TWI354103B - Probe card transfer apparatus - Google Patents

Probe card transfer apparatus Download PDF

Info

Publication number
TWI354103B
TWI354103B TW96149660A TW96149660A TWI354103B TW I354103 B TWI354103 B TW I354103B TW 96149660 A TW96149660 A TW 96149660A TW 96149660 A TW96149660 A TW 96149660A TW I354103 B TWI354103 B TW I354103B
Authority
TW
Taiwan
Prior art keywords
probe card
unit
probe
transfer device
arm unit
Prior art date
Application number
TW96149660A
Other languages
English (en)
Chinese (zh)
Other versions
TW200834080A (en
Inventor
Su Hyun Choi
Meang Kwon Kim
Jeon Ho Jin
Ki Uk Choi
Original Assignee
Secron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Secron Co Ltd filed Critical Secron Co Ltd
Publication of TW200834080A publication Critical patent/TW200834080A/zh
Application granted granted Critical
Publication of TWI354103B publication Critical patent/TWI354103B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
TW96149660A 2006-12-27 2007-12-24 Probe card transfer apparatus TWI354103B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060134679A KR100833285B1 (ko) 2006-12-27 2006-12-27 프로브카드 운반장치

Publications (2)

Publication Number Publication Date
TW200834080A TW200834080A (en) 2008-08-16
TWI354103B true TWI354103B (en) 2011-12-11

Family

ID=39562651

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96149660A TWI354103B (en) 2006-12-27 2007-12-24 Probe card transfer apparatus

Country Status (3)

Country Link
KR (1) KR100833285B1 (ko)
TW (1) TWI354103B (ko)
WO (1) WO2008078886A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130044484A (ko) 2011-10-24 2013-05-03 삼성전자주식회사 프로브 카드 핸들링 대차
KR102335827B1 (ko) 2014-12-24 2021-12-08 삼성전자주식회사 프로브 카드 로딩 장치, 그를 포함하는 프로브 카드 관리 시스템
CN106873195B (zh) * 2015-12-11 2020-10-30 De&T株式会社 探针单元更换装置
CN108493124B (zh) * 2018-05-16 2024-07-12 深圳市杰普特光电股份有限公司 自动化晶圆测试机台
KR20240025960A (ko) 2022-08-19 2024-02-27 (주)고성엔지니어링 고중량 프로브 카드 이송 및 적재장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831518B2 (ja) 1987-04-21 1996-03-27 東京エレクトロン株式会社 プロ−ブカ−ド保持搬送装置
JP3215475B2 (ja) * 1991-12-20 2001-10-09 東京エレクトロン株式会社 プローブ装置
JP3273706B2 (ja) * 1994-11-02 2002-04-15 東京エレクトロン株式会社 プローブ装置
JP4798595B2 (ja) * 2001-08-07 2011-10-19 東京エレクトロン株式会社 プローブカード搬送装置及びプローブカード搬送方法
JP4391744B2 (ja) 2002-12-27 2009-12-24 東京エレクトロン株式会社 移動式プローブカード搬送装置、プローブ装置及びプローブ装置へのプローブカードの搬送方法

Also Published As

Publication number Publication date
KR100833285B1 (ko) 2008-05-28
TW200834080A (en) 2008-08-16
WO2008078886A1 (en) 2008-07-03

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