TWI358381B - - Google Patents

Download PDF

Info

Publication number
TWI358381B
TWI358381B TW094132697A TW94132697A TWI358381B TW I358381 B TWI358381 B TW I358381B TW 094132697 A TW094132697 A TW 094132697A TW 94132697 A TW94132697 A TW 94132697A TW I358381 B TWI358381 B TW I358381B
Authority
TW
Taiwan
Prior art keywords
workpiece
residue
brushing
handling system
transfer stage
Prior art date
Application number
TW094132697A
Other languages
English (en)
Chinese (zh)
Other versions
TW200619116A (en
Inventor
Mikio Fukuzawa
Akihisa Kodaira
Original Assignee
Tokyo Weld Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Weld Co Ltd filed Critical Tokyo Weld Co Ltd
Publication of TW200619116A publication Critical patent/TW200619116A/zh
Application granted granted Critical
Publication of TWI358381B publication Critical patent/TWI358381B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)
  • Furnace Details (AREA)
  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
TW094132697A 2004-09-27 2005-09-21 Workpiece carrying system TW200619116A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004280031A JP4469945B2 (ja) 2004-09-27 2004-09-27 ワーク搬送システム

Publications (2)

Publication Number Publication Date
TW200619116A TW200619116A (en) 2006-06-16
TWI358381B true TWI358381B (enrdf_load_stackoverflow) 2012-02-21

Family

ID=36230604

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132697A TW200619116A (en) 2004-09-27 2005-09-21 Workpiece carrying system

Country Status (4)

Country Link
JP (1) JP4469945B2 (enrdf_load_stackoverflow)
KR (1) KR101122178B1 (enrdf_load_stackoverflow)
CN (1) CN1757583B (enrdf_load_stackoverflow)
TW (1) TW200619116A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5028589B2 (ja) * 2006-10-10 2012-09-19 株式会社 東京ウエルズ ワーク排出装置
JP4807890B2 (ja) * 2009-07-13 2011-11-02 ハイメカ株式会社 電子部品の整列装置および整列方法
CN103508183A (zh) * 2012-06-19 2014-01-15 台湾暹劲股份有限公司 电子元件送料装置及其应用设备
CN107098140B (zh) * 2017-03-31 2019-04-30 京东方科技集团股份有限公司 运载体清洁装置和方法
JP7306368B2 (ja) * 2020-12-16 2023-07-11 株式会社村田製作所 搬送体、電子部品の搬送装置、および、電子部品の測定装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63218420A (ja) * 1987-03-04 1988-09-12 Tokai Rubber Ind Ltd ベルトクリ−ナ
JP3714198B2 (ja) * 2001-05-25 2005-11-09 松下電器産業株式会社 ペースト吐出装置
JP3925337B2 (ja) * 2002-07-22 2007-06-06 株式会社村田製作所 チップ部品の搬送保持装置
CN2635323Y (zh) * 2003-07-11 2004-08-25 栾学信 金刚石切割片

Also Published As

Publication number Publication date
TW200619116A (en) 2006-06-16
KR101122178B1 (ko) 2012-03-19
CN1757583A (zh) 2006-04-12
KR20060051511A (ko) 2006-05-19
JP2006089268A (ja) 2006-04-06
JP4469945B2 (ja) 2010-06-02
CN1757583B (zh) 2010-09-29

Similar Documents

Publication Publication Date Title
US10896828B2 (en) Wafer manufacturing cleaning apparatus, process and method of use
JP4230642B2 (ja) 基板搬送治具及び基板搬送装置
US6170116B1 (en) Abrasive member and cleaning device for probe needle for probe card
US10792713B1 (en) Pick and place machine cleaning system and method
US20080213079A1 (en) Apparatus and Method for Separating and Transporting Substrates
TWI358381B (enrdf_load_stackoverflow)
US11756811B2 (en) Pick and place machine cleaning system and method
TWI668074B (zh) 鑽頭自動清洗裝置
US10610909B2 (en) Washer idler roller and wafer cleaner using same
CN107042433A (zh) 磨削装置
JP2013084884A (ja) 基板処理装置および基板処理方法
JP4766678B2 (ja) 研削装置のチャックテーブルの洗浄装置
SG148017A1 (en) Transport method and transport apparatus for semiconductor wafer
KR20150047410A (ko) 기판의 단면을 클리닝하는 장치
JP2004034192A (ja) 切削装置の切削ブレード監視装置
CN114245760A (zh) 取放机器清洁系统和方法
JP6495079B2 (ja) チャックテーブル
JP4061261B2 (ja) ダイボンディング用コレット
US20210005499A1 (en) Pick and place machine cleaning system and method
TWI330051B (enrdf_load_stackoverflow)
JP2002263867A (ja) レーザマーキング装置及びレーザマーキング方法
JP2011059010A (ja) テストコンタクト、そのクリーニング方法及び半導体製造装置
WO2022162838A1 (ja) 半導体装置の製造装置、および、基板の清掃方法
KR101323662B1 (ko) 기판 처리 장치용 서포트 플레이트
JP4920508B2 (ja) 移載機