JPS57113599A - Automatic matching device for plasma generator - Google Patents

Automatic matching device for plasma generator

Info

Publication number
JPS57113599A
JPS57113599A JP56000182A JP18281A JPS57113599A JP S57113599 A JPS57113599 A JP S57113599A JP 56000182 A JP56000182 A JP 56000182A JP 18281 A JP18281 A JP 18281A JP S57113599 A JPS57113599 A JP S57113599A
Authority
JP
Japan
Prior art keywords
plasma generator
matching device
automatic matching
automatic
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56000182A
Other languages
Japanese (ja)
Other versions
JPS6246960B2 (en
Inventor
Kiyoshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP56000182A priority Critical patent/JPS57113599A/en
Publication of JPS57113599A publication Critical patent/JPS57113599A/en
Publication of JPS6246960B2 publication Critical patent/JPS6246960B2/ja
Granted legal-status Critical Current

Links

JP56000182A 1981-01-06 1981-01-06 Automatic matching device for plasma generator Granted JPS57113599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56000182A JPS57113599A (en) 1981-01-06 1981-01-06 Automatic matching device for plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56000182A JPS57113599A (en) 1981-01-06 1981-01-06 Automatic matching device for plasma generator

Publications (2)

Publication Number Publication Date
JPS57113599A true JPS57113599A (en) 1982-07-15
JPS6246960B2 JPS6246960B2 (en) 1987-10-05

Family

ID=11466851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56000182A Granted JPS57113599A (en) 1981-01-06 1981-01-06 Automatic matching device for plasma generator

Country Status (1)

Country Link
JP (1) JPS57113599A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973900A (en) * 1982-10-18 1984-04-26 株式会社日立国際電気 Impedance automatic matching device for plasma generator
JPS6327034U (en) * 1986-08-07 1988-02-22
JP2007515761A (en) * 2003-12-18 2007-06-14 アプライド　マテリアルズ　インコーポレイテッド Dual frequency RF matching

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973900A (en) * 1982-10-18 1984-04-26 株式会社日立国際電気 Impedance automatic matching device for plasma generator
JPS6327034U (en) * 1986-08-07 1988-02-22
JP2007515761A (en) * 2003-12-18 2007-06-14 アプライド　マテリアルズ　インコーポレイテッド Dual frequency RF matching

Also Published As

Publication number Publication date
JPS6246960B2 (en) 1987-10-05

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