201043322 六、發明說明： 【發明所屬之技術領域】 本發明’是關於矽材料切斷用的線鋸之冷卻劑管理方 法及裝置。 【先前技術】 先前，矽晶錠、矽晶圓等矽材料切斷用的裝置，是使 〇 用所謂的線鋸（例如參照專利文獻1等）。先前的線鋸， 如專利文獻1所示，是將鐵類金屬線材形成的鋼線以保持 著指定張力的狀態行進的同時，邊將分散液中已分散有磨 粒的切削液（稱爲游離磨粒方式）供應至線鋸的同時，邊 使鋼線接觸矽材料，藉此以線狀截取該接觸部份進行切斷 〇 上述線鋸所使用的切削液，是分散液中混合有可使重 量比例如成爲1 : 1 (即，約50% )之大量的磨粒藉此提高 〇切削性，再加上，爲了進行均勻的切削是需要提高分散性 ’因此是使用比較高黏度的分散液。 基於此，若是將如上述黏度高的切削液供應至線鋸進 行矽材料的切斷時，切斷後之使用過的粉漿中，除了會混 入有上述高濃度的磨粒以外，還會混入有矽材料切斷後的 矽切屑，以致固體成份濃度更爲增加，因此使用過的粉漿 其黏度會更加上昇。 上述來自於線鋸之使用過的粉漿’通常’是承接在粉 槳承接槽後，就送至回收槽儲存。儲存在粉漿回收槽內之 -5- 201043322 使用過的粉漿，首先，是供應至第1分離手段使其中粒徑 比矽切屑還大的磨粒分離後，送至第2分離手段分離成矽 切屑和分離液。上述第1分離手段所分離的磨粒，和，第 2分離手段所分離的分離液，是供應至攪拌槽，此外，攪 拌槽內是供應有未使用的磨粒、未使用的分散液藉此進行 切削液的攪拌，攪拌後的切削液是供應至上述線鋸。上述 游離磨粒方式的線鋸，當切削液中的磨粒分散性降低時， 是會有無法均勻切斷的問題，因此需要經長進行攪拌等避 免產生磨粒的沉澱暨分離藉此保持均勻的分散性。 來自於上述線鋸之使用過的粉漿，如上述其黏度非常 高，並且混有磨粒和矽切屑，因此需要設置複數段的分離 手段進行磨粒和矽切屑的分離以致分離作業繁瑣，分離手 段也比較大規模以致有設備成本高的問題。如上述，使用 過的粉漿其分離作業困難，因此先前之使用過的粉漿其分 離作業，是在切斷作業結束後進行分批方式。 此外，切斷作業所產生的矽切屑，是會和分散液中的 水份及添加物等產生反應形成膠凝作用或溶膠作用，以致 切削液中會有塊狀物（凝塊）形成的問題，當想要提高上 述線鋸的鋼線行進速度來執行運轉時，上述凝塊會咬在鋼 線上，導致矽材料切斷面品質降低的問題。 另外，先前游離磨粒方式的線鋸，鋼線行進速度提高 時是會有實質供應至切削部的磨粒量減少的問題，再加上 ，如上述因會有咬入凝塊造成品質降低的問題，所以先前 是壓低鋼線的行進速度，因此，利用先前的線鋸切斷矽晶 -6 - 201043322 錠時，是需要1 2〜24小時前後的長時間’以致切斷作業 效率低。 另一方面，近年來，已知有使用鋼琴線等鋼線芯材表 面已固定有鑽石磨粒的固定磨粒鋼線（所謂固定磨粒方式 )切斷矽晶圓的技術（例如參照專利文獻2等）。專利文 獻2中，是對固定磨粒鋼線供應冷卻劑進行矽晶圓切斷， 混有切斷所產生之矽切屑的使用過的粉漿，是由粉漿承接 Q 槽承接後，送至回收槽儲存。接著，儲存在回收槽之使用 過的粉漿，是被導入至沉澱槽等藉此去除矽切屑，去除矽 切屑後的冷卻劑是被導入供應槽然後供應至上述固定磨粒 鋼線做爲再度使用。 專利文獻2所示的固定磨粒鋼線，因鋼線上固定著鑽 石磨粒，所以可經常確保磨粒的分散性，因此與上述專利 文獻1相比是可提昇切削性能夠以較短的時間完成切斷， 再加上’對於固定磨粒鋼線只要供應冷卻主體的冷卻劑即 Ο 可（不要求分散性）’因此其優點是冷卻劑能夠採用水溶 性冷卻劑等低黏度又廉價的產品。 [先行技術文獻] [專利文獻] [專利文獻1]日本特開2001-322066號公報 [專利文獻2]日本特開2002-144229號公報 【發明內容】 [發明欲解決之課題] 201043322 但是，即使是在使用專利文獻2所示的固定磨粒鋼線 進行矽材料切斷時，循環使用的冷卻劑中的固體成份（矽 切屑）的濃度也是保持在比較高的狀態，並且，根據本發 明者們的調查得知相對於矽材料的切斷開始時，切斷結束 時的冷卻劑中的固體成份濃度是會上昇6〜7%，因此就會 有壓低固定磨粒鋼線切削速度的問題。再加上，使用過的 粉漿儲存在回收槽的期間，濃度高的矽切屑會和冷卻劑中 的水份及添加物等產生反應膠凝作用或溶膠作用以致會有 形成塊狀物（凝塊）的問題。因此，是會有該凝塊被咬入 在固定磨粒鋼線導致矽材料切斷面品質降低的問題，所以 即使固定磨粒鋼線本身切削性優異，還是無法充分發揮其 性能，仍然是會有壓低切削速度的問題。 本發明，是有鑑於上述問題而爲的發明，提供一種能 夠大幅提昇利用固定磨粒鋼線切斷矽材料時之切斷速度的 線鋸之冷卻劑管理方法及裝置。 [用以解決課題之手段] 本發明相關的線鋸之冷卻劑管理方法，是對鋼線芯材 表面固定有鑽石磨粒的固定磨粒鋼線供應冷卻劑進行矽材 料切斷的線鋸之冷卻劑管理方法， 其特徵爲，將切斷所產生之使用過的粉獎直接導入離 心分離機藉此去除矽切屑，將去除矽切屑後的冷卻1劑供應 至上述固定磨粒鋼線做爲再度使用。 上述線鋸之冷卻劑管理方法中，上述使用過的粉漿以 -8 - 201043322 利用重力供應至離心分離機爲佳。 此外，上述線鋸之冷卻劑管理方法中，利用上述離心 分離機去除矽切屑後的冷卻劑的固體成份濃度是以6〜8 重量％爲佳。 另外，上述線鋸之冷卻劑管理方法中，導入至上述離 心分離機之使用過的粉漿是以經過加熱爲佳。 本發明相關的線鋸之冷卻劑管理裝置，具有：所具備 0 的固定磨粒鋼線是在鋼線芯材表面固定有鑽石磨粒可對矽 材料進行切斷的線鋸本體；及可對上述固定磨粒鋼線供應 冷卻劑的冷卻劑供應裝置，其特徵爲：具備有可直接導入 上述線鋸本體所產生之使用過的粉漿進行矽切屑的去除’ 將去除矽切屑後的冷卻劑供應至上述冷卻劑供應裝置的離 心分離機。 上述線鋸之冷卻劑管理裝置中，以在上述線鋸本體的 下部配置離心分離機，來自於線鋸本體之使用過的粉漿利 〇 用重力供應至離心分離機爲佳。 此外，上述線鋸之冷卻劑管理裝置中，以在上述離心 分離機的入口部具備有可對使用過的粉漿進行加熱的加熱 器爲佳。 [發明效果] 根據本發明的線鋸之冷卻劑管理方法及裝置時’是構 成爲可將切斷所產生之使用過的粉漿直接導入離心分離機 ，立即去除使用過的粉漿中的矽切屑，所以能夠使返回至 -9- 201043322 冷卻劑供應裝置做爲再使用的冷卻劑中的矽切屑濃度管理 在穩定的低狀態’因此，能夠使固定磨粒鋼線保持高的切 削速度，再加上，是立即去除使用過的粉漿中的矽切屑’ 所以能夠抑制矽切屑和冷卻劑中的水份及添加物等產生反 應所造成的膠凝作用或溶膠作用問題，因此，從能夠防止 凝塊的咬入問題能夠提昇矽材料切斷面品質的結果的來看 ，也就是可達到提昇固定磨粒鋼線切削速度的優異效果。 再加上，因是對離心分離機的分離性能進行調節使從 使用過的粉漿去除矽切屑後之冷卻劑的固體成份濃度成爲 6〜8重量％，藉此就能夠獲得切斷面品質保持在高品質狀 態下提昇固定磨粒鋼線切斷速度的效果。 【實施方式】 [發明之最佳實施形態] 以下，是與圖示例同時說明本發明的實施形態。 第1圖爲表示實施本發明的線鋸之冷卻劑管理裝置的 一實施例槪略方塊圖。第1圖中，1是線鋸本體，該線鋸 本體1’其鋼線芯材表面固定有鑽石磨粒的固定磨粒鋼線 2 ’是複數次圈掛在頂點朝下配置成倒三角形狀的滾輪3a 、3 b、3 C上驅動成行進。再加上，掛在滾輪3 b、3 e間的 固疋磨粒鋼線2的上部是配置有砂材料4 (工件）的同時 ’砍材料4的上部是設有可使矽材料4卡止不往上方脫離 的制動器5。6是冷卻劑供應裝置，該冷卻劑供應裝置6 具有：冷卻劑7收容用的供應槽8 ;連接在該供應槽8的 -10- 201043322 '冷卻劑供應管9 ;配備在該冷卻劑供應管9的泵浦1 0及冷 卻器11，利用上述泵浦1〇的驅動使上述供應槽8的冷卻 劑7透過供應噴嘴12供應至上述線鋸本體1的矽材料4 和固定磨粒鋼線2接觸的部份。 接著，是在驅動上述固定磨粒鋼線2行進的同時，於 利用冷卻劑供應裝置6對矽材料4和固定磨粒鋼線2接觸 的部份供應有冷卻劑7的狀態下，使倒三角形狀的滾輪3a 0 、3b、3c朝箭符號A方向上昇時，矽材料4是會於卡止 在制動器5的狀態下由固定磨粒鋼線2切削在複數部份完 成切斷。 上述線鋸本體1的下部，是設有從線鋸本體1落下來 之使用過的粉漿13承接用的粉漿承接槽14,再加上，承 接在該粉漿承接槽1 4之使用過的粉漿1 3 ’是由粉漿供應 管1 6直接供應至配置在要比粉漿承接槽1 4還下側的離心 分離機1 5。即，粉漿承接槽1 4之使用過的粉漿1 3是利用 Q 重力供應至離心分離機1 5。1 7是設置在離心分離機1 5的 入口和上述粉漿承接槽14之間的加溫器。另’圖示例中 ，是圖示著粉漿承接槽14之使用過的粉漿13利用重力供 應至離心分離機1 5的例子，但也可在離心分離機1 5的入 口如虛線所示配備供應用泵浦1 8 ’利用泵浦壓將使用過的 粉漿1 3供應至離心分離機1 5。 上述離心分離機1 5，如第2圖所示，是構成爲例如以 2000〜6000 rpm的高速旋轉一端側具備有錐形部19的筒 形外胴即旋轉體2 0，在筒形的旋轉體1 9內部’是透過設 -11 - 201043322 置在上述錐形部19側的軸21內部的內軸22導入有上述 使用過的粉漿13 ’再加上’在上述旋轉體20內部’是設 有和旋轉體20有稍微旋轉差進行旋轉的螺旋23 ’因此’ 從內軸22供應在旋轉體20內部之使用過的粉漿13的矽 切屑是由離心力推向旋轉體20的內面’又加上’利用螺 旋23的作用使其送往第2圖的左方向沿著錐形部19形成 脫水的同時移動’脫水後的矽切屑24是從固體出口 25吐 出。此外，冷卻劑7是成爲精製液被送往第2圖的右方向 ，從側板26的取出口 27取出。 從上述離心分離機15的固體出口 25吐出的矽切屑24 ，是回收至第1圖所示的切屑回收容器28 ’此外’從上述 離心分離機15的取出口 27吐出的冷卻劑7’是返回至冷 卻劑供應裝置6的供應槽8做爲再度使用。供應槽8內’ 是供應有新冷卻劑7 ’做爲補充因蒸發等造成冷卻劑7減少 的份量，同時補充有在離心分離機1 5因比重大的成份與 矽切屑24 —起排出造成減少的成份，藉此進行成份調整 〇 上述離心分離機15，是可根據使用過的粉漿13供應 量、旋轉體20的錐體部的角度暨長度、設置在旋轉體20 內部藉此分開矽切屑24和冷卻劑7的分離擋板高度等設 定矽切屑24去除性能的同時，還可透過調整旋轉體20的 旋轉速度來調整矽切屑24去除性能，因此就能夠將矽切 屑分離後的冷卻劑7中含有的固體成份濃度調整成目標値 -12- 201043322 本發明者們’是於冷卻劑7中含有的固體成份濃度調 整成各種値的狀況下實施了矽材料4的切斷試驗，結果得 知冷卻劑7的固體成份濃度調整成6〜8重量％時，即使是 在保持著高切斷速度的狀態下進行切斷也能夠保持高品質 的砂材料4切斷面。另，冷卻劑7的固體成份濃度爲6〜8 重量％時之固定成份的平均粒徑是約1μιη。此外，爲了提 高上述離心分離機15的分離性能，並且使冷卻劑7的固 〇 體成份濃度維持成6〜8重量％，得知有效的手段是利用加 溫器17對要供應至離心分離機15之使用過的粉漿13進 行加溫。 其次’是對上述實施例的動作進行說明。 驅動線鋸本體1的固定磨粒鋼線2行進的同時，驅動 栗浦1 〇將攪拌供應槽8的冷卻劑7供應至矽材料4和固 定磨粒鋼線2接觸的部份，並且使倒三角形狀的滾輪3 a、 3b、3c朝箭頭符號a方向上昇。如此一來，卡止在制動 〇 器5的矽材料4就會由固定磨粒鋼線2切削在複數部份完 成切斷。 矽材料4切削所產生之使用過的粉漿1 3是流下到粉 漿承接槽14，粉漿承接槽14之使用過的粉漿13是由粉漿 供應管1 6供應至離心分離機1 5即刻去矽切屑24 ^矽切屑 24去後的冷卻劑7是供應至供應槽8。此時，使用過的粉 漿1 3，是形成爲冷卻劑7中只混入有矽切屑24，所以與 先前混入有磨粒的游離磨粒方式之使用過的粉漿相比其黏 度較低，因此利用離心分離機1 5是能夠連續又容易去除 -13- 201043322 矽切屑24。 上述供應槽8內’是供應有新冷卻劑7，做爲補充因蒸 發等造成冷卻劑7減少的份量，同時補充有在離心分離機 1 5因比重大的成份與矽切屑24 —起排出造成減少的成份 ，藉此進行成份調整’成份調整後的冷卻劑7，是由冷卻 器11保持成指定的溫度然後再度供應至上述線鋸本體。 如以上所述，因是構成爲將矽材料4切削所產生之使 用過的粉漿13直接導入離心分離機15，即刻去除使用過 的粉漿1 3中的矽切屑24 ’所以能夠使返回至冷卻劑供應 裝置6做爲再使用的冷卻劑7中的矽切屑濃度管理在穩定 的低狀態，因此，能夠使固定磨粒鋼線2保持高的切削速 度。再加上，是立即去除使用過的粉漿13中的矽切屑， 所以能夠抑制矽切屑和冷卻劑7中的水份及添加物等產生 反應所造成的膠凝作用或溶膠作用問題，因此，從能夠防 止凝塊的咬入問題能夠提昇矽材料4切斷面品質的結果的 來看，也就是能夠提昇固定磨粒鋼線2的切削速度也就是 可達到提昇固定磨粒鋼線切削速度。 因此，即使是將經由離心分離機1 5所獲得的冷卻劑7 返回至冷卻劑供應裝置6再度供應至線鋸本體1進行矽材 料4的切斷，還是能夠在矽材料4切斷面維持著高品質的 狀態下利用固定磨粒鋼線2進行高速切斷。 上述中，是透過對離心分離機1 5的旋轉數進行控制 ，使矽切屑24去除後的冷卻劑7的固體成份濃度調整成 爲6〜8重量％。如上述，冷卻劑7的固體成份濃度調整成 -14- 201043322 爲6〜8重量％時的固體成份的平均粒 如以上所述，當冷卻劑7的固體 〜8重量％時，此時的固體成份的平 以固體成份對切削性的影響小，因此 能夠維持較高的切削速度，再加上， ，所以矽材料4的切斷面就能夠保持 此時，若利用加溫器1 7對要供历 Q 使用過的粉漿13進行加溫，是能夠 1 5的分離性能，因此就能夠使上述冷 度維持成6〜8重量％的管理變容易。 用固定磨粒鋼線2以高速切斷矽材料 造成使用過的粉漿1 3溫度上昇，但 昇之使用過的粉漿1 3直接導入離心j 該熱是能夠提高上述離心分離機1 5的 另，本發明的線鋸之冷卻劑管理 〇 限於上述的實施例，對於鋼線本體之 料切斷方式並沒有限定，其他，只要 範圍理所當然是可加以各種變更。 【圖式簡單說明】 第1圖爲表示實施本發明的線鋸 一實施例槪略方塊圖。 第2圖爲表示離心分離機的一例; 徑是約1 μ m。 丨成份濃度調整成爲6 均粒徑是約 Ιμιη，所 ’固定磨粒鋼線2就 因幾乎沒有凝塊形成 較高的品質。 I至離心分離機1 5之 提昇上述離心分離機 卻劑7的固體成份濃 此外，如上述，當利 4時，切斷時的熱會 因是將如上述溫度上 子離機1 5，所以利用 I分離性能。 方法及裝置，並不只 固定磨粒鋼線的矽材 不脫離本發明的主旨 之冷卻劑管理裝置的 旣略剖面側面圖。 -15- 201043322 【主要元件符號說明】 1 :線銅本體 2 z固定磨粒鋼線 4 :矽材料 6 :冷卻劑供應裝置 7 :冷卻劑 13 :使用過的粉槳 1 5 :離心分離機 1 7 :加溫器 2 4 :矽切屑 -16201043322 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a coolant management method and apparatus for a wire saw for cutting a crucible material. [Prior Art] In the prior art, a device for cutting a tantalum material such as a twin ingot or a tantalum wafer is a so-called wire saw (see, for example, Patent Document 1). In the prior art, as shown in Patent Document 1, the steel wire formed of the ferrous metal wire is moved while maintaining the specified tension, and the cutting fluid in which the abrasive grains have been dispersed in the dispersion (referred to as free) When the abrasive grain method is supplied to the wire saw, the steel wire is brought into contact with the enamel material, thereby cutting the contact portion in a line shape to cut the cutting fluid used in the wire saw, which is mixed in the dispersion liquid. The weight ratio is, for example, a large amount of abrasive grains of 1:1 (i.e., about 50%), thereby improving the machinability of the crucible, and further, it is necessary to improve the dispersibility in order to perform uniform cutting. Therefore, a relatively high viscosity dispersion is used. . In this case, when the cutting fluid having the high viscosity is supplied to the wire saw to cut the crucible material, the used slurry after the cutting is mixed with the above-mentioned high-concentration abrasive grains. The crumbs of the crucible after the material is cut, so that the concentration of the solid component is further increased, so the viscosity of the used slurry is increased. The above-mentioned used slurry "usually" from the wire saw is taken into the recovery tank and then stored in the recovery tank. 5 - 201043322 used in the slurry recovery tank. The used slurry is first supplied to the first separation means to separate the abrasive grains having a larger particle size than the chopped chips, and then sent to the second separation means to be separated into矽Cutter and separation solution. The abrasive grains separated by the first separation means and the separation liquid separated by the second separation means are supplied to the stirring tank, and the unused agitating liquid or the unused dispersion liquid is supplied in the stirring tank. The cutting fluid is stirred, and the agitated cutting fluid is supplied to the wire saw. In the wire saw of the free abrasive type, when the dispersibility of the abrasive grains in the cutting fluid is lowered, there is a problem that the wire saw cannot be uniformly cut. Therefore, it is necessary to carry out stirring for a long period of time to avoid precipitation and separation of the abrasive grains, thereby maintaining uniformity. Dispersion. The used slurry from the above-mentioned wire saw has a very high viscosity as described above, and is mixed with abrasive grains and swarf chips. Therefore, it is necessary to provide a plurality of separation means for separating the abrasive grains and the swarf chips so that the separation operation is cumbersome and separate. The means are also relatively large and there is a problem of high equipment costs. As described above, the used slurry is difficult to separate, so that the previously used slurry is separated, and the batch method is performed after the cutting operation is completed. In addition, the swarf generated by the cutting operation reacts with water and additives in the dispersion to form a gelling action or a sol action, so that a blocky substance (clot) is formed in the cutting fluid. When it is desired to increase the traveling speed of the steel wire of the wire saw to perform the operation, the clot may bite on the steel wire, causing a problem that the quality of the cut surface of the tantalum material is lowered. In addition, in the wire saw of the prior free-abrasive type, when the traveling speed of the steel wire is increased, there is a problem that the amount of abrasive grains substantially supplied to the cutting portion is reduced, and, as described above, the quality is lowered due to biting of the clot. The problem is that the speed of the steel wire is previously lowered. Therefore, when the former wire saw is used to cut the twin crystal-6 - 201043322 ingot, it takes a long time of about 12 to 24 hours, so that the cutting operation is inefficient. On the other hand, in recent years, a technique of cutting a silicon wafer by using a fixed abrasive grain steel wire (so-called fixed abrasive grain method) in which a diamond abrasive grain is fixed on a surface of a steel wire core material such as a piano wire is known (for example, refer to the patent document) 2, etc.). Patent Document 2 is a used slurry in which a coolant is supplied to a fixed abrasive steel wire and a crucible is cut, and the used swarf generated by the cutting is mixed, and the slurry is taken up by the Q tank and then sent to the slurry. The recycling tank is stored. Then, the used slurry stored in the recovery tank is introduced into a sedimentation tank or the like to remove the swarf chips, and the coolant after removing the swarf swarf is introduced into the supply tank and then supplied to the fixed abrasive steel wire as a re-entry. use. Since the fixed abrasive steel wire shown in Patent Document 2 has the diamond abrasive grains fixed on the steel wire, the dispersibility of the abrasive grains can be always ensured, so that the machinability can be improved in a shorter time than in Patent Document 1 described above. The cutting is completed, plus 'for the fixed abrasive steel wire, as long as the coolant for the cooling main body is supplied, it is not required to disperse.' Therefore, the advantage is that the coolant can be a low-viscosity and low-cost product such as a water-soluble coolant. . [PRIOR ART DOCUMENT] [Patent Document 1] JP-A-2001-322066 [Patent Document 2] JP-A-2002-144229 [Summary of the Invention] [Problems to be Solved by the Invention] 201043322 However, even When the tantalum material is cut using the fixed abrasive steel wire shown in Patent Document 2, the concentration of the solid component (chopper) in the circulating coolant is also maintained at a relatively high state, and according to the present inventors According to our investigation, when the cutting of the crucible material is started, the solid content concentration in the coolant at the end of the cutting is increased by 6 to 7%, so that there is a problem that the cutting speed of the fixed abrasive steel wire is lowered. In addition, during the storage of the used slurry in the recovery tank, the high concentration of the swarf swarf will react with the water and additives in the coolant to cause a gelation or sol to form agglomerates. Block) problem. Therefore, there is a problem in that the clot is bitten into the fixed abrasive grain line, and the quality of the cut surface of the tantalum material is lowered. Therefore, even if the fixed abrasive steel wire itself is excellent in machinability, the performance cannot be fully exerted. There is a problem of lowering the cutting speed. The present invention has been made in view of the above problems, and provides a coolant management method and apparatus for a wire saw capable of greatly improving a cutting speed when a crucible material is cut by a fixed abrasive grain steel wire. [Means for Solving the Problem] The coolant management method for a wire saw according to the present invention is a wire saw for supplying a coolant to a fixed abrasive steel wire to which a diamond abrasive grain is fixed on a surface of a steel wire core material. The coolant management method is characterized in that the used powder prize generated by the cutting is directly introduced into the centrifugal separator to remove the swarf chips, and the cooling agent after removing the swarf chips is supplied to the fixed abrasive grain steel wire as Use again. In the above coolant management method for a wire saw, it is preferred that the used slurry is supplied to the centrifugal separator by gravity from -8 to 201043322. Further, in the coolant management method for the wire saw, it is preferable that the solid content concentration of the coolant after removing the chopped chips by the centrifugal separator is 6 to 8 wt%. Further, in the coolant management method of the wire saw, the used slurry introduced into the centrifugal separator is preferably heated. A coolant management device for a wire saw according to the present invention has: a fixed abrasive steel wire having 0 is a wire saw body in which a diamond abrasive grain is fixed on a surface of a steel wire core material to cut a crucible material; and The coolant supply device for supplying a coolant to the fixed abrasive grain steel wire is characterized in that: the used slurry which can be directly introduced into the wire saw body is used for removing the swarf chips, and the coolant after removing the swarf chips is removed. A centrifugal separator supplied to the above coolant supply device. In the coolant management device for the wire saw, a centrifugal separator is disposed in a lower portion of the wire saw body, and the used slurry from the wire saw body is preferably supplied to the centrifugal separator by gravity. Further, in the coolant management device for a wire saw, it is preferable that a heater capable of heating the used slurry is provided at an inlet portion of the centrifugal separator. [Effect of the Invention] According to the method and apparatus for managing a coolant of a wire saw according to the present invention, it is configured such that the used slurry generated by the cutting can be directly introduced into the centrifugal separator, and the ruthenium in the used slurry is immediately removed. Chips, so it is possible to return to the -9-201043322 coolant supply device as a re-use coolant in which the swarf concentration is managed in a stable low state. Therefore, it is possible to maintain a high cutting speed of the fixed abrasive steel wire. In addition, it is an immediate removal of the swarf swarf in the used syrup. Therefore, it is possible to suppress the problem of gelation or sol action caused by the reaction of moisture and additives in the swarf and the coolant, and therefore, it is possible to prevent The problem of the bite of the clot can improve the quality of the cut surface of the crucible material, that is, the excellent effect of improving the cutting speed of the fixed abrasive grain steel wire. In addition, since the separation performance of the centrifugal separator is adjusted so that the solid content concentration of the coolant after removing the chopped chips from the used slurry is 6 to 8 wt%, the quality of the cut surface can be maintained. The effect of raising the cutting speed of the fixed abrasive steel wire in a high quality state. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a schematic block diagram showing an embodiment of a coolant management device for a wire saw according to the present invention. In Fig. 1, 1 is a wire saw body, and the wire saw body 1' has a fixed abrasive grain steel wire 2' with a diamond abrasive grain fixed on a surface of a steel wire core material, and the plurality of rings are hung at a vertex downward to be arranged in an inverted triangular shape. The rollers 3a, 3b, 3C are driven to travel. In addition, the upper part of the solid-grained abrasive steel wire 2 hung between the rollers 3b and 3e is provided with the sand material 4 (workpiece) while the upper part of the chopping material 4 is provided to allow the crucible material 4 to be locked. The brake 5.6 which is not detached upward is a coolant supply device 6 having a supply tank 8 for housing the coolant 7 and a refrigerant supply pipe 9 connected to the supply tank 8-10-201043322 a pump 10 and a cooler 11 provided in the coolant supply pipe 9, and the coolant 7 of the supply tank 8 is supplied to the wire saw body 1 through the supply nozzle 12 by the driving of the pump 1 4 The part in contact with the fixed abrasive steel wire 2. Next, while driving the fixed abrasive grain steel wire 2, while the coolant supply device 6 supplies the coolant 7 to the portion where the crucible material 4 and the fixed abrasive grain steel wire 2 are in contact with each other, the inverted triangle is provided. When the shape of the rollers 3a 0, 3b, and 3c rises in the direction of the arrow A, the 矽 material 4 is cut by the fixed abrasive steel wire 2 in a state of being locked in the brake 5, and the cutting is completed in a plurality of portions. The lower portion of the wire saw body 1 is provided with a slurry receiving groove 14 for receiving the used slurry 13 dropped from the wire saw body 1, and is used in the slurry receiving groove 14 The slurry 1 3 ' is supplied directly from the slurry supply pipe 16 to the centrifugal separator 15 disposed on the lower side than the slurry receiving tank 14 . That is, the used slurry 13 of the slurry receiving tank 14 is supplied to the centrifugal separator 15 by Q gravity. 17. 7 is disposed between the inlet of the centrifugal separator 15 and the slurry receiving tank 14 described above. Warmer. In the other example, the used slurry 13 showing the used slurry receiving tank 14 is supplied to the centrifugal separator 15 by gravity, but the inlet of the centrifugal separator 15 may be as shown by a broken line. Equipped with a supply pump 1 8 'Use the pump pressure to supply the used slurry 1 3 to the centrifuge 1 5 . As shown in FIG. 2, the centrifugal separator 15 is configured to rotate the cylindrical body, that is, the cylindrical body 20 having the tapered portion 19 at one end side of the high speed rotation of 2000 to 6000 rpm. The inner portion of the body 1 9 is introduced through the inner shaft 22 disposed inside the shaft 21 on the side of the tapered portion 19, and the used slurry 13' is added, and 'inside the rotating body 20' is A spiral 23 having a slight rotation difference with the rotating body 20 is provided. Therefore, the swarf of the used slurry 13 supplied from the inner shaft 22 inside the rotating body 20 is pushed by the centrifugal force toward the inner surface of the rotating body 20' Further, 'the action of the spiral 23 is sent to the left direction of the second drawing to form dehydration along the tapered portion 19, and the 'dehydrated chopped chips 24 are discharged from the solid outlet 25. Further, the coolant 7 is sent to the right direction of Fig. 2 as a refining liquid, and taken out from the take-out port 27 of the side plate 26. The chopping chips 24 discharged from the solids outlet 25 of the centrifugal separator 15 are collected in the chip collecting container 28 shown in Fig. 1 and the coolant 7' discharged from the outlet 27 of the centrifugal separator 15 is returned. The supply tank 8 to the coolant supply device 6 is used again. The supply tank 8 is supplied with a new coolant 7' as a supplement to reduce the amount of coolant 7 caused by evaporation, etc., and is supplemented with a decrease in the centrifugal separator 15 due to the significant component and the swarf swarf 24 The composition of the centrifugal separator 15 is adjusted according to the supplied amount of the slurry 13 and the angle and length of the cone portion of the rotating body 20, and is disposed inside the rotating body 20 to separate the cutting chips. 24 and the separation baffle height of the coolant 7 and the like, while setting the removal performance of the swarf 24, it is also possible to adjust the removal performance of the swarf swarf 24 by adjusting the rotational speed of the rotator 20, so that the coolant 7 after separating the swarf chips can be removed. The concentration of the solid content contained in the target is adjusted to the target 値-12-201043322. The inventors of the present invention performed the cutting test of the ruthenium material 4 under the condition that the concentration of the solid component contained in the coolant 7 was adjusted to various enthalpy. When the solid content concentration of the coolant 7 is adjusted to 6 to 8 wt%, the cut surface of the sand material 4 of high quality can be maintained even if the cutting is performed while maintaining a high cutting speed. Further, the average particle diameter of the fixing component when the solid concentration of the coolant 7 is 6 to 8 % by weight is about 1 μm. Further, in order to improve the separation performance of the centrifugal separator 15 and maintain the solid content of the coolant 7 at 6 to 8 wt%, it is known that an effective means is to supply the centrifugal separator to the centrifugal separator. The used slurry 13 of 15 is heated. Next, the operation of the above embodiment will be described. While driving the fixed abrasive steel wire 2 of the wire saw body 1 to travel, the pump 1 is driven to supply the coolant 7 of the agitation supply tank 8 to the portion where the crucible material 4 and the fixed abrasive steel wire 2 are in contact, and is poured The triangular shaped rollers 3a, 3b, 3c rise in the direction of the arrow symbol a. As a result, the crucible material 4 stuck in the brake damper 5 is cut by the fixed abrasive steel wire 2 in a plurality of portions. The used slurry 13 produced by the cutting of the crucible material 4 is discharged to the slurry receiving tank 14, and the used slurry 13 of the slurry receiving tank 14 is supplied from the slurry supply pipe 16 to the centrifugal separator 1 5 The coolant 7 immediately after the removal of the swarf chips 24 矽 swarf 24 is supplied to the supply tank 8. At this time, the used slurry 13 is formed so that only the swarf chips 24 are mixed in the coolant 7, so that the viscosity is lower than that of the used granules in which the abrasive grains are previously mixed. Therefore, the use of the centrifugal separator 15 is capable of continuously and easily removing the 13-201043322 swarf chip 24. The inside of the supply tank 8 is supplied with a new coolant 7 as a supplement to the amount of the coolant 7 which is reduced by evaporation or the like, and is supplemented by the discharge of the components of the centrifuge 15 and the swarf swarf 24 The reduced composition, whereby the component adjustment 'component adjusted coolant 7 is held by the cooler 11 to a specified temperature and then supplied again to the wire saw body. As described above, since the used slurry 13 which is formed by cutting the enamel material 4 is directly introduced into the centrifugal separator 15, the swarf swarf 24' in the used slurry 13 is removed immediately, so that it can be returned to The coolant supply device 6 manages the crumb concentration in the coolant 7 to be used in a stable low state, and therefore, the fixed abrasive steel wire 2 can be maintained at a high cutting speed. In addition, since the swarf chips in the used syrup 13 are removed immediately, it is possible to suppress the problem of gelation or sol action caused by the reaction of the swarf and the coolant and the additives in the coolant 7, and therefore, From the viewpoint of being able to prevent the problem of the bite of the clot, the quality of the cut surface of the crucible material 4 can be improved, that is, the cutting speed of the fixed abrasive grain 2 can be increased, that is, the cutting speed of the fixed abrasive steel wire can be improved. Therefore, even if the coolant 7 obtained via the centrifugal separator 15 is returned to the coolant supply device 6 and re-supplied to the wire saw body 1 to cut the crucible material 4, it can be maintained on the cut surface of the crucible material 4. The high-speed cutting is performed by the fixed abrasive grain steel wire 2 in a high quality state. In the above, the number of rotations of the centrifugal separator 15 is controlled so that the solid content concentration of the coolant 7 after the removal of the chopping chips 24 is adjusted to 6 to 8 wt%. As described above, the solid content of the coolant 7 is adjusted to be -14,433,322, and the average particle size of the solid component is 6 to 8 wt%, as described above, when the solid of the coolant 7 is 8% by weight, the solid at this time The flatness of the component has a small effect on the machinability of the solid component, so that the cutting speed can be maintained, and the cut surface of the crucible material 4 can be maintained at this time, if the heater 7 is used Since the slurry 13 used for the Q treatment is heated, the separation performance of 15 can be achieved. Therefore, it is easy to maintain the above-described coldness at 6 to 8 wt%. The use of the fixed abrasive steel wire 2 to cut the crucible material at a high speed causes the used slurry 13 to rise in temperature, but the used slurry 13 is directly introduced into the centrifuge j. This heat is capable of improving the centrifugal separator 15 described above. Further, the coolant management of the wire saw of the present invention is limited to the above-described embodiment, and the material cutting method of the steel wire body is not limited, and other ranges may of course be variously modified. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic block diagram showing an embodiment of a wire saw embodying the present invention. Fig. 2 is a view showing an example of a centrifugal separator; the diameter is about 1 μm. The concentration of the bismuth component is adjusted to be 6 均μηη, and the fixed abrasive steel wire 2 has a high quality due to almost no clot formation. I to the centrifugal separator 15 to increase the solid content of the above-mentioned centrifugal separator agent 7, in addition, as described above, when the profit is 4, the heat at the time of cutting will be off the machine as the above temperature, 1 5 Use I to separate performance. The method and apparatus, not only the coffin of the fixed abrasive steel wire, but also the schematic side view of the coolant management device which does not deviate from the gist of the present invention. -15- 201043322 [Description of main component symbols] 1 : Wire copper body 2 z fixed abrasive grain steel wire 4 : Tantalum material 6 : Coolant supply device 7 : Coolant 13 : Used powder paddle 1 5 : Centrifugal separator 1 7: Warmer 2 4 : 矽 矽 -16