KR100997587B1 - 광 조사기 및 광 조사기에 부착되는 방전 램프 - Google Patents

광 조사기 및 광 조사기에 부착되는 방전 램프 Download PDF

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Publication number
KR100997587B1
KR100997587B1 KR1020060127765A KR20060127765A KR100997587B1 KR 100997587 B1 KR100997587 B1 KR 100997587B1 KR 1020060127765 A KR1020060127765 A KR 1020060127765A KR 20060127765 A KR20060127765 A KR 20060127765A KR 100997587 B1 KR100997587 B1 KR 100997587B1
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KR
South Korea
Prior art keywords
lamp
base
discharge lamp
pair
light irradiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020060127765A
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English (en)
Korean (ko)
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KR20070081081A (ko
Inventor
고지 츠지
츠요시 야하타
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20070081081A publication Critical patent/KR20070081081A/ko
Application granted granted Critical
Publication of KR100997587B1 publication Critical patent/KR100997587B1/ko
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
KR1020060127765A 2006-02-09 2006-12-14 광 조사기 및 광 조사기에 부착되는 방전 램프 Expired - Fee Related KR100997587B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006031907A JP4929743B2 (ja) 2006-02-09 2006-02-09 光照射器および光照射器に取り付けられる放電ランプ
JPJP-P-2006-00031907 2006-02-09

Publications (2)

Publication Number Publication Date
KR20070081081A KR20070081081A (ko) 2007-08-14
KR100997587B1 true KR100997587B1 (ko) 2010-11-30

Family

ID=38488755

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060127765A Expired - Fee Related KR100997587B1 (ko) 2006-02-09 2006-12-14 광 조사기 및 광 조사기에 부착되는 방전 램프

Country Status (4)

Country Link
JP (1) JP4929743B2 (enrdf_load_stackoverflow)
KR (1) KR100997587B1 (enrdf_load_stackoverflow)
CN (1) CN101016977B (enrdf_load_stackoverflow)
TW (1) TW200732590A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010283A1 (ja) * 2019-07-16 2021-01-21 ウシオ電機株式会社 ロングアーク型放電ランプ、ランプユニット及び光照射装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110153A (ja) * 1990-08-31 1992-04-10 Toshiba Lighting & Technol Corp 紫外線照射装置
US5387800A (en) * 1992-08-19 1995-02-07 Dymax Corporation Prefocused lamp and reflector assembly
JP3893208B2 (ja) * 1997-12-17 2007-03-14 キヤノン株式会社 照明装置、及びその照明装置を備える画像読み取り装置
JP4237907B2 (ja) * 1999-10-04 2009-03-11 浜松ホトニクス株式会社 光源装置、スポット光源装置及び光源装置用放電管
CN2741070Y (zh) * 2004-11-08 2005-11-16 罗筱泠 易调焦定位的投影灯

Also Published As

Publication number Publication date
TW200732590A (en) 2007-09-01
KR20070081081A (ko) 2007-08-14
CN101016977A (zh) 2007-08-15
JP2007209884A (ja) 2007-08-23
JP4929743B2 (ja) 2012-05-09
CN101016977B (zh) 2010-05-19
TWI363848B (enrdf_load_stackoverflow) 2012-05-11

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