TWI404949B - 檢查用治具之維修方法及基板檢查裝置 - Google Patents

檢查用治具之維修方法及基板檢查裝置 Download PDF

Info

Publication number
TWI404949B
TWI404949B TW099135059A TW99135059A TWI404949B TW I404949 B TWI404949 B TW I404949B TW 099135059 A TW099135059 A TW 099135059A TW 99135059 A TW99135059 A TW 99135059A TW I404949 B TWI404949 B TW I404949B
Authority
TW
Taiwan
Prior art keywords
inspection
resistance value
contact
contacts
pair
Prior art date
Application number
TW099135059A
Other languages
English (en)
Chinese (zh)
Other versions
TW201115160A (en
Inventor
Tomoka Kariya
Original Assignee
Nidec Read Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Read Corp filed Critical Nidec Read Corp
Publication of TW201115160A publication Critical patent/TW201115160A/zh
Application granted granted Critical
Publication of TWI404949B publication Critical patent/TWI404949B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07328Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support for testing printed circuit boards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/28Provision in measuring instruments for reference values, e.g. standard voltage, standard waveform
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0268Marks, test patterns or identification means for electrical inspection or testing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
TW099135059A 2009-10-21 2010-10-14 檢查用治具之維修方法及基板檢查裝置 TWI404949B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009242875A JP5428748B2 (ja) 2009-10-21 2009-10-21 検査用治具のメンテナンス方法及び基板検査装置

Publications (2)

Publication Number Publication Date
TW201115160A TW201115160A (en) 2011-05-01
TWI404949B true TWI404949B (zh) 2013-08-11

Family

ID=44048705

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099135059A TWI404949B (zh) 2009-10-21 2010-10-14 檢查用治具之維修方法及基板檢查裝置

Country Status (3)

Country Link
JP (1) JP5428748B2 (ko)
KR (1) KR101157878B1 (ko)
TW (1) TWI404949B (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5400107B2 (ja) * 2011-08-16 2014-01-29 Ckd株式会社 基板検査装置
JP5866943B2 (ja) * 2011-10-06 2016-02-24 日本電産リード株式会社 基板検査装置
JP6252106B2 (ja) * 2013-10-31 2017-12-27 日本電産リード株式会社 接触子のメンテナンス方法及び検査装置
JP6375661B2 (ja) * 2014-03-26 2018-08-22 日本電産リード株式会社 抵抗測定装置、基板検査装置、検査方法、及び検査用治具のメンテナンス方法
JP6696523B2 (ja) * 2018-03-14 2020-05-20 日本電産リード株式会社 抵抗測定方法、抵抗測定装置、及び基板検査装置
TWI716106B (zh) * 2019-09-16 2021-01-11 力成科技股份有限公司 封裝基板之電阻量測方法及其封裝基板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200809226A (en) * 2006-06-20 2008-02-16 Nidec Read Corp Substrate inspecting apparatus and substrate inspecting method
TW200809227A (en) * 2006-06-29 2008-02-16 Nidec Read Corp Board inspecting method and board inspecting device
US20080218175A1 (en) * 2007-03-08 2008-09-11 Test Research, Inc. Open-Circuit Testing System and Method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201529A (ja) * 2000-01-21 2001-07-27 Hitachi Telecom Technol Ltd プリント配線板の試験方法及び試験装置
JP4607295B2 (ja) * 2000-08-02 2011-01-05 日置電機株式会社 回路基板検査装置
JP3950713B2 (ja) * 2002-02-28 2007-08-01 日置電機株式会社 回路配線検査方法およびその装置
JP2008076281A (ja) * 2006-09-22 2008-04-03 Nidec-Read Corp 基板検査治具、基板検査装置及び検査方法
KR100975808B1 (ko) * 2007-04-17 2010-08-13 니혼덴산리드가부시키가이샤 기판검사용 치구

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200809226A (en) * 2006-06-20 2008-02-16 Nidec Read Corp Substrate inspecting apparatus and substrate inspecting method
TW200809227A (en) * 2006-06-29 2008-02-16 Nidec Read Corp Board inspecting method and board inspecting device
US20080218175A1 (en) * 2007-03-08 2008-09-11 Test Research, Inc. Open-Circuit Testing System and Method

Also Published As

Publication number Publication date
KR101157878B1 (ko) 2012-06-22
KR20110043446A (ko) 2011-04-27
TW201115160A (en) 2011-05-01
JP5428748B2 (ja) 2014-02-26
JP2011089858A (ja) 2011-05-06

Similar Documents

Publication Publication Date Title
CN105510798B (zh) 基板检查方法及基板检查装置
TWI404949B (zh) 檢查用治具之維修方法及基板檢查裝置
JP7105977B2 (ja) 検査システム、ならびに検査システムの故障解析・予知方法
TWI604203B (zh) Insulation inspection method and insulation inspection device
KR102216324B1 (ko) 접촉자의 유지 보수 방법 및 검사 장치
JP4369949B2 (ja) 絶縁検査装置及び絶縁検査方法
TW200809226A (en) Substrate inspecting apparatus and substrate inspecting method
JP5463714B2 (ja) 基板検査方法及び基板検査装置
JP6765125B2 (ja) 抵抗測定装置、基板検査装置、及び抵抗測定方法
TW201500743A (zh) 基板檢查裝置
KR102126836B1 (ko) 절연 검사 방법 및 절연 검사 장치
JP5604839B2 (ja) 基板検査方法及び基板検査装置
JP4467373B2 (ja) 抵抗測定方法およびその装置
JP6255833B2 (ja) 基板検査方法及び基板検査装置
JP2014020815A (ja) 基板検査装置および基板検査方法
JP2013024724A (ja) 回路基板検査装置および回路基板検査方法
JP6723190B2 (ja) 検査装置
JPH06347502A (ja) プリント基板試験方法
KR20230089427A (ko) 절연 검사 장치 및 절연 검사 방법
JP2002100658A (ja) 半導体装置の検査装置
JP2012237622A (ja) 測定装置及び測定方法