JP4790685B2 - Precision temperature control device - Google Patents

Description

  The present invention relates to a precise temperature control device, and more specifically, adjusts the supply amount of a heat medium supplied to a heating circuit provided with a heating means and a cooling circuit provided with a cooling means. The present invention relates to a precise temperature adjusting device that adjusts the temperature of a fluid to be passed through.

Usually, in the precision processing field such as a semiconductor device manufacturing process, most of them are installed in a temperature-controlled clean room.
However, in recent years, in the precision processing field, processes requiring precision processing with higher processing accuracy than before have been emerging.
In a process that requires such high precision processing, it is usually required that the temperature change environment is smaller than that of a clean room. For this reason, a process requiring high precision processing or the like is provided in a space unit in which precise temperature management is performed.
As a temperature adjusting device used for adjusting the temperature of such a space unit, for example, the temperature adjusting device shown in FIG.
9 includes a cooling circuit including a compressor 100, a three-way valve 102, a condenser 104, an expansion valve 106, and a cooler 108, a compressor 100, a three-way valve 102, a heater 110, and an expansion valve 106. And a heating circuit comprising:
The cooler 108 and the heater 110 adjust the temperature of the air flow to be temperature adjusted blown out from the fan 112.

In such a temperature adjusting device, the high-temperature first heat medium compressed by the compressor 100 is distributed to the cooling circuit and the heating circuit by the three-way valve 102. The high temperature first heat medium distributed to the cooling circuit side is cooled and condensed by the condenser 104. The cooled and agglomerated heat medium is expanded adiabatically by the expansion valve 106, further cooled, and supplied to the cooler 108. In the cooler 108, the heat medium that has been heated to absorb the temperature while cooling the air flow to be temperature-adjusted blown from the fan 112 is supplied to the compressor 100.
On the other hand, the high temperature first heat medium distributed to the heating circuit side is supplied to the heater 110, and the air flow to be temperature adjusted cooled by the cooler 108 is heated and adjusted to a desired temperature. In this manner, in the heater 110, the heat medium that has been radiated and cooled while heating the air flow to be temperature-cooled that has been cooled by the cooler 108 passes through the expansion valve 106 and the cooler 108, and passes through the compressor 100. To be supplied.
JP-A 51-97048

In the temperature adjusting device shown in FIG. 9, the entire amount of the high-temperature first heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. The amount of cooling energy for cooling the temperature-controlled air flow blown out from the fan 112 is constant.
On the other hand, by adjusting the high-temperature first heat medium amount distributed to the heating circuit side by the three-way valve 102, the heating amount in the heater 110 with respect to the air flow to be temperature-adjusted cooled by the cooler 108 can be adjusted.
Therefore, it is possible to adjust the temperature of the air flow to be temperature adjusted that passes through the cooler 108 and the heater 110, and it is possible to perform temperature management in the space unit in which precise temperature management is performed in a narrow temperature range.
However, in the temperature control apparatus shown in FIG. 9, the entire amount of the high-temperature first heat medium compressed by the compressor 100 passes through the expansion valve 106, is adiabatically expanded and cooled, and is supplied to the cooler 108. Therefore, the temperature adjustment for the air flow to be adjusted from the fan 112 is performed exclusively by the high-temperature first heat medium amount compressed by the compressor 100 supplied to the heater 110.

For this reason, when the set temperature of the air flow to be temperature adjusted passing through the cooler 108 and the heater 110 is significantly increased, the heating amount for the air flow to be temperature adjusted is insufficient.
Therefore, when the set temperature of the air flow subject to temperature adjustment passing through the cooler 108 and the heater 110 is significantly increased, the temperature of the air flow subject to temperature adjustment does not reach the set temperature or reaches the set temperature. May take a long time to complete.
In order to make up for such a shortage of the heating amount of the temperature adjusting device shown in FIG. 9, it may be possible to provide the auxiliary electric heater 114 as shown in FIG. 10, but this is wasteful in terms of energy.
Furthermore, in the temperature adjusting device shown in FIGS. 9 and 10, the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit is not displayed, and the operating status of the temperature adjusting device cannot be easily grasped. It was an administrative problem.
Therefore, in the present invention, the conventional temperature in which the heating capacity for the fluid whose temperature is to be adjusted is insufficient, and the operating condition is difficult to visually recognize without displaying the distribution ratio of the high-temperature heat medium distributed between the heating circuit and the cooling circuit. Solves the problems of the adjusting device, improves the heating capacity for the fluid to be temperature adjusted, saves energy, and displays the distribution ratio of the high-temperature heat medium distributed between the heating circuit and the cooling circuit It is to provide a precision temperature control device.

In order to achieve the above object, the present inventors provide a cooling circuit and a heating circuit, and a distribution unit capable of changing a cooling amount and a heating amount with respect to a temperature adjustment target fluid passing through the cooling unit and the heating unit. Providing heat pump means capable of transferring heat from a low temperature part to a high temperature part in order to improve the heating capacity of the heating circuit, and distributing a high temperature heat medium distributed to the heating circuit and the cooling circuit As a result of considering that it is effective to provide a display unit for displaying the ratio, the present invention has been achieved.
That is, the present invention provides a heating circuit in which a part of the high-temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and the remaining portion of the high-temperature first heat medium is cooled by the condensing means. And a cooling circuit that is adiabatically expanded by the first expansion means and further cooled and supplied to the cooling means, and the temperature adjustment target fluid that passes through the heating means and the cooling means is brought to a predetermined temperature. The hot first heat medium is distributed to the heating circuit and the cooling circuit, and the first heat medium that has passed through each of the heating circuit and the cooling circuit is joined and re-supplied to the compressor. A precise temperature control device that distributes a portion of the high temperature first heat medium to the heating circuit side, distributes a remaining portion of the high temperature first heat medium to the cooling circuit side, and heats the heating circuit. Distribution ratio of high temperature first heat medium distributed to each of circuit and cooling circuit A distribution means capable of changing the rate; and the distribution means is controlled to adjust the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit to pass through the heating means and the cooling means A temperature control unit that controls a fluid to be adjusted to a predetermined temperature, and heat so that the heating circuit releases heat and then adiabatic with a second expansion unit so that the heating capacity of the heating circuit is improved. The distribution ratio of the heat pump means having heat absorption means for the first heat medium that has been expanded and further cooled to absorb heat from the second heat medium that is an external heat source, and the high-temperature first heat medium distributed to the heating circuit side And a display unit for displaying a distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side.

In the present invention, among the circuits including the heating circuit and the cooling circuit, the circuit until the first heat medium is merged from the distribution means is provided independently in terms of circuit, so that the temperature of the fluid to be temperature-adjusted The adjustment range can be widened.
The distribution means for distributing the high temperature first heat medium to the heating circuit and the cooling circuit can change the distribution ratio of the high temperature first heat medium distributed to the heating circuit and the cooling circuit substantially continuously. By using the distribution means, the temperature adjustment of the temperature adjustment target fluid can be adjusted more accurately.
This “substantially changeable distribution means” means that a two-way valve or a proportional three-way valve is used as the distribution means, and when the two-way valve or the proportional three-way valve is driven by step control, This means that the three-way valve or the proportional three-way valve is microscopically driven stepwise, but includes a case where it is driven continuously as a whole.

As such a distribution means, a two-way valve provided in each of the branch pipes for branching the high temperature first heat medium from the compressor to the heating circuit side and the cooling circuit side is used, and the two-way valve is used as the temperature control unit. And adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit, the fluid to be temperature-adjusted passing through the heating means and the cooling means is predetermined. A temperature control unit that controls the temperature is used, and in the temperature control unit, a storage unit that stores a relationship between an opening degree and a flow rate of each of the two-way valves, and a two-way valve stored in the storage unit The distribution ratio of the high temperature first heat medium distributed to the heating circuit side displayed on the display unit and the distribution ratio of the high temperature first heat medium distributed to the cooling circuit side from the relationship between the opening degree and the flow rate of each And a high-temperature first distributed to the heating circuit side. It can be easily displayed on the display unit and a distribution ratio of the first heat medium of high temperature which are distributed and the distribution ratio of the medium to the cooling circuit side.
Alternatively, as the distribution means, the total amount of the high temperature first heat medium distributed to the heating circuit side and the high temperature first heat medium distributed to the cooling circuit side is the amount of the high temperature first heat medium discharged from the compressor. Adjusting the opening degree of the heating circuit side outlet and the opening degree of the cooling circuit side outlet so as to be equal, using a proportional three-way valve that proportionally distributes the high temperature first heat medium, and as a temperature control unit, Temperature control that adjusts the opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve to control the temperature adjustment target fluid passing through the heating unit and the cooling unit to a predetermined temperature. The temperature control unit is provided with a high temperature distributed to the heating circuit side displayed on the display unit from the opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve. The distribution ratio of the first heat medium and the high temperature first heat medium distributed to the cooling circuit side By providing a calculation unit that calculates the distribution ratio, the distribution ratio of the high temperature first heat medium distributed to the heat circuit side and the distribution ratio of the high temperature first heat medium distributed to the cooling circuit side are obtained. It can be easily displayed on the display unit.

These display units include a temperature display unit for switching and displaying a current temperature and a set temperature of a temperature adjustment target fluid that has passed through the heating unit and the cooling unit, and a setting unit for setting the set temperature to a desired temperature. By providing this, it is possible to reduce the size of the operation panel of the precision temperature control device.
The display unit is provided with a plurality of LEDs, and the respective distribution ratios on the heating circuit side and the cooling circuit side are displayed by lighting the LEDs, so that the current distribution ratios on the heating circuit side and the cooling circuit side are indicated. You can grasp at a glance.
Moreover, it is preferable from a viewpoint of energy saving to use the 2nd heat medium supplied without being heated or cooled from the outside as a 2nd heat medium.
Further, the cooling medium supplied to the condensing means of the cooling circuit for cooling the high temperature first heat medium and the second heat medium supplied to the heat absorbing means of the heat pump means are made the same heat medium and supplied to the condensing means. Then, it is preferable that the heat of the high-temperature first heat medium removed by the condensing means can be effectively used by supplying it to the heat absorbing means of the heat pump means.

In the precision temperature control apparatus according to the present invention, the high temperature first heat medium discharged from the compressor is supplied to each of the heating means of the heating circuit and the cooling means of the cooling circuit. Further, the distribution means changes the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit, so that the heating amount and the cooling amount for the temperature adjustment target fluid passing through the heating means and the cooling means are changed. Can be adjusted easily.
In addition, the precise temperature control apparatus of the present invention is provided with heat pump means. Since this heat pump means is a means that can transfer heat from a low temperature part to a high temperature part, among the high temperature first heat medium (high temperature part) that is compressed and heated by the compressor, The first heat medium, which has been cooled by releasing heat by the heating means and then adiabatically expanded by the second expansion means and further cooled, is converted into a second heat medium (temperature) of the external heat source by the heat absorption means constituting the heat pump means. Heat absorption from the lower part) and the temperature can be returned to the compressor.
For this reason, in the precise temperature control apparatus of the present invention, the high-temperature first heat medium (high temperature part) discharged from the compressor is supplied with the compression power energy by the compressor and the second heat of the external heat source by the heat pump means. Energy absorbed from the medium (part where the temperature is low) can be added, and the heating capability of the heating means to which the high-temperature first heat medium is supplied can be improved.
Therefore, in the precise temperature control apparatus of the present invention, the minute load fluctuation of the temperature adjustment target fluid passing through the heating means and the cooling means is a distribution ratio of the high temperature first heat medium distributed to the heating circuit and the cooling circuit. It is possible to respond quickly by finely adjusting and improve responsiveness.
In addition, even when the set temperature of the temperature adjustment target fluid that passes through the heating means and the cooling means is significantly increased, the distribution ratio for distributing the distribution ratio of the high-temperature first heat medium to the heating circuit rather than the cooling circuit is greatly increased. By making the temperature higher, the temperature adjustment target fluid can be adjusted to a predetermined temperature.
As described above, in the precise temperature adjustment device of the present invention, even if an auxiliary heater such as an auxiliary electric heater is not required or downsized, the fluid to be temperature adjusted can be adjusted to a predetermined temperature, and energy can be saved.
Further, since the display unit for displaying the distribution ratio of the high-temperature first heat medium distributed to the heating circuit side and the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side is provided, the current temperature The operating status of the adjusting device can be easily grasped, which is convenient for management of the temperature adjusting device.

An example of the precision temperature control apparatus according to the present invention is shown in FIG. The precision temperature control apparatus shown in FIG. 1 is a precision temperature control apparatus for coolant used in machine tools and the like. In this cooling liquid precise temperature adjusting device, the high-temperature first heat medium compressed and discharged by the compressor 10 controlled to rotate at a predetermined rotational speed by an inverter is supplied to the heating circuit and the cooling circuit by the distribution means 12. And distributed. The first heat medium that has passed through each of the heating circuit and the cooling circuit is joined and re-supplied to the compressor 10. Of the circuits including the heating circuit and the cooling circuit, the circuits from the distribution unit 12 to the first heat medium merge are provided independently from each other.
As the first heat medium to be compressed by the compressor 10 shown in FIG. 1, for example, hydrocarbons such as propane, isobutane and cyclopentane, chlorofluorocarbons, ammonia and carbon dioxide gas are supplied, and the temperature is adjusted by vaporization / liquefaction of the heat medium. The coolant is heated and cooled to adjust to a predetermined temperature.
The distribution means 12 is provided with two-way valves 12a and 12b in each branch pipe that branches the high-temperature first heat medium to the heating circuit side and the cooling circuit side. The two-way valves 12a and 12b control the opening degree of the two-way valves 12a and 12b, and the total amount of the high temperature first heat medium distributed to the heating circuit side and the high temperature first heat medium distributed to the cooling circuit side is the compressor 10. A temperature control unit 15 that proportionally distributes the high-temperature first heat medium is provided so as to be equal to the amount of the high-temperature first heat medium discharged from. As will be described later, the temperature control unit 15 controls the degree of opening of each of the two-way valves 12a and 12b based on a signal from the temperature sensor 22 that measures the temperature of the coolant at the outlet of the precision temperature adjusting device. The distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit is changed substantially continuously to adjust the coolant to a predetermined temperature.
Here, “substantially change” means that when each of the two-way valves 12a and 12b is driven by step control, the two-way valves 12a and 12b are microscopically driven stepwise. Specifically, it means that it is continuously driven.
In each of the two-way valves 12a and 12b, the relationship between the valve opening and the flow rate is not linear as shown in FIG. Therefore, the temperature control unit 12c holds the flow rate characteristic data for each of the two-way valves 12a and 12b shown in FIG. 2, and the temperature control unit 12c is based on the flow rate characteristics of the two-way valves 12a and 12b. An opening signal is transmitted to each two-way valve 12a, 12b.

In the heating circuit in which a part of the high-temperature first heat medium discharged from the compressor 10 is distributed, a heater 14 is provided as a heating unit to which the high-temperature first heat medium is supplied. Cooling liquid as a temperature adjustment target returned from the USER stored in the storage tank 24 is supplied to the heater 14 by the pump 26 and heated by the distributed high-temperature first heat medium.
The cooling circuit includes a condenser 16 that condenses the high-temperature first heat medium as a condensing unit that cools the distributed high-temperature first heat medium, and a first heat medium cooled by the condenser 16. An expansion valve 18 serving as a first expansion means that expands adiabatically and further cools, and a cooler 20 to which a cooled first heat medium is supplied are provided. The cooling device 20 is supplied with the temperature adjustment target coolant heated by the heater 14, and the coolant is cooled to the predetermined temperature by the first heat medium cooled to the predetermined temperature.
In this manner, the coolant that has passed through the heater 14 and the cooler 20 is adjusted to the temperature set in the temperature control unit 12c, and is sent to the USER.
The heating circuit and the cooling circuit are provided with a heat exchanger 28 for heating as heat absorption means of the heat pump means. The heating heat exchanger 28 includes a first heat medium that is radiated and cooled by the heater 14 and then adiabatically expanded by an expansion valve 30 as a second expansion means and further cooled, and a cooling circuit. Cooling water that is supplied to the condenser 16 provided as a cooling medium and supplied with cooling water as the second heating medium that has been heated by absorbing the heat of the high-temperature first heating medium The first heat medium that has absorbed the heat returns to the accumulator 31 and is supplied to the compressor 10. The accumulator 31 is also supplied with a first heat medium that has absorbed heat from the cooling water by the cooler 20. As the accumulator 31, an accumulator type accumulator was used.
Even if the accumulator 31 is not installed, the first heat medium that has been heated by absorbing heat from the cooling water by the heat exchanger 28 for heating and the first heat medium that has absorbed heat from the cooling liquid as the temperature adjustment target by the cooler 20. What is necessary is just to join the heat medium and re-supply the compressor 10.

In the precise temperature control apparatus shown in FIG. 1, the first heat medium radiated by the heater 14 is adiabatically expanded and cooled by the expansion valve 30, but in the cooling by adiabatic expansion in the expansion valve 30, 1 There is no heat exchange between the heat medium and the outside. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water as the second heat medium supplied to the heating heat exchanger 28 via the condenser 16 from the outside.
Therefore, the high-temperature first heat medium discharged from the compressor 10 includes the cooling water as the second heat medium supplied from the outside by the heat exchanger 28 for heating of the heat pump means to the compression power energy by the compressor 10. More endothermic energy can be added. Furthermore, in the precise temperature control apparatus shown in FIG. 1, the cooling water supplied from the outside is supplied to the heating heat exchanger 28 via the condenser 16, and the high-temperature first heat removed by the condenser 16. Part of the energy removed from the medium can also be applied to the high temperature first heat medium discharged from the compressor 10. As a result, the heating capacity of the heating circuit can be improved. As a result, the use of other heating means such as an auxiliary heater can be eliminated or downsized.

In the precision temperature control apparatus shown in FIG. 1, the cooling supplied to the condenser 16 so that the pressure on the discharge side of the compressor 10 is kept constant during the piping of the cooling water supplied to the condenser 16. A control valve 32 is provided as a cooling medium control means for controlling the supply amount of water. The control valve 32 is controlled so that the discharge pressure of the compressor 10 is constant.
That is, when the discharge pressure of the compressor 10 exceeds a predetermined pressure, the opening degree of the control valve 32 increases, the amount of cooling water supplied to the condenser 16 increases, and the cooling capacity of the condenser 16 is improved. The For this reason, the discharge pressure of the compressor 10 falls. On the other hand, when the discharge pressure of the compressor 10 becomes a predetermined pressure or less, the opening degree of the control valve 32 becomes small, the amount of cooling water supplied to the condenser 16 decreases, and the cooling capacity of the condenser 16 decreases. . For this reason, the discharge pressure of the compressor 10 becomes high.
In this manner, the temperature adjusting device can be stably operated by keeping the discharge pressure of the compressor 10 constant. Moreover, it can adjust so that the amount of cooling water may be supplied to the condenser 16 more than needed, and it may not discharge | emit out of the system.

By the way, when the temperature setting of the setting / display unit 17 connected to the temperature control unit 15 is significantly increased, the temperature control unit 15 sets the two-way valve 12b to a fully closed state or a state close to a fully closed state. At the same time, the two-way valve 12a is set to a fully open state or a state close to a fully open state, and most of the high temperature first heat medium is distributed to the heating circuit side.
However, the high-temperature first heat medium supplied to the heater 14 of the heating circuit is condensed by the heater 14, and the discharge pressure of the compressor 10 becomes lower than a predetermined pressure. Therefore, the control valve 32 is closed and the condenser No cooling water is supplied to 16.
In this way, when the cooling water is not supplied to the condenser 16, the cooling water supplied from the condenser 16 to the heating heat exchanger 28 of the heat pump means is also not supplied. For this reason, the heat exchanger 28 for heating becomes an operation stop state, and a heat pump means stops functioning.
In addition, heat exchange between the first heat medium and the cooling water that has been radiated and cooled and condensed by the heater 14 and then expanded adiabatically by the expansion valve 30 and further cooled is not performed. There is a risk of freezing.
In this regard, in the precise temperature control apparatus shown in FIG. 1, a control valve 36 is provided in the bypass pipe 34 of the control valve 32 as means for supplying cooling water to the heat exchanger 28 for heating. The control valve 36 receives a signal from the temperature control unit 15 when the two-way valve 12a is in a fully open state or a state close to a full open state (or when the two-way valve 12b is in a fully closed state or a state close to a fully closed state). The cooling water is forcibly supplied to the condenser 16 and the heating heat exchanger 28 is in an operating state.
For this reason, even when the temperature setting of the setting / display unit 17 is significantly increased, even when the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side becomes zero or in the vicinity thereof, the heating is performed. A predetermined amount of cooling water can be supplied to the heat exchanger 28, so that the heating heat exchanger 28 can be prevented from freezing and the function of the heat pump means can be exhibited.
When the discharge pressure of the compressor 10 increases and reaches a predetermined pressure, the control valve 36 is closed by a signal from the temperature control unit 15. Thereafter, the amount of cooling water supplied to the condenser 16 is controlled so that the pressure on the discharge side of the compressor 10 is kept constant by the control valve 32.

As shown in FIG. 3, a setting / display unit 17 is connected to the temperature control unit 15 of the precision temperature control apparatus shown in FIG. The setting / display unit 17 is a distribution ratio of the high-temperature first heat medium distributed to the heating circuit side (refers to a ratio to the high-temperature first heat medium discharged from the compressor 10; hereinafter, simply referred to as distribution ratio). And a display unit 17a for displaying the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side, and a setting unit 17b for setting the set temperature of the cooling water to a desired temperature. Yes.
As shown in FIG. 4, the setting / display unit 17 is provided on an operation panel 21 provided in the precision temperature adjusting device. The display unit 17a of the operation panel 21 shown in FIG. 4 is provided with two upper and lower displays, and the upper display displays an LED display that displays the distribution ratio of the high-temperature first heat medium distributed to the heating circuit side. The lower display is an LED display unit 19b that displays the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side. In the LED display portions 19a and 19b, a plurality of LEDs are arranged in a bar shape with the distribution ratio of the high-temperature first heat medium distributed to the heating circuit side and the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side. Lights up to display. In this LED, approximately half of the display unit is shielded so that it is turned on in a semicircular appearance.
Further, the setting / display unit 17 switches between the current temperature and the set temperature of the cooling water that has passed through the heater 14 and the cooler 20, and sets the set temperature to a desired temperature. A setting unit 17b is provided. When operating the setting unit 17b to change the set temperature, the temperature display unit 17c is automatically changed from the current temperature to the set temperature.

The setting / display unit 17 shown in FIGS. 3 and 4 is connected to the calculation unit 15a of the temperature control unit 15 as shown in FIG. 3, and the set temperature set by the setting unit 17b passes through the calculation unit 15a. Is displayed on the temperature display portion 17c of the display portion 17a. Further, the current temperature of the cooling water that has passed through the heater 14 and the cooler 20 measured by the temperature sensor 22 is also displayed on the temperature display unit 17c via the calculation unit 15a.
In the calculation unit 15a, the current temperature of the cooling water that has passed through the heater 14 and the cooler 20 measured by the temperature sensor 22 is compared with the set temperature set by the setting unit 17b, and stored in the storage unit 15b. The distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit is calculated based on the relationship between the opening degree and the flow rate of the two-way valves 12a and 12b (FIG. 2). At this time, in the calculation unit 15a, the total amount of the high-temperature first heat medium amount distributed to the heating circuit side and the high-temperature first heat medium amount distributed to the cooling circuit side is discharged from the compressor 10. The openings of the two-way valves 12a and 12b are determined so as to be equal to the high-temperature first heat medium amount and output to the two-way valves 12a and 12b.
As described above, the calculation unit 15a controls the respective opening degrees of the two-way valves 12a and 12b and substantially continuously changes the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit. The coolant that has passed through the heater 14 and the cooler 20 is adjusted to a predetermined temperature. Further, the calculation unit 15a displays the calculated distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit on the temperature display unit 17c.
Moreover, in the calculating part 15a, as a result of calculating in the calculating part 15a, the two-way valve 12a became a fully open state or a state close to a fully open state (or the two-way valve 12b was in a fully closed state or a state close to a fully closed state). At this time, a signal for opening the control valve 36 is transmitted, and the cooling water is forcibly supplied to the condenser 16 so that the heat exchanger 28 for heating is in an operating state.

In the precision temperature control apparatus shown in FIG. 1, the heating capacity of the heating circuit can be improved by installing a heat pump means, and the two-way valves 12a and 12b distribute the heat to the first heat medium and the cooling circuit distributed to the heating circuit side. The distribution ratio with the high temperature first heat medium to be performed can be changed substantially continuously according to the temperature of the coolant discharged from the cooler 20.
For this reason, in the precise temperature control apparatus shown in FIG. 1, the high temperature first heat medium is always supplied to the heating circuit and the cooling circuit, and the temperature that passes through the heater 14 of the heating circuit and the cooler 20 of the cooling circuit. A minute load fluctuation of the coolant to be adjusted can be quickly dealt with by quickly finely adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit by the two-way valves 12a and 12b. Can be improved.
As a result, the temperature of the coolant to be adjusted that passes through the heater 14 of the heating circuit and the cooler 20 of the cooling circuit can be controlled with an accuracy of ± 0.1 ° C. or less with respect to the set temperature.

Further, in the temperature adjusting device shown in FIG. 1, as described above, the heating capacity of the heating circuit is improved, and cooling is performed from the two-way valves 12a and 12b serving as distribution means in the circuit including the heating circuit and the cooling means. Circuits until the first heat medium that has passed through each of the heat exchanger 20 and the heating heat exchanger 28 are joined by the accumulator 31 are provided independently from each other. For this reason, even when the set temperature of the coolant to be adjusted that passes through the heater 14 and the cooler 20 is significantly increased, the distribution ratio of the high-temperature first heat medium is reduced by the two-way valves 12a and 12b in the cooling circuit. As a result, the distribution ratio distributed to the heating circuit can be significantly increased, and the coolant to be temperature adjusted can be quickly adjusted to a predetermined temperature.
Furthermore, in the temperature adjusting device shown in FIG. 1, since the heating capacity of the heating circuit is improved and it is not necessary to use other heating means such as an auxiliary heater, compared with a temperature adjusting device provided with an auxiliary heater or the like, Significant energy savings can be achieved.

In the precision temperature control apparatus shown in FIG. 1, the two-way valves 12a and 12b are provided as the distributing means, but a proportional three-way valve 38 may be used as shown in FIG. The proportional three-way valve 38 has a total amount of the high temperature first heat medium distributed to the heating circuit side and the high temperature first heat medium distributed to the cooling circuit side, and the high temperature first heat medium amount discharged from the compressor. The opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port are adjusted so as to be equal to, and the high temperature first heat medium is proportionally distributed. This proportional three-way valve 38 is also controlled by the temperature control unit 15.
In the calculation unit 15a of the temperature control unit 15, based on a comparison between the current temperature of the cooling water that has passed through the heater 14 and the cooler 20 measured by the temperature sensor 22 and the set temperature set by the setting unit 17b, The opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve 38 are calculated, and the result is transmitted to the proportional three-way valve 38.
In this way, the arithmetic unit 15a controls the proportional three-way valve 38 to continuously change the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit, so that the heater 14 and the cooler 20 The temperature adjustment target coolant that has passed through is adjusted to a predetermined temperature.
Further, in the calculation unit 15a, the distribution ratio and cooling of the high-temperature first heat medium distributed to the heating circuit side based on the opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve 38. The distribution ratio of the high-temperature first heat medium distributed to the circuit side is calculated and displayed on the temperature display unit 17c.

FIG. 1 illustrates a temperature adjusting device that adjusts the temperature of the coolant, but the present invention can also be applied to a temperature adjusting device for air. An example is shown in FIG. In the temperature control device for air shown in FIG. 6, the high-temperature first heat medium compressed by the compressor 40 is distributed to the heating circuit and the cooling circuit by the distribution means 42. A heater 44 provided in the heating circuit and a cooler 46 provided in the cooling circuit are provided in the space unit 48. A fan 49 is provided so that the air flow subject to temperature adjustment passes through the heater 44 and the cooler 46.
The distribution means 42 that distributes the high-temperature first heat medium compressed by the compressor 40 to the heating circuit and the cooling circuit has a branch pipe that branches the high-temperature first heat medium into the heating circuit side and the cooling circuit side. Each is provided with a two-way valve 42a, 42b. The two-way valves 42a and 42b control the degree of opening, and the total amount of the high-temperature first heat medium distributed to the heating circuit side and the high-temperature first heat medium distributed to the cooling circuit side is the compressor 40. A temperature control unit 43 that proportionally distributes the high-temperature first heat medium is provided so as to be equal to the amount of the high-temperature first heat medium discharged from. Similar to the temperature control unit 15 shown in FIG. 3, the temperature control unit 43 is provided with a calculation unit 43a and a storage unit 43b. The temperature control unit 43 controls the opening degrees of the two-way valves 42a and 42b based on a signal from the temperature sensor 52 provided on the discharge side of the fan 49 from which the temperature-adjusted air flow is discharged. The distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit is changed substantially continuously, and the air flow sucked into the space unit 48 is adjusted to a predetermined temperature.

The high-temperature first heat medium distributed to the heating circuit is directly supplied to the heater 44 and heats the outside air sucked into the space unit 48. At this time, the high-temperature first heat medium dissipates heat. To be cooled.
On the other hand, the high-temperature first heat medium distributed to the cooling circuit side is cooled by the condenser 50, further adiabatically expanded by the expansion valve 52 as the first expansion means, and further cooled. The first heat medium cooled by adiabatic expansion is supplied to the cooler 46.
The first heat medium supplied to the cooler 46 cools the air flow sucked into the space unit 48 and heated by the heater 44, and the temperature is adjusted to a predetermined temperature. At that time, the first heat medium supplied to the cooler 46 absorbs heat from the air flow.
Cooling water as the second heat medium is supplied to the condenser 50 provided in the cooling circuit via the pipe 51 without being heated or cooled from the outside. The cooling water is heated by the high temperature first heat medium in the condenser 50 and discharged from the pipe 54. The cooling water discharged from the pipe 54 is supplied as a heating source to the heating heat exchanger 57 of the heat pump means.
The heating heat exchanger 57 is supplied with a low-temperature first heat medium that is radiated and cooled by the heater 44 and then adiabatically expanded by the expansion valve 58 and further cooled. For this reason, in the heat exchanger 57 for heating, the low-temperature first heat medium that has been radiated by the heater 44 and further adiabatically expanded and cooled from the cooling water supplied via the condenser 50 absorbs heat and rises. Be warmed.
The first heat medium whose temperature has been raised is supplied to the accumulator 60. The accumulator 60 is also supplied with the first heat medium that is supplied to the cooler 46 and absorbs heat from the fluid sucked into the space unit 48, and is merged with the first heat medium that has passed through the heat exchanger 57 for heating. , And re-supplied to the compressor 40. The accumulator 60 is a type of accumulator that can store a liquid component and reliably supply only the gas component to the compressor 10. For this reason, the state of the first heat medium supplied to the compressor 40 can be stabilized by installing the accumulator 60.

As described above, even in the temperature adjusting device shown in FIG. 6, the heating capacity of the heating circuit can be improved by installing the heat pump means, and the high-temperature first heat medium distributed to the heating circuit side by the two-way valves 42a and 42b and the cooling. The distribution ratio of the high-temperature first heat medium distributed to the circuit can be changed substantially continuously in accordance with the temperature of the air flow to be temperature adjusted that has passed through the heater 44 and the cooler 46.
For this reason, in the precise temperature control apparatus shown in FIG. 6, the first heat medium having a high temperature is constantly supplied to the heating circuit and the cooling circuit, and the air flow of the temperature adjustment target that passes through the heater 44 and the cooler 46 is controlled. Minute load fluctuations can be quickly dealt with by quickly finely adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit by the two-way valves 42a and 42b, thereby improving the responsiveness.
As a result, it is possible to control the temperature of the temperature-controlled air flow passing through the heater 44 of the heating circuit and the cooler 46 of the cooling circuit with an accuracy of ± 0.1 ° C. or less with respect to the set temperature, as shown in FIG. The temperature change of the space unit 48 in which the temperature adjusting device is installed can be made smaller than the temperature change of the clean room, and a process requiring precision machining can be installed.

Further, in the temperature adjusting device shown in FIG. 6, as described above, the heating capacity of the heating circuit is improved, and cooling is performed from the two-way valves 42a and 42b serving as distribution means among the circuits including the heating circuit and the cooling means. Circuits until the first heat medium that has passed through each of the heat exchanger 46 and the heating heat exchanger 57 are joined by the accumulator 60 are provided independently from each other. For this reason, even when the set temperature of the air flow to be temperature adjusted passing through the heater 44 and the cooler 46 is significantly increased, the distribution ratio of the high-temperature first heat medium is reduced by the two-way valves 42a and 42b in the cooling circuit. As a result, the distribution ratio distributed to the heating circuit can be significantly increased, and the coolant to be temperature adjusted can be quickly adjusted to a predetermined temperature.
As a result, for example, in the temperature adjusting device shown in FIG. 10, the temperature setting range is about 20 to 26 ° C., but in the temperature adjusting device shown in FIG. 6, the temperature setting range is greatly expanded to 18 to 35 ° C. it can.
Further, in the temperature adjusting device shown in FIG. 6, the heating capacity of the heating circuit is improved and it is not necessary to use other heating means such as an auxiliary heater. Therefore, the temperature adjusting device provided with the auxiliary heater 114 shown in FIG. In comparison, significant energy saving can be achieved.
For example, in the temperature control apparatus provided with the auxiliary heater 114 shown in FIG. 10, the breakdown of the total energy consumption is 18% for the compressor 100, 69% for the auxiliary heater 114, and 13% for the blower 112. In this regard, the temperature adjustment device shown in FIG. 6 can cut the energy consumption of the auxiliary heater 114.
For this reason, when the system of the temperature control apparatus shown in FIG. 10 is applied to a water-cooled air conditioner with a discharge rate of about 20 m ³ / min, the maximum power consumption is 11.7 KW, but it is shown in FIG. When the temperature control system is applied, the maximum power consumption can be reduced to about 2.4 KW.

In the temperature adjusting device shown in FIG. 6, a control valve 62 as a refrigerant control means is provided in a pipe 51 that supplies a cooling medium to the condenser 50. The control valve 62 is controlled so that the discharge pressure of the compressor 40 is constant.
That is, when the discharge pressure of the compressor 40 exceeds a certain value, the opening degree of the control valve 62 increases, the amount of the cooling medium supplied to the condenser 50 increases, and the cooling capacity of the condenser 50 is improved. Is done. For this reason, the discharge pressure of the compressor 40 falls. On the other hand, when the discharge pressure of the compressor 40 becomes a certain value or less, the opening degree of the control valve 62 decreases, the amount of the cooling medium supplied to the condenser 50 decreases, and the cooling capacity of the condenser 50 decreases. To do. For this reason, the discharge pressure of the compressor 40 becomes high.
In this way, the temperature adjusting device can be stably operated by keeping the discharge pressure of the compressor 40 constant.

By the way, in the temperature adjustment device for air, it is frequently performed that the temperature setting of the setting / display unit 45 connected to the temperature control unit 43 is significantly increased. As described above, when the temperature setting of the setting / display unit 45 is significantly increased, the temperature control unit 43 sets the two-way valve 42b to a fully closed state or a state close to the fully closed state, and fully opens the two-way valve 42a. The state is close to the fully open state, and most of the high-temperature first heat medium is distributed to the heating circuit side.
At this time, the high temperature first heat medium supplied to the heater 44 of the heating circuit is condensed by the heater 44, and the discharge pressure of the compressor 40 becomes lower than a predetermined pressure, so that the control valve 62 is closed. The cooling water is not supplied to the condenser 50.
Thus, when the cooling water is not supplied to the condenser 50, the cooling water supplied from the condenser 50 to the heating heat exchanger 56 constituting the heat pump means is also not supplied. For this reason, the heat exchanger 56 for heating becomes an operation stop state, and a heat pump means stops functioning.
In addition, the heat medium that has dissipated heat and condensed by the heater 44 is expanded in an adiabatic manner by the expansion valve 58 and heat exchange between the cooled heat medium and the cooling water is not performed, and the heat exchanger 56 for heating may freeze. There is.
In this regard, in the precise temperature adjustment apparatus shown in FIG. 6, a control valve 66 is provided in the bypass pipe 64 of the control valve 62 as means for supplying cooling water to the heat exchanger 56 for heating. The control valve 66 receives a signal from the temperature control unit 43 when the two-way valve 42a is in a fully open state or a state close to a fully open state (or when the two-way valve 42b is in a fully closed state or a state close to a fully closed state). The cooling water is forcibly supplied to the condenser 16 and the heating heat exchanger 56 is in an operating state.
For this reason, the distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side is zero, as in the case where the temperature setting of the setting / display unit 45 connected to the temperature control unit 43 is significantly increased. Even in the vicinity, a predetermined amount of cooling water can be supplied to the heating heat exchanger 56, the freezing of the heating heat exchanger 56 can be prevented, and the function of the heat pump means can be exhibited.
When the discharge pressure of the compressor 40 increases and reaches a predetermined pressure, the control valve 66 is closed by a signal from the temperature control unit 43. Thereafter, the amount of cooling water supplied to the condenser 50 is controlled so that the pressure on the discharge side of the compressor 40 is kept constant by the control valve 66.

The proportional temperature control apparatus shown in FIG. 6 may also use the proportional three-way valve 38 shown in FIG. The proportional three-way valve 38 includes a high temperature first heat medium in which a total amount of the high temperature first heat medium distributed to the heating circuit side and the high temperature first heat medium distributed to the cooling circuit side is discharged from the compressor 40. The high temperature first heat medium is proportionally distributed so as to be equal to the amount. The proportional three-way valve 38 is also controlled by the temperature control unit 43 based on a signal from the temperature sensor 52 provided on the discharge side of the fan 49, and the high-temperature first heat medium distributed to the heating circuit and the cooling circuit. The distribution ratio can be changed continuously.
Further, in the temperature adjusting device shown in FIG. 6, the control valve 66 is provided in the bypass pipe 64 of the control valve 62 provided in the pipe 51 for supplying the cooling water to the condenser 50. However, as shown in FIG. The piping 68 may be provided, and the orifice 68 may be provided so that the cooling water with the minimum flow rate at which the heating heat exchanger 56 can be always operated can be supplied.
The temperature control unit 43 and the setting / display unit 45 have the same configuration as the temperature control unit 15 and the setting / display unit 17 shown in FIG. The numbers of the constituent members are described in parentheses.

As described above, in the LED display portions 19a and 19b of the setting / display portion 17 used in the temperature adjusting apparatus shown in FIGS. 1 to 7, as shown in FIG. 4, the high temperature first heat distributed to the heating circuit side. The distribution ratio of the medium and the distribution ratio of the high temperature first heat medium distributed to the cooling circuit side are displayed with a plurality of LEDs lit in a bar shape, but a pair of LEDs are lit as shown in FIG. May be displayed. In the LED display sections 19a and 19b of the setting / display section 17 shown in FIG. 8, the distribution ratio of the high temperature first heat medium distributed to the heating circuit side and the distribution of the high temperature first heat medium distributed to the cooling circuit side. In accordance with the change from the ratio, the pair of LEDs that are lit move in the left-right direction.
In this case, from the left side to the right side for a plurality of LEDs arranged on the display unit 19a up to the LED of the part to be lit, for example, from the right side to the left side for a plurality of LEDs arranged on the display unit 19b, for example, You may make it reach | attain by lighting one by one at intervals of about 0.5 second. In this way, if a plurality of LEDs arranged side by side are sequentially turned on to reach, a so-called “flasher” display effect can be obtained, and the user can recognize the display contents sensibly, unique and An effective setting / display unit 17 can be obtained.

It is a circuit diagram explaining an example of the temperature control apparatus which concerns on this invention. It is a graph explaining the flow characteristic of the two-way valves 12a and 12b which comprise the distribution means shown in FIG. It is the schematic explaining the structure of the temperature control part 15 and the setting / display part 17 of the temperature control apparatus shown in FIG. It is a front view of the setting / display part 17 of the temperature control apparatus shown in FIG. It is explanatory drawing explaining the proportional three-way valve which can be used instead of the two-way valves 12a and 12b. It is a circuit diagram explaining the other example of the temperature control apparatus which concerns on this invention. It is explanatory drawing explaining the orifice which can be used instead of the control valve provided in the bypass piping 64 of the control valve of the piping which supplies a cooling water to a condenser. It is the schematic explaining the other structure of the temperature control part 15 and the setting / display part 17 of the temperature control apparatus shown in FIG. It is the schematic of the conventional temperature control apparatus. It is the schematic explaining the example of improvement of the conventional temperature control apparatus.

Explanation of symbols

10, 40 Compressor 12, 42 Distributing means 12a, 12b, 42a, 42b Two-way valve 12c, 42c Temperature controller 14, 44 Heater 15, 43 Temperature controller 16, 50 Condenser 17, 45 Setting / display unit 18 , 30, 52, 58 Expansion valve 20, 46 Cooler 22, 52 Temperature sensor 24 Storage tank 26 Pump 28, 56 Heat exchanger 31, 60 Accumulator 32, 36, 62, 66 Control valve 34, 64 Bypass piping 38 Proportional three-way valve 40 Spatial unit 49 Fan

Claims (9)

A heating circuit in which a part of the high temperature first heat medium compressed and heated by the compressor is supplied to the heating means, and the first expansion after the remaining portion of the high temperature first heat medium is cooled by the condensation means A cooling circuit that is adiabatically expanded by the means, further cooled and supplied to the cooling means, and adjusts the temperature adjustment target fluid that passes through the heating means and the cooling means to a predetermined temperature. A precision temperature control device in which a high-temperature first heat medium is distributed to a heating circuit and a cooling circuit, and the first heat medium that has passed through each of the heating circuit and the cooling circuit merges and is re-supplied to the compressor. There,
A part of the high temperature first heat medium is distributed to the heating circuit side, a remaining part of the high temperature first heat medium is distributed to the cooling circuit side, and distributed to each of the heating circuit and the cooling circuit. Distribution means capable of changing the distribution ratio of the high-temperature first heat medium to be performed;
The distribution means is controlled to adjust the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit, so that the temperature adjustment target fluid that passes through the heating means and the cooling means has a predetermined temperature. A temperature control unit for controlling
In order to improve the heating capability of the heating circuit, the first heat medium that is cooled by releasing heat by the heating means and then adiabatically expanding by the second expansion means is further an external heat source. Heat pump means comprising heat absorbing means for absorbing heat from the second heat medium;
A display unit is provided for displaying a distribution ratio of the high-temperature first heat medium distributed to the heating circuit side and a distribution ratio of the high-temperature first heat medium distributed to the cooling circuit side. A precise temperature control device.   The precise temperature control apparatus according to claim 1, wherein a circuit from the distribution means to the joining of the first heat medium is provided independently from the circuit including the heating circuit and the cooling circuit.   3. The precise temperature control apparatus according to claim 1, wherein the distribution means is a distribution means capable of changing the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit substantially continuously. . The distribution means is a two-way valve provided in each branch pipe that branches the high-temperature first heat medium from the compressor into the heating circuit side and the cooling circuit side,
The temperature control unit adjusts the opening degree of each of the two-way valves, adjusts the distribution ratio of the high-temperature first heat medium distributed to the heating circuit and the cooling circuit, and sets the heating unit and the cooling unit. A temperature control unit that controls a fluid to be adjusted for temperature control to a predetermined temperature,
In the temperature control unit, a storage unit storing a relationship between the opening degree and the flow rate of each of the two-way valves, and a relationship between each opening degree and the flow rate of the two-way valve stored in the storage unit. And a calculation unit for calculating a distribution ratio of the high temperature first heat medium distributed to the heating circuit side displayed on the display unit and a distribution ratio of the high temperature first heat medium distributed to the cooling circuit side. The precision temperature control apparatus as described in any one of Claims 1-3. The total amount of the high temperature first heat medium distributed to the heating circuit side and the high temperature first heat medium distributed to the cooling circuit side by the distribution means becomes equal to the amount of the high temperature first heat medium discharged from the compressor. The proportional three-way valve that proportionally distributes the high temperature first heat medium by adjusting the opening degree of the heating circuit side outlet and the opening degree of the cooling circuit side outlet,
In addition, the temperature control unit adjusts the opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve so that the temperature adjustment target fluid passing through the heating unit and the cooling unit is predetermined. A temperature control unit for controlling the temperature,
The temperature control unit includes a high temperature first heat medium distributed to the heating circuit side displayed on the display unit based on the opening degree of the heating circuit side discharge port and the opening degree of the cooling circuit side discharge port of the proportional three-way valve. The precision temperature control apparatus as described in any one of Claims 1-3 which comprises the calculating part which calculates the distribution ratio of these, and the distribution ratio of the high temperature 1st heat medium distributed to the cooling circuit side.   The precise temperature control apparatus according to any one of claims 1 to 5, wherein the second heat medium is a second heat medium supplied without being heated or cooled from the outside.   The cooling medium supplied to the condensing means of the cooling circuit to cool the high-temperature first heat medium and the second heat medium supplied to the heat absorbing means of the heat pump means are the same heat medium and are supplied to the condensing means. The precision temperature control apparatus according to any one of claims 1 to 6, which is supplied to the heat absorption means of the heat pump means afterwards.   The display unit is provided with a temperature display unit that switches between a current temperature and a set temperature of the fluid to be adjusted that has passed through the heating unit and the cooling unit, and a setting unit that sets the set temperature to a desired temperature. The precision temperature control apparatus as described in any one of Claims 1-7.   The display unit is provided with a plurality of LEDs, and each distribution ratio between the heating circuit side and the cooling circuit side is displayed by turning on the LEDs. Temperature control device.