TWI355015B - Dual frequency rf match - Google Patents

Dual frequency rf match Download PDF

Info

Publication number
TWI355015B
TWI355015B TW093137328A TW93137328A TWI355015B TW I355015 B TWI355015 B TW I355015B TW 093137328 A TW093137328 A TW 093137328A TW 93137328 A TW93137328 A TW 93137328A TW I355015 B TWI355015 B TW I355015B
Authority
TW
Taiwan
Prior art keywords
circuit
source
sub
impedance
matching
Prior art date
Application number
TW093137328A
Other languages
English (en)
Chinese (zh)
Other versions
TW200522145A (en
Inventor
Steven C Shannon
John Holland
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200522145A publication Critical patent/TW200522145A/zh
Application granted granted Critical
Publication of TWI355015B publication Critical patent/TWI355015B/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
TW093137328A 2003-12-18 2004-12-03 Dual frequency rf match TWI355015B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US53080703P 2003-12-18 2003-12-18
US10/823,371 US7879185B2 (en) 2003-12-18 2004-04-12 Dual frequency RF match

Publications (2)

Publication Number Publication Date
TW200522145A TW200522145A (en) 2005-07-01
TWI355015B true TWI355015B (en) 2011-12-21

Family

ID=34681594

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093137328A TWI355015B (en) 2003-12-18 2004-12-03 Dual frequency rf match

Country Status (5)

Country Link
US (1) US7879185B2 (enExample)
JP (1) JP2007515761A (enExample)
KR (1) KR101027090B1 (enExample)
TW (1) TWI355015B (enExample)
WO (1) WO2005066997A2 (enExample)

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Also Published As

Publication number Publication date
US7879185B2 (en) 2011-02-01
US20050133163A1 (en) 2005-06-23
TW200522145A (en) 2005-07-01
JP2007515761A (ja) 2007-06-14
WO2005066997A2 (en) 2005-07-21
KR20080086556A (ko) 2008-09-25
WO2005066997A3 (en) 2005-09-29
KR101027090B1 (ko) 2011-04-05

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