal to or less than the biasing force of the spring 40c, the valve body 40b moves in a direction to close the opening of the valve portion 40a, and the amount of cooling water supplied to the condenser 26 decreases. As a result, the cooling capacity of the condenser 26 decreases. For this reason, the discharge pressure of the 1st compressor 18 becomes high.
In this way, the temperature adjusting device can be stably operated by keeping the discharge pressure of the first compressor 18 constant. Moreover, it can adjust so that the amount of cooling water may be supplied to the condenser 26 more than needed, and it may not discharge | emit out of the system.

By the way, when the temperature setting of the air flow passing through the heater 14 and the cooler 16 is significantly increased, the first control unit 22a fully closes the opening degree of the discharge port on the cooling flow path side of the proportional three-way valve 20. Or while making it the state close | similar to a fully closed state, let the discharge port by the side of a heating flow path be a fully open state or a state close to a fully open state.
In addition, when the temperature of the air flow to be adjusted is low, the high-temperature first heat medium supplied to the heater 14 in the heating flow path is condensed by the low-temperature air flow in the heater 14 and the first compression is performed. Since the discharge pressure of the machine 18 is lower than the predetermined pressure, the control valve 40 is closed and the cooling water is not supplied to the condenser 26.

As described above, when the cooling water is not supplied to the condenser 26, the cooling water supplied from the condenser 26 to the heat absorber 32 is also not supplied. For this reason, the heat absorber 32 becomes an operation stop state, and it does not function as a heat pump.
In addition, heat exchange between the first heat medium, which is radiated and condensed by the first heater 14, is adiabatically expanded and cooled by the expansion valve 34 and the cooling water is not performed, and the heat absorber 32 is frozen. There is a risk.

  For this reason, a control valve 44 is provided in the bypass pipe 42 of the control valve 40 as means for supplying cooling water to the heat absorber 32 as in the temperature adjusting device shown in FIG. In the control valve 44, the opening degree of the discharge port on the cooling channel side of the proportional three-way valve 20 is in a fully closed state or a state close to a fully closed state, and the discharge port on the heating channel side is in a fully open state or a state close to a fully open state. When this occurs, it opens by a signal from the first control unit 22a, forcibly supplies cooling water to the condenser 26, and the heat absorber 32 is in an operating state.

Therefore, when the temperature setting of the air flow passing through the first heater 14 and the first cooler 16 is significantly increased, or when the air flow passing through the first heater 14 and the first cooler 16 is low temperature Thus, even when the distribution ratio of the high-temperature first heat medium distributed to the cooling flow path side becomes zero or in the vicinity thereof, a predetermined amount of cooling water can be supplied to the heat absorber 32, and the heat absorber 32 can be frozen. It can prevent and exert the function as a heat pump.
When the discharge pressure of the first compressor 18 increases and reaches a predetermined pressure, the control valve 44 is closed by a signal from the first control unit 22a. Thereafter, the supply amount of the cooling water supplied to the condenser 26 is controlled so that the pressure on the discharge side of the first compressor 18 is kept constant by the control valve 40.

In the temperature adjusting device shown in FIG. 3, the air flow blown to the first cooler 16 and cooled is blown to the first heater 14. In this manner, by first blowing an air flow to the first cooler 16, moisture in the air flow can be condensed and dehumidified.
In the temperature adjusting device shown in FIG. 3, when the constituent members are the same as the constituent members of the temperature adjusting device shown in FIG. 1, the same reference numerals as those in FIG. Omitted.

1 to 3, the cooling water is used as the heat medium supplied to the condenser 26 and the heat absorber 32. However, as shown in FIG. 4, the condenser 26 and the heat absorber 32 of the heat pump means are used. An air flow by the fan 46 can be used as a heat medium supplied to the fan.
In the temperature adjusting device shown in FIG. 4, the first heat medium radiated by the first heater 14 is adiabatically expanded by the expansion valve 34 and further cooled and supplied to the heat absorber 32, and the fan 46 is supplied to the condenser 26. A stream of air that is blown and heated is blown. For this reason, in the heat absorber 32, the first heat medium, which has been radiated and condensed by the first heater 14 and adiabatically expanded and further cooled, absorbs heat from the air flow and is heated.
In the temperature adjusting device shown in FIG. 4, when the constituent members are the same as the constituent members of the temperature adjusting device shown in FIG. 1, the same reference numerals as those in FIG. Omitted.

Further, in place of the proportional three-way valve 20 as the first distributor used in the temperature control device shown in FIGS. 1 to 4, gate valves 38 a and 38 b as two two-way valves are provided as shown in FIG. 5. Can be used. Each of the two gate valves 38a and 38b is controlled by the first controller 22a. The opening degree of each of the two-way valves 38a, 38b is adjusted by the first control unit 22a, and the gaseous high-temperature first heat medium compressed and heated by the first compressor 18 is heated (first channel). The distribution ratio distributed to the heat pump circuit) and the cooling flow path (first cooling circuit) is substantially continuously adjusted, and the air flow passing through the first heater 14 and the title 1 cooler 16 is set to a predetermined temperature. Control. At that time, the total amount of the high temperature first heat medium amount distributed to the first heater 14 side and the high temperature first heat medium amount distributed to the first cooler 16 side is discharged from the first compressor 18. The opening of the gate valves 38a, 38b is adjusted so as to be equal to the amount of the first high-temperature heat medium that has been made, and the proportional distribution is continuously performed.
At that time, as shown in FIG. 6, in each of the gate valves 38a and 38b, the relationship between the valve opening and the flow rate is not linear. For this reason, the first control unit 22a holds the flow rate characteristic data for each of the gate valves 38a and 38b shown in FIG. 6, and the first control unit 22a is based on the flow rate characteristics of the gate valves 38a and 38b. An opening signal is transmitted to each gate valve 38a, 38b.

Next, FIG. 7 shows an embodiment of a temperature / humidity adjusting device 54 according to the present invention in which the temperature adjusting device 50 and the humidifying / dehumidifying device 52 are combined.
The basic configuration of the circulation circuit of the heat medium (second heat medium) in the humidifying / dehumidifying device 52 is the same as that of the temperature adjusting device 50.
That is, in the humidifying / dehumidifying device 52, a part of the second heat medium sent out from the second compressor 68 is distributed by the second distributor 70, and the second heater (condenser) 64, the expansion valve 84, and the evaporator 82 are distributed. The second heat pump circuit circulated in the order of the second compressor 68 and the remaining portion of the second heat medium sent out from the second compressor 68 are distributed by the second distributor 70, and the condenser 76 and the expansion valve 78. The second cooling circuit (evaporator) 66 and the second compressor 68 are circulated in this order, and the second distributor 70 is controlled to be distributed to the second heat pump circuit and the second cooling circuit. A second control unit 72a that adjusts the distribution ratio of the high-temperature second heat medium to control the temperature / humidity adjustment target air passing through the second heater 64 and the second cooler 66 to a necessary required temperature; It has.

The second heater 64 and the second cooler 66 are arranged on the inlet side of the space unit (duct) 10. That is, in the example of FIG. 7, the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14 are arranged in this order from the entrance side of the space unit 10 at a necessary interval. Has been. The air flow sucked by the fan 12 and entering the space unit 10 contacts the heat exchangers of the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14 in this order. It will be.
The heating control of the air flow by the first cooler 16 and the first heater 14 is as described above.

The heating control of the air flow in the second cooler 66 and the second heater 64 also has the same function, although the control conditions are different from those in the temperature adjustment device 50. Therefore, description of the function is omitted.
The humidifying / dehumidifying device 52 is further disposed on the near side of the second heater, and spray nozzles 88 for spraying water for humidifying the air passing through the second heater 64, and are ejected from the spray nozzles 88. A water amount control valve 92 for adjusting the amount of water.

The configuration of the spray nozzle 88 will be described in more detail.
As described above, the spray nozzle 88 is disposed between the second cooler 66 and the second heater 64 and sprays a predetermined amount of water onto the air dehumidified by the second cooler 66. The spray nozzle 88 is provided with a plurality of nozzles, and can spray water uniformly in the space unit 10.
Pure water stored in the water tank 120 is supplied to the spray nozzle 88 via the water amount control valve 92 provided in the pump 122 and the water supply pipe 124. The spray nozzle 88 is formed of a two-fluid nozzle that sprays water in the form of a mist with compressed air, and this compressed air is supplied to the spray nozzle 88 via a pipe 128.
The water tank 120 stores pure water obtained by supplying normal water supplied via the pipe 30 to the pure water device 130. The amount of pure water stored in the water tank 120 is kept constant by a control valve 134 provided in the pure water supply pipe 132.
The spray nozzle 88 may not be a two-fluid nozzle, but may be a nozzle that sprays water by ultrasonic waves, or may be a nozzle that ejects water vapor itself due to factory exhaust heat or the like.

The temperature / humidity adjusting device 54 further includes a first temperature sensor 24 that detects the temperature of the outlet air that has passed through the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14, 2 cooler 66, second heater 64, first cooler 16, and first humidity sensor 136 that detects the humidity of the outlet air that has passed through first heater 14.
In the temperature / humidity adjusting device 54 configured as described above, the air to be temperature / humidity adjusted passes through the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14, and passes through. The air to be adjusted is adjusted to the required temperature and amount of water necessary by the humidifying / dehumidifying device 52 and also adjusted to the desired temperature and humidity by the temperature adjusting device 50.

A specific example of this temperature / humidity adjustment control will be further described.
On the outlet side of the space unit (duct), as described above, the temperature of the outlet air that has passed through the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14 is detected. The first temperature sensor 24 is disposed, and the first humidity sensor detects the humidity of the outlet air that has passed through the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14. 136 is provided. Based on the humidity detected by the first humidity sensor 136, the humidity control unit 138 adjusts the opening of the water amount control valve 92, and the amount of spray water from the spray nozzle 88 is adjusted.

  A second temperature sensor 140 that detects the temperature of the air that has passed through the second cooler 66 and the second heater 64 is disposed downstream of the second heater 64. Based on the temperature detected by the second temperature sensor 140, the second controller 72a adjusts the distribution amount of the second heat medium to the heating flow path side (second heat pump circuit side) and the cooling circuit side by the second distributor 70. By doing so, the temperature of the air that has left the second heater 64 is controlled to be a predetermined temperature.

More specific temperature / humidity control will be described with reference to FIGS.
The overall control described below is performed by an overall control unit (not shown).
First, the desired set temperature and humidity of the outlet air are input to the overall control unit (S1, S2).
The amount of water is controlled by the humidity controller 138 so that the amount of water sprayed from the spray nozzle 88 becomes a required amount of water based on the input set humidity of the outlet air and the humidity of the outlet air measured by the first humidity sensor 136. The control valve 92 is adjusted (S3). The spray nozzle 88 only needs to be sprayed with a necessary and sufficient amount of water, sprayed only so as not to be insufficient, and excess water is condensed by the cooler and dehumidified, so that it is sprayed more.

Further, the overall control unit calculates the outlet air dew point temperature (water content) from the input outlet air set temperature and the input outlet air set humidity (S4).
Further, the set value of the temperature measured by the second temperature sensor 140 after passing through the second cooler 66 and the second heater 64 is input to the overall control unit (S5).
This set temperature value is obtained in advance by a test. That is, theoretically, the set temperature should be the above calculated dew point temperature, but when actually measuring the outlet humidity, the higher the calculated dew point temperature, the lower the measured outlet humidity. It was confirmed by experiment.

  Therefore, as shown in FIG. 9, a dew point temperature (set dew point temperature) that is higher (shifted) by a required temperature than the theoretical dew point temperature (calculated dew point temperature) is input to the overall control unit. This offset dew point temperature (set dew point temperature) is obtained in advance in relation to the set dew point temperature and the measured outlet humidity. Since this offset value differs for each apparatus depending on the area of the second heater 64, the flow velocity of the passing air, the position of the spray nozzle 88, and the like, it is obtained in advance by an experiment.

Then, the distribution ratio of the second heat medium by the second distributor 70 is adjusted by the second controller 72a so that the temperature detected by the second temperature sensor 140 becomes the set dew point temperature shifted from the calculated dew point temperature. (S6).
By the control of the air temperature at the outlet of the second heater 64 and the control of the amount of spray water ejected from the spray nozzle 88 by the second temperature sensor 140 and the second controller 72a, the necessary amount of water is passed into the passing air. included.

  Since the first control unit 22a adjusts the distribution ratio by the first distributor 20 as described above so that the temperature detected by the first temperature sensor 24 becomes the set outlet temperature of the outlet of the space unit 10. Yes (S7). As a result, the desired outlet temperature can be adjusted, and excess water in the air that has exited the second heater 64 is dehumidified by the first cooler 16, so that the outlet humidity of the space unit 10 is also adjusted to the desired humidity. It is done.

  In the present embodiment, the moisture is once dehumidified by the second cooler 66 in the humidifying / dehumidifying device 52 and humidified to the required moisture amount by the spray nozzle 88. In this way, since it is dehumidified once and then humidified, a low humidity setting can be easily performed. In addition, although not shown in figure, the dehumidification member which consists of mesh members, such as a metal material with a large heat capacity, is cooled by this 2nd cooler 66, and the moisture of ambient air is condensed and dehumidified by this 2nd cooler 66 Is preferably disposed.

In FIG. 7, the spray nozzle 88 is disposed between the second cooler 66 and the second heater 64, but the spray nozzle 88 is disposed on the outlet side of the second heater 64 as shown in FIG. In this case, the spray from the spray nozzle 88 is heated by the second heater and can be sufficiently heated by the air flow.
Further, the second cooler 66 and the second heater 64 are arranged so that air is supplied to the second cooler 66 after being supplied to the second heater 64 as shown in FIG. The spray nozzle 88 may be disposed between the second cooler 66 and the second heater 64. Also in this case, the spray from the spray nozzle 88 is heated by the second heater 64 and can be sufficiently heated by the air flow.

Furthermore, it is arrangement | positioning of the 2nd heater 64 and the 2nd cooler 66 which are shown in FIG.10 (b), Comprising: As shown in FIG.10 (c), the spray nozzle is on the inlet side of the air of the 2nd heater 64. 88 may be provided. Also in this case, the spray from the spray nozzle 88 can be sufficiently heated by the second heater 64.
However, for example, in the arrangement of the second heater 64 and the second cooler 66 shown in FIG. 10A, as shown in FIG. 10D, spraying is performed on the air inlet side of the second cooler 66. In the case where the nozzle 88 is provided, the pure water sprayed from the spray nozzle 88 is condensed in the second cooler 66 and removed from the air flow, so that the air flow can be adjusted to a predetermined temperature. It becomes difficult.

  In the above-described embodiment, the second cooler 66 and the second heater 64 of the humidifying / dehumidifying device 52 and then the first cooler 16 of the temperature adjusting device 50 are entered into the space unit (duct) 10 from the air flow inlet side. The first heater 14 is arranged in this order, but the four heat exchangers of the second cooler 66, the second heater 64, the first cooler 16, and the first heater 14 may be arranged in a confused manner. Good.

  FIGS. 11 to 34 show examples of arrangement of these four heat exchangers, the spray nozzle 88 and the second temperature sensor 140. In each figure, H, C, DH, and DC indicate the first heater 14, the first cooler 16, the second heater 64, and the second cooler 66, respectively, and the white circle indicates the second temperature sensor. The arrow indicates the direction of air flow (from the inlet side to the outlet side).

FIG. 11 shows an example in which the first cooler 16, the second heater 64, the spray nozzle 88, the second cooler 66, the second temperature sensor 140, and the first heater 14 are arranged in this order from the inlet side.
Hereinafter, the arrangement from the entrance side is shown.
FIG. 12: first cooler 16, second heater 64, second cooler 66, spray nozzle 88, second temperature sensor 140, first heater 14.
FIG. 13: first cooler 16, spray nozzle 88, second heater 64, second cooler 66, second temperature sensor 140, first heater 14.
FIG. 14: first cooler 16, second cooler 66, spray nozzle 88, second heater 64, second temperature sensor 140, first heater 14.

FIG. 15: first cooler 16, second cooler 66, second heater 64, spray nozzle 88, second temperature sensor 140, first heater 14.
FIG. 16: the first cooler 16, the spray nozzle 88, the second cooler 66, the second heater 64, the second temperature sensor 140, and the first heater 14.
FIG. 17: first heater 14, second heater 64, spray nozzle 88, second cooler 66, second temperature sensor 140, first cooler 16.
FIG. 18: the first heater 14, the second heater 64, the second cooler 66, the spray nozzle 88, the second temperature sensor 140, and the first cooler 16.
FIG. 19: first heater 14, spray nozzle 88, second heater 64, second cooler 66, second temperature sensor 140, first cooler 16.

FIG. 20: first heater 14, second cooler 66, spray nozzle 88, second heater 64, second temperature sensor 140, first cooler 16.
FIG. 21: first heater 14, second cooler 66, second heater 64, spray nozzle 88, second temperature sensor 140, first cooler 16.
FIG. 22: first heater 14, spray nozzle 88, second cooler 66, second heater 64, second temperature sensor 140, first cooler 16.
FIG. 23: second cooler 66, second heater 64, spray nozzle 88, second temperature sensor 140, first cooler 16, first heater 14.
FIG. 24: second cooler 66, second heater 64, second temperature sensor 140, first cooler 16, spray nozzle 88, first heater 14.
FIG. 25: second cooler 66, spray nozzle 88, second heater 64, second temperature sensor 140, first cooler 16, first heater 14.

FIG. 26: second heater 64, second cooler 66, spray nozzle 88, second temperature sensor 140, first cooler 16, first heater 14.
FIG. 27: second heater 64, second cooler 66, second temperature sensor 140, first cooler 16, spray nozzle 88, first heater 14.
FIG. 28: second heater 64, spray nozzle 88, second cooler 66, second temperature sensor 140, first cooler 16, first heater 14.
FIG. 29: second cooler 66, second heater 64, spray nozzle 88, second temperature sensor 140, first heater 14, first cooler 16.
FIG. 30: second cooler 66, second heater 64, second temperature sensor 140, first heater 14, spray nozzle 88, first cooler 16.
FIG. 31: second cooler 66, spray nozzle 88, second heater 64, second temperature sensor 140, first heater 14, first cooler 16.

FIG. 32: second heater 64, second cooler 66, spray nozzle 88, second temperature sensor 140, first heater 14, first cooler 16.
FIG. 33: second heater 64, second cooler 66, second temperature sensor 140, first heater 14, spray nozzle 88, first cooler 16.
FIG. 34: second heater 64, spray nozzle 88, second cooler 66, second temperature sensor 140, first heater 14, first cooler 16.
The final outlet temperature and outlet humidity can be adjusted also by the arrangement of each part in FIGS. In addition, as shown in FIGS. 11-34, it is preferable to arrange | position the 2nd heater (DH) 64 and the 2nd cooler (DC) 66 adjacent.

It is the schematic explaining an example of the temperature adjustment apparatus of the temperature / humidity adjustment apparatus in this invention. It is explanatory drawing explaining the internal structure of the control valve used for the temperature control apparatus shown in FIG. It is the schematic explaining the other example of a temperature control apparatus. It is the schematic explaining the further another example of a temperature control apparatus. It is explanatory drawing explaining the other divider | distributor which can be used with the temperature control apparatus shown in FIGS. It is a graph which shows the flow volume characteristic of the gate valve used with the divider | distributor shown in FIG. It is the schematic explaining an example of the temperature / humidity adjustment apparatus which concerns on this invention. It is explanatory drawing which shows a temperature / humidity adjustment procedure. It is a graph which shows an example of the offset relationship calculated | required beforehand of the calculation dew point and the setting dew point. It is explanatory drawing explaining the arrangement | sequence of a 2nd heater, a 2nd cooler, and a spray nozzle. ~ It is explanatory drawing which shows various arrangement | sequences of a 2nd cooler, a 2nd heater, a 1st cooler, a 1st heater, a spray nozzle, and a 2nd temperature sensor. It is explanatory drawing explaining the conventional temperature control apparatus. It is the schematic explaining the example of improvement which improved the conventional temperature adjustment apparatus to the temperature / humidity adjustment apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Space unit 12 Fan 14 1st heater 16 1st cooler 18 1st compressor 20 1st distributor (three-way valve)
22a 1st control part 24 1st temperature sensor 26 condenser 28 expansion valve 30 piping 31 piping 32 heat sink 34 expansion valve 36 accumulator 38a, 38b two-way valve 40 control valve 44 control valve 50 temperature adjustment device 52 humidification / dehumidification device 54 temperature Humidity adjustment device 64 Second heater 66 Second cooler 68 Second compressor 70 Second distributor (three-way valve)
72a 2nd control part 24 1st temperature sensor 76 condenser 78 expansion valve 80 piping 81 piping 82 heat sink 84 expansion valve 86 accumulator 90 control valve 94 control valve 136 1st humidity sensor 138 2nd control part 140 2nd temperature sensor

Claims (10)

A: A part of the first heat medium sent out from the first compressor is distributed by the first distributor, and is circulated in the order of the first heater (condenser), the expansion valve, the evaporator, and the first compressor. 1 heat pump circuit and the remainder of the 1st heat carrier sent out from the 1st compressor are distributed by the 1st above-mentioned distributor, a condenser, an expansion valve, the 1st cooler (evaporator), and the 1st compressor in order A first cooling circuit to be circulated; and the first distributor is controlled to adjust a distribution ratio of a high-temperature first heat medium distributed to the first heat pump circuit and the first cooling circuit to thereby adjust the first heater. And a first control unit that controls the temperature / humidity adjustment target air passing through the first cooler to a set temperature;
B: A part of the second heat medium sent out from the second compressor is distributed by the second distributor, and is circulated in the order of the second heater (condenser), the expansion valve, the evaporator, and the second compressor. 2 heat pump circuit and the remaining portion of the second heat medium sent out from the second compressor are distributed by the second distributor, in the order of condenser, expansion valve, second cooler (evaporator), second compressor. Controlling the second cooling circuit to be circulated, a spray nozzle for spraying water for humidifying the passing air, a water amount control valve for adjusting the amount of water ejected from the spray nozzle, and the second distributor And adjusting the distribution ratio of the high-temperature second heat medium distributed to the second heat pump circuit and the second cooling circuit to change the temperature / humidity adjustment target air passing through the second heater and the second cooler. A humidifying / dehumidifying device comprising a second control unit for controlling the required required temperature;
C: a first temperature sensor that detects a temperature of the outlet air that has passed through the second cooler, the second heater, the first cooler, and the first heater;
D: a first humidity sensor that detects the humidity of the outlet air that has passed through the second cooler, the second heater, the first cooler, and the first heater;
And
The air to be adjusted in temperature and humidity passes through the second cooler, the second heater, the first cooler, and the first heater, and the air that passes through the air is adjusted to the required temperature and moisture amount required by the humidifying / dehumidifying device of B. A temperature / humidity adjusting device which is adjusted and adjusted to a desired temperature and humidity by the temperature adjusting device of A. A second temperature sensor for detecting the temperature of the air that has passed through the second cooler and the second heater;
An overall control unit,
By the overall control unit,
The water amount control valve is controlled so that the amount of water sprayed from the spray nozzle becomes a necessary amount of water based on the set humidity of the outlet air being input and the humidity of the outlet air measured by the first humidity sensor. And
Calculate the outlet air dew point temperature from the input outlet air set temperature and the input outlet air set humidity.
The set temperature of the air that has passed through the second heater and the second cooler is set to a set dew point temperature that is shifted from the calculated dew point temperature by a temperature determined in advance by experience,
Adjusting the distribution ratio by the second distributor by the second control unit so that the temperature detected by the second temperature sensor becomes the set dew point temperature;
The temperature / humidity adjustment according to claim 1, wherein a distribution ratio by the first distributor is adjusted by the first controller so that a temperature detected by the first temperature sensor becomes the set outlet temperature. apparatus.   The temperature / humidity adjusting device according to claim 1 or 2, wherein moisture is dehumidified by the humidifying / dehumidifying device and humidified to a necessary amount of water by a spray nozzle.   The temperature / humidity adjusting device according to any one of claims 1 to 3, wherein the heat radiated by the condenser of the first cooling circuit is absorbed and used by the evaporator of the first heat pump circuit.   The temperature / humidity adjusting device according to any one of claims 1 to 4, wherein the heat radiated by the condenser of the second cooling circuit is absorbed and used by the evaporator of the second heat pump circuit.   The temperature / humidity adjusting device according to claim 1, wherein the spray nozzle is a two-fluid nozzle that sprays water with compressed air.   7. A dehumidifying member that is cooled by the second cooler and that condenses and dehumidifies the moisture in the surrounding air is disposed in the second cooler of the second cooling circuit. The temperature and humidity adjusting device according to the item.   The temperature / humidity adjusting device according to any one of claims 1 to 7, wherein the second cooler, the second heater, the first cooler, and the first heater are arranged in this order from the air inlet side.   A high-temperature heat medium in which a total amount of a high-temperature heat medium distributed to the heater side and a high-temperature heat medium distributed to the cooler side is discharged from the compressor by at least one of the first distributor and the second distributor The temperature / humidity adjusting device according to any one of claims 1 to 8, wherein the temperature / humidity adjusting device is a proportional three-way valve that proportionally distributes a high-temperature heat medium so as to be equal to the amount.   The at least one of the first distributor and the second distributor is a two-way valve provided in each branch pipe that branches a high-temperature heat medium into a heater side and a cooler side. The temperature / humidity adjusting apparatus according to any one of 1 to 8.

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