JP2010255879A - Temperature adjusting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem in a conventional temperature adjusting device that energy-saving is imperfect. <P>SOLUTION: In this temperature adjusting device which includes a proportional three-way valve 20 for supplying a part of a first heat medium of high temperature discharged from a compressor 18 to a heater 14, and supplying the cooler 16 with the remaining first heat medium of high temperature after cooling, adiabatically expanding and further cooling it, to adjust a temperature of the water as an object of temperature adjustment, passing through the heater 14 and the cooler 16 and stored in a storage tank 64, and a heat absorber 32 of a heat pump means for absorbing the heat of the first heat medium which is cooled and then adiabatically expanded by the heater 14 from the water stored in a storage tank 29 to improve a heating capacity of a heating machine 4, and in which the first heat mediums respectively passing through the cooler 16 and the heat absorber 32 are joined and resupplied to the compressor 18, a control part 22 is disposed to control the proportional three-way valve 20 so that the water as the object of temperature adjustment is adjusted to a prescribed temperature by changing a distribution ratio of the first heat medium of high temperature to be distributed to the heater 14 and the cooler 16, and the water passing through a condenser 26 and the heat absorber 32 is supplied for preliminary temperature adjustment of the water as the object of temperature adjustment. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a temperature control device.

Usually, in the precision processing field such as the manufacturing process of semiconductor devices, most of them are installed in a clean room in which temperature and humidity are controlled.
However, in recent years, in the precision processing field, processes requiring precision processing with higher processing accuracy than before have been emerging.
In processes that require such high precision machining, precision machine tools that are strictly temperature controlled are required.
As a temperature adjusting device used for adjusting the temperature of such a precision machine tool, for example, the following Patent Document 1 proposes a temperature adjusting device shown in FIG.
The temperature adjusting device shown in FIG. 7 includes a heating flow path in which a part of the high-temperature first heat medium compressed and heated by the compressor 100 is supplied to the heater 102, and a remaining portion of the high-temperature first heat medium. Is cooled by the condenser 104 and then adiabatically expanded by the first expansion valve 106, further cooled and supplied to the cooler 108, and stored in the storage tank 110 by the pump 112. The high temperature first heat medium is distributed to the heating flow path and the cooling flow path so that the water whose temperature is to be adjusted passes through the heater 102 and the cooler 108 and is adjusted to a predetermined temperature. In the temperature adjustment device, the first heat medium that has passed through each of the passage and the cooling passage is re-supplied to the compressor 100.
In this temperature adjusting device, a part of the high-temperature first heat medium discharged from the compressor 100 is distributed to the heating flow path side, and the remaining portion of the high-temperature first heat medium is distributed to the cooling flow path side and heated. Heat is released by the heater 102 so that the proportional three-way valve 114 capable of changing the distribution ratio of the high-temperature first heat medium distributed to the flow path and the cooling flow path and the heating capacity of the heating flow path are improved. A heat pump means including a heat absorber 118 that absorbs heat from water as a second heat medium, which is an external heat source, after the first heat medium that has been adiabatically expanded by the second expansion valve 116 and further cooled after cooling. The proportional three-way valve 114 is controlled to adjust the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, and the temperature adjustment target passing through the heater 102 and the cooler 108 is adjusted. And a controller 120 for controlling the air to a predetermined temperature. That.

International Publication No. 2008/078525 Pamphlet

In the temperature adjusting device shown in FIG. 7, the temperature of water supplied to the USER such as a precision machine tool through the heater 102 and the cooler 108 can be controlled with an accuracy of ± 0.1 ° C. with respect to the target temperature. In addition, energy saving can be achieved.
However, in the temperature adjusting device shown in FIG. 7, the water that has passed through the condenser 194 and the heat absorber 118 of the heater pump means is discharged to the outside. For this reason, although a part of the amount of heat absorbed by the condenser 194 is absorbed by the heat absorber 118, most of it is discarded, so that energy saving is incomplete.
Therefore, an object of the present invention is to provide a temperature adjusting device that can solve the problems of the conventional temperature adjusting device that is incomplete in energy saving and can achieve further energy saving.

As a result of repeated studies to solve the above problems, the present inventors have found that the temperature of water that has passed through the condenser 194 and the heat absorber 118 of the temperature adjustment device shown in FIG. When the distribution ratio of the high-temperature first heat medium distributed to each other is stable, it is relatively stable at a predetermined temperature, so that the water that has passed through the condenser 194 and the heat absorber 118 is adjusted to the temperature of the external device. It was found that it can be used for
That is, as means for solving the above problems, a heating flow path in which a part of the high-temperature first heat medium compressed and heated by a compressor is supplied to the heating means, and the high-temperature first heat medium A cooling flow path is provided that is cooled by the condensing means and then adiabatically expanded by the first expansion means and further cooled and supplied to the cooling means, and passes through the heating means and the cooling means. The high temperature first heat medium is distributed to the heating flow path and the cooling flow path, and passes through each of the heating flow path and the cooling flow path so as to adjust the temperature adjustment target fluid to a predetermined temperature. 1 is a temperature adjusting device in which a heat medium is re-supplied to the compressor, and distributes a part of the high-temperature first heat medium discharged from the compressor to the heating flow path side, and the high-temperature first heat The remaining part of the medium is distributed to the cooling flow path side and distributed to the heating flow and the cooling flow path. Distributing means capable of changing the distribution ratio of the high-temperature first heat medium, and the second expansion means adiabatically after the heat is released by the heating means and cooled so that the heating capacity of the heating flow path is improved. The first heat medium expanded and further cooled by the heat pump means including heat absorption means for absorbing heat from the second heat medium, which is an external heat source, controls the distribution means, and the heating flow path and the cooling flow path A controller for adjusting a distribution ratio of the high-temperature first heat medium distributed to the heating medium and controlling a fluid to be adjusted in temperature passing through the heating unit and the cooling unit to a predetermined temperature, and the condensing unit And the second heat medium that has passed through the heat absorbing means can be provided for temperature adjustment of an external device or for preliminary temperature adjustment of the fluid to be temperature adjusted.
In the means for solving this problem, by providing a heat exchanger for preliminary temperature adjustment for supplying the temperature-adjusted second heat medium and the temperature-adjusted fluid through the condensing means and the heat absorption means, Preliminary temperature adjustment can be easily performed for the fluid to be temperature adjusted.

  Further, as means for solving the above problems, a heating flow path in which a part of the high-temperature first heat medium compressed and heated by a compressor is supplied to the heating means, and the high-temperature first heat medium A cooling flow path is provided that is cooled by the condensing means and then adiabatically expanded by the first expansion means and further cooled and supplied to the cooling means, and passes through the heating means and the cooling means. The high temperature first heat medium is distributed to the heating flow path and the cooling flow path, and passes through each of the heating flow path and the cooling flow path so as to adjust the temperature adjustment target fluid to a predetermined temperature. 1 is a temperature adjusting device in which a heat medium is re-supplied to the compressor, and distributes a part of the high-temperature first heat medium discharged from the compressor to the heating flow path side, and the high-temperature first heat The remaining portion of the medium is distributed to the cooling flow path side and is distributed to the heating flow and the cooling flow path. A distribution means capable of changing a distribution ratio of the first heat medium, and a second expansion means for adiabatic after the heat is released by the heating means and cooled so that the heating capacity of the heating flow path is improved. The first heat medium that has been expanded and further cooled is distributed to the heat pump means having heat absorption means for absorbing heat from the temperature adjustment target fluid, the distribution means, and distributed to the heating flow path and the cooling flow path. A controller for adjusting the distribution ratio of the first high-temperature heat medium to control the temperature adjustment target fluid passing through the heating unit and the cooling unit to a predetermined temperature, and the condensing unit and the heat absorbing unit. It is possible to provide a temperature adjustment device in which the fluid to be temperature-adjusted that has passed through is supplied to the heating means and the cooling means.

In the means for solving the problems provided by the present inventors, the following preferred embodiments can be raised.
In the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high heating side on the heating flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means is By controlling the distribution means so that the fluid is adjusted to a temperature lower than the fluid adjusted to a predetermined temperature through the heating channel and the cooling channel, the heating channel and the cooling channel are passed through to the predetermined temperature. The second heat medium having a temperature lower than that of the adjusted fluid can be supplied to an external device or the like.
On the other hand, in the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high cooling side on the cooling flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means By passing the heating channel and the cooling channel through the heating channel and the cooling channel, the distribution means is controlled so that the fluid is adjusted to a temperature higher than the fluid adjusted to a predetermined temperature. A second heat medium having a temperature higher than that of the fluid adjusted to a predetermined temperature can be supplied to an external device or the like.
In addition, it is preferable that the fluid to be temperature adjusted and the second heat medium are water.

According to the temperature adjustment device provided by the present inventors, the temperature adjustment target fluid that passes through the heating channel and the cooling channel can be adjusted with high accuracy with respect to the target temperature.
Furthermore, by providing the heat absorption means of the heat pump means, and using the second heat medium that has passed through the condensation means and the heat absorption means for adjusting the temperature of the external device or adjusting the preliminary temperature of the fluid to be adjusted by the compressor, The energy applied to the first heat medium can be sufficiently utilized, and further energy saving can be achieved as compared with the temperature adjusting device shown in FIG.
Further, when supplying the temperature adjustment target fluid to the condensing means and the heat absorption means, the preliminary temperature adjustment of the temperature adjustment target fluid can be easily performed and added to the first heat medium by the compressor. Enough energy can be used.

It is the schematic which shows an example of the temperature control apparatus which the present inventors provided. It is sectional drawing explaining an example of the control valve 40 as a cooling water control means used for the temperature control apparatus shown in FIG. It is explanatory drawing explaining the other example of the distribution means used for the temperature control apparatus shown in FIG. It is the schematic which shows the other example of the temperature control apparatus which the present inventors provided. It is the schematic which shows the other example of the temperature control apparatus which the present inventors provided. It is the schematic which shows the other example of the temperature control apparatus which the present inventors provided. It is the schematic explaining the conventional temperature control apparatus.

FIG. 1 is a schematic diagram for explaining an example of a temperature adjusting device provided by the present inventors. In the temperature adjusting device shown in FIG. 1, the water to be temperature adjusted that is returned from an external device (hereinafter simply referred to as USER) such as a machine tool and stored in the storage tank 64 is transferred to the heat exchanger by the pump 66. 50 and the deionizer 52 are supplied to the cooling flow path and the heating flow path, and the temperature-adjusted water is supplied to the USER.
A heater 14 as a heating means constituting the heating flow path and a cooler 16 as a cooling means constituting the cooling flow path are provided, and the temperature is adjusted precisely by cooling and heating water to be temperature adjusted. Adjust and supply to USER.
The heater 14 and the cooler 16 are supplied with, for example, hydrocarbons such as propane, isobutane and cyclopentane, chlorofluorocarbons, ammonia, and carbon dioxide as the first heat medium, and the temperature of the first heat medium is determined by vaporization and liquefaction. The water to be adjusted is heated and cooled to adjust to a predetermined temperature.
Such a first heat medium is compressed and heated by the compressor 18 and discharged in the form of a gas at a high temperature (for example, 70 ° C.). The high-temperature first heat medium discharged from the compressor 18 is distributed to the heating channel side provided with the heater 14 and the cooling channel side provided with the cooler 16 by the proportional three-way valve 20 serving as a distribution unit. .
In this proportional three-way valve 20, the total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side is the high temperature first heat medium discharged from the compressor 18. Distribute to equal the amount.

The proportional three-way valve 20 is controlled by the control unit 22. The control unit 22 compares the measured temperature measured by the temperature sensor 24 provided in the supply pipe that supplies the temperature-adjusted water to the USER with the set temperature so that the measured temperature matches the set temperature. The distribution ratio of the high-temperature first heat medium distributed to the heating flow path side and the cooling flow path side is substantially continuously changed, and the temperature adjustment target water supplied to the heating flow path and the cooling flow path is predetermined. Adjust to temperature.
This “substantially continuously changing” means that when the proportional three-way valve 20 is driven by step control, the proportional three-way valve 20 is microscopically driven stepwise, but is continuously continuous as a whole. This includes the case where it is driven. The set temperature set in the control unit 22 may be arbitrarily set.
The high temperature first heat medium distributed to the cooling flow path side is cooled by the condenser 26 as the condensing means and then adiabatically expanded by the expansion valve 28 as the expanding means, and further cooled (for example, cooled to 10 ° C.). ) The cooled first heat medium is supplied to the cooler 16 to cool the temperature adjustment target water and adjust it to a predetermined temperature. At that time, the first heat medium supplied to the cooler 16 is heated by absorbing heat from water.
On the other hand, the high-temperature first heat medium distributed to the heating channel side is directly supplied to the heater 14 and heats the temperature adjustment target water cooled by the cooler 16 to adjust it to a predetermined temperature. At that time, the high-temperature first heat medium is radiated and cooled to become the first heat medium containing the condensate.
As described above, in the temperature adjustment device shown in FIG. 1, the accuracy of temperature adjustment of the temperature adjustment target water can be improved by using the heater 14 for the temperature adjustment target water cooled by the cooler 16.

The condenser 26 is supplied with water stored in the storage tank 29 as the second heat medium by the pump 33 as cooling water for cooling the high-temperature first heat medium distributed to the heater 14 side. . The cooling water is heated to about 30 ° C. by the first heat medium of about 70 ° C. in the condenser 26 and is discharged from the pipe 31. The cooling water discharged from the pipe 31 is supplied as a heat source to a heat absorber 32 as a heat absorption unit of the heat pump unit.
The heat absorber 32 is supplied with a first heat medium at about 10 ° C., which is adiabatically expanded by the expansion valve 34 and further cooled by the first heat medium radiated by the heater 14. For this reason, in the heat absorber 32, based on the temperature difference between the cooling water that has absorbed heat in the condenser 26 and has been heated to about 30 ° C., and the first heat medium that has been cooled to about 10 ° C., Can absorb heat from cooling water.
The first heat medium that has been heated by absorbing heat from the cooling water by the heat absorber 32 is supplied to the compressor 18 via the accumulator 36. The accumulator 36 is also supplied with a first heat medium that is supplied to the cooler 16 and absorbs heat from the water whose temperature is to be adjusted. Since the accumulator 36 is a type of accumulator that can store the liquid component and re-supply only the gas component to the compressor 18, it can reliably supply only the gas component of the first heat medium to the compressor 18.
As this accumulator 36, an accumulator type accumulator can be used.
Even if the accumulator 36 is not installed, a heat medium that has been heated by absorbing heat from the air flow with the heat absorber 32 and a first heat medium that has been supplied to the cooler 16 and has absorbed heat from the water whose temperature is to be adjusted. It only has to be merged and re-supplied to the compressor 18.

In the temperature adjustment device shown in FIG. 1, the cooling water that has passed through the condenser 26 and the heat absorber 32 is supplied to the heat exchanger 50, and the temperature of the water stored in the storage tank 64 is a temperature suitable for the pure water device 52. Adjust to range. This is because the deionizer 52 is filled with an ion exchange resin, and the characteristics of the ion exchange resin can be sufficiently exhibited by adjusting the temperature of the temperature adjustment target water so as to be within a predetermined temperature range. .
Here, the cooling water that has passed through the condenser 26 and the heat absorber 32 has a distribution ratio of the high-temperature first heat medium that is distributed to the heater 14 and the cooler 16 when the temperature adjusting device is stably operated, that is, the cooling water. When stable, the temperature is stable.
However, the temperature is controlled by the control unit 22 controlling the distribution ratio of the high-temperature first heat medium distributed to the heater 14 and the cooler 16 to a higher heating side on the heater 14 side, or by the control unit 22 The distribution ratio of the high-temperature first heat medium distributed to the heater 14 and the cooler 16 differs depending on whether the high cooling side is controlled on the cooler 16 side.
For example, when the control unit 22 controls the distribution ratio of the high-temperature first heat medium to the heating side, the temperature of the water that has passed through the condenser 26 and the heat absorber 32 is the heater 14 and the cooler 16. The temperature is lower than the temperature of the water supplied to the USER that has passed through. The heat absorber 32 to which the first heat medium cooled through the heater 14 and the expansion valve 34 is supplied is supplied to the heat absorber 32 more than the condenser 26 to which the high-temperature first heat medium is directly supplied from the compressor 18. This is because one heat medium is supplied.
On the other hand, when the control part 22 is controlling the distribution ratio of the high temperature 1st heat medium to the cooling side, the temperature of the water which passed the condenser 26 and the heat absorber 32 is the heater 14 and the cooler 16. It becomes higher than the temperature of the water supplied to the USER that passed through. This is because more first heat medium than the heat absorber 32 is supplied to the condenser 26.
The accuracy of the temperature of water that has passed through the condenser 26 and the heat absorber 32 with respect to the target temperature is inferior to the accuracy of the temperature of the water that has passed through the heater 14 and the cooler 16 with respect to the target temperature. The water to be adjusted can be used sufficiently for preliminary temperature adjustment within a temperature range in which the characteristics of the ion exchange resin filled in the pure water device 52 can be exhibited.

In addition, even if the distribution ratio of the high-temperature first heat medium is on the heating side or the cooling side by the control unit 22, the cooling water that has passed through the condenser 26 and the heat absorber 32 is supplied to the heat exchanger 50. The water to be adjusted can be adjusted to a temperature range in which the characteristics of the ion exchange resin filled in the pure water device 52 can be sufficiently exhibited.
In the temperature adjusting device shown in FIG. 1, the first heat medium radiated by the heater 14 is adiabatically expanded and cooled by the expansion valve 34, but in the cooling by adiabatic expansion in the expansion valve 34, There is no exchange of heat between the heat medium and the outside. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water as the second heat medium supplied from the outside to the heat absorber 32 via the condenser 26.
Therefore, energy absorbed from the cooling water as the external heat source by the heat absorber 32 of the heat pump means can be added to the compression power energy by the compressor 18 to the high-temperature first heat medium discharged from the compressor 18.
Further, in the temperature adjusting device shown in FIG. 1, the cooling water supplied from the outside is supplied to the heat absorber 32 via the condenser 26 and is removed from the high-temperature first heat medium removed by the condenser 26. Part of the energy can also be added to the high-temperature first heat medium discharged from the compressor 18, and the heating capacity of the heating channel can be improved.
Moreover, in the temperature adjusting device shown in FIG. 1, the cooling water that has passed through the condenser 26 and the heat absorber 32 is supplied to the heat exchanger 50 to adjust the temperature adjustment target water to a predetermined temperature. For this reason, the energy added to the first heat medium by the compressor 18 can be effectively used, and the energy saving can be further improved as compared with the temperature adjusting device shown in FIG.

In the temperature adjusting device shown in FIG. 1, the distribution ratio between the high-temperature first heat medium distributed to the heating flow path side and the high-temperature first heat medium distributed to the cooling flow path side by the proportional three-way valve 20 is supplied to the USER. The temperature can be changed substantially continuously according to the temperature.
For this reason, in the temperature control apparatus shown in FIG. 1, the high temperature 1st heat medium is always supplied to the heating flow path and the cooling flow path, and the heater 14 of the heating flow path and the cooler 16 of the cooling flow path are connected. The minute load fluctuation of the water to be adjusted for temperature adjustment can be quickly dealt with by immediately finely adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path by the proportional three-way valve 20. Can improve responsiveness.
As a result, the temperature of the temperature adjustment target water passing through the heater 14 of the heating channel and the cooler 16 of the cooling channel can be controlled with an accuracy of ± 0.1 ° C. or less with respect to the set temperature.
On the other hand, the temperature of the cooling water that has passed through the condenser 26 and the heat absorber 32 has an accuracy of about ± 10 ° C. with respect to the target temperature, but the ion-exchanger in which the water to be temperature adjusted is filled in the pure water device 52. It can be adjusted to a temperature range in which the characteristics of the resin can be fully exhibited.
Further, in the temperature adjusting device shown in FIG. 1, as described above, the heating capacity of the heating channel is improved, and the proportional three-way valve 20 serving as the distribution unit among the channels including the heating channel and the cooling unit is used. Each of the flow path including the heating flow path and the flow path including the cooling flow path until the first heat medium that has passed through each of the cooler 16 and the heat absorber 32 is joined by the accumulator 36 is independent of the flow path. Is provided. For this reason, even when the set temperature of the temperature adjustment target water passing through the heater 14 and the cooler 16 is significantly increased, the proportional three-way valve 20 allows the distribution ratio of the high-temperature first heat medium to be higher than that of the cooling flow path. The distribution ratio distributed to the heating channel can be significantly increased, and the temperature adjustment target water can be quickly adjusted to a predetermined temperature.

  As described above, in the temperature adjusting apparatus shown in FIG. 1, the control valve 40 as the cooling water control means is provided in the pipe for supplying the cooling water to the condenser 26. The control valve 40 is controlled so that the discharge pressure of the compressor 18 is constant. As shown in FIG. 2, the control valve 40 is provided with a rod-like portion including a valve body 40 b that opens and closes an opening of a valve portion 40 a provided in the cooling water flow path. The rod-like portion is biased in a direction in which the valve body 40b closes the opening of the valve portion 40a by a spring 40c with which the tip end surface abuts. Further, the other end surface of the rod-shaped portion is in contact with the bellows 40d to which the pressure of the first heat medium discharged from the compressor 18 is supplied, and the rod-shaped portion is opened against the urging force of the spring 40c. The valve body 40b is urged in the direction to open the valve.

For this reason, when the discharge pressure of the compressor 18 becomes equal to or greater than the urging force of the spring 40 c, the valve body 40 d is moved by the bellows 40 d in a direction to open the opening of the valve portion 40 a and the cooling supplied to the condenser 26 is performed. The amount of water increases and the cooling capacity of the condenser 26 is improved. For this reason, the discharge pressure of the compressor 18 decreases.
On the other hand, when the discharge pressure of the compressor 18 becomes equal to or less than the biasing force of the spring 40c, the valve body 40d moves in the direction of closing the opening of the valve portion 40a, and the amount of cooling water supplied to the condenser 26 decreases. The cooling capacity of the condenser 26 is reduced. For this reason, the discharge pressure of the compressor 18 becomes high.
In this way, the temperature adjusting device can be stably operated by keeping the discharge pressure of the compressor 18 constant.
By the way, when the temperature of the temperature adjustment target water passing through the heater 14 and the cooler 16 is significantly increased, the controller 22 fully closes the opening degree of the discharge port on the cooling flow path side of the proportional three-way valve 20. The discharge port on the heating flow path side is set to a fully open state or a state close to a fully open state.
In addition, when the temperature of the temperature adjustment target water is low, the high temperature first heat medium supplied to the heater 14 in the heating channel is condensed by the low temperature water in the heater 14 and discharged from the compressor 18. Since the pressure is lower than the predetermined pressure, the control valve 40 is closed and the cooling water is not supplied to the condenser 26.
In this way, when the cooling water is not supplied to the condenser 26, the cooling water supplied from the condenser 26 to the heat absorber 32 of the heat pump means is also not supplied. For this reason, the heat absorber 32 becomes an operation stop state, and a heat pump means stops functioning.
In addition, heat exchange between the first heat medium, which is radiated and condensed by the heater 14, is adiabatically expanded by the expansion valve 34 and cooled, and the cooling water is not performed, and the heat absorber 32 may freeze. There is.

For this reason, in the temperature adjusting device shown in FIG. 1, a control valve 44 is provided in the bypass piping of the control valve 40 as means for supplying cooling water to the heat absorber 32. In the control valve 44, the opening degree of the discharge port on the cooling channel side of the proportional three-way valve 20 is in a fully closed state or a state close to a fully closed state, and the discharge port on the heating channel side is in a fully open state or a state close to a fully open state. When this occurs, it opens by a signal from the control unit 22, forcibly supplies cooling water to the condenser 26, and the heat absorber 32 is in an operating state.
Therefore, when the temperature setting of the temperature adjustment target water passing through the heater 14 and the cooler 16 is significantly increased, or when the air flow passing through the heater 14 and the cooler 16 is low temperature, the cooling is performed. Even when the distribution ratio of the high-temperature first heat medium distributed to the flow path side becomes zero or in the vicinity thereof, a predetermined amount of cooling water can be supplied to the heat absorber 32 to prevent the heat absorber 32 from freezing and heat pump means. The function of can be demonstrated.
When the discharge pressure of the compressor 18 increases and reaches a predetermined pressure, the control valve 44 is closed by a signal from the control unit 22. Thereafter, the supply amount of the cooling water supplied to the condenser 26 is controlled so that the pressure on the discharge side of the compressor 18 is kept constant by the control valve 40.

In the temperature adjusting device shown in FIG. 1, the proportional three-way valve 20 is used as the distributing means. However, as shown in FIG. 3A, two two-way valves 38a and 38b can be used. Each of the two two-way valves 38 a and 38 b is controlled by the control unit 22. The first control unit 22 adjusts the opening degree of each of the two-way valves 38a and 38b, and the gaseous high temperature first heat medium compressed and heated by the compressor 18 is heated and cooled. The distribution ratio to be distributed to the water is adjusted substantially continuously, and the temperature adjustment target water passing through the heater 14 and the cooler 16 is controlled to a predetermined temperature. At that time, the total amount of the high temperature first heat medium amount distributed to the heater 14 side and the high temperature first heat medium amount distributed to the cooler 16 side is the first high temperature discharged from the compressor 18. The opening of the two-way valves 38a and 38b is adjusted so as to be equal to the amount of heat medium, and is continuously proportionally distributed.
At that time, the relationship between the valve opening and the flow rate of each of the two-way valves 38a and 38b is not linear as shown in FIG. Therefore, the control unit 22 holds the flow rate characteristic data for each of the two-way valves 38a and 38b shown in FIG. 3B, and the control unit 22 determines the flow rate characteristics of the two-way valves 38a and 38b. Then, an opening degree signal is transmitted to each of the two-way valves 38a and 38b.
Here, “to adjust the distribution ratio distributed to the heating flow path and the cooling flow path substantially continuously” or “to adjust the distribution ratio substantially continuously” means that the two-way valves 38a and 38b are stepped. When driven by control and adjusting the distribution ratio between the heating channel and the cooling channel, the opening degree of the two-way valves 38a, 38b is microscopically driven and adjusted, It is meant to include the case of being continuously driven and adjusted as a whole.

In the temperature adjusting device shown in FIGS. 1 to 3, water stored in a storage tank 29 different from the storage tank 64 in which water to be temperature adjusted is stored is supplied to the condenser 26 and the heat absorber 32. As shown in FIG. 4, the temperature adjustment target water stored in the storage tank 64 is supplied to the condenser 26 and the heat absorber 32, and the temperature adjustment target water that has passed through the condenser 26 and the heat absorber 32 is purified water. It may be supplied to the container 52.
Thus, the temperature range in which the temperature of the temperature adjustment target water stored in the storage tank 64 that has passed through the condenser 26 and the heat absorber 32 can sufficiently exhibit the characteristics of the ion-exchange resin charged in the pure water device 52. Can be adjusted.
4 that are the same as those of the temperature adjusting device shown in FIG. 1 are given the same reference numerals as those in FIG. 1 and detailed description thereof is omitted. .

In the temperature adjusting device shown in FIGS. 1 to 4, the condenser 26 and the heat absorber 32 are directly or indirectly used for the preliminary temperature adjustment of the water to be temperature adjusted. As shown in FIG. You may make it supply the water which passed the container 26 and the heat absorber 32 to an external apparatus.
In the temperature control apparatus shown in FIG. 5, the water returned from the 1st USER is stored in the storage tank 64, and this water is directly supplied to the cooler 16 and the heater 14 to perform precise temperature adjustment and return from the 2nd USER. From the storage tank 29 that stores the water, the condenser 26 and the heat absorber 32 are supplied, and the water that has passed through the condenser 26 and the heat absorber 32 is supplied to the 2nd USER.
Note that, among the constituent members constituting the temperature adjusting device shown in FIG. 5, the same members as those of the temperature adjusting device shown in FIG. .

1 to 5, water is used as a fluid to be supplied to the condenser 26 and the heat absorber 32, but as a fluid to be supplied to the condenser 26 and the heat absorber 32 as shown in FIG. Air may be used.
In the temperature adjusting device shown in FIG. 6, air is passed through the condenser 26 and the heat absorber 32 by sucking air into the chamber 60 containing the condenser 26 and the heat absorber 32 by the fan 62. Can be adjusted to a predetermined temperature.
Of the constituent members constituting the temperature adjusting device shown in FIG. 6, the same members as the constituent members of the temperature adjusting device shown in FIG. .

DESCRIPTION OF SYMBOLS 14 Heater 16 Cooler 18 Compressor 20 Proportional three-way valve 22 Control part 24 Temperature sensor 26 Condenser 28, 34 Expansion valve 29, 64 Storage tank 32, 66 Pump 32 Heat absorber 36 Accumulator 38a, 38b Two-way valve 40 Control valve 50 Heat exchanger 52 Pure water device 60 Chamber 62 Fan

Claims (9)

A heating flow path in which a part of the high temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and a first portion after the remaining portion of the high temperature first heat medium is cooled by the condensation means. A cooling flow path that is adiabatically expanded by the expansion means, is further cooled, and is supplied to the cooling means, so that the temperature adjustment target fluid that passes through the heating means and the cooling means is adjusted to a predetermined temperature. The temperature adjustment is such that the high-temperature first heat medium is distributed to the heating flow path and the cooling flow path, and the first heat medium that has passed through each of the heating flow path and the cooling flow path is re-supplied to the compressor. A device,
A portion of the high temperature first heat medium discharged from the compressor is distributed to the heating flow path side, and the remaining portion of the high temperature first heat medium is distributed to the cooling flow path side, and the heating flow and cooling are distributed. A distribution means capable of changing a distribution ratio of the high-temperature first heat medium distributed to the flow path;
In order to improve the heating capacity of the heating flow path, the first heat medium that is cooled by releasing heat by the heating means and then adiabatically expanded by the second expansion means and further cooled is an external heat source. Heat pump means comprising heat absorption means for absorbing heat from a certain second heat medium;
Controlling the distribution means, adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, and adjusting the temperature adjustment target fluid that passes through the heating means and the cooling means. And a control unit for controlling to a predetermined temperature,
The temperature adjusting device is characterized in that the second heat medium that has passed through the condensing means and the heat absorbing means is supplied for temperature adjustment of an external device or preliminary temperature adjustment of the fluid to be temperature adjusted.   In the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high heating side on the heating flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means is The temperature adjustment device according to claim 1, wherein the distribution means is controlled so as to be adjusted to a temperature lower than that of the fluid adjusted to a predetermined temperature through the heating channel and the cooling channel.   In the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high cooling side on the cooling flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means is The temperature adjusting device according to claim 1, wherein the distribution means is controlled so as to be adjusted to a temperature higher than that of the fluid adjusted to a predetermined temperature through the heating channel and the cooling channel.   The temperature according to any one of claims 1 to 3, further comprising a heat exchanger for preliminary temperature adjustment to which the second heat medium that has passed through the condensing means and the heat absorbing means and the fluid to be temperature adjusted are supplied. Adjustment device.   The temperature adjusting device according to any one of claims 1 to 4, wherein the fluid to be temperature adjusted and the second heat medium are water. A heating flow path in which a part of the high temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and a first portion after the remaining portion of the high temperature first heat medium is cooled by the condensation means. A cooling flow path that is adiabatically expanded by the expansion means, is further cooled, and is supplied to the cooling means, so that the temperature adjustment target fluid that passes through the heating means and the cooling means is adjusted to a predetermined temperature. The temperature adjustment is such that the high-temperature first heat medium is distributed to the heating flow path and the cooling flow path, and the first heat medium that has passed through each of the heating flow path and the cooling flow path is re-supplied to the compressor. A device,
A portion of the high temperature first heat medium discharged from the compressor is distributed to the heating flow path side, and the remaining portion of the high temperature first heat medium is distributed to the cooling flow path side, and the heating flow and cooling are distributed. A distribution means capable of changing a distribution ratio of the high-temperature first heat medium distributed to the flow path;
In order to improve the heating capacity of the heating flow path, the first heat medium that is cooled by releasing heat by the heating means and then adiabatically expanded by the second expansion means and further cooled is used for the temperature adjustment. Heat pump means comprising heat absorbing means for absorbing heat from the target fluid;
Controlling the distribution means, adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path, and adjusting the temperature adjustment target fluid that passes through the heating means and the cooling means. And a control unit for controlling to a predetermined temperature,
The temperature adjusting device is characterized in that the temperature adjustment target fluid that has passed through the condensing means and the heat absorbing means is supplied to the heating means and the cooling means.   In the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high heating side on the heating flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means is The temperature adjusting device according to claim 6, wherein the distribution means is controlled to be adjusted to a temperature lower than that of the fluid adjusted to a predetermined temperature through the heating channel and the cooling channel.   In the control unit, the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path is set to a high cooling side on the cooling flow path side, and the second heat medium that has passed through the condensation means and the heat absorption means is The temperature adjusting device according to claim 6, wherein the distribution means is controlled so as to be adjusted to a temperature higher than that of the fluid adjusted to a predetermined temperature through the heating channel and the cooling channel.   The temperature adjusting device according to any one of claims 6 to 8, wherein the temperature adjustment target fluid and the second heat medium are water.

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