TWI389610B - Method for manufacturing printed circuit board - Google Patents

Method for manufacturing printed circuit board Download PDF

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TWI389610B
TWI389610B TW98145277A TW98145277A TWI389610B TW I389610 B TWI389610 B TW I389610B TW 98145277 A TW98145277 A TW 98145277A TW 98145277 A TW98145277 A TW 98145277A TW I389610 B TWI389610 B TW I389610B
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hole
opening
detecting
conductive pattern
detecting hole
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TW201124013A (en
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ya-jun Zhu
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Zhen Ding Technology Co Ltd
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Description

電路板製作方法Circuit board manufacturing method

本發明涉及電路板領域,尤其涉及一種電路板之製作方法。The present invention relates to the field of circuit boards, and in particular, to a method of fabricating a circuit board.

印刷電路板因具有裝配密度高等優點而得到廣泛應用。關於高密度互連電路板之應用請參見文獻Takahashi, A. Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. Wajima, M. Res. Lab., High density multilayer printed circuit board for HITAC M-880,IEEE Trans. on Components, Packaging, and Manufacturing Technology, 1992, 15(4): 418-425。Printed circuit boards are widely used due to their high assembly density. For applications on high-density interconnect boards, see the literature Takahashi, A. Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. Wajima, M. Res. Lab., High density multilayer printed circuit board for HITAC M -880, IEEE Trans. on Components, Packaging, and Manufacturing Technology, 1992, 15(4): 418-425.

於電路板之導電線路之表面通常需要形成絕緣防焊層,用於遮蔽不需要與貼裝元件或者導電線路連通之導電線路部分,而將需要與其他與貼裝元件或者導電線路之連通導電線路部分暴露出來。先前技術中,上述之絕緣防焊層通常採用印刷感光材料之方式形成。於感光材料印刷後,對其曝光、顯影,從而使得需要保留之部分仍留於電路板導電線路之表面,而不需要保留之部分即與需與外其他元件或線路連通之部分從防焊層露出。由於電路板之尺寸不斷減小,導電線路於電路板表面之分佈越來越密集,需要暴露之線路部分與需要遮蔽之線路之間之距離亦變小。進行曝光之過程中,由於曝光偏差之存在,從而進行顯影之過程中,容易將需要遮蔽之導電線路部分暴露出來,使得後續之表面貼裝元件過程中,印刷之導電膏如錫膏等與原需要遮蔽之導電線路連通,後續檢測過程中,電路板之導電線路短路,造成電路板之不良。An insulating solder mask is usually required on the surface of the conductive line of the circuit board for shielding a portion of the conductive line that does not need to be in communication with the mounting component or the conductive line, and will need to communicate with other mounting components or conductive lines. Partially exposed. In the prior art, the above-mentioned insulating solder resist layer is usually formed by printing a photosensitive material. After the photosensitive material is printed, it is exposed and developed, so that the portion to be retained remains on the surface of the circuit board conductive line, and the portion that needs to be retained, that is, the portion that needs to communicate with other components or lines from the solder resist layer Exposed. As the size of the board continues to decrease, the distribution of the conductive lines on the surface of the board becomes more and more dense, and the distance between the portion of the line to be exposed and the line to be shielded becomes smaller. During the exposure process, due to the existence of the exposure deviation, in the process of developing, it is easy to expose the portion of the conductive line that needs to be shielded, so that the printed conductive paste such as solder paste and the like are in the process of the subsequent surface mount component. The conductive lines that need to be shielded are connected, and during the subsequent detection process, the conductive lines of the circuit board are short-circuited, resulting in a bad circuit board.

有鑑於此,提供一種電路板之製作方法,能夠於曝光之後便能檢測曝光之偏差情況實屬必要。In view of the above, it is necessary to provide a method of manufacturing a circuit board that can detect the deviation of exposure after exposure.

以下將以實施例說明一種電路板製作方法。A method of fabricating a circuit board will be described below by way of example.

一種電路板製作方法,包括步驟:提供包括第一銅箔層及絕緣層之電路基板;於第一銅箔層內製作第一導電圖形及第一檢測孔,所述第一導電圖形包括第一導電線路及第一焊盤;提供第一覆蓋膜,所述第一覆蓋膜開設有與第一焊盤相對應之第一開口及與第一檢測孔相對應之第二開口;將第一覆蓋膜壓合於第一導電圖形,使得第一焊盤從第一開口露出,第一檢測孔從第二開口露出;利用感光材料填充第一開口及第二開口;去除第一開口內之部分感光材料,從而形成暴露出第一焊盤之第一過孔,去除部分第二開口內之感光材料,從而形成第二檢測孔;檢測第二檢測孔與第一檢測孔之相對位置,從而判定第一過孔與第一焊盤之偏差是否滿足偏位公差之要求。A circuit board manufacturing method includes the steps of: providing a circuit substrate including a first copper foil layer and an insulating layer; forming a first conductive pattern and a first detecting hole in the first copper foil layer, the first conductive pattern including the first a first cover film, the first cover film is provided with a first opening corresponding to the first pad and a second opening corresponding to the first detecting hole; The film is pressed into the first conductive pattern, so that the first pad is exposed from the first opening, the first detecting hole is exposed from the second opening; the first opening and the second opening are filled with the photosensitive material; and part of the photosensitive in the first opening is removed a material, thereby forming a first via hole exposing the first pad, removing a photosensitive material in a portion of the second opening, thereby forming a second detecting hole; detecting a relative position of the second detecting hole and the first detecting hole, thereby determining Whether the deviation of a via from the first pad satisfies the requirement of the offset tolerance.

與先前技術相較,本技術方案提供之電路板製作方法,於進行製作之過程中,可檢測曝光及顯影之偏差,從而可避免由於曝光及顯影之偏差而使之電路板表面不需露出之線路區域暴露出而引起之偏差不滿足要求之電路板流入後續制程,而引起電路板檢測或使用過程中之短路,從而可提升電路板之製作良率,降低電路板之生產成本。Compared with the prior art, the circuit board manufacturing method provided by the technical solution can detect the deviation of exposure and development during the manufacturing process, thereby avoiding the surface of the circuit board from being exposed due to the deviation of exposure and development. If the circuit board is exposed and the deviation does not meet the requirements, the circuit board flows into the subsequent process, causing short circuit during the detection or use of the circuit board, thereby improving the manufacturing yield of the circuit board and reducing the production cost of the circuit board.

下面結合附圖及實施例對本技術方案提供之電路板製作方法作進一步說明。The method for fabricating the circuit board provided by the technical solution is further described below with reference to the accompanying drawings and embodiments.

本技術方案實施例提供之一種電路板製作方法,包括如下步驟:A circuit board manufacturing method provided by the embodiment of the technical solution includes the following steps:

第一步,請參閱圖1,提供電路基板100。In the first step, referring to FIG. 1, a circuit substrate 100 is provided.

本實施例中,採用之電路基板100為本技術領域常見之雙面背膠銅箔,即其包括第一銅箔層110、第二銅箔層130及位於第一銅箔層110及第二銅箔層130之間之絕緣層120。In this embodiment, the circuit substrate 100 is a double-sided adhesive copper foil commonly used in the technical field, that is, the first copper foil layer 110, the second copper foil layer 130, and the first copper foil layer 110 and the second layer. An insulating layer 120 between the copper foil layers 130.

第二步,請一併參閱圖2至圖4,於電路基板100之第一銅箔層110內製作第一導電圖形111及第一檢測孔112,於第二銅箔層130內製作第二導電圖形131及與第一檢測孔112相對應之第一透光孔132。In the second step, referring to FIG. 2 to FIG. 4, the first conductive pattern 111 and the first detecting hole 112 are formed in the first copper foil layer 110 of the circuit substrate 100, and the second detecting layer 112 is formed in the second copper foil layer 130. The conductive pattern 131 and the first light transmission hole 132 corresponding to the first detection hole 112.

本實施例中,採用影像轉移工藝-蝕刻工藝於第一銅箔層110內形成第一導電圖形111,並且於第一銅箔層110內除第一導電圖形111之區域蝕刻形成一個或者複數個第一檢測孔112。第一導電圖形111包括用於與外界或其他層導電線路相連通之第一焊盤1111及第一導電線路1112。本實施例中,第一檢測孔112為圓環形,其外徑為1.0毫米。可理解,第一檢測孔112之外徑可根據實際之電路板進行設定。另,第一檢測孔112之形狀亦不限於圓環形,其亦可係內部係圓形,外部可設計成正方形等其他形狀。為便於標記形成之電路之偏位公差之要求,可於圓環形之第一檢測孔112之內部圓形銅區113內蝕刻形成偏位元公差標記,以方便後續檢測作業。In this embodiment, the first conductive pattern 111 is formed in the first copper foil layer 110 by using an image transfer process-etching process, and one or more of the regions of the first copper foil layer 110 except the first conductive pattern 111 are etched. The first detection hole 112. The first conductive pattern 111 includes a first pad 1111 and a first conductive line 1112 for communicating with external or other layer conductive lines. In this embodiment, the first detecting hole 112 is annular and has an outer diameter of 1.0 mm. It can be understood that the outer diameter of the first detecting hole 112 can be set according to the actual circuit board. In addition, the shape of the first detecting hole 112 is not limited to a circular shape, and may be circular inside, and the outside may be designed into other shapes such as a square. In order to facilitate the deviation tolerance of the circuit formed by the marking, a offset bit tolerance mark may be formed in the inner circular copper region 113 of the first detecting hole 112 of the circular ring to facilitate subsequent detection operations.

另外,可於第一檢測孔112之兩條相互垂直之直徑方向上設置有銅箔沒有被蝕刻之四個連接段,每個連接段連接於圓形銅區與第一檢測孔112外側之第一銅箔層110之間。於進行檢測時,可較方便地觀測偏位之方向。In addition, four connecting segments in which the copper foil is not etched may be disposed in two mutually perpendicular diameter directions of the first detecting hole 112, and each connecting segment is connected to the outer side of the circular copper region and the first detecting hole 112. Between a copper foil layer 110. When performing the test, it is convenient to observe the direction of the deviation.

於藉由影像轉移工藝以及蝕刻工藝形成第一導電圖形111及第一檢測孔112之同時或者之後,於第二銅箔層130內形成第二導電圖形131及第一透光孔132。第二導電圖形131具有用於與其他元件或另外電路層相連通之第二焊盤1311及第二導電線路1312。於垂直於電路基板100之方向上,第一透光孔132與第一檢測孔112相互對應,優選地,第一透光孔132與第一檢測孔112同軸設置,且第一透光孔132之孔徑大於第一檢測孔112之內徑。從而,第一檢測孔112對應之電路基板100對應之區域只具有絕緣層120,當較強之光線可從第一透光孔132之一側透射到第一檢測孔112之一側。本實施例中,第一透光孔132之孔徑為1.5毫米。可理解,第一透光孔132用於向第一檢測孔112透光,其開設之形狀不限於本實施例中之圓形,其亦可為其他如多邊形或不規則形狀。The second conductive pattern 131 and the first light-transmissive hole 132 are formed in the second copper foil layer 130 simultaneously with or after the first conductive pattern 111 and the first detecting hole 112 are formed by the image transfer process and the etching process. The second conductive pattern 131 has a second pad 1311 and a second conductive line 1312 for communicating with other elements or additional circuit layers. The first light transmission hole 132 and the first detection hole 112 correspond to each other in a direction perpendicular to the circuit substrate 100. Preferably, the first light transmission hole 132 is disposed coaxially with the first detection hole 112, and the first light transmission hole 132 is disposed. The aperture is larger than the inner diameter of the first detection hole 112. Therefore, the region corresponding to the circuit substrate 100 corresponding to the first detecting hole 112 has only the insulating layer 120, and the strong light can be transmitted from one side of the first light transmitting hole 132 to one side of the first detecting hole 112. In this embodiment, the first light transmission hole 132 has a hole diameter of 1.5 mm. It can be understood that the first light transmission hole 132 is used for transmitting light to the first detection hole 112, and the shape of the opening is not limited to the circular shape in the embodiment, and may be other shapes such as a polygon or an irregular shape.

第三步,請一併參閱圖5及圖6,提供第一覆蓋膜200及第二覆蓋膜300。In the third step, referring to FIG. 5 and FIG. 6, the first cover film 200 and the second cover film 300 are provided.

第一覆蓋膜200用於覆蓋第一導電圖形111中不需要與外界相連通之區域,第二覆蓋膜300用於覆蓋第二導電圖形131中不需要與外界相連通之區域。本實施例中,於第一覆蓋膜200內開設有與第一導電圖形111中第一焊盤1111相對應之第一開口210及與第一檢測孔112相對應之第二開口220。於第二覆蓋膜300內開設有與第二導電圖形131之第二焊盤1311相對應之第三開口310及與第一透光孔132相對應之第四開口320。由於第一覆蓋膜200及第二覆蓋膜300之開口之製作精度不足以保證其形成之開口與導電線路之連通區域之形狀、大小及開設位置等精准匹配,於第一覆蓋膜200及第二覆蓋膜300中開設之開口尺寸均略大於與其對應之需要與外界連通之導電線路區域、測試圖案及透光孔之大小。本實施例中,第二開口220及第四開口320之形狀均為圓形,其直徑均為1.5毫米。The first cover film 200 is for covering an area of the first conductive pattern 111 that does not need to communicate with the outside, and the second cover film 300 is for covering an area of the second conductive pattern 131 that does not need to communicate with the outside. In the first embodiment, a first opening 210 corresponding to the first pad 1111 of the first conductive pattern 111 and a second opening 220 corresponding to the first detecting hole 112 are defined in the first cover film 200. A third opening 310 corresponding to the second pad 1311 of the second conductive pattern 131 and a fourth opening 320 corresponding to the first light transmission hole 132 are defined in the second cover film 300. Since the manufacturing precision of the openings of the first cover film 200 and the second cover film 300 is insufficient to ensure that the shape, the size, and the position of the opening of the opening formed by the opening and the conductive line are precisely matched, the first cover film 200 and the second cover film The size of the opening formed in the cover film 300 is slightly larger than the size of the conductive line region, the test pattern, and the light transmission hole corresponding to the external communication. In this embodiment, the second opening 220 and the fourth opening 320 are all circular in shape and have a diameter of 1.5 mm.

第四步,請參閱圖7,將第一覆蓋膜200壓合於電路基板100之第一導電圖形111一側,將第二覆蓋膜300壓合於電路基板100之第二導電圖形131一側。In the fourth step, referring to FIG. 7 , the first cover film 200 is pressed onto the first conductive pattern 111 side of the circuit substrate 100 , and the second cover film 300 is pressed onto the second conductive pattern 131 side of the circuit substrate 100 . .

藉由貼合然後加熱高溫壓合之方式使得第一覆蓋膜200壓合於電路基板100之第一導電圖形111一側,第二覆蓋膜300壓合於電路基板100之第二導電圖形131一側。其中,第一導電圖形111之第一焊盤1111第一開口210露出,第一檢測孔112從第二開口220露出。第二導電圖形131之第二焊盤1311從第三開口310露出,第一透光孔132對應之絕緣層120之區域從第四開口320露出。The first cover film 200 is pressed against the first conductive pattern 111 side of the circuit substrate 100 by laminating and then heating at a high temperature, and the second cover film 300 is pressed against the second conductive pattern 131 of the circuit substrate 100. side. The first opening 1111 of the first conductive pattern 111 of the first conductive pattern 111 is exposed, and the first detecting hole 112 is exposed from the second opening 220. The second pad 1311 of the second conductive pattern 131 is exposed from the third opening 310, and a region of the first light-transmissive hole 132 corresponding to the insulating layer 120 is exposed from the fourth opening 320.

第五步,請參閱圖8,於第一覆蓋膜200之第一開口210及第二開口220內填充感光材料400。In the fifth step, referring to FIG. 8 , the photosensitive material 400 is filled in the first opening 210 and the second opening 220 of the first cover film 200 .

於第一覆蓋膜200之第一開口210及第二開口220內填充感光材料400。感光材料400可藉由印刷之方式形成,使得感光材料400與第一開口210及第二開口220暴露出之區域緊密接觸,從而可遮蓋第一覆蓋膜200沒有覆蓋之區域。具體地,於第一開口210對應處形成感光材料400之面積大於其對應之第一開口210之面積,從而使得形成於第一開口210內之感光材料400完全覆蓋第一開口210。於第二開口220內形成之感光材料400完全覆蓋第二開口220。本實施例中,第二開口220內之感光材料400為圓形,其與第二開口220同軸設置且直徑大於第二開口220之直徑,其直徑為1.7毫米。本實施例中,感光材料400可為本技術領域常見之感光油墨,其可為正光阻材料形成,亦可採用負光阻材料製作。The photosensitive material 400 is filled in the first opening 210 and the second opening 220 of the first cover film 200. The photosensitive material 400 can be formed by printing such that the photosensitive material 400 is in close contact with the exposed regions of the first opening 210 and the second opening 220, so that the uncovered region of the first cover film 200 can be covered. Specifically, the area of the photosensitive material 400 formed at the corresponding position of the first opening 210 is larger than the area of the corresponding first opening 210, so that the photosensitive material 400 formed in the first opening 210 completely covers the first opening 210. The photosensitive material 400 formed in the second opening 220 completely covers the second opening 220. In this embodiment, the photosensitive material 400 in the second opening 220 is circular, and is disposed coaxially with the second opening 220 and has a diameter larger than the diameter of the second opening 220, and has a diameter of 1.7 mm. In this embodiment, the photosensitive material 400 may be a photosensitive ink commonly used in the art, which may be formed of a positive photoresist material or a negative photoresist material.

第六步,請參閱圖9,去除第一開口210內之部分感光材料400,從而形成暴露出第一焊盤1111之第一過孔411,去除部分第二開口220內之感光材料400形成第二檢測孔421使第一檢測孔112從該第二檢測孔421露出。In the sixth step, referring to FIG. 9, a portion of the photosensitive material 400 in the first opening 210 is removed, thereby forming a first via 411 exposing the first pad 1111, and removing the photosensitive material 400 in the portion of the second opening 220. The second detecting hole 421 exposes the first detecting hole 112 from the second detecting hole 421.

採用具有與第一導電圖形111之第一焊盤1111及第一檢測孔112之形狀及位置相對應透光區域之底片,對感光材料400進行曝光並顯影。與第一檢測孔112相對應之底片之透光區域之直徑大於第一檢測孔112之內部圓形銅區113之直徑。從而於第一開口210內之感光材料400形成第一過孔411,於第二開口220內之感光材料400內形成第二檢測孔421並使第一檢測孔112從該第二檢測孔421露出。第一檢測孔112可部分從第二檢測孔421露出,亦可全部從第二檢測孔421露出,以保證從第一檢測孔112方向射向第二檢測孔421之光線可過第一檢測孔112從第二檢測孔421射出。本實施例中,形成之第二檢測孔421之直徑等於內部圓形銅區113之直徑與兩倍之偏位公差之絕對值之加和。The photosensitive material 400 is exposed and developed by using a negative film having a light-transmitting region corresponding to the shape and position of the first pad 1111 and the first detecting hole 112 of the first conductive pattern 111. The diameter of the light transmitting region of the negative film corresponding to the first detecting hole 112 is larger than the diameter of the inner circular copper portion 113 of the first detecting hole 112. The first detecting hole 411 is formed in the photosensitive material 400 in the first opening 210, and the second detecting hole 421 is formed in the photosensitive material 400 in the second opening 220, and the first detecting hole 112 is exposed from the second detecting hole 421. . The first detecting hole 112 may be partially exposed from the second detecting hole 421 or may be entirely exposed from the second detecting hole 421 to ensure that the light that is directed from the first detecting hole 112 toward the second detecting hole 421 may pass through the first detecting hole. 112 is emitted from the second detection hole 421. In this embodiment, the diameter of the second detecting hole 421 formed is equal to the sum of the diameter of the inner circular copper region 113 and the absolute value of the offset tolerance of twice.

第七步,請參閱圖10,檢測第一檢測孔112與第二檢測孔421之相對位置,從而判斷曝光及顯影之偏差是否滿足偏位公差之要求,從而得到偏位公差滿足要求之電路板10。In the seventh step, referring to FIG. 10, the relative position of the first detecting hole 112 and the second detecting hole 421 is detected, thereby determining whether the deviation of exposure and development meets the requirement of the offset tolerance, thereby obtaining a circuit board with a bias tolerance meeting the requirement. 10.

由於第二檢測孔421與第一過孔411同時形成,因此,第二檢測孔421與第一檢測孔112之間之偏差與第一過孔411與第一導電圖形111之第一焊盤1111之間之偏差相等。因此,檢測第一檢測孔112與第二檢測孔421之相對位置,即可判斷第一過孔411與第一導電圖形111之第一焊盤1111之間之偏差是否滿足偏位公差之要求。Since the second detecting hole 421 is formed simultaneously with the first via hole 411, the deviation between the second detecting hole 421 and the first detecting hole 112 and the first via hole 411 and the first pad 1111 of the first conductive pattern 111 The deviation between them is equal. Therefore, by detecting the relative positions of the first detecting hole 112 and the second detecting hole 421, it can be determined whether the deviation between the first via 411 and the first pad 1111 of the first conductive pattern 111 satisfies the requirement of the offset tolerance.

本實施例中,採用目檢台裝置(圖未示)對第一檢測孔112與第二檢測孔421之相對位置進行檢測。將電路板10平行放置於目檢台裝置之承載台20上,使得電路板10之第二覆蓋膜300與承載台20接觸。目檢台裝置之光線透過承載台20照射至電路板10。該光線藉由第四開口320、第一透光孔132,透過絕緣層120照射至第一檢測孔112。由於第一檢測孔112處不具有銅箔,光線可透過,而第二檢測孔421之孔徑大於第一檢測孔112之內部圓形銅區113之直徑。In the present embodiment, the relative position of the first detecting hole 112 and the second detecting hole 421 is detected by a visual inspection table device (not shown). The circuit board 10 is placed in parallel on the carrier 20 of the visual inspection table device such that the second cover film 300 of the circuit board 10 is in contact with the carrier 20. Light from the visual inspection station device is transmitted through the stage 20 to the circuit board 10. The light is transmitted to the first detecting hole 112 through the insulating layer 120 through the fourth opening 320 and the first light transmitting hole 132. Since the first detecting hole 112 does not have a copper foil, the light is permeable, and the aperture of the second detecting hole 421 is larger than the diameter of the inner circular copper region 113 of the first detecting hole 112.

請參閱圖11,當曝光顯影之偏差滿足偏位公差之要求時,於第一覆蓋膜200之一側可觀測到圓環形之透光區域。請參閱圖12,當曝光顯影之偏差不滿足偏位公差之要求時,第一檢測孔112之部分與第二檢測孔421重疊,從而於第一覆蓋膜200之一側都不能觀測到完整圓環形之透光區域。當然,亦可採用目檢台裝置之檢測裝置量測透光區域之不同位置之尺寸,從而判斷曝光顯影偏差是否滿足偏位公差之要求。從而獲得曝光顯影偏差滿足偏位公差要求之電路板10,以免不能滿足偏位公差要求之電路板10流入後續制程或者應用。Referring to FIG. 11, when the deviation of the exposure development satisfies the requirement of the offset tolerance, a circular transparent region can be observed on one side of the first cover film 200. Referring to FIG. 12, when the deviation of the exposure development does not satisfy the requirement of the offset tolerance, the portion of the first detection hole 112 overlaps with the second detection hole 421, so that a complete circle cannot be observed on one side of the first cover film 200. The light-transmissive area of the ring. Of course, it is also possible to measure the size of different positions of the light-transmitting area by using the detecting device of the visual inspection table device, thereby judging whether the exposure developing deviation satisfies the requirement of the offset tolerance. Thereby, the circuit board 10 with the exposure development deviation meeting the offset tolerance requirement is obtained, so as to avoid the circuit board 10 that cannot meet the offset tolerance requirement flow into the subsequent process or application.

當然,本技術方案提供之電路板製作方法亦可於製作第二導電圖形131時還於第二銅箔層130內製作第三檢測孔,於製作第二導電圖形131時或者於製作第一導電圖形111時還於第一銅箔層110製作與第三檢測孔相對應之第二透光孔,所述第二覆蓋膜300還具有與第三檢測孔對應之第六開口,所述第一覆蓋膜200還具有與第二焊盤相對應之第五開口,將第一覆蓋膜200壓合於第一導電圖形111時,所述第二焊盤從第五開口露出,於第二導電圖形131上壓合所述第二覆蓋膜時,所述第三檢測孔從第六開口露出,利用感光材料填充第一開口210及第二開口220時還使得感光材料填充第五開口及第六開口,去除第一開口210內之部分感光材料時還去除第五開口內之部分感光材料以於第五開口內之感光材料內形成第二過孔,去除第二開口220之部分感光材料時還去除第六開口內之部分感光材料以於第六開口之感光材料內形成第四檢測孔,檢測第二檢測孔與第一檢測孔之相對位置之同時或之後還藉由檢測第三檢測孔與該第四檢測孔之相對位置,判定第二覆蓋膜一側形成之第二過孔與第二焊盤之偏差是否滿足偏位公差之要求。Of course, the circuit board manufacturing method provided by the technical solution can also be used to form the third detecting hole in the second copper foil layer 130 when the second conductive pattern 131 is formed, or to form the first conductive layer when the second conductive pattern 131 is formed. The pattern 111 further forms a second light transmission hole corresponding to the third detection hole in the first copper foil layer 110, and the second cover film 300 further has a sixth opening corresponding to the third detection hole, the first The cover film 200 further has a fifth opening corresponding to the second pad. When the first cover film 200 is pressed against the first conductive pattern 111, the second pad is exposed from the fifth opening, and the second conductive pattern is exposed. When the second cover film is pressed on the 131, the third detecting hole is exposed from the sixth opening, and when the first opening 210 and the second opening 220 are filled with the photosensitive material, the photosensitive material is filled into the fifth opening and the sixth opening. Removing a portion of the photosensitive material in the first opening 210 to remove a portion of the photosensitive material in the fifth opening to form a second via hole in the photosensitive material in the fifth opening, and removing a portion of the photosensitive material in the second opening 220 Part of the sixth opening The material forms a fourth detecting hole in the photosensitive material of the sixth opening, and detects the relative position of the third detecting hole and the fourth detecting hole simultaneously or after detecting the relative position of the second detecting hole and the first detecting hole. And determining whether the deviation between the second via formed on one side of the second cover film and the second pad satisfies the requirement of the offset tolerance.

另外,電路基板100亦可為單面背膠銅箔,於製作過程中,則不需要進行第二銅箔層130一側之製作過程。本技術方案提供之電路板製作方法,還可形成更多層之電路板。具體地,只需要於上述之第一覆蓋膜200一側壓合單面背膠銅箔,使得單面背膠銅箔之絕緣層與第一覆蓋膜200接觸,於壓合之單面背膠銅箔之銅箔層形成導電圖形並且於與第一檢測孔對應之區域形成透光孔,然後貼合覆蓋膜並且形成感光材料,並對該感光材料進行曝光顯影,從而可檢測壓合之單面背膠銅箔表面曝光顯影之偏位是否滿足偏位公差之要求,從而可得到更多層之曝光偏差均滿足偏位公差要求之電路板。In addition, the circuit board 100 can also be a single-sided adhesive copper foil. During the manufacturing process, the manufacturing process of the second copper foil layer 130 side is not required. The circuit board manufacturing method provided by the technical solution can also form more layers of circuit boards. Specifically, it is only necessary to press the single-sided adhesive copper foil on the side of the first cover film 200, so that the insulating layer of the single-sided adhesive copper foil is in contact with the first cover film 200, and the single-sided adhesive is pressed on the single side. The copper foil layer of the copper foil forms a conductive pattern and forms a light-transmissive hole in a region corresponding to the first detecting hole, and then conforms to the cover film and forms a photosensitive material, and exposes the photosensitive material to expose the pressed single Whether the surface of the surface adhesive copper foil surface exposure development meets the requirements of the offset tolerance, so that more layers of the circuit board with the exposure deviation satisfying the offset tolerance requirement can be obtained.

本技術方案提供之電路板之製作方法,於進行製作之過程中,可檢測曝光及顯影之偏差,從而可避免由於曝光及顯影之偏差而係之電路板表面不需露出之線路區域暴露出而引起之偏差不滿足要求之電路板流入後續制程,而引起電路板檢測或使用過程中之短路,從而可提升電路板之製作量率,降低電路板之生產成本。The manufacturing method of the circuit board provided by the technical solution can detect the deviation of the exposure and the development during the manufacturing process, thereby avoiding the exposure of the circuit area on the surface of the circuit board which is not exposed due to the deviation of the exposure and the development. The circuit board that causes the deviation does not meet the requirements flows into the subsequent process, and causes a short circuit during the detection or use of the circuit board, thereby improving the manufacturing rate of the circuit board and reducing the production cost of the circuit board.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧電路板10‧‧‧ boards

20‧‧‧承載台20‧‧‧Loading station

100‧‧‧電路基板100‧‧‧ circuit board

110‧‧‧第一銅箔層110‧‧‧First copper foil layer

111‧‧‧第一導電圖形111‧‧‧First conductive pattern

1111‧‧‧第一焊盤1111‧‧‧First pad

1112‧‧‧第一導電線路1112‧‧‧First conductive line

112‧‧‧第一檢測孔112‧‧‧First detection hole

113‧‧‧銅區113‧‧‧ Copper Zone

120‧‧‧絕緣層120‧‧‧Insulation

130‧‧‧第二銅箔層130‧‧‧Second copper foil layer

131‧‧‧第二導電圖形131‧‧‧Second conductive pattern

1311‧‧‧第二焊盤1311‧‧‧second pad

1312‧‧‧第二導電線路1312‧‧‧Second conductive line

132‧‧‧第一透光孔132‧‧‧First light transmission hole

200‧‧‧第一覆蓋膜200‧‧‧First cover film

210‧‧‧第一開口210‧‧‧ first opening

220‧‧‧第二開口220‧‧‧second opening

300‧‧‧第二覆蓋膜300‧‧‧second cover film

310‧‧‧第三開口310‧‧‧ third opening

320‧‧‧第四開口320‧‧‧fourth opening

400‧‧‧感光材料400‧‧‧Photosensitive materials

411‧‧‧第一過孔411‧‧‧First via

421‧‧‧第二檢測孔421‧‧‧Second detection hole

圖1係本技術方案實施例提供之電路基板之示意圖。FIG. 1 is a schematic diagram of a circuit substrate provided by an embodiment of the present technical solution.

圖2係本技術方案實施例提供之形成導電線路之電路基板之俯視圖。2 is a top plan view of a circuit substrate forming a conductive line provided by an embodiment of the present technical solution.

圖3係本技術方案實施例提供之形成導電線路之電路基板之仰視圖。3 is a bottom view of a circuit substrate forming a conductive line provided by an embodiment of the present technical solution.

圖4係圖2沿ΙⅤ-IⅤ線之剖面示意圖。Figure 4 is a schematic cross-sectional view of Figure 2 taken along line -V-IV.

圖5係本技術方案實施例提供之第一覆蓋膜之示意圖。FIG. 5 is a schematic diagram of a first cover film provided by an embodiment of the present technical solution.

圖6係本技術方案實施例提供之第二覆蓋膜之示意圖。FIG. 6 is a schematic diagram of a second cover film provided by an embodiment of the present technical solution.

圖7係本技術方案實施例提供之導電線路表面壓合覆蓋膜後之示意圖。FIG. 7 is a schematic view showing the surface of the conductive circuit provided by the embodiment of the present technical solution after the cover film is pressed.

圖8係本技術方案實施例提供之形成有感光材料層後之之示意圖。FIG. 8 is a schematic view showing the formation of a photosensitive material layer provided by an embodiment of the present technical solution.

圖9係本技術方案實施例提供之感光材料層顯影後之示意圖。FIG. 9 is a schematic view of the photosensitive material layer provided by the embodiment of the present technical solution after development.

圖10係本技術方案實施例提供之對顯影後之電路板顯影偏差進行檢測之示意圖。FIG. 10 is a schematic diagram of detecting the development deviation of the developed circuit board provided by the embodiment of the present technical solution.

圖11係本技術方案實施例提供之顯影後偏差滿足偏位公差要求之第一檢測孔與第二檢測孔之位置關係。FIG. 11 is a positional relationship between a first detecting hole and a second detecting hole in which the post-development deviation provided by the embodiment of the present invention satisfies the deviation tolerance requirement.

圖12係本技術方案實施例提供之顯影後偏差不滿足偏位公差要求之第一檢測孔與第二檢測孔之位置關係。FIG. 12 is a positional relationship between a first detecting hole and a second detecting hole which are not satisfied by the deviation tolerance after the developing deviation provided by the embodiment of the present technical solution.

10‧‧‧電路板 10‧‧‧ boards

20‧‧‧承載台 20‧‧‧Loading station

1111‧‧‧第一焊盤 1111‧‧‧First pad

112‧‧‧第一檢測孔 112‧‧‧First detection hole

120‧‧‧絕緣層 120‧‧‧Insulation

132‧‧‧第一透光孔 132‧‧‧First light transmission hole

320‧‧‧第四開口 320‧‧‧fourth opening

411‧‧‧第一過孔 411‧‧‧First via

421‧‧‧第二檢測孔 421‧‧‧Second detection hole

Claims (10)

一種電路板製作方法,包括步驟:
提供包括第一銅箔層及絕緣層之電路基板;
於第一銅箔層內製作第一導電圖形和第一檢測孔,所述第一導電圖形包括第一導電線路及第一焊盤;
提供第一覆蓋膜,所述第一覆蓋膜開設有與第一焊盤相對應之第一開口及與第一檢測孔相對應之第二開口;
將第一覆蓋膜壓合於第一導電圖形,使得第一焊盤從第一開口露出,第一檢測孔從第二開口露出;
利用感光材料填充第一開口及第二開口;
去除第一開口內之部分感光材料,從而形成暴露出第一焊盤之第一過孔,去除部分第二開口內之感光材料,從而形成第二檢測孔並使第一檢測孔從該第二檢測孔露出;及
檢測第二檢測孔與第一檢測孔之相對位置,從而判定第一過孔與第一焊盤之偏差是否滿足偏位公差之要求。
A circuit board manufacturing method includes the steps of:
Providing a circuit substrate including a first copper foil layer and an insulating layer;
Forming a first conductive pattern and a first detecting hole in the first copper foil layer, the first conductive pattern comprising a first conductive line and a first pad;
Providing a first cover film, the first cover film is provided with a first opening corresponding to the first pad and a second opening corresponding to the first detecting hole;
Pressing the first cover film to the first conductive pattern such that the first pad is exposed from the first opening, and the first detecting hole is exposed from the second opening;
Filling the first opening and the second opening with a photosensitive material;
Removing a portion of the photosensitive material in the first opening to form a first via hole exposing the first pad, removing the photosensitive material in the portion of the second opening, thereby forming a second detecting hole and making the first detecting hole from the second The detection hole is exposed; and the relative position of the second detection hole and the first detection hole is detected, thereby determining whether the deviation of the first via hole from the first pad satisfies the requirement of the offset tolerance.
如申請專利範圍第1項所述之電路板製作方法,其中,第一開口之直徑大於第一焊盤之直徑,第二開口之直徑大於第一檢測孔之最大直徑。The method of fabricating a circuit board according to claim 1, wherein the diameter of the first opening is larger than the diameter of the first pad, and the diameter of the second opening is larger than the maximum diameter of the first detecting hole. 如申請專利範圍第1項所述之電路板製作方法,其中,檢測第二檢測孔與第一檢測孔之相對位置包括步驟:
從絕緣層一側入射光線,以使得光線透過絕緣層入射至第一檢測孔並從第二檢測孔中射出;及
觀察從第二檢測孔中射出之光線形成之形狀是否符合預定形狀。
The method for manufacturing a circuit board according to claim 1, wherein detecting the relative position of the second detecting hole and the first detecting hole comprises the steps of:
Light is incident from one side of the insulating layer such that light is incident on the first detecting hole through the insulating layer and is emitted from the second detecting hole; and observing whether a shape formed by the light emitted from the second detecting hole conforms to a predetermined shape.
如申請專利範圍第1項所述之電路板製作方法,其中,所述第一檢測孔為形成於第一銅箔層之圓環形開口,所述第二檢測孔之孔徑等於第一檢測孔之內徑與兩倍之偏位公差之絕對值之加和。The method for manufacturing a circuit board according to claim 1, wherein the first detecting hole is an annular opening formed in the first copper foil layer, and the second detecting hole has a hole diameter equal to the first detecting hole. The sum of the inner diameter and the absolute value of the offset tolerance of twice. 如申請專利範圍第4項所述之電路板製作方法,其中,於檢測第一檢測孔與第二檢測孔之相對位置時,光線從絕緣層一側入射至第一檢測孔及第二檢測孔,當從第一覆蓋膜一側檢測到光線透過第一檢測孔及第二檢測孔後透光區域之形狀為圓環形時,曝光顯影形成之第一過孔與第一焊盤之偏差滿足偏位公差之要求。The method of manufacturing a circuit board according to the fourth aspect of the invention, wherein, when detecting the relative position of the first detecting hole and the second detecting hole, the light is incident from the insulating layer side to the first detecting hole and the second detecting hole. When the light transmission through the first detection hole and the second detection hole is detected to be a circular shape, the deviation between the first via formed by the exposure and the first pad is satisfied. Requirements for offset tolerances. 如申請專利範圍第4項所述之電路板製作方法,其中,所述第一檢測孔內部具有圓形銅區,所述圓形銅區內形成有偏位元公差標記,用於標示所述第一過孔與第一焊盤之偏位公差要求。The circuit board manufacturing method of claim 4, wherein the first detecting hole has a circular copper area inside, and the circular copper area is formed with a deviation bit tolerance mark for indicating the The offset tolerance of the first via and the first pad is required. 如申請專利範圍第1項所述之電路板製作方法,其中,所述電路基板還包括第二銅箔層,所述絕緣層位於第一銅箔層與第二銅箔層之間,於形成第一導電圖形及第一檢測孔同時或者之後,於第二銅箔層形成第二導電圖形及第一透光孔,所述第一透光孔與第一檢測孔相對應,所述第一透光孔與第一檢測孔同軸設置,第一透光孔之直徑大於第一檢測孔之最大直徑。The circuit board manufacturing method of claim 1, wherein the circuit substrate further comprises a second copper foil layer, the insulating layer being located between the first copper foil layer and the second copper foil layer to form Forming a second conductive pattern and a first light-transmissive hole in the second copper foil layer simultaneously or after the first conductive pattern and the first detecting hole, the first light-transmitting hole corresponding to the first detecting hole, the first The light transmission hole is disposed coaxially with the first detection hole, and the diameter of the first light transmission hole is larger than the maximum diameter of the first detection hole. 如申請專利範圍第7項所述之電路板製作方法,其中,所述第二導電圖形包括第二焊盤,所述電路板製作方法還包括步驟:
提供第二覆蓋膜,所述第二覆蓋膜內開設有與所述第二焊盤相對應之第三開口及與第一透光孔相對應之第四開口;及
於第二導電圖形上壓合所述第二覆蓋膜,使得第二焊盤從第三開口露出,第一透光孔暴露出之絕緣層區域從第四開口露出。
The circuit board manufacturing method of claim 7, wherein the second conductive pattern comprises a second pad, and the circuit board manufacturing method further comprises the steps of:
Providing a second cover film, the second cover film is provided with a third opening corresponding to the second pad and a fourth opening corresponding to the first light transmission hole; and pressing on the second conductive pattern The second cover film is combined such that the second pad is exposed from the third opening, and the exposed region of the first light-transmissive hole is exposed from the fourth opening.
如申請專利範圍第8項所述之電路板製作方法,其中,所述第四開口之直徑大於第一透光孔,第三開口之直徑大於第二焊盤之直徑。The circuit board manufacturing method of claim 8, wherein the fourth opening has a larger diameter than the first light transmission hole, and the third opening has a larger diameter than the second surface. 如申請專利範圍第8項所述之電路板製作方法,其中,於製作第二導電圖形時還於第二銅箔層內製作第三檢測孔,於製作第二導電圖形時或者於製作第一導電圖形時還於第一銅箔層製作與第三檢測孔相對應之第二透光孔,所述第二覆蓋膜還具有與第三檢測孔對應之第五開口,所述第一覆蓋膜還具有與第二焊盤相對應之第六開口,將第一覆蓋膜壓合於第一導電圖形時,所述第二焊盤從第六開口露出,於第二導電圖形上壓合所述第二覆蓋膜時,所述第三檢測孔從第五開口露出,利用感光材料填充第一開口及第二開口時還使得感光材料填充第五開口及第六開口,去除第一開口內之部分感光材料時還去除第五開口內之部分感光材料以於第五開口內之感光材料內形成第二過孔,去除第二開口之部分感光材料時還去除第六開口內之部分感光材料以於第六開口之感光材料內形成第四檢測孔,檢測第二檢測孔與第一檢測孔之相對位置之同時或之後還藉由檢測第三檢測孔與該第四檢測孔之相對位置,判定第二覆蓋膜一側形成之第二過孔與第二焊盤之偏差是否滿足偏位公差之要求。The method for fabricating a circuit board according to the eighth aspect of the invention, wherein the second conductive pattern is further formed in the second copper foil layer when the second conductive pattern is formed, or the first conductive pattern is formed in the second conductive pattern. And forming a second light transmission hole corresponding to the third detection hole in the first copper foil layer, the second cover film further having a fifth opening corresponding to the third detection hole, the first cover film And a sixth opening corresponding to the second pad, the second pad is exposed from the sixth opening when the first cover film is pressed into the first conductive pattern, and the second conductive pattern is pressed on the second conductive pattern When the second cover film is exposed, the third detecting hole is exposed from the fifth opening, and when the first opening and the second opening are filled with the photosensitive material, the photosensitive material is further filled with the fifth opening and the sixth opening, and the part inside the first opening is removed. The photosensitive material further removes a portion of the photosensitive material in the fifth opening to form a second via hole in the photosensitive material in the fifth opening, and removes part of the photosensitive material in the sixth opening when removing the photosensitive material in the second opening. Sense of the sixth opening Forming a fourth detecting hole in the optical material, and detecting the relative position of the second detecting hole and the first detecting hole, or after detecting the relative position of the third detecting hole and the fourth detecting hole, determining the second covering film Whether the deviation of the second via formed on the side and the second pad satisfies the requirement of the offset tolerance.
TW98145277A 2009-12-28 2009-12-28 Method for manufacturing printed circuit board TWI389610B (en)

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