TWI417512B - Linear measurement method and linear measuring device - Google Patents

Linear measurement method and linear measuring device Download PDF

Info

Publication number
TWI417512B
TWI417512B TW098136156A TW98136156A TWI417512B TW I417512 B TWI417512 B TW I417512B TW 098136156 A TW098136156 A TW 098136156A TW 98136156 A TW98136156 A TW 98136156A TW I417512 B TWI417512 B TW I417512B
Authority
TW
Taiwan
Prior art keywords
measured
contour
curve
component
measurement
Prior art date
Application number
TW098136156A
Other languages
English (en)
Chinese (zh)
Other versions
TW201017096A (en
Inventor
Yoshinaga Kiyota
Kouichi Ichihara
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201017096A publication Critical patent/TW201017096A/zh
Application granted granted Critical
Publication of TWI417512B publication Critical patent/TWI417512B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/08—Detecting presence of flaws or irregularities

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
TW098136156A 2008-10-29 2009-10-26 Linear measurement method and linear measuring device TWI417512B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008277597A JP5100613B2 (ja) 2008-10-29 2008-10-29 真直度測定方法及び真直度測定装置

Publications (2)

Publication Number Publication Date
TW201017096A TW201017096A (en) 2010-05-01
TWI417512B true TWI417512B (zh) 2013-12-01

Family

ID=42274724

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098136156A TWI417512B (zh) 2008-10-29 2009-10-26 Linear measurement method and linear measuring device

Country Status (4)

Country Link
JP (1) JP5100613B2 (ja)
KR (1) KR101169575B1 (ja)
CN (1) CN101726279B (ja)
TW (1) TWI417512B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103267461B (zh) * 2013-06-09 2015-08-12 南京晨光集团有限责任公司 用于测量空间物体重复定位精度的方法
KR101542996B1 (ko) 2014-03-25 2015-08-07 현대자동차 주식회사 마운팅 핀 직진도 관리 시스템 및 그 제어 방법
JP6401618B2 (ja) * 2015-01-13 2018-10-10 株式会社ナガセインテグレックス 測定方法及び測定装置
JP6352833B2 (ja) * 2015-02-26 2018-07-04 住友重機械工業株式会社 形状計測装置、加工装置及び形状計測方法
JP6392395B1 (ja) * 2017-03-26 2018-09-19 株式会社アドテックエンジニアリング 平面度測定方法及びピン高さ調整方法
JP7296279B2 (ja) * 2019-08-30 2023-06-22 住友重機械工業株式会社 形状計測装置、及び検出器の校正方法
JP7296334B2 (ja) * 2020-03-26 2023-06-22 住友重機械工業株式会社 真直度計測システム、変位センサ校正方法、及び真直度計測方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW333607B (en) * 1996-07-29 1998-06-11 Jung Kyu Lee Scale for sensing moving object and apparatus for sensing moving object using the scale
US5816895A (en) * 1997-01-17 1998-10-06 Tokyo Seimitsu Co., Ltd. Surface grinding method and apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61139712A (ja) * 1984-12-13 1986-06-27 Mitsubishi Heavy Ind Ltd 真直度測定方法
JPS6447905A (en) * 1987-08-19 1989-02-22 Mitsubishi Heavy Ind Ltd Method for measuring straightness
JPH01107105A (ja) * 1987-10-20 1989-04-25 Mitsubishi Heavy Ind Ltd 真直度形状測定法
JPH07103751A (ja) * 1993-10-07 1995-04-18 Kawasaki Steel Corp ロールプロフィール測定方法
JP2002228411A (ja) 2001-02-05 2002-08-14 Hitachi Kokusai Electric Inc 二次元測定装置
JP2005024567A (ja) 2004-09-07 2005-01-27 Hitachi Kokusai Electric Inc 位置測定装置
DE102005021345A1 (de) * 2005-05-04 2006-11-09 Schaeffler Kg Linearführungseinheit mit Längenmesssystem
JP2008216122A (ja) 2007-03-06 2008-09-18 Mitsutoyo Corp 表面性状測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW333607B (en) * 1996-07-29 1998-06-11 Jung Kyu Lee Scale for sensing moving object and apparatus for sensing moving object using the scale
US5816895A (en) * 1997-01-17 1998-10-06 Tokyo Seimitsu Co., Ltd. Surface grinding method and apparatus

Also Published As

Publication number Publication date
JP2010107263A (ja) 2010-05-13
TW201017096A (en) 2010-05-01
KR101169575B1 (ko) 2012-07-31
KR20100047801A (ko) 2010-05-10
CN101726279A (zh) 2010-06-09
CN101726279B (zh) 2012-02-01
JP5100613B2 (ja) 2012-12-19

Similar Documents

Publication Publication Date Title
TWI417512B (zh) Linear measurement method and linear measuring device
TWI417511B (zh) Linear measurement method and linear measuring device
US7900367B2 (en) Differential calibration
JP5570722B2 (ja) 計量装置の較正
JP4504818B2 (ja) 加工物検査方法
US20050283989A1 (en) Method of inspecting workpieces on a measuring machine
US11402201B2 (en) Coordinate positioning apparatus and method of operation
US9459096B2 (en) Method of calibration of a mathematical model of a coordinate measuring machine for the compensation of dynamic errors due to deformation
Klapetek et al. Methods for determining and processing 3D errors and uncertainties for AFM data analysis
JPH07324929A (ja) 座標測定装置を用いて加工物の座標を測定する方法
JP2015514205A (ja) 工作物を検査するための方法および装置
US20020059041A1 (en) Movement control by a metrological instrument
JP2008509386A (ja) 表面測定用プローブの使用法
JP7296334B2 (ja) 真直度計測システム、変位センサ校正方法、及び真直度計測方法
JP2010256107A (ja) 測定装置及び測定方法
JP2008224578A (ja) 長尺体の表面形状測定方法および表面形状測定装置
US10533833B2 (en) Method and apparatus for characterising instrument error
JP2010169635A (ja) 形状測定装置
JP6128639B2 (ja) 測定方法
JP2003227712A (ja) エリアセンサを用いた表面形状測定系の自律校正方法
JPH05231830A (ja) 水平距離測定装置