TWI402177B - 處理液吐出頭單元以及具備此吐出頭單元的處理液吐出裝置 - Google Patents

處理液吐出頭單元以及具備此吐出頭單元的處理液吐出裝置 Download PDF

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Publication number
TWI402177B
TWI402177B TW099123631A TW99123631A TWI402177B TW I402177 B TWI402177 B TW I402177B TW 099123631 A TW099123631 A TW 099123631A TW 99123631 A TW99123631 A TW 99123631A TW I402177 B TWI402177 B TW I402177B
Authority
TW
Taiwan
Prior art keywords
treatment liquid
discharge head
processing liquid
distributor
side wall
Prior art date
Application number
TW099123631A
Other languages
English (en)
Chinese (zh)
Other versions
TW201109185A (en
Inventor
Jeong-Seon Kim
Original Assignee
Semes Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semes Co Ltd filed Critical Semes Co Ltd
Publication of TW201109185A publication Critical patent/TW201109185A/zh
Application granted granted Critical
Publication of TWI402177B publication Critical patent/TWI402177B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/09—Ink jet technology used for manufacturing optical filters

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Mathematical Physics (AREA)
  • Optical Filters (AREA)
  • Nozzles (AREA)
TW099123631A 2009-07-21 2010-07-19 處理液吐出頭單元以及具備此吐出頭單元的處理液吐出裝置 TWI402177B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090066368A KR101081899B1 (ko) 2009-07-21 2009-07-21 처리액 토출 헤드 유닛 및 이를 구비한 처리액 토출 장치

Publications (2)

Publication Number Publication Date
TW201109185A TW201109185A (en) 2011-03-16
TWI402177B true TWI402177B (zh) 2013-07-21

Family

ID=43515079

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099123631A TWI402177B (zh) 2009-07-21 2010-07-19 處理液吐出頭單元以及具備此吐出頭單元的處理液吐出裝置

Country Status (4)

Country Link
JP (1) JP5496800B2 (ko)
KR (1) KR101081899B1 (ko)
CN (1) CN101961956B (ko)
TW (1) TWI402177B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180001375A (ko) * 2016-06-27 2018-01-04 주식회사 고산테크 잉크젯 헤드 약액 공급 장치
KR101694278B1 (ko) * 2016-06-27 2017-01-09 주식회사 고산테크 잉크젯 압력 제어장치
CN108146068B (zh) * 2016-12-05 2021-07-06 塔工程有限公司 喷墨型液体涂布模块及其除气方法
KR102268605B1 (ko) * 2019-11-07 2021-06-23 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
KR20220012457A (ko) 2020-07-22 2022-02-04 삼성디스플레이 주식회사 잉크젯 프린팅 장치, 및 이를 이용한 표시 장치의 제조 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200604750A (en) * 2004-07-02 2006-02-01 Seiko Epson Corp Method of forming thin film
TW200700165A (en) * 2005-06-23 2007-01-01 Akzo Nobel Coatings Int Bv Dispenser
KR20080057975A (ko) * 2006-12-21 2008-06-25 세메스 주식회사 액체 공급 유닛 및 이를 포함하는 기판 처리 장치
TW200902158A (en) * 2007-03-29 2009-01-16 Seiko Epson Corp Functional liquid supply apparatus, liquid droplet ejection apparatus, method of manufacturing electro-optical apparatus, electro-optical apparatus and electronic apparatus

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413677B1 (ko) * 2000-07-24 2003-12-31 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드
CN1286645C (zh) * 2003-02-28 2006-11-29 精工爱普生株式会社 液滴喷出装置及液滴喷出头的喷出异常检测、判断方法
JP4455138B2 (ja) * 2004-04-20 2010-04-21 理想科学工業株式会社 インクジェット装置
JP4808454B2 (ja) * 2005-09-07 2011-11-02 株式会社アルバック 印刷ヘッド及び印刷装置
JP2007075753A (ja) * 2005-09-15 2007-03-29 Toppan Printing Co Ltd インク吐出装置
JP2007144976A (ja) * 2005-10-25 2007-06-14 Sharp Corp インクジェット装置およびインクジェット装置のインク充填方法
JP5233073B2 (ja) * 2006-02-27 2013-07-10 コニカミノルタ株式会社 インクジェット記録装置及びそのインク供給方法
JP2007268425A (ja) * 2006-03-31 2007-10-18 Toppan Printing Co Ltd インク吐出ヘッド冷却方法及びインク吐出装置
JP2008012787A (ja) * 2006-07-06 2008-01-24 Sony Corp 液体流通方法、液体流通装置、及び液体吐出装置
JP4872562B2 (ja) * 2006-09-25 2012-02-08 ブラザー工業株式会社 液体吐出装置用ヘッド
JP2009090599A (ja) * 2007-10-11 2009-04-30 Fujifilm Corp インクジェット記録装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200604750A (en) * 2004-07-02 2006-02-01 Seiko Epson Corp Method of forming thin film
TW200700165A (en) * 2005-06-23 2007-01-01 Akzo Nobel Coatings Int Bv Dispenser
KR20080057975A (ko) * 2006-12-21 2008-06-25 세메스 주식회사 액체 공급 유닛 및 이를 포함하는 기판 처리 장치
TW200902158A (en) * 2007-03-29 2009-01-16 Seiko Epson Corp Functional liquid supply apparatus, liquid droplet ejection apparatus, method of manufacturing electro-optical apparatus, electro-optical apparatus and electronic apparatus

Also Published As

Publication number Publication date
CN101961956B (zh) 2014-06-04
CN101961956A (zh) 2011-02-02
KR20110008834A (ko) 2011-01-27
KR101081899B1 (ko) 2011-11-10
TW201109185A (en) 2011-03-16
JP5496800B2 (ja) 2014-05-21
JP2011028265A (ja) 2011-02-10

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