TW200732590A - Light irradiation device and discharging lamp attached to the light irradiation device - Google Patents

Light irradiation device and discharging lamp attached to the light irradiation device

Info

Publication number
TW200732590A
TW200732590A TW095142085A TW95142085A TW200732590A TW 200732590 A TW200732590 A TW 200732590A TW 095142085 A TW095142085 A TW 095142085A TW 95142085 A TW95142085 A TW 95142085A TW 200732590 A TW200732590 A TW 200732590A
Authority
TW
Taiwan
Prior art keywords
light irradiation
irradiation device
lamp
discharge lamp
pair
Prior art date
Application number
TW095142085A
Other languages
English (en)
Chinese (zh)
Other versions
TWI363848B (enrdf_load_stackoverflow
Inventor
Koji Tsuji
Tsuyoshi Yahata
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200732590A publication Critical patent/TW200732590A/zh
Application granted granted Critical
Publication of TWI363848B publication Critical patent/TWI363848B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
TW095142085A 2006-02-09 2006-11-14 Light irradiation device and discharging lamp attached to the light irradiation device TW200732590A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006031907A JP4929743B2 (ja) 2006-02-09 2006-02-09 光照射器および光照射器に取り付けられる放電ランプ

Publications (2)

Publication Number Publication Date
TW200732590A true TW200732590A (en) 2007-09-01
TWI363848B TWI363848B (enrdf_load_stackoverflow) 2012-05-11

Family

ID=38488755

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142085A TW200732590A (en) 2006-02-09 2006-11-14 Light irradiation device and discharging lamp attached to the light irradiation device

Country Status (4)

Country Link
JP (1) JP4929743B2 (enrdf_load_stackoverflow)
KR (1) KR100997587B1 (enrdf_load_stackoverflow)
CN (1) CN101016977B (enrdf_load_stackoverflow)
TW (1) TW200732590A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010283A1 (ja) * 2019-07-16 2021-01-21 ウシオ電機株式会社 ロングアーク型放電ランプ、ランプユニット及び光照射装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110153A (ja) * 1990-08-31 1992-04-10 Toshiba Lighting & Technol Corp 紫外線照射装置
US5387800A (en) * 1992-08-19 1995-02-07 Dymax Corporation Prefocused lamp and reflector assembly
JP3893208B2 (ja) * 1997-12-17 2007-03-14 キヤノン株式会社 照明装置、及びその照明装置を備える画像読み取り装置
JP4237907B2 (ja) * 1999-10-04 2009-03-11 浜松ホトニクス株式会社 光源装置、スポット光源装置及び光源装置用放電管
CN2741070Y (zh) * 2004-11-08 2005-11-16 罗筱泠 易调焦定位的投影灯

Also Published As

Publication number Publication date
KR20070081081A (ko) 2007-08-14
CN101016977A (zh) 2007-08-15
JP2007209884A (ja) 2007-08-23
KR100997587B1 (ko) 2010-11-30
JP4929743B2 (ja) 2012-05-09
CN101016977B (zh) 2010-05-19
TWI363848B (enrdf_load_stackoverflow) 2012-05-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees