TWI421493B - 色層分析用管柱及其製造方法與分析裝置 - Google Patents

色層分析用管柱及其製造方法與分析裝置 Download PDF

Info

Publication number
TWI421493B
TWI421493B TW100106052A TW100106052A TWI421493B TW I421493 B TWI421493 B TW I421493B TW 100106052 A TW100106052 A TW 100106052A TW 100106052 A TW100106052 A TW 100106052A TW I421493 B TWI421493 B TW I421493B
Authority
TW
Taiwan
Prior art keywords
column
side wall
analysis
portions
flow path
Prior art date
Application number
TW100106052A
Other languages
English (en)
Chinese (zh)
Other versions
TW201142281A (en
Inventor
Seokhyoung Hong
Tomofumi Kiyomoto
Hiroshi Kobayashi
Original Assignee
Tokyo Electron Ltd
Shinwa Kako Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Shinwa Kako Kk filed Critical Tokyo Electron Ltd
Publication of TW201142281A publication Critical patent/TW201142281A/zh
Application granted granted Critical
Publication of TWI421493B publication Critical patent/TWI421493B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/60Construction of the column
    • G01N30/6095Micromachined or nanomachined, e.g. micro- or nanosize
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0475Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/08Regulating or influencing the flow resistance
    • B01L2400/084Passive control of flow resistance
    • B01L2400/086Passive control of flow resistance using baffles or other fixed flow obstructions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hematology (AREA)
  • Fluid Mechanics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Dispersion Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
TW100106052A 2010-02-25 2011-02-23 色層分析用管柱及其製造方法與分析裝置 TWI421493B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010040077A JP2011174856A (ja) 2010-02-25 2010-02-25 クロマトグラフィー用カラム、その製造方法、および分析装置

Publications (2)

Publication Number Publication Date
TW201142281A TW201142281A (en) 2011-12-01
TWI421493B true TWI421493B (zh) 2014-01-01

Family

ID=44506425

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100106052A TWI421493B (zh) 2010-02-25 2011-02-23 色層分析用管柱及其製造方法與分析裝置

Country Status (6)

Country Link
US (1) US20120318049A1 (enExample)
EP (1) EP2541245A4 (enExample)
JP (1) JP2011174856A (enExample)
CN (1) CN102812354A (enExample)
TW (1) TWI421493B (enExample)
WO (1) WO2011104990A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1022314B1 (nl) * 2013-02-05 2016-03-15 PharmaFluidics N.V. Chemische reactor inrichting
US10073068B2 (en) 2013-09-18 2018-09-11 Agilent Technologies, Inc. Liquid chromatography columns with structured walls
BE1024344B1 (nl) * 2016-07-04 2018-02-02 PharmaFluidics N.V. Productie van chemische reactoren
CN108333283B (zh) * 2017-01-20 2024-07-19 中国科学院上海微系统与信息技术研究所 一种含有流线型椭圆微柱阵列的微色谱柱及其制备方法
BE1026910B1 (nl) * 2018-12-21 2020-07-22 Pharmafluidics N V Chemische reactoren
BE1028976B1 (nl) * 2020-12-30 2022-08-01 Pharmafluidics N V Pilaarstructuren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1720438A (zh) * 2002-11-29 2006-01-11 日本电气株式会社 分离设备和分离方法
TW200831173A (en) * 2006-08-14 2008-08-01 Tokyo Electron Ltd Column for chromatography and its manufacturing method
WO2009128294A1 (ja) * 2008-04-19 2009-10-22 ブラザー工業株式会社 検査対象受体及び当該検査対象受体を備えた検査装置
US20090314065A1 (en) * 2007-08-24 2009-12-24 Tokyo Electron Limited Chromatography detector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120450A (ja) * 1993-10-22 1995-05-12 Sumika Bunseki Center:Kk 多孔質体クロマトグラフィー用カラム
US6156273A (en) * 1997-05-27 2000-12-05 Purdue Research Corporation Separation columns and methods for manufacturing the improved separation columns
JP2002301367A (ja) * 2001-04-05 2002-10-15 Gl Sciences Inc クロマトグラフィー用多孔質体の製造方法
CN101585507B (zh) * 2009-06-23 2013-07-03 中国科学院上海微系统与信息技术研究所 一种pdms微流控芯片中通孔结构的制作方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1720438A (zh) * 2002-11-29 2006-01-11 日本电气株式会社 分离设备和分离方法
TW200831173A (en) * 2006-08-14 2008-08-01 Tokyo Electron Ltd Column for chromatography and its manufacturing method
US20090314065A1 (en) * 2007-08-24 2009-12-24 Tokyo Electron Limited Chromatography detector
WO2009128294A1 (ja) * 2008-04-19 2009-10-22 ブラザー工業株式会社 検査対象受体及び当該検査対象受体を備えた検査装置

Also Published As

Publication number Publication date
JP2011174856A (ja) 2011-09-08
TW201142281A (en) 2011-12-01
US20120318049A1 (en) 2012-12-20
CN102812354A (zh) 2012-12-05
WO2011104990A1 (ja) 2011-09-01
EP2541245A4 (en) 2013-12-18
EP2541245A1 (en) 2013-01-02

Similar Documents

Publication Publication Date Title
TWI421493B (zh) 色層分析用管柱及其製造方法與分析裝置
US9279791B2 (en) Odor sensing system
US20030049563A1 (en) Fractionating apparatus having colonies of pillars arranged in migration passage at interval and process for fabricating pillars
WO2013136430A1 (ja) 一粒子解析装置および解析方法
WO2008020593A1 (en) Column for chromatography and method for producing the same
EP2953716B1 (en) Chemical reactor device
CN107076763A (zh) 具有均匀且高纵横比的纳米间隙的柱阵列结构
US9121820B2 (en) Top-down fabrication method for forming a nanowire transistor device
Slentz et al. Geometric effects of collocated monolithic support structures on separation performance in microfabricated systems
KR101584083B1 (ko) 미소입자의 변형성 및 피로 특성 분석 장치
CN112816608B (zh) 微色谱柱及制备方法
JP2014519611A (ja) 平面状マイクロ流体分離装置のヴィアに起因する分散の低減
KR100563840B1 (ko) 미세유체채널이 집적화된 3차원 전극장치 및 그 제작 방법
CN108333283A (zh) 一种含有流线型椭圆微柱阵列的微色谱柱及其制备方法
JP7103591B2 (ja) 粒子検出装置及び粒子検出方法
JP5331798B2 (ja) 検査対象受体及び当該検査対象受体を備えた検査装置
KR20080008441A (ko) 단백질 고정화용 마이크로칩
KR20100091879A (ko) 개방형 그루브 채널 칩
KR20210119998A (ko) 화학 반응기용 필터
US20220048005A1 (en) Chemical reactors
JP2006047095A (ja) 成分分離素子およびその製造方法
KR20210110308A (ko) 생물학적 개체의 선택적 포획을 위한 미세유체 장치
JP2011027473A (ja) 計量装置の製造方法、計量装置、及び混合装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees