TWI417128B - Method and device for managing coolant of wire saw - Google Patents

Method and device for managing coolant of wire saw Download PDF

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Publication number
TWI417128B
TWI417128B TW099106341A TW99106341A TWI417128B TW I417128 B TWI417128 B TW I417128B TW 099106341 A TW099106341 A TW 099106341A TW 99106341 A TW99106341 A TW 99106341A TW I417128 B TWI417128 B TW I417128B
Authority
TW
Taiwan
Prior art keywords
coolant
wire saw
centrifugal separator
steel wire
slurry
Prior art date
Application number
TW099106341A
Other languages
English (en)
Chinese (zh)
Other versions
TW201043322A (en
Inventor
Masaya Tanaka
Katsumi Takahashi
Norio Takagi
Original Assignee
Ihi Compressor And Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Compressor And Machinery Co Ltd filed Critical Ihi Compressor And Machinery Co Ltd
Publication of TW201043322A publication Critical patent/TW201043322A/zh
Application granted granted Critical
Publication of TWI417128B publication Critical patent/TWI417128B/zh

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
TW099106341A 2009-04-27 2010-03-04 Method and device for managing coolant of wire saw TWI417128B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009107353A JP2010253621A (ja) 2009-04-27 2009-04-27 ワイヤソーのクーラント管理方法及び装置

Publications (2)

Publication Number Publication Date
TW201043322A TW201043322A (en) 2010-12-16
TWI417128B true TWI417128B (zh) 2013-12-01

Family

ID=43315143

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099106341A TWI417128B (zh) 2009-04-27 2010-03-04 Method and device for managing coolant of wire saw

Country Status (2)

Country Link
JP (1) JP2010253621A (ja)
TW (1) TWI417128B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5624449B2 (ja) * 2010-12-16 2014-11-12 株式会社Ｉｈｉ回転機械 ワイヤソーのスラリ管理装置
CN105235078B (zh) * 2015-10-15 2018-03-27 天津英利新能源有限公司 一种浆料冷却系统
JP6819619B2 (ja) * 2018-01-22 2021-01-27 信越半導体株式会社 ワーク切断方法及びワイヤソー
CN110789014B (zh) * 2019-10-15 2021-11-30 江苏吉星新材料有限公司 一种碳化硅衬底片的切片方法
CN113894679A (zh) * 2021-10-09 2022-01-07 厦门惟度新材料有限公司 一种线锯浸没式切割冷却装置
CN114147288A (zh) * 2021-12-13 2022-03-08 上海德瀛睿创半导体科技有限公司 线锯机及线锯系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW363914B (en) * 1996-02-21 1999-07-11 Shinetsu Handotai Kk Recycling system for water soluble sludge waste
TW434093B (en) * 1996-09-06 2001-05-16 Sharp Kk A multi-wire saw
US6422067B1 (en) * 1999-04-26 2002-07-23 Super Silicon Crystal Research Institute Corporation Slurry useful for wire-saw slicing and evaluation of slurry
EP1685927A1 (en) * 2003-10-27 2006-08-02 Mitsubishi Denki Kabushiki Kaisha Multi-wire saw
TW200841991A (en) * 2006-12-22 2008-11-01 Garbo S R L Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component
EP2075160A2 (en) * 2007-11-27 2009-07-01 Calsonic Kansei Corporation Console box structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW363914B (en) * 1996-02-21 1999-07-11 Shinetsu Handotai Kk Recycling system for water soluble sludge waste
TW434093B (en) * 1996-09-06 2001-05-16 Sharp Kk A multi-wire saw
US6422067B1 (en) * 1999-04-26 2002-07-23 Super Silicon Crystal Research Institute Corporation Slurry useful for wire-saw slicing and evaluation of slurry
EP1685927A1 (en) * 2003-10-27 2006-08-02 Mitsubishi Denki Kabushiki Kaisha Multi-wire saw
TW200841991A (en) * 2006-12-22 2008-11-01 Garbo S R L Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component
EP2075160A2 (en) * 2007-11-27 2009-07-01 Calsonic Kansei Corporation Console box structure

Also Published As

Publication number Publication date
JP2010253621A (ja) 2010-11-11
TW201043322A (en) 2010-12-16

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