Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
  • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
  • G01R31/2851—Testing of integrated circuits [IC]
  • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
  • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/6773—Conveying cassettes, containers or carriers
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/10—Measuring as part of the manufacturing process
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/10—Measuring as part of the manufacturing process
  • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means

Definitions

• the present invention relates generally to a carrying apparatus for probe card, which is used in probe test equipment for testing wafers and, more particularly, to a carrying apparatus for probe cards, which can easily and safely transfer or replace a probe card, which has a large diameter and is heavy, and which contains various types of probe cards, thus enabling the immediate replacement of a probe card by supplying a needed probe card.
• Background Art
• a process of manufacturing a semiconductor device includes a plurality of steps. Only functional chips, and not defective chips, must be selected from among semiconductor chips formed on a wafer in a step of assembling a semiconductor device. Accordingly, it is important to determine whether semiconductor chips formed on a wafer are functional or defective. For this purpose, probe test equipment for testing whether semiconductor chips are functional or defective is used.
• the above-described probe card replacement is performed by a probe card changer, which is provided in the probe test equipment.
• the task of supplying a probe card to the probe card changer and seating it therein is manually conducted by a worker.
• the number of probes mounted to a probe card has recently been increased, and thus the probe card is manufactured to have a large diameter and to be heavy.
• the diameter of some probe cards is about 480 D, and the weight thereof ranges from 25 D to a maximum of 40 D.
• the present invention has been made keeping in mind the above problems occurring in the prior art, and the present invention is directed to provide a carrying apparatus for probe card having a new structure, which can easily and safely transfer or replace a probe card, which has a large diameter and is heavy, and which contains various types of probe cards, thus enabling the replacement of an existing probe card by quickly supplying a needed probe card Technical Solution
• the present invention provides a carrying apparatus for probe card, the apparatus used in probe test equipment for testing wafers, the apparatus including: a probe card holding unit configured to hold a probe card and provided with a load sensing unit for sensing the weight of the held probe card; an arm unit configured such that the probe c ard holding unit is mounted thereto; an ascending and descending shaft connected to the arm unit so as to freely rotate the arm unit; and a load support unit configured to support the ascending and descending shaft using a force corresponding to the sum of the weights of the probe card holding unit, the arm unit, the ascending and descending shaft, and the probe card; wherein the force that is applied to the load support unit to support the ascending and descending shaft varies in proportion to the weight of the held probe card.
• the arm unit has multiple stages, so that the length thereof varies with respect to the ascending and descending shaft. Furthermore, the arm unit may further include a fixing part for fixing the length thereof.
• the fixing part includes a plurality of depressions and an engaging part, which is provided in each stage of the arm unit, and the length of the arm unit is adjusted in the state in which the plurality of depressions and the engaging part are disengaged, and is fixed when the plurality of depressions and the engaging part are engaged with each other.
• the probe card holding unit includes a picker part provided so as to be connected with or separated from the probe card, and a rotational part provided such that the picker part rotates freely relative to the arm unit. Furthermore, the probe card holding unit may further include buffering parts for reducing impact and motion attributable to tilting of the picker part.
• the load support unit includes an ascending and descending body connected with the ascending and descending shaft, a support drive part for supporting the ascending and descending body and ascending and descending the ascending and descending body, and a guide part for guiding the ascent and descent of the ascending and descending body according to the operation of the support drive part.
• the support drive part of the carrying apparatus for probe card includes a cylinder for supporting the ascending and descending body or raising and lowering the ascending and descending body, and an auxiliary cylinder for assisting the operation of the cylinder in proportion to the weight of the probe card sensed by the load sensing unit.
• the probe card holding unit further includes an air inlet configured such that high pressure air, which is generated by a pneumatic device, is introduced therethrough, an air path configured such that the air, which is introduced through the air inlet, passes therethrough, a blocking member installed in the air path, and configured to vary the width of the air path in proportion to the weight of the probe card connected to the picker part, and an air outlet configured such that the air passing through the blocking member is discharged therethrough, wherein the air, which is discharged through the air outlet, operates the auxiliary cylinder.
• the guide part of the carrying apparatus for probe card includes a plurality of guide blocks fixedly coupled with the ascending and descending body, and one or more guide rails engaged with the plurality of guide blocks to guide the ascent and descent of the guide blocks.
• the carrying apparatus for probe card of the present invention may further include a probe card containing unit that is configured such that one or more probe cards are contained therein.
• the probe card containing unit includes one or more probe card stages provided so as to be able to seat or separate the probe card, and one or more sliding parts provided in the respective probe card stages so that the probe card stages slides and protrude outside.
• Each of the sliding parts includes guide frames installed on the respective sides of a corresponding probe card stage, ball retainers provided in the guide frames, and a plurality of balls contained in the ball retainers, wherein each of the sliding parts has a two-step linear guide structure.
• the carrying apparatus for probe card according to the present invention can contain various kinds of probe cards therein, and thus immediate replacement can be performed by supplying a needed probe card.
• FIG. 1 is a perspective view of a carrying apparatus for probe card according to the present invention
• FIG. 2 is a plan view of the carrying apparatus for probe card according to the present invention.
• FIG. 3 is a sectional view showing the arm unit of the carrying apparatus for probe card according to the present invention, taken along line A-A shown in FIG. 2;
• FIG. 4 is a perspective view of the probe card holding part of the carrying apparatus for probe card according to the present invention.
• FIG. 5 is a sectional view taken along line A'- A' shown in FIG. 4;
• FIG. 6 is a sectional view taken along line B-B shown in FIG. 2;
• FIG. 7 is a sectional view taken along line C-C shown in FIG. 2;
• FIG. 8 is a view showing the use of the carrying apparatus for probe card according to the present invention. Best Mode for Carrying Out the Invention
• FIGS. 1 to 8 A carrying apparatus for probe card according to a preferred embodiment of the present invention is described in detail with reference to FIGS. 1 to 8 below.
• the carrying apparatus for probe card includes a probe card holding unit 100, an arm unit 200, an ascending and descending shaft 300, a load support unit 400, and a probe card containing unit 500.
• the probe card holding unit 100 is mounted to one end of the arm unit 200, and is configured to hold a holding part, which is provided on the upper surface of a probe card PC, and to stably transfer the probe card PC.
• the probe card holding unit 100 includes a load sensing unit 110, a picker part 120, a rotational part 130, and buffering parts 140.
• the load sensing unit 110 is fastened to the upper end of the picker part 120, and senses the weight of the probe card PC, which is connected to the picker part 120.
• the load sensing unit 110 adjusts the magnitude of the force that is generated when an auxiliary cylinder 422, which will be described later, assists a cylinder 421, which will be described later, according to the sensed weight.
• the load sensing unit 110 includes an air inlet 111, an air path 112, a blocking member 113, and an air outlet 114.
• This air inlet 111 is a portion through which high pressure air, which is generated by a pneumatic device (not shown), is introduced, and the air path 112 is a path through which the air, which is introduced through the air inlet 111, passes.
• the blocking member 113 is installed in the air path 112, and varies the width of the air path 112 in proportion to the weight of the probe card PC connected to the picker part 120. That is, the blocking member 113 controls the pressure of air that is discharged through the air outlet 114, by varying the width of the air path 112 according to the weight of the probe card PC being held.
• the blocking member 113 is implemented using a member such as a diaphragm, which can vary the width of the air path 112.
• the air outlet 114 is a portion through which the air passing through the blocking member 113 is discharged. That is, the high pressure air, which is introduced through the air inlet 111, is discharged through the air outlet 114 in proportion to the weight of the probe card PC. This discharged air operates the auxiliary cylinder 422, which will be described later.
• the auxiliary cylinder 422 assists the cylinder 421 in proportion to the weight of the probe card PC, which is connected to the picker part 120, in response to the action of the load sensing unit 110.
• the load sensing unit 110 is implemented such that the pressure of the air that is discharged through the air outlet 114 is controlled by adjusting the blocking member 113 according to the weight of the probe card PC, but the present invention is not limited thereto.
• the load sensing unit 110 may be implemented using a load sensor that generates electrical signals.
• the picker part 120 is provided to have a structure in which the picker part 120 is coupled with the holding part of the probe card PC so as to be connected to or separated from the holding part of the probe card PC.
• the picker part 120 has coupling holes in the lower end thereof, and is provided with a fastening lever or a fastening holder to hold an object inserted into the coupling holes.
• the holding part of the probe card PC is inserted into the coupling holes. In this state, the fastening lever or the fastening holder is manipulated, by which the picker part 120 and the probe card PC are fixedly coupled to each other.
• the rotational part 130 is configured such that the picker part 120 can rotate freely relative to the arm unit 200.
• the rotational part 130 is preferably constructed in a ball joint manner, but the present invention is not limited thereto, and any structure that can freely rotate the picker part 120 relative to the arm unit 200 may be used as the rotational part 130.
• the buffering parts 140 reduce impact and motion that are applied to the probe card PC when the picker part 120 is tilted with respect to the arm unit 200.
• the buffering parts 140 are formed of four springs, as shown in FIGS. 3 and 4, but the present invention is not limited thereto, and any material that can reduce impact and motion can be freely selected for the buffering parts 140.
• the buffering parts 140 may be implemented using small-sized impact absorption cylinders.
• the arm unit 200 is a structure that includes the probe card holding unit 100 and supports the probe card PC held by the probe card holding unit 100, and is connected to the ascending and descending shaft 300 so as to be able to rotate freely relative to the ascending and descending shaft 300. Accordingly, the arm unit 200 can transfer the probe card PC within the swing range of the ascending and descending shaft 300, that is, the arm unit 200 can transfer the probe card PC from one point to another point within the swing range.
• the arm unit 200 may be imp lemented such that the rotation thereof is limited within a predetermined range. Furthermore, the arm unit 200 is preferably installed parallel to a support surface on which the carrying apparatus for probe card is located.
• the arm unit 200 is fixedly coupled to the ascending and descending shaft 300, and the ascending and descending shaft 300 is connected with the load support unit 400 so as to be able to rotate freely. Accordingly, the arm unit 200 may be provided so as to be able to rotate freely relative to the load support unit 400. Additional description of the arm unit 200 will be made when the ascending and descending shaft 300 is described later.
• the arm unit 200 as shown in
• FIG. 3 has multiple stages, so that the length thereof can be varied with respect to the ascending and descending shaft 300.
• the swing range of the arm unit 200 may be varied according to variation in the length thereof. Accordingly, the arm unit 200 can transfer the probe card PC from one point to another point within the maximum range thereof.
• the arm unit 200 is provided so that the length thereof can be manually varied by pushing and pulling operations, which are conducted by a worker, but the present invention is not necessarily limited thereto.
• the arm unit 200 may be implemented such that the length thereof is varied by an operating unit, which is separately provided.
• the arm unit 200 may further include a fixing part 250.
• the fixing part 250 is responsible for fixing the length of the arm unit 200.
• the fixing part 250 includes a plurality of depressions 251 and an engaging part 252, which are provided in each stage of the arm unit 200.
• the plurality of depressions 251 is laterally formed to have the same shape as a rack gear, and the engaging part 252 is formed so as to be inserted into a depression selected from among the plurality of depressions 251 and to be engaged with the selected depression. Accordingly, the length of the arm unit 200 is adjusted in the state in which the plurality of depressions 251 and the engaging part 252 are disengaged from each other, and is fixed when the plurality of depressions 251 and the engaging part 252 are engaged with each other.
• a fixing switch 260 is preferably provided in the arm unit 200.
• the fixing switch 260 disengages the engaging part 252 from the plurality of depressions 251, or engages the engaging part 252 with the plurality of depressions 251.
• the fixing switch 260 is implemented using a single push button, but the present invention is not limited thereto, and any element that can function as a switch, is generally used, and can operate the fixing part 250 may be used for the fixing switch 260 without limitation.
• the ascending and descending shaft 300 connects the arm unit 200 to the load support unit 400, and raises and lowers the arm unit 200 according to the operation of the load support unit 400.
• the ascending and descending shaft 300 is installed perpendicular to the support surface on which the carrying apparatus for probe card is located.
• the ascending and descending shaft 300 is connected with the arm unit 200 so that the arm unit 200 can be freely rotated, and is fixedly coupled with the load support unit 400.
• the ascending and descending shaft 300 may be fixedly coupled with the arm unit 200 and may be connected with the load support unit 400 so as to be able to rotate freely relative to the load support unit 400.
• the two cases differs from each other according to whether the ascending and descending shaft 300 rotates along with the arm unit 200, but are the same in that the arm unit 200 can be freely rotated relative to the support surface.
• a rotation guide member (not shown), such as a bearing, is provided in the load support unit 400.
• a rotation guide member (not shown), such as a bearing, is provided in the arm unit 200.
• the load support unit 400 is fixedly coupled to the ascending and descending shaft
• the 300 supports the ascending and descending shaft 300 using a force corresponding to the sum of the weights of the probe card holding unit 100, the arm unit 200, the ascending and descending shaft 300, and the probe card PC. Accordingly, the force corresponding to the sum of the weights of the probe card holding unit 100, the arm unit 200, the ascending and descending shaft 300 and the probe card PC creates an equilibrium state relative to the drive force of the load support unit 400.
• the load support unit 400 raises the ascending and descending shaft 300 by providing additional force to the ascending and descending shaft 300. Furthermore, the equilibrium state between the forces is achieved as described above, so that the ascending and descending shaft 300 can be lowered when the worker presses the arm unit 200 using a small amount of force of less than about 5 kgf.
• the load support unit 400 includes an ascending and descending body 410, a support drive part 420, and a guide part 430.
• the ascending and descending body 410 is connected with the ascending and descending shaft 300, and is configured to raise the arm unit 200 by raising the ascending and descending shaft 300 when raised by the support drive part 420.
• the load support unit 400 may be fixedly coupled with the ascending and descending shaft 300, or may be connected with the ascending and descending shaft 300 so that the ascending and descending shaft 300 can be freely rotated.
• the ascending and descending body 410 which is a part of the load support unit 400, may has the same coupling structure relative to the shaft 300 as that between the load support unit 400 and the shaft 300.
• the support drive part 420 supports the ascending and descending body 410 using a force corresponding to the sum of the weights of the probe card holding unit 100, the arm unit 200, the ascending and descending shaft 300, the ascending and descending body 410, and the probe card PC. Furthermore, the support drive part 420 additionally provides the force that is necessary to raise the ascending and descending body 410.
• the support drive part 420 includes a cylinder 421, an auxiliary cylinder 422, and a raising switch 423.
• the cylinder 421 provides a force that can offset the weight of equipment including the probe card holding unit 100, the arm unit 200, the ascending and descending shaft 300, and the ascending and descending body 410. Furthermore, the cylinder 421 provides the force that is necessary to perform lifting in response to the manipulation of the raising switch 423.
• the auxiliary cylinder 422 assists the cylinder 421 by providing a force that can offset the weight of the probe card PC sensed by the load sensing unit 110.
• the load sensing unit 110 according to the preferred embodiment of the present invention is configured such that the pressure of air passing through the load sensing unit 110 is adjusted according to the weight of the probe card PC.
• the auxiliary cylinder 422 operates in response to the adjusted air pressure, and thus the magnitude of the force, which is provided by the auxiliary cylinder 422, is determined. That is, the auxiliary cylinder 422 assists the cylinder 421 by providing the force in proportion to the weight of the probe card PC using a physical method based on the adjustment of air pressure.
• the present invention is not limited as to the method of operating the auxiliary cylinder 422, and any method that causes the auxiliary cylinder 422 to provide the force that can offset the weight of the probe card PC can be used without limitation.
• the auxiliary cylinder 422 may be implemented such that a load sensor that can generate electrical signals is provided, as described above, and the force is provided in proportion to the weight of the probe card PC as indicated by the electrical signals.
• the raising switch 423 is used to operate the cylinder 421 so that the ascending and descending body 410 ascends and, thus, the arm unit 200 ascends.
• the raising switch 423 is installed on the arm unit 200, as shown in FIG. 3, but the present invention is not limited thereto.
• the carrying apparatus for probe card is implemented such that the cylinder 421 raises the arm unit 200 by operating according to the manipulation of the raising switch 423, and lowers the arm unit 200 when the worker presses the arm unit 200 using a small amount of force of less than 5 kgf, but the present invention is not necessarily limited thereto.
• the carrying apparatus for probe card may be implemented such that the raising switch 423 is not provided therein, but the arm unit 200 ascends when the worker applies a small amount of force in the direction for raising the arm unit 200, as in when raising the arm unit 200.
• the carrying apparatus for probe card may be implemented such that a raising and lowering switch, which functions as a lowering switch, in addition to functioning as the raising switch 423, and the arm unit 200 ascends/descends according to the raising/lowering manipulation of the raising and lowering switch.
• the operating unit of the support drive part 420 is implemented in the form of an air pressure cylinder, but the present invention is not limited thereto, and any unit, such as a motor and a gear, that can provide force to the ascending and descending body 410 may be used without limitation.
• the carrying apparatus for probe card may further include a connection member 424 that connects the ascending and descending body 410 with the support drive part 420, and transmits the force from the support drive part 420 to the ascending and descending body 410.
• the guide part 430 is responsible for guiding the ascent and descent of the ascending and descending body 410 according to the operation of the support drive part 420.
• the guide part 430 as shown in FIGS. 6 and 7, includes guide blocks 431 and guide rails 432.
• the guide blocks 431 are fixedly coupled with the ascending and descending body
• the guide blocks 431 are engaged with the guide rails 432, and perform a guide function so that the ascending and descending body 410 can ascend and descend along the guide rails 432, which are fixedly installed.
• two pairs of guide blocks 431 are provided, but the present invention is not limited as to the number of guide blocks 431 or the shape of the guide blocks 431.
• the guide rails 432 are fixedly installed perpendicular to the support surface on which the carrying apparatus for probe card is installed, and are engaged with the guide blocks 431 to guide the ascent and descent of the guide blocks 431.
• a pair of guide rails 432 is provided, but the present invention is not limited as to the number of guide rails 432 or the shape of the guide rails 432.
• the probe card containing unit 500 is configured to contain various kinds of probe cards PC therein so that the carrying apparatus for probe card can immediately replace an existing probe card by supplying a needed probe card PC to the probe test equipment.
• the probe card containing unit 500 includes probe card stages 510 and sliding parts 520.
• Each of the probe card stages 510 has the shape of a plate having a circular seating hole 511 in which the probe card PC is seated or from which the probe card PC is separated. In the preferred embodiment of the present invention, three probe card stages 510 are provided, but the present invention is not limited thereto, and a higher number of probe card stages may be provided as needed.
• the probe card stages 510 are contained in the carrying apparatus for probe card when the carrying apparatus for probe card moves, and a corresponding probe card stage protrudes outside when a probe card PC to be used is taken out from the carrying apparatus for probe card. Accordingly, the probe card PC can be separated from the protruding probe card stage 510 or can be seated in the protruding probe card stage 510.
• a set of sliding parts 520 is provided in each probe card stage 510, and is configured such that the probe card stage 510 can slide and can protrude to the outside.
• the probe card stages 510 have individual handles 512, and are configured for the worker to pull them out.
• the present invention is not limited thereto, and the sliding parts 520 may be implemented such that an operating unit is mounted, and the probe card stages 510 are automatically protruded by the operating unit.
• each of the sliding parts 520 as shown in FIGS. 1 and 7, includes guide frames 521, ball retainers 522, and balls 523.
• Each guide frames 521 are mounted on each side of each probe card stage 510, and thus each of the probe card stages 510 has a two-step linear guide structure.
• a first guide frame 521a is fixedly mounted on the inner surface of the carrying apparatus for probe card so that it is not moved.
• a third guide frame 521c is fixedly coupled with the probe card stage 521.
• a second guide frame 521b is configured to be able to slide between the first guide frame 521a and the third guide frame 521c.
• the probe card stage 510 primarily protrudes.
• the probe card stage 510 is further pulled after the primary protrusion, the second guide frame 521b and the first guide frame 521a slide, the probe card stage 510 secondarily protrudes.
• the reason for forming the guide frame 521 to have the two-step linear guide structure is to realize further protrusion of the probe card stages 510 compared to a one-step linear guide structure. As the extent of protrusion of the probe card stages 510 is increased, the interference with other parts of the carrying apparatus for probe card can be prevented when the probe card PC is transferred, so that the probe card PC can be prevented from being damaged. For this reason, the lengths to which the probe card stages 521 protrude are important.
• the ball retainers 522 are disposed in the respective intervals between the linear guide frames 521. That is, the first ball retainer 522a is disposed between the first guide frame 521a and the second guide frame 521b. The second ball retainer 522b is disposed between the second guide frame 521b and the third guide frame 521c. The ball retainers 522 fix the locations of the balls 523 contained in each probe card stage 510, and thus a stable sliding system can be established.
• each ball retainer 522 a plurality of balls 523 is contained in each ball retainer 522.
• the balls 523 reduce the friction between the guide frames 521, thus realizing smooth sliding.
• Each of the sliding parts 520 may further include a fixing member (not shown) for fixing the probe card stages 510 so that they do not protrude while the carrying apparatus for probe card is moved.
• the carrying apparatus for probe card is moved and located around desired equipment which needs a probe card PC. Subsequently, the worker pulls out a probe card stage 510, in which the probe card PC is seated, to cause it to protrude outside the carrying apparatus for probe card. Thereafter, the worker releases the fixing of the fixing part 250, moves the arm unit 200 to the holding part of the probe card PC by manipulating the raising switch 423 or by pressing the arm unit 200 downwards using a small amount of force, and couples the probe card holding unit 100 with the holding part of the probe card PC.
• the probe card PC is transferred to a desired location, such as the seating part of a Semi Automatic Probe Card Changer (SACC), through the manipulation of the raising switch 423.
• a desired location such as the seating part of a Semi Automatic Probe Card Changer (SACC)
• SACC Semi Automatic Probe Card Changer
• the probe card holding unit 100 is separated from the probe card PC.
• the arm unit 200 is fixed using the fixing part 250, the arm unit 200 ascends through the manipulation of the raising switch 423, and, subsequently, the probe card stage 510 is pushed into the carrying apparatus for probe card.
• the carrying apparatus for probe card is chiefly used to replace an existing probe card by supplying a new probe card PC to an SACC, which is provided in the probe test equipment.
• the use of the carrying apparatus for probe card is as shown in FIG. 8.
• the present invention is directed to provide a carrying apparatus for probe card having a new structure, which can easily and safely transfer or replace a probe card, which has a large diameter and is heavy, and which contains various types of probe cards, thus enabling the replacement of an existing probe card by quickly supplying a needed probe card

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• Engineering & Computer Science (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Manufacturing & Machinery (AREA)
• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Power Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Measuring Leads Or Probes (AREA)

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• 2006
  • 2006-12-27 KR KR1020060134679A patent/KR100833285B1/ko active IP Right Grant
• 2007
  • 2007-12-11 WO PCT/KR2007/006436 patent/WO2008078886A1/en active Application Filing
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