JP5526359B2 - Temperature control blower - Google Patents

Description

  The present invention relates to a temperature adjustment blower that blows a temperature-adjusted gas.

For example, in the manufacture of a liquid crystal display, precision processing such as film formation by sputtering or plasma CVD or exposure by an exposure apparatus is performed on a glass plate in a clean room controlled in temperature and humidity.
By the way, although this glass plate has to be conveyed between each manufacturing process, when trying to convey with the conveyor using a normal roller, there existed a subject that high-speed movement, a sudden stop, etc. were difficult.

Then, when conveying this glass plate, conveying between each process at the time of manufacture using an air conveyance apparatus is proposed conventionally (for example, refer patent document 1).
In the air conveyance device disclosed in Patent Document 1, air is blown from below the pad on which the glass plate is placed to float the glass plate from the pad, and the gripping means for gripping the glass plate is moved in the conveyance direction. It can be moved at high speed or stopped suddenly.

In the air conveyance device as described above, since the air ejected from below the glass plate directly contacts the glass plate, it is necessary to adjust the temperature of the air to a temperature suitable for the manufacturing process.
Therefore, in the air conveyance device, for example, it is necessary to eject the air whose temperature is adjusted by the temperature adjusting device.

JP 2008-120506 A

When supplying temperature-controlled air to an air conveyance device using a conventionally known temperature adjustment device, first generate compressed air with an air compressor, and introduce this compressed air into the temperature adjustment device to generate temperature-controlled air. Was. This is because the compressed air used in each process other than the air conveyance device is used as it is. However, the pressure required for air conveyance is at most 10 to 30 kPa, and it is necessary to further reduce the generated temperature-controlled air to a predetermined pressure.
However, in this configuration, the air whose temperature is adjusted by the temperature adjusting device is generated by an air compressor that consumes a large amount of power, and is further subjected to decompression processing, so there is a problem that energy loss is large.

  Considering the energy loss as described above, it is conceivable that air for temperature adjustment is not generated by an air compressor but is generated by a blower and supplied to a temperature adjusting device. However, in this configuration, it is necessary to provide piping until the air generated by the blower is introduced into the temperature adjustment device, and there is a problem that pressure loss occurs. In addition, if the piping is complicated, there is a problem that the labor and cost for constructing the equipment increase.

  Accordingly, the present invention is made to solve the above-described problems, and an object of the present invention is to provide a temperature-controlled air blower capable of generating low-pressure temperature-controlled air with a small energy loss and a compact configuration.

According to the temperature adjustment blower according to the present invention, the casing, the blower for taking in air from the outside of the casing, the temperature of the air blown from the blower is adjusted, and the temperature-controlled air after temperature adjustment is adjusted to the outside of the casing. The blower and the temperature regulator are housed in a single casing, and the temperature regulator is part of a high-temperature heat medium that is compressed and heated by the compressor. A heating flow path having a heating means to be supplied, a condensing means to which the remainder of the high-temperature heat medium is supplied, and the heat medium cooled by the condensing means is adiabatically expanded by the expansion means and further cooled. A high-temperature heat medium into the heating flow path and the cooling flow path so as to adjust the temperature adjustment target fluid passing through the cooling flow path having the cooling means to be supplied and the heating means and the cooling means to a predetermined temperature. Distribution means for distributing, a heating flow path and a cooling flow path, The heat medium that has passed through each is joined and re-supplied to the compressor, and the heating means and the cooling means are arranged in a space unit provided at the uppermost stage inside the casing. The blower is disposed in the lowermost stage inside the casing, and circulates the air to be adjusted in temperature discharged from the blower from the lowermost stage to the uppermost stage. And a blower pipe outlet is disposed at one end in the horizontal direction of the space unit at the uppermost stage, and an outlet of the blower pipe is disposed at the other horizontal end of the space unit at the uppermost stage. A discharge port is formed through which the temperature-adjusted air is discharged through the heating means and the cooling means, and the air suction port of the blower is formed on the side surface or the back surface of the housing. It is characterized in that.
By adopting this configuration, the temperature of the air is adjusted from the blower having a pressure lower than that of the compressed air generated by the air compressor, so that energy loss can be reduced as compared with the conventional configuration. In addition, since the blower and the temperature controller are housed in a single casing, the piping facility and the like can be made compact, pressure loss can be reduced, and piping labor can be reduced. Moreover, the floor area in the factory can be used effectively by having a compact configuration. Furthermore, by storing the blower in the housing, it is difficult for the sound when the blower is driven to leak to the outside, and the noise can be reduced.
According to this configuration, precise temperature adjustment is possible.

Further, the blower may be arranged below the temperature regulator.
The effect | action by this structure is as follows. The air discharged by the blower rises in temperature from the air temperature introduced from the outside of the housing. For this reason, by raising the air discharged from the blower as it is and introducing it into the temperature controller, the piping can be simplified, the pressure loss can be further reduced, and the structure inside the housing can be made compact. .

  According to the present invention, energy loss can be reduced, and low-pressure temperature-controlled air can be generated with a compact configuration.

It is a side view which shows the internal structure of the temperature control air blower of this invention. It is the schematic which shows the structure of 1st Embodiment of a temperature regulator. It is sectional drawing explaining the structure of the control valve used for the temperature regulator of FIG. It is the schematic which shows the structure of 2nd Embodiment of a temperature regulator. It is the schematic which shows the structure of 3rd Embodiment of a temperature regulator. FIG. 6 is an explanatory diagram for explaining the principle of energy saving in the temperature regulator of FIG. 5 when it is on the cooling side. FIG. 6 is an explanatory diagram for explaining the principle of energy saving in the temperature regulator of FIG. 5 when it is on the heating side. 6 is a flowchart illustrating a control procedure in the temperature regulator of FIG. 5. It is explanatory drawing explaining the other distribution means which can be used with a temperature regulator. It is a graph which shows the flow characteristic of the two-way valve used with the distribution means shown in FIG.

(overall structure)
The schematic block diagram of the temperature control air blower which concerns on the 1st Embodiment of this invention is shown in FIG.
In the temperature adjusting blower 30, a temperature adjuster 32 and a blower 34 for sending air to the temperature adjuster 32 are accommodated in one housing 31. In the form shown in FIG. 1, the interior of the housing 31 is divided into upper, middle, and lower three stages, a blower 34 is installed at the lowermost stage, and a temperature regulator 32 is installed at the uppermost and middle stages. Among the temperature adjusters 32, devices such as the compressor 36, the condenser 38, and the expansion valve 40 are installed in the middle stage, and the space unit 10 in which the air blown from the blower 34 flows and the temperature of the air is adjusted is the most. It is arranged on the upper stage.

A space unit 10 is formed in the uppermost stage, and a heater 41 that is a heat exchanger for heating and a cooler 42 that is a heat exchanger for cooling are arranged on the outlet side. The filter 43 is provided, and the temperature of the air flow passing through the space unit 10 is adjusted. As the filter, a HEPA filter or the like can be used, and the temperature-controlled air can be kept clean.
Outside the filter 43, a discharge port 49 for discharging the temperature-adjusted air from the housing 31 is provided.

The air discharged from the lowermost blower 34 is sent from the lowermost stage to the uppermost stage by a blower pipe 44. The blower pipe 44 is formed in a cylindrical shape that is closed except for the inlet and outlet so that air does not enter and exit in the middle stage.
An outlet of the blower pipe 44 opens at one end of the space unit 10 formed at the uppermost stage of the housing 31. The air blown out from the outlet of the blower pipe 44 is adjusted to a desired temperature by passing through the heater 41 and the cooler 42, and then the other end of the space unit 10 formed at the uppermost stage of the housing 31. It is discharged from the formed discharge port 49.
The outlet of the blower pipe 44 may be disposed at one end in the horizontal direction of the space unit 10, and the discharge port 49 for discharging the temperature-adjusted air may be disposed at the other opposite horizontal end of the space unit 10. By arranging in this way, the flow of air from the outlet of the blower pipe 44 to the discharge port 49 via the heater 41, the cooler 42 and the filter 43 is linear, and there is little pressure loss during air circulation, The air that is subject to temperature adjustment can be sufficiently heat exchanged.

(Blower)
Next, the blower 34 will be described.
The blower 34 in this embodiment employs an impeller rotary type as an example of a centrifugal blower that can discharge at a low pressure of about 5 kPa to 30 kPa. The motor for rotating the impeller is an AC motor using a three-phase 200V power source, and the air volume is about 1500 to 10000 l / min. That is, in the present embodiment, a device that discharges low-pressure and large-capacity air is called a blower.

The air suction port of the blower 34 is disposed on the opposite side of the discharge port 35 and is located behind the discharge port 35 in FIG. A suction port 39 provided in the housing 31 for supplying air to the blower 34 is formed on the side surface or the back surface of the housing 31, and a filter 45 is provided in the suction port 39.
The suction port 39 provided in the housing 31 and the suction port of the blower 34 do not have to be connected. When not connected, the air sucked from the suction port 39 of the housing 31 by sucking the blower 34 has an effect of cooling the blower 34, the compressor 36 disposed in the middle stage, and the like. In this case, the lowermost stage and the middle stage are preferably communicated so that air can flow.
An exhaust fan 46 for exhausting air in the lowermost (and / or middle) space sucked by the blower 34 is provided at the lowermost stage of the casing 31.

  As an example of the blower 34, it is not limited to a centrifugal blower, A roots pump etc. can be included.

(Temperature adjuster)
(Heat pump balance circuit)
Next, the temperature adjuster will be described with reference to FIG.
In order to precisely adjust the temperature of the air sucked in by the blower 34, the temperature adjuster 32 includes a heater 41 as a heating unit that constitutes a heating channel and a cooler 42 as a cooling unit that constitutes a cooling channel. Is provided in the space unit 10.

For example, hydrocarbons such as propane, isobutane, and cyclopentane, chlorofluorocarbons, ammonia, and carbon dioxide gas are supplied to the heater 41 and the cooler 42 as the first heat medium, and the blower 34 is vaporized and liquefied by the first heat medium. The air sent from is heated and cooled in the space unit 10 to adjust to a predetermined temperature.
Such a first heat medium is compressed and heated by the compressor 36 and discharged in the form of a gas at a high temperature (for example, 70 ° C.). The high-temperature first heat medium discharged from the compressor 36 is distributed to the heating channel side provided with the heater 41 and the cooling channel side provided with the cooler 42 by the proportional three-way valve 48 serving as a distribution means. .

In this proportional three-way valve 48, the total amount of the high temperature first heat medium distributed to the heating flow path side and the high temperature first heat medium distributed to the cooling flow path side is the high temperature first heat medium discharged from the compressor 36. Distribute to equal the amount.
The proportional three-way valve 48 is controlled by the first control unit 56. The first control unit 56 compares the measured temperature measured by the temperature sensor 59 provided on the downstream side of the space unit 10 with the set temperature, so that the measured temperature matches the set temperature. The distribution ratio of the high-temperature first heat medium distributed to the path side and the cooling channel side is changed substantially continuously to adjust the temperature of the discharge air.
This “substantially continuously changing” means that when the proportional three-way valve 48 is driven by step control, the proportional three-way valve 48 is microscopically driven stepwise, but is continuously continuous as a whole. This includes the case where it is driven.
The set temperature set in the first control unit 56 may be arbitrarily set.

The high-temperature first heat medium distributed to the heating flow path side is directly supplied to the heater 41 and heats the air flow to adjust it to a predetermined temperature. At that time, the high-temperature first heat medium is radiated and cooled to become the first heat medium containing the condensate.
On the other hand, the high-temperature first heat medium distributed to the cooling flow path side is cooled by the condenser 38 as the condensing means and then adiabatically expanded by the expansion valve 40 as the expansion means to be further cooled (for example, 10 ° C. Cooled). The cooled first heat medium is supplied to the cooler 42, and the air flow sucked into the space unit 10 and heated by the heater 41 is cooled and adjusted to a predetermined temperature. At that time, the first heat medium supplied to the cooler 42 is heated by absorbing heat from the air flow. Thus, the accuracy of the temperature adjustment of the air flow can be improved by blowing the air flow heated to the heater 41 and blown to the cooler 42.

The condenser 38 is supplied with the second heat medium supplied from the outside without being heated or cooled via the pipe 50 for cooling the high-temperature first heat medium distributed to the heater 41 side. As the cooling water is supplied. The cooling water is heated to about 30 ° C. by the first heat medium of about 70 ° C. in the condenser 38 and discharged from the pipe 51. The cooling water discharged from the pipe 51 is supplied as a heat source to a heat absorber 52 as a heat absorption unit of the heat pump unit.
The heat absorber 52 is supplied with a first heat medium having a temperature of about 10 ° C., which is adiabatically expanded by the expansion valve 47 and further cooled by the first heat medium radiated by the heater 41. For this reason, in the heat absorber 52, based on the temperature difference between the cooling water that has been absorbed by the condenser 38 and heated to about 30 ° C., and the first heat medium that has been cooled to about 10 ° C., Can absorb heat from cooling water.
The first heat medium that has been heated by absorbing heat from the cooling water in the heat absorber 52 is supplied to the compressor 36 via the accumulator 54. The accumulator 54 is also supplied with a first heat medium that absorbs heat from the air flow supplied to the cooler 42 and sucked into the space unit 10. Since this accumulator 54 is a type of accumulator that can store a liquid component and re-supply only the gas component to the compressor 36, it can reliably supply only the gas component of the first heat medium to the compressor 36.
As this accumulator 54, an accumulator type accumulator can be used.
Even if the accumulator 54 is not installed, a heat medium that has been heated by absorbing heat from the cooling water by the heat absorber 52 and a heat medium that has absorbed heat from the air supplied to the cooler 42 and sucked into the space unit 10. And can be re-supplied to the compressor 36.

By the way, in the temperature regulator 32 of the present embodiment, the first heat medium radiated by the heater 41 is adiabatically expanded and cooled by the expansion valve 47, but in the cooling by the adiabatic expansion by the expansion valve 47, There is no exchange of heat between the first heat medium and the outside. For this reason, the first heat medium cooled adiabatically can absorb heat from the cooling water as the second heat medium supplied to the heat absorber 52 via the condenser 38 from the outside.
Therefore, energy absorbed from the cooling water supplied from the outside by the heat absorber 52 of the heat pump means can be added to the compression power energy by the compressor 36 to the high temperature first heat medium discharged from the compressor 36. . Furthermore, in this embodiment, the cooling water supplied from the outside is supplied to the heat absorber 52 via the condenser 38, and a part of the energy removed from the high-temperature first heat medium by the condenser 38 is also included. The high temperature first heat medium discharged from the compressor 36 can be added, and the heating capacity of the heating channel can be improved. As a result, it is not necessary to use other heating means such as an auxiliary heater.

As described above, in the temperature adjuster 32 of the present embodiment, the heating capacity of the heating channel can be improved by the installation of the heat pump means, and the high-temperature first heat medium and cooling distributed to the heating channel side by the proportional three-way valve 48. The distribution ratio with the high-temperature first heat medium distributed to the flow path side can be changed substantially continuously according to the temperature in the space unit 10.
For this reason, the high temperature 1st heat medium is always supplied to the heating flow path and the cooling flow path, and the air flow of the temperature adjustment target passing through the heater 41 of the heating flow path and the cooler 42 of the cooling flow path is adjusted. A minute load fluctuation can be quickly dealt with by quickly finely adjusting the distribution ratio of the high-temperature first heat medium distributed to the heating flow path and the cooling flow path by the proportional three-way valve 48, and the responsiveness can be improved.
As a result, the temperature of the air flow subject to temperature adjustment passing through the heater 41 of the heating channel and the cooler 42 of the cooling channel can be controlled with an accuracy of ± 0.1 ° C. or less with respect to the set temperature. The temperature change of 10 can be made extremely small.

  Further, in the temperature regulator 32 of the present embodiment, as described above, the heating capacity of the heating channel is improved, and the proportional three-way valve 48 as a distribution unit among the channels including the heating channel and the cooling unit. Each of the flow path including the heating flow path and the flow path including the cooling flow path until the first heat medium that has passed through each of the cooler 42 and the heat sink 52 is joined by the accumulator 54 It is provided independently. For this reason, even when the set temperature of the air flow to be temperature adjusted passing through the heater 41 and the cooler 42 is significantly increased, the proportional three-way valve 48 allows the distribution ratio of the high-temperature first heat medium to be higher than that of the cooling flow path. In addition, the distribution ratio distributed to the heating flow path can be significantly increased, and the air flow to be temperature adjusted can be quickly adjusted to a predetermined temperature.

Further, in the temperature regulator 32 of the present embodiment, a control valve 60 as a refrigerant control means is provided in a pipe 50 that supplies cooling water to the condenser 38. The control valve 60 is controlled so that the discharge pressure of the compressor 36 is constant.
As shown in FIG. 3, the control valve 60 is provided with a rod-like portion having a valve body 60 b that opens and closes an opening of a valve portion 60 a provided in the flow path of the cooling water. The rod-like portion is biased in a direction in which the valve body 60b closes the opening of the valve portion 60a by a spring 60c with which the tip end surface abuts. Further, the other end surface of the rod-shaped portion is in contact with a bellows 60d to which the pressure of the first heat medium discharged from the compressor 36 is supplied, and the rod-shaped portion is opened against the urging force of the spring 60c. The valve body 60b is urged in the direction to release the valve.
Therefore, when the discharge pressure of the compressor 36 becomes equal to or greater than the urging force of the spring 60 c, the valve body 60 b is moved in the direction to open the opening of the valve portion 60 a by the bellows 60 d of the control valve 60 and supplied to the condenser 38. The amount of cooling water to be increased increases, and the cooling capacity of the condenser 38 is improved. For this reason, the discharge pressure of the compressor 36 decreases.
On the other hand, when the discharge pressure of the compressor 36 becomes equal to or less than the urging force of the spring 60 c of the control valve 60, the valve body 60 b moves in a direction to close the opening of the valve portion 60 a and the amount of cooling water supplied to the condenser 38. Decreases, and the cooling capacity of the condenser 38 decreases. For this reason, the discharge pressure of the compressor 36 increases.
In this way, by keeping the discharge pressure of the compressor 36 constant, the precision temperature regulator can be stably operated. Moreover, it can adjust so that the amount of cooling water may be supplied to the condenser 38 more than needed, and it may not discharge | emit out of the system.

(Reheat circuit)
Next, another embodiment of the temperature regulator 32 according to the present invention will be described with reference to FIG.
As the temperature regulator 32 in this embodiment, it is not necessary to employ a circuit that provides heat pump means as described above to save energy.
That is, the temperature regulator shown in FIG. 4 is provided with a compressor 36, a three-way valve 48, a condenser 38, an expansion valve 40, a cooler 42, and a heater 41. In addition, a cooling channel including the cooler 42 and a heating channel including the heater 41 are provided.
The cooler 42 and the heater 41 adjust the temperature of the air flow discharged from the blower 34 into the space unit 10.

In the temperature adjuster 32 shown in FIG. 4, the high-temperature heat medium compressed by the compressor 36 is distributed to the cooling channel and the heating channel by the three-way valve 48. The high-temperature heat medium distributed to the cooling channel side is cooled by the condenser 38.
The cooled heat medium is adiabatically expanded and cooled by the expansion valve 40, and is supplied to the cooler 42. The cooler 42 absorbs heat while cooling the temperature-controlled air flow supplied from the blower 34. The heat medium heated by the cooler 42 is supplied to the compressor 36.
On the other hand, the high-temperature heat medium distributed to the heating flow path side is supplied to the heater 41, and the air flow to be temperature-adjusted cooled by the cooler 42 is heated and adjusted to a desired temperature. In this way, the heating medium 41 that has cooled the heat by releasing the heat while heating the air flow to be temperature adjusted passes through the expansion valve 40 and the cooler 42 and is supplied to the compressor 36.

The temperature adjuster 32 of the present embodiment is a heater 41 for the air flow to be temperature-adjusted that is cooled by the cooler 42 by adjusting the flow rate of the high-temperature heat medium distributed to the heating flow path side by the three-way valve 48. The amount of heating can be adjusted.
Therefore, it is possible to adjust the temperature of the air flow subject to temperature adjustment that passes through the cooler 42 and the heater 41, and the temperature management in the space unit is feasible although it is a narrow temperature range as compared with the heat pump balance circuit.
When the temperature adjustment target air flow supplied from the blower 34 is supplied to the temperature adjuster 32 in a sufficiently heated state, the temperature adjustment is possible even if the heating capacity of the temperature adjuster 32 is low. The temperature regulator 32 is preferably a reheat circuit.
In particular, when cooling / dehumidification is required, the temperature regulator 32 shown in FIG. 4 is considered preferable.

(Inverter control circuit)
Further, as another embodiment of the temperature regulator 32, a configuration in which the compressor is inverter-controlled as shown in FIG. 5 may be adopted.
In addition, the same code | symbol is attached | subjected about the component same as embodiment shown in FIG. 2, and description may be abbreviate | omitted.
In the present embodiment, the first heat medium is compressed and heated by the compressor 36 whose rotation speed is controlled by the inverter 19 as the rotation speed control means, and is discharged in the form of a gas at a high temperature (for example, 70 ° C.). The Further, the inverter 19 receives a control signal for changing the rotation speed of the compressor 36 from the second control unit 57 and controls the rotation speed of the compressor 36.

  In the temperature adjustment in the space unit 10 in which the heater 41 and the cooler 42 are arranged, for example, when the system is on the cooling side, in the initial operation state in which the air temperature is stable, as shown in FIG. In addition, the air cooled on the cooling side including the cooler 42 is heated on the heating side including the heater 41. In the operation state shown in FIG. 6A, the energy to be heated on the heating side may be larger than the energy A required to cool the air. In this case, as shown in FIG. 6B, if the overlapping energy between the cooling side portion and the heating side portion can be reduced as much as possible, energy saving can be achieved.

On the other hand, when the system is on the heating side, the air heated at the heating side including the heater 41 is cooled including the cooler 42 as shown in FIG. Cooling at the side. In the operation state shown in FIG. 7A, the energy to cool on the cooling side may be larger than the energy B required to heat the air. In this case, as shown in FIG. 7B, if the overlapping energy between the cooling side portion and the heating side portion can be reduced, energy saving can be achieved.
However, if the heater 41 and the cooler 42 are ON / OFF controlled so that the heat load canceling each other is zero, the operation of the temperature adjusting device becomes unstable and the space unit 10 is stabilized at a predetermined temperature. It takes time. For this reason, to the extent that the temperature adjusting device can be stably operated, it is necessary that the heat load applied to each of the heater 41 and the cooler 42 be present at a minimum so as to cancel each other.
In addition, it is preferable to experimentally obtain | require this heat load part which mutually cancels out this required minimum.

  In the temperature regulator 32 of the present embodiment, the rotational speed of the compressor 36 is reduced so as to reduce as much as possible the thermal loads that cancel each other out of the thermal loads applied to the heater 41 and the cooler 42. Is controlled by the second control unit 57 via the inverter 19.

  In addition, when the temperature controller 32 of this embodiment was trial-run, when the cooler 42 and the heater 41 are operated on the cooling side, as the heat load applied to the heater 41, the heater 41 side by the proportional three-way valve 48 is used. It has been found that the distribution ratio of the high-temperature heat medium to 5 to 15% (the distribution ratio of the high-temperature heat medium to the cooler 42 side by the proportional three-way valve 48 is 95 to 85%) is preferable for stable operation. . On the other hand, when the cooler 42 and the heater 41 are operated on the heating side, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48 is 95 to 85 as a heat load applied to the heater 41 side. % (The distribution ratio of the high-temperature heat medium to the cooler 42 side by the proportional three-way valve 48 is 5 to 15%).

Subsequently, the control of the proportional three-way valve 48 by the first controller 56 and the control of the rotational speed of the compressor 36 by the second controller 57 are shown in the flowchart of FIG.
In the control shown in the flowchart of FIG. 8, the heat load applied to the heater 41 side, specifically, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48, the cooler 42 and the heater 41 are controlled. When operating on the cooling side, the rotational speed of the compressor 36 is controlled to be 5 to 15%, and when operating the cooler 42 and the heater 41 on the heating side, a distribution ratio of 95 to 85% Thus, the rotation speed of the compressor 36 is controlled.

  In the flowchart shown in FIG. 8, after starting the compressor 36 in step S10, the temperature signal measured by the temperature sensor 59 provided in the space unit 10 so that the space unit 10 is set to a predetermined temperature in step S12. Based on the above, the distribution ratio of the high-temperature heat medium distributed to the heater 41 side and the cooler 42 side by the proportional three-way valve 48 is continuously changed to adjust the fluid sucked into the space unit 10 to a predetermined temperature. .

In step S14, it is determined whether the space unit 10 has reached a predetermined temperature and is stable. If the temperature in the space unit 10 is not stable, the process returns to step S12, and the heater 41 by the proportional three-way valve 48 is used. The distribution ratio of the high-temperature heat medium distributed to the side and the cooler 42 side is continuously changed. Steps S12 and S14 are performed by the first controller 56.
Here, in step S14, when the temperature in the space unit 10 measured in advance within a set time (for example, several minutes) is at a predetermined temperature, it is determined that the temperature in the space unit 10 is stable.

On the other hand, when the space unit 10 reaches a predetermined temperature and is stable, it is determined whether or not the distribution ratio of the high-temperature heat medium distributed to the heater 41 in steps S16 to S22 is within a predetermined range. To do. Steps S16 to S22 are performed by the second control unit 57.
The average high temperature heat medium distribution ratio shown in FIG. 8 is a value obtained by averaging the heat medium distribution ratio within a predetermined time because the distribution ratio of the high temperature heat medium distributed to the heater 41 varies. It is.

First, in step S16 and step S18, when it is assumed that the cooler 42 and the heater 41 are on the cooling side, whether or not the average high-temperature heat medium distribution ratio to the heater 41 side is within 5 to 15%. to decide.
Here, when the average high-temperature heat medium distribution rate to the heater 41 side is within 5 to 15%, the cooler 42 and the heater 41 are on the cooling side, and the operation of the temperature adjusting device is stable. Therefore, the process goes to step S28 from step S18 through step S16. In step S28, it is determined whether or not the compressor 36 is in operation. If the compressor 36 is in operation, the process returns to step S14.

On the other hand, when the average high-temperature heat medium distribution ratio to the heater 41 side is less than 5%, the average high-temperature heat medium distribution ratio to the heater 41 side is too low, and the operation of the temperature adjustment device becomes unstable. easy.
For this reason, in order to increase the average high-temperature heat medium distribution rate to the heater 41 side, the process proceeds from step S16 to step S24, and the rotation speed of the compressor 36 is increased. In step S <b> 24, an increase signal for increasing the rotation speed of the compressor 36 set in the inverter 19 with a minimum change amount is transmitted from the second control unit 57 to the inverter 19. This is because the temperature adjusting device can be stably operated by increasing the rotational speed of the compressor 36 with the minimum change amount.
Here, the amount of change for changing the rotation speed of the compressor 36 is set in the second control unit 57 in advance. This amount of change is preferably the minimum number of rotations of the compressor 36. The minimum number of revolutions varies depending on the temperature control device, and is preferably obtained experimentally. However, when the number of revolutions of the compressor 36 is 2000 to 5000 rpm, the minimum change amount may be in the range of 3 to 10%. preferable.

Further, when the average high temperature heat medium distribution ratio to the heater 41 side exceeds 15%, it is determined that the cooler 42 and the heater 41 are not on the cooling side through steps S16 and S18. Then, the process proceeds to step S20 and step S22. In step S20 and step S22, when it is assumed that the cooler 42 and the heater 41 are on the heating side, it is determined whether or not the average high-temperature heat medium distribution ratio to the heater 41 side is within 95 to 85%. .
Here, when the average high-temperature heat medium distribution ratio to the heater 41 side is within 85 to 95%, the cooler 42 and the heater 41 are on the heating side, and the operation of the temperature control device is stable. Therefore, the process passes through step S20 and proceeds from step S22 to step S28. In step S28, it is determined whether or not the compressor 36 is in operation. If the compressor 36 is in operation, the process returns to step S14.

  On the other hand, when the average high temperature heat medium distribution ratio to the heater 41 side exceeds 95%, the average high temperature heat medium distribution ratio to the heater 41 side is too high, and the operation of the temperature adjusting device becomes unstable. easy. For this reason, in order to reduce the average high-temperature heat medium distribution ratio to the heater 41 side, the process proceeds from step S20 to step S24, and the rotational speed of the compressor 36 is increased. In step S <b> 24, an increase signal for increasing the rotation speed of the compressor 36 set in the inverter 19 with a minimum change amount is transmitted from the second control unit 57 to the inverter 19.

  When the average high-temperature heat medium distribution ratio to the heater 41 side is less than 85%, in step S22, the cooler 42 and the heater 41 are neither the heating side nor the cooling side, that is, the heating device 41. Among the thermal loads applied to each of the cooler 42 and the cooler 42, it is determined that there are many thermal loads that cancel each other out. For this reason, it transfers to step S26 and the rotation speed of the compressor 36 is reduced. In step S <b> 26, a lowering signal for lowering the rotation speed of the compressor 36 set in the inverter 19 by the minimum change amount is transmitted from the second control unit 57 to the inverter 19. This is because the number of rotations of the compressor 36 is reduced by the minimum change amount, and the cooler 42 and the heater 41 are shifted to the heating side or the cooling side.

  Next, the process proceeds to step S28 through step S24 or step S26. If the compressor 36 is in operation, the process returns to step S14. In step S14, in step S24 or step S26, it is determined whether or not the space unit 10 has reached a predetermined temperature and is stable in a state where the rotation speed of the compressor 36 is increased or decreased by the minimum change amount. When the space unit 10 has reached the predetermined temperature and is stable, it is determined again whether or not the average high-temperature heat medium distribution rate to the heater 41 side is within the predetermined range through steps S16 to S26. To do.

On the other hand, if it is determined in step S14 that the temperature in the space unit 10 is not stable, the process returns to step S12 and the high-temperature heat medium distributed to the heater 41 side and the cooler 42 side by the proportional three-way valve 48 is returned. Change the distribution ratio continuously. After the space unit 10 reaches a predetermined temperature and stabilizes, the process proceeds to steps S16 to S26.
In step S28, when the compressor 36 is not in the operating state, the control by the first control unit 56 and the second control unit 57 is stopped.

In the flowchart shown in FIG. 8 described above, the first control unit 56 controls the average high-temperature heat medium distribution rate to the heater 41 side, but controls the average high-temperature heat to the cooler 42 side. You may control by paying attention to a medium distribution rate.
Further, when the cooler 42 and the heater 41 are operated on the cooling side, as a heat load applied to the heater 41, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48 is 5 to 15%. On the other hand, when the cooler 42 and the heater 41 are operated on the heating side, as a heat load applied to the heater 41 side, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48 is 95. The rotation speed of the compressor 36 is controlled so as to be ˜85%.

With such a distribution ratio of the high-temperature heat medium, when the operation of the temperature regulator 32 becomes unstable, the following control is performed.
First, when the cooler 42 and the heater 41 are operated on the cooling side, as a heat load applied to the heater 41, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48 is set to 20 to 30%. On the other hand, when the cooler 42 and the heater 41 are operated on the heating side, as a heat load applied to the heater 41 side, the distribution ratio of the high-temperature heat medium to the heater 41 side by the proportional three-way valve 48 is 80 to 80. You may control the rotation speed of the compressor 36 so that it may become 70%.

In addition, instead of the proportional three-way valve 48, as shown in FIG. 9, two two-way valves 62a and 62b may be used as the distribution means of the temperature regulator 32 in each of the embodiments described above.
Each of the two two-way valves 62 a and 62 b is controlled by the first control unit 56. The opening degree of each of the two-way valves 62a and 62b is adjusted by the first control unit 56, and the gaseous high-temperature heat medium compressed and heated by the compressor 36 is distributed to the heating channel and the cooling channel. The distribution ratio is adjusted substantially continuously, and the air flow passing through the heater 41 and the cooler 42 is controlled to a predetermined temperature. At that time, the total amount of the high-temperature heat medium distributed to the heater 41 side and the high-temperature heat medium amount distributed to the cooler 42 side becomes equal to the high-temperature heat medium amount discharged from the compressor 36. In this way, the opening of the two-way valves 62a and 62b is adjusted and proportionally distributed.

At that time, the relationship between the valve opening and the flow rate of each of the two-way valves 62a and 62b is not linear as shown in FIG. For this reason, the first control unit 56 holds the flow rate characteristic data for each of the two-way valves 62a and 62b shown in FIG. 10, and the first control unit 56 sets the flow rate characteristics of the two-way valves 62a and 62b. Based on this, an opening degree signal is transmitted to each of the two-way valves 62a and 62b.
Here, “to adjust the distribution ratio distributed between the heating flow path and the cooling flow path substantially continuously” or “to adjust the distribution ratio substantially continuously” means that the two-way valves 62a and 62b are stepped. When driven by control and adjusting the distribution ratio between the heating flow path and the cooling flow path, the opening degree of the two-way valves 62a and 62b is microscopically driven and adjusted, It is meant to include the case of being continuously driven and adjusted as a whole.

In addition, the cooler 42 and the heater 41 which are each heat exchanger of the temperature regulator 32 mentioned above can use a general fin and tube type heat exchanger. By adopting a fin-and-tube heat exchanger, there is little pressure loss during air circulation, and the air to be temperature adjusted can be sufficiently heat exchanged.
The space unit 10 (the uppermost part of the casing 31) may be configured as a pressure vessel. By configuring the space unit 10 as a pressure vessel, it is possible to cope with the case where the air flow to be temperature adjusted becomes a high pressure.

Further, in each of the embodiments described above, the air flow in the space unit 10 uses only the blowing force by the blower 34. However, a fan may be provided in the space unit 10 to increase the flow velocity.
Furthermore, in each of the embodiments described above, the outlet of the blower pipe 44 is disposed at one end of the space unit 10 and the discharge port 49 for discharging the temperature-adjusted air is disposed at the other end of the space unit 10. The position of the outlet of the blower pipe 44 and the outlet 49 may be an arbitrary position of the space unit 10 as long as the pressure loss at the time of air circulation as a temperature adjustment target is not a problem.

  In each of the embodiments of the temperature regulator 32 described above, even if the order of the air flow to be temperature regulated is the order of the cooler 42 and the heater 41 from the upstream side, the heater 41 from the upstream side, Either the order of the coolers 42 may be used.

The temperature-controlled air blower of the present invention is not only used for an air conveying device for a glass plate, but may be employed for an air knife used for drying a glass substrate, cooling after coating, cooling a film laminate, or the like.
Furthermore, you may use for the ejection apparatus of the air for conveyance at the time of conveying particle | grain states, such as a pellet.

DESCRIPTION OF SYMBOLS 10 Spatial unit 19 Inverter 30 Temperature adjustment blower 31 Case 32 Temperature adjustment machine 34 Blower 35 Discharge port 36 Compressor 38 Condenser 39 Suction port 40, 47 Expansion valve 41 Heater 41 Heater 42 Cooler 43, 45 Filter 44 Blowing pipe 46 Exhaust fan 48 Proportional three-way valve 50, 51 Piping 52 Heat absorber 54 Accumulator 56 First controller 57 Second controller 59 Temperature sensor 60 Control valve 60a Valve part 60b Valve body 60c Spring 60d Bellows 62 Two-way valve

Claims (2)

A housing,
A blower that draws in air from outside the housing;
A temperature adjuster that adjusts the temperature of the air blown from the blower and discharges the temperature-controlled air after temperature adjustment to the outside of the housing;
The blower and temperature controller are housed in a single housing .
The temperature regulator is
A heating flow path having a heating means to which a part of a high-temperature heat medium compressed and heated by a compressor is supplied;
A cooling flow path having a condensing unit to which the remainder of the high-temperature heat medium is supplied, and a cooling unit to which the heat medium cooled by the condensing unit is adiabatically expanded by the expansion unit and further cooled and supplied,
Distributing means for distributing a high-temperature heat medium to the heating flow path and the cooling flow path so as to adjust the temperature adjustment target fluid passing through the heating means and the cooling means to a predetermined temperature,
The heat medium that has passed through each of the heating channel and the cooling channel is joined and re-supplied to the compressor,
The heating means and the cooling means are arranged in a space unit provided at the uppermost stage inside the housing,
The blower is disposed at the lowest stage inside the housing,
A cylindrical blower pipe is formed in which air other than the inlet and the outlet is closed to circulate the air to be adjusted in temperature discharged from the blower from the lowermost stage to the uppermost stage.
The outlet of the air blowing pipe is disposed at one end in the horizontal direction of the space unit in the uppermost stage,
On the other end in the horizontal direction of the space unit in the uppermost stage, a discharge port is formed through which air that is blown out from the outlet of the blower pipe and passes through the heating means and the cooling means is discharged.
The temperature adjusting blower according to claim 1, wherein the air suction port of the blower is formed on a side surface or a back surface of the housing .   The temperature adjusting blower according to claim 1, wherein the blower is disposed below the temperature adjuster.

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