TWI363848B - - Google Patents
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- Publication number
- TWI363848B TWI363848B TW095142085A TW95142085A TWI363848B TW I363848 B TWI363848 B TW I363848B TW 095142085 A TW095142085 A TW 095142085A TW 95142085 A TW95142085 A TW 95142085A TW I363848 B TWI363848 B TW I363848B
- Authority
- TW
- Taiwan
- Prior art keywords
- lamp
- convex portion
- concave portion
- discharge lamp
- pair
- Prior art date
Links
- 238000007789 sealing Methods 0.000 claims description 26
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 22
- 230000005484 gravity Effects 0.000 claims description 14
- 238000001816 cooling Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006031907A JP4929743B2 (ja) | 2006-02-09 | 2006-02-09 | 光照射器および光照射器に取り付けられる放電ランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200732590A TW200732590A (en) | 2007-09-01 |
TWI363848B true TWI363848B (enrdf_load_stackoverflow) | 2012-05-11 |
Family
ID=38488755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095142085A TW200732590A (en) | 2006-02-09 | 2006-11-14 | Light irradiation device and discharging lamp attached to the light irradiation device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4929743B2 (enrdf_load_stackoverflow) |
KR (1) | KR100997587B1 (enrdf_load_stackoverflow) |
CN (1) | CN101016977B (enrdf_load_stackoverflow) |
TW (1) | TW200732590A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021010283A1 (ja) * | 2019-07-16 | 2021-01-21 | ウシオ電機株式会社 | ロングアーク型放電ランプ、ランプユニット及び光照射装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04110153A (ja) * | 1990-08-31 | 1992-04-10 | Toshiba Lighting & Technol Corp | 紫外線照射装置 |
US5387800A (en) * | 1992-08-19 | 1995-02-07 | Dymax Corporation | Prefocused lamp and reflector assembly |
JP3893208B2 (ja) * | 1997-12-17 | 2007-03-14 | キヤノン株式会社 | 照明装置、及びその照明装置を備える画像読み取り装置 |
JP4237907B2 (ja) * | 1999-10-04 | 2009-03-11 | 浜松ホトニクス株式会社 | 光源装置、スポット光源装置及び光源装置用放電管 |
CN2741070Y (zh) * | 2004-11-08 | 2005-11-16 | 罗筱泠 | 易调焦定位的投影灯 |
-
2006
- 2006-02-09 JP JP2006031907A patent/JP4929743B2/ja not_active Expired - Fee Related
- 2006-11-14 TW TW095142085A patent/TW200732590A/zh not_active IP Right Cessation
- 2006-12-14 KR KR1020060127765A patent/KR100997587B1/ko not_active Expired - Fee Related
-
2007
- 2007-02-08 CN CN2007100054656A patent/CN101016977B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101016977B (zh) | 2010-05-19 |
TW200732590A (en) | 2007-09-01 |
CN101016977A (zh) | 2007-08-15 |
JP2007209884A (ja) | 2007-08-23 |
JP4929743B2 (ja) | 2012-05-09 |
KR100997587B1 (ko) | 2010-11-30 |
KR20070081081A (ko) | 2007-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |