TWI354103B - Probe card transfer apparatus - Google Patents

Description

IX. Description of the invention: [Technical field to which the invention pertains] The invention relates to a probe card transfer device which is used in a probe measuring device for rounding and is particularly relevant for an easy and safe turn or replacement The probe card transfer device of the card has a large diameter and a system, and it includes various types of probe cards, so that the probe card can be immediately replaced by the probe card supplied with the feed card. [Prior Art] In general, a process for fabricating a semiconductor device includes a plurality of steps. In the step of implanting the t-conductor device, only the functional wafer, and not the defective wafer, must be selected from among the semiconductor wafers formed on a wafer. Accordingly, it is important to determine whether a semiconductor wafer formed on a wafer can be: operational or defective. For this purpose, a probe test apparatus for testing whether a semiconductor wafer is operable or defective is used. In a typical test process, a probe is used to apply an electrical signal generated by a tester of the probe test device to a probe card to make an assessment of whether the individual semiconductor wafers are operable or defective. The probe card makes contact with the wafer formed on the - crystal 81. In this case, the probe card used for testing must be replaced depending on the type of semiconductor device being fabricated. In this case, the replacement of the probe card described above is performed by a probe card transducer, which is provided in the probe test device. The probe card is supplied to the probe card transducer and the probe card is placed in the 1354103 ¥. The probe card converter is manually operated by a worker. At the same time, in order to reduce the time taken for the above test, the number of probes mounted to the -= pin card has recently increased, and thus the probe card is made to have a large diameter and will be heavy. In more detail, several probe cards are available in a straight L system of approximately 480 $ / card and have a weight range of approximately 25 kg to a maximum of kilograms. Accordingly, in this case t, the replacement of the probe card is hereby provided; the probe card is supplied to the probe card converter and the probe card is mounted on the probe card. In the manner of the converter, the worker must transfer in person: the probe card will be made in (4), and (4) the probe card will be placed in the probe card converter.豆豆里里 〇, Ό疋, ^, has a large diameter and a heavy probe card is the burden on the worker. Furthermore, a separate location is required to safely exchange the material for the probe card, and in addition, the job card can usually be damaged due to the carelessness of the worker using excessive force when working. When the probe card is replaced, the worker must separate the probe card used by the probe card transducer at a position close to the side surface of the probe test device, and must be supplied and placed - new Probe card. Accordingly, there is a problem in which, in a line providing a plurality of components of the probe testing device, a space of at least 8 mm must be provided between the components of the probe testing device to facilitate the probe. Replacement of the card. As a result, in the case of manually replacing a probe card, it takes a lot of work time due to the above problem. That is, the wafer test operation cannot be performed during the replacement of the probe card, and it takes a long time (four) to change the probe 1354103. [Invention] The present invention has been made in the prior art. The problem is made, and the present invention is directed to providing a new; needle card transfer device that can easily and safely transfer or replace a probe and has a m-path and is heavy, and includes various types of probes. ", so can be supplied by the fascinating - the need for the probe frog secret probe card. The desired probe card replacement - now = invention provides a probe card transfer device, the device is used in a test crystal needle test device, the probe card transfer device includes: a probe stuck early, its group Forming a probe card capable of holding, and providing a load sensing unit for sensing the weight of the probe card; an arm unit configured such that the probe card holding unit is mounted to the arm unit; An up-down shaft connected to the arm unit for freely rotating the arm; and a load-retaining unit, the group of which can be used - a force support > The force corresponds to the sum of the probe card holding unit, the arm, the rising and falling shaft, and the weight of the probe card = applied to the load bearing unit to the branch, the rising and falling pulling star It varies depending on the ratio of the weight of the probe card held. In the probe card transfer device of the present invention, the arm unit has a plurality of p-ports such that its length varies with respect to the rising and falling shafts. The arm unit may further comprise a fixing component for fixing The length of the hopper iUj in the probe + 卞 transfer device of the present invention, the fixing member includes a recess and an engaging member, the access 110 is included in the plurality-frame, and the arm: the component is provided The length of each early element of the arm unit is fixed in the state in which the plurality of recessed grandfather biting members are disengaged, and the engaging members are fixed when they are mutually salivated... when the plurality of recesses are The accommodating portion is in the probe card of the present invention, the detector component is provided, and the probe card holding unit is enclosed or the component is separated by the probe card to be connected with the probe The component is free to rotate relative to the arm unit. The binary may additionally include a shock absorbing member for reducing the impact and motion attributable to the tilt of the splayed beta 4 member. And the descending body 2: wherein the load branch unit comprises a drive Λ, and is connected with the rising and falling shaft; a supporting boat moving part is used for supporting the ascending and the fork descending body ascending the disk to descend. And causing the rise and the operation of the lower member to be the upper member for The driving force guides the rise and fall of the rising and falling body. ::: The selective driving component of the card transfer device includes a steam knower for raising and lowering the body, or raising and lowering the rising and falling The tongue of the probe card is used to assist the operation of the cylinder according to the proportion of the weight sensed by the load sensing unit. The probe card included in the invention is transferred to the probe card. The holding unit is also a high-rise office, the group structure is such that the work wind generated by the air-motor device is introduced through the air inlet; the coffee is introduced into the air passage through the air inlet:::! The air path; a resistance W4103% of the breaking member's weight of the probe card mounted to the air path extractor component: forming a wide outlet that can change the air path according to the ratio of the degree of connection to the degree θ The group is configured such that the air passing through the blocking member is discharged from the second gas outlet, wherein the auxiliary steam is operated by gas. ...the air discharged from the exit

2 = the guiding component of the card transfer device comprises a plurality of guiding blocks, the second of which is fixedly grounded to the descending body; & one or more guiding rails, the number of guiding members of which are coupled to guide the guiding The rise of the lead member and the probe card transfer apparatus of the present invention may further include a probe card accommodating unit 70 which is configured such that one or more probe cards are housed therein. & the probe card accommodating unit includes one or more probe card holders, the 2-pin card holder is provided to be able to position or separate the probe card; and one or more sliding members are provided for the individual components The probe card holder is so that the probe card holder slides and protrudes outward. Each of the sliding members includes a guiding frame mounted on each side of a corresponding probe card holder; ball fasteners provided in the guiding frames; and a plurality of balls housed in the plurality of balls In the ball fasteners, each of the sliding members has a two-step-linear guiding structure. [Embodiment] Embodiments of the present invention will be described in detail below with reference to the drawings, so that they can be easily provided by those having ordinary knowledge in the art of the present invention. However, the present invention can be provided in various manners, and is not limited to the embodiment β described in the following. The probe card transfer apparatus according to the preferred embodiment of the present invention will be described in detail below with reference to Figs. 1 to 7, the probe transfer device according to the preferred embodiment of the present invention includes a probe card holding unit 1 , an arm unit ascending and descending shaft 3 00, and a load supporting unit 4 〇, and a probe card accommodating unit 500. The meta-probe card holding unit has just been mounted to the end of the arm unit 200, and is configured to hold a mouth-holding member provided on the upper surface of the probe card pc, and stably transfer the probe. Needle card PC.冲- Next, the probe card holdings are described in detail below with reference to FIGS. 3 and 4. As shown in FIGS. 3 and 4, the probe card holding unit 100 includes a load sensing unit S110 and an extractor unit. 120 parts (10), and shock absorbing parts 14〇.

The load sensing unit S(10) is fastened to the extractor unit 120 and senses the probe card PC connected to the extractor unit #12G. The load sensing unit 110 adjusts according to the sensed weight. The force is 5 values 'this force is generated when the auxiliary cylinder 422 described later is assisted - will be generated when the cylinder 42 is described later. ', the load sensing unit 1 1 0 will be described in detail below and will be later The relationship between the auxiliary cylinders 422 is described. As shown in Fig. 5, the load sensing h no includes - air inlet u], an air path ι ΐ 2, 4 breaking member m, and - air outlet ι ΐ 4. This air inlet m system The high-dust air generated by a gas plant (not shown) is introduced through a portion of the 11 1354103 portion, and the air path 丨丨 2 is passed through the air inlet 11 1 through the path. The blocking member 113 is mounted in the air path i and varies in width according to the weight of the probe card PC connected to the extractor member 120. That is, by the _ pin card PC The weight changes the width of the air path 112, and the blocking member (1) controls The pressure of the air discharged through the air outlet 114. ❹1 changes the % of the air path 112 to the broken member 113. The member, the m film provides the resistance, and the air outlet 114 is part of the air outlet 114. The air of the breaking member (1) is discharged through the portion, that is, the pressurized air introduced through the air inlet (1) is discharged according to the probe card PC to the air outlet m. This is discharged: the ratio passes through the As will be described later, the discharged work is similar to the auxiliary cylinder, whereby the auxiliary cylinder 422 responds to the load sensing unit ho in response to the probe card pc connected to the extractor unit m. In the preferred embodiment of the present invention, the unit η is measured by the ratio of the weight of the weight, and the unit η is passed through the air outlet. The weight adjustment of the card PC is controlled by the resistance', but the invention is not limited thereto. For example, the load sensing unit ii can be provided using an electrical signal load sensor. The output unit 120 is provided to have a structure. , wherein the detected P piece 1 2 0 system and the touch + ρ ρ is coupled to the holding member of the segment C so as to be connected to the "pinning card PC" or the holding member of the probe card pc

12 1354103 Separate. The extractor member 120 has underneath and is provided with a -tight lever or a tight grip to secure the light hole, the hole object, and the needle card. The holding part of c = two = hole. In this state, the tension lever or the surface connector member 12G and the probe card pc are operated by means of a fixture, and the jaws are fixedly coupled to each other. "Tighten the lever or the tight system = (4) the rotary member 13G, so that the "(4) 12" can be phased: ": Γ ° ° freely rotates. The rotary member 13 is preferably made with respect to ==, but the present invention is not limited thereto, and any structure in which the detector member 120 can be freely rotated is used as the rotary member 13 When the μ-cluster member 120 is tilted about the arm unit, the hairpin member 140 reduces the impact and motion applied to the probe card. In the preferred embodiment, the damping members 140 are made of four springs, as shown in Figures 3 and 4, but the invention is not limited thereto, and any material that impacts and moves the components can be freely selected. It is used as a salt trap for such shock absorbing rafts, for example, '4 damper parts 14 提供 can be provided using a decompression shock absorbing cylinder of a small size design. = arm unit 2 is a structure comprising the probe card holding unit, the needle card holding unit _ and the probe card rising 2 are connected to the rising and falling shaft 300 so as to be able to The down shaft 300 is free to rotate. Accordingly, the arm unit 2 transfers the probe card within the swing range of the rising and falling shafts, that is, the arm unit 2 can be moved from one point to another 13 1354103 within the swing range. % Transfer the probe card PC a little. Here, in order to prevent the probe card pc from being damaged by interference with other parts of the probe card transfer device, the arm unit 2A may be provided such that its rotation is restricted to a predetermined range. Further, the arm unit 200 is preferably mounted parallel to a floor surface on which the probe card transfer apparatus is attached. Further, the arm unit 200 is fixedly coupled to the ascending and lowering & shaft 300' and the ascending and descending shaft is coupled to the load baffle unit 400 so as to be freely rotatable. Accordingly, the arm can be provided 7C 200 early so as to be freely rotatable relative to the load supporting unit 4〇〇. When the raising and lowering shaft 3 is described later, the arm unit 200 will be additionally squished. In the preferred embodiment of the invention, as shown in Figure 3, the arm unit 200 has a plurality of stands so that its length can vary with respect to the ascending and descending shafts 300. In this case, the swing range of the arm unit 2 (10) may vary depending on the length thereof. Accordingly, the arm unit 200 can transfer the probe card pc from one point to another within its maximum range. In the preferred embodiment of the present invention, the arm unit 2 is provided such that its length can be manually changed by a push-pull operation, which is performed by a worker, but the present invention is not limited thereto. . For example, the arm unit 200 can be provided such that its length is varied by a separately provided operating unit. In the case where the arm unit 200 is provided such that its length can be changed, the arm unit 200 may further include a fixing member 25A. The fixing portion 14 1354103 • » 250 is a negative for fixing the length of the arm unit 2 (10). In the preferred embodiment of the present invention, as shown in FIG. 3, the fixing member includes a plurality of recesses 251 and -0i joint members 252, and the recess portions and the engaging members are provided to the arm units 2 Each of the stations. The plurality of recesses 251 are formed laterally to have the same shape as the rack gear, and the saliving member is formed so as to be inserted into a recess selected from the recessed portion 25 1 and The selected recess is engaged. Accordingly, the length of the arm unit 2' is adjusted in a state where the plurality of recessed portions 251 and the merging member 252 are disengaged from each other, and is fixed when the plurality of recessed portions 251 and the engaging member 252 are engaged with each other. 5, as shown in Figure 3, a fixed switch 26 is preferably provided for the #2 2 wipe. The fixed switch 26 is disengaged by the plurality of recesses (5). The toothed member 252 or the plurality of recesses 251 is called with the spray member 252. In the preferred embodiment of the present invention, the fixed switch 260 is provided separately, but the present invention is not limited thereto, and substantially any component that can be used as a switch can be used, and can be operated without limitation. A fixing member 250 for the fixed switch 260. The raising and lowering shaft 300 connects the arm unit 2 to the load supporting unit 400, and raises and lowers the arm unit A 200 according to the operation of the load supporting unit 4''. Preferably, the rise and fall shaft 3 is mounted perpendicular to the support surface and the probe card transfer apparatus is located on the surface of the support. The rise and fall shaft 300 is coupled to the arm unit 2A such that the arm unit 200 can be freely rotated and is fixedly attached to the load support unit 15 1354103 « yuan 400. Alternatively, the selection and the lowering shaft 3〇〇 can be engaged with the arm unit i 2GG and can be connected to the load bearing unit 400 so as to be able to freely move relative to the load supporting unit. Rotation 0 Depending on whether the raising and lowering shafts are rotated with the arm unit 2, the two cases are different from each other 'but the arm S S 200 can be freely rotated relative to the supporting surface to be the same. Install the rise and fall axes

Rod 3 00 so as to be able to follow the example of a 兀 ^ 现 忑 忑 兀 兀 兀 兀 兀 兀 兀 , , , , , , , , , , , , , , 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例 案例In the case where the arm unit 2 is mounted so as to be rotatable around the ascending and descending axis #300, a rotation guiding member (not shown) such as a bearing is provided to the arm unit. The load tower unit 400 is fixedly grounded to the ascending and descending shafts 300, and supports the ascending and descending shafts with a force corresponding to the probe card holding unit 1〇〇. The sum of the arm unit 2〇〇, the rising and falling shaft 300, and the weight of the probe card PC. Accordingly, corresponding to the probe card holding single force (10), the arm unit measures, the rise The force of the sum of the descending axis 梓 300 and the weight of the probe card PC establishes an equilibrium state with respect to the driving force of the load supporting unit 400. θ In this state, the load supporting unit 400 raises the rising and falling shaft 3〇〇 by providing additional force to and ascending and descending shafts 3〇〇. The balance between the forces is achieved as described above, so that the =4 worker presses the arm unit 200 with a small force of less than about 5 kg, the rise and fall shaft 3 (8) Can be lowered. 16 1354103 200 'But the invention is not limited thereto. Another option is that the probe card transfer device is not swayed, so that it provides 6 liters of 鬲 switch 423, but when the shackle author is used to raise the 兀 200 When a small force is applied, the bucket is clamped on the arm 200: when the arm unit 200 is raised. Furthermore, the probe-transfer device can be provided such that in addition to being used as the boost switch,

Si: the raising and lowering switch, and the arm unit 2. . According to the return, the rise and fall of the switch is lowered and lowered. Furthermore, in the preferred embodiment of the present invention, the operating unit of the driving component (4) is provided in the form of a gas-vapor red, but the invention is not limited to, and may be limitedly used to provide any force to the Rising and descending a single 兀, such as a motor and a gear. Furthermore, as shown in FIG. 6, the probe card transfer device according to the present invention may further include a connecting member 424 that connects the rising and falling body 2 supporting the driving material, and transmits the strict by the supporting driving member (four) Up to the rising and falling body 41〇. The /leading guide member 43G is responsible for guiding the rise and fall of the ascending and descending core 410 in accordance with the operation of the support driving member 420. In the preferred embodiment of the invention, as shown in Figures 6 and 7, the guide member 43A includes a guide block member 43 1 and a guide rail 432. The guide block members 431 are fixedly attached to the rising and falling bodies 4i0 in a fixed manner. The guide blocks 431 are coupled to the guide rails 432 4 and have a guiding function so that the ascending and descending bodies 41 can be raised and lowered along the guide rails 432. The guide rails are fixedly installation. In the preferred embodiment of the invention (S) 19 1354103, two pairs of guiding blocks 431 are provided, but the invention is not limited by the number of guiding blocks 431 or the shape of the guiding blocks 431. The guides 432 are fixedly mounted perpendicular to the support surface, and the probe card transfer device is mounted on the support surface. The guide rails are engaged with the guide members 431 to guide the guide The riser 43 is raised and lowered. In a preferred embodiment of the invention, a pair of rails are provided, but the invention is not limited by the number of rails 432 or the shape of the rails 432. The probe card accommodating unit 500 is configured to accommodate various types of the probe card PC therein, so that the probe card transfer device can supply the probe card device to the probe test device by And immediately replace the existing probe, and the probe card is accommodated earlier by π 500 in detail on the τ plane with reference to Figures 1 and 7. The probe card accommodates the unit package sliding member 520. Dingkou 510 and the probe card Each of the pedestals 51 has a shape of a rounded #^丨u ten board and has a heart* hole 511, the probe card is in the hole or the probe card A-6z孔孔佳实施例+, provides -: hole separation. In the present invention, and if necessary, the card holder is from 51. However, the present invention is not limited to provide a higher number of probe cards. The turret is transferred to the probe card to transfer the ...-um 510 system to the present probe. When a probe card pc is used, the probe card is transferred from the outside of the device. According to this, the cutting table protrudes until the probe card pc can be separated by the protruding probe card holder table si〇20 (S ·) 1354103' or can be placed in the The protruding probe holders are arranged in. - The group sliding member 52G is provided in each of the probe card holders, and is configured such that the probe card holder table 51G can slide and protrude to the outside. The preferred embodiment of the probe card holder 510 has a 1 = and is configured for the worker to pull them out. However, two: limited to this and the sliding members 520 can be provided such that one == And the probe card holders 51° are automatically enlarged by the operation unit. In the preferred embodiment of the present invention, as shown in Figures i and f, each of the (four) components 52G includes a guide (10) frame. 521, ball fastener 522 and ball 523. Three guiding frames 521 are mounted on each side of each probe card holder 51' and such probe card holders are from 51() In a more detailed manner, the first guide frame 52u is fixedly mounted on the inner surface of the probe card transfer device so that it does not move. The third guiding frame 521 is fixedly coupled to the probe card holder table HO. The second guiding frame 521b is configured to be capable of being configured. The first guiding frame 52 U and the third guiding frame 52u slide between each other. According to this, when the worker pulls a handle 512 of a desired probe card holder HO, the third guiding The frame 52U and the second guiding frame slide 'and so as to mainly protrude the probe card holder 510. When the probe card holder 510 is further pulled after the initial protrusion, the second guiding machine The frame 521b and the first guiding frame 521a slide, and the probe card frame 5 1 0 is protruded next. ~ Compared with the white ladder-linear guiding structure, the guiding machine 21 1354103 frame 521 is formed. In the case of having the two-step and linear guides, the probe card holders are highlighted. Since the range in which the probe 1 protrudes is increased, when the probe is broken, the 44- Μ ^ is prevented from being transferred.

The interference of the other parts of the needle card transfer device is such that the probe card PC is protected from damage. For this reason, the length is important. The two of the probe card holders are protruded = the fasteners 522 are disposed between the linear guide frames (2). That is, the xylophone.. a guide ^_ 521 " the first - ball fasteners are set in the first frame 52U and the second guide frame 521 bead fasteners 522b are tied to the poor.s ^ The younger brother "positioned in the second guiding frame" lb and the third guiding m (four) ball fastener 522 fix the 滚 十 10 510 system of the balls 523 accommodated in each probe card. The position, and so can be established - a stable slip = the 'multiple balls (2) are housed in each of the ball fasteners 522. While the guide frame 521 is slid, the bead 523 reduces the amount of smooth guidance that is not so consistent. The sliding members 520 are used for fixing the needles: two fixed members (not shown - 备铭#λ 主木十卡架σ 510, so that when the probe card is transferred, the mobile device is moved again When they are not prominent, the description will be based on the preferred embodiment of the present invention. The probe card transfer device is designed to move and position around the desired one: Zhongan = need a probe Card PC. Subsequently, the worker pulls out the probe card holder 51 of the ^Jusica card PC to cause the probe card (S) 22 1354103 = the table protrudes the probe card transfer device, then borrow By manipulating the raising 423 or by pressing the arm unit downwards with a small force, the worker releases the fixing function of the fixing member 25, and moves the supporting member of the (4) probe card PC. The wire is connected to the probe card to hold the holding member of the probe card PC and the probe card PC. ^, the needle card PC is transferred to the position of the high position (four) 423, such as a semi-automatic probe card converter (SACC) The probe card pc has been placed in the desired position by using the small force (four) according to the arm early '200 Thereafter, the probe card holding unit 1 is separated by the probe card PC. + & - ▲ 1 Thereafter, the fixing member 250 is used to fix the arm early το 200' Raising the switch (3) = rising vertically' and then the probe card holder is pushed into the probe card transfer device. The handling of the probe card PC that has been received by the probe card transfer device has been The above description. Since the opposite operation is performed in the reverse order for the above operation, the description is omitted. The probe card transfer device is mainly used to supply a new probe card. In place of an existing probe card, the sacc is provided in the probe. 4, in the same manner as shown in the card transfer device. As described above, in the probe card transfer device according to the present invention, one The transfer and replacement of the large diameter and heavy probe card can be performed easily and safely. Furthermore, the probe card transfer device according to the present invention can include each of the 23 1354103 and can be supplied by a type The probe card is replaced. Needle carding reduces the replacement of the probe test set, thus improving productivity and biosynthesis, due to the above advantages, the time-consuming productivity of the probe card used in the preparation. In the line, "etc"::To one...is installed

Wider...: When the step is increased, the work is so important that the worker is difficult to replace the probe card of the probe (4) equipment towel. However, in the probe card transfer device of the present invention, it is not required to be placed by the position of the side surface of the material of the probe test device, and the needle card can be used to be wide on the line. The arm unit is used in the center channel to perform replacement of the probe card. According to this = the cost incurred by the reconfiguration of the line, which can be attributed to the diameter of the probe card =. 1 卜

It is to be understood that those skilled in the art will appreciate that various modifications may be made without departing from the scope and spirit of the invention. The above and other objects, features and advantages of the present invention are set forth in the description of the preferred embodiments of the invention. The drawings are more clearly understood, wherein: Figure 1 is a perspective view of a probe card transfer device in accordance with the present invention;

Figure 2 is a probe card in accordance with the present invention. Figure 3 is a plan view taken from the transfer apparatus of Figure 2;

Figure 4 is a cross-sectional view of the needle line transfer device according to the present invention. Figure 4 is a perspective view of the member according to the present invention; the probe card holder of the card transfer device is held. Figure 5 is taken from Figure 4; section 6 of the section line A'-A' is taken from Figure 2; One is taken from the figure in Figure 2; and Figure 8 is a view, used. The cross section of the hatching C-C shown shows the probe card transfer apparatus according to the present invention.

[Explanation of main component symbols] 100 Probe card holder 110 Load sensing unit 111 Air inlet 112 Air path 113 Blocking member 114 Air outlet 120 Extractor unit 130 Rotary part 140 Vibration absorbing part 25 1354103

200 arm unit 250 fixing member 251 recess 252 engaging member 260 fixed switch 300 ascending and descending shaft 400 load supporting unit 410 ascending and descending body 420 supporting driving member 421 cylinder 422 auxiliary cylinder 423 raising switch 424 connecting member 430 guiding member 43 1 Guide block 432 Guide 500 Probe card accommodating unit 510 Probe card holder 511 Placement hole 512 Handle 520 Slide member 521 Guide frame 521a First guide frame 521b Second guide frame 26 1354103 521c third guide frame 522 ball fastener 522a first ball fastener 522b second ball fastener 523 ball PC probe card

27

Claims (1)

1354103 X. Applying for patents: a type of probe card transfer device, which is used for a needle device, the probe card transfer device includes: a probe card holder unit, the group constitutes a holding probe card, and a load sensing unit for sensing the weight of the held probe card; a cooking unit configured such that the probe is snapped onto the arm unit; ^ a rising and falling shaft connected to the branch An arm unit for freely rotating the arm unit; and a load-carrying element, the group of which is configured to use the force to support the rising disc lowering shaft, the force corresponding to the probe card holding unit and the arm unit The sum of the rise and the weight of the lower rod and the probe card; ^ the force i applied to the load support unit to support the rising and falling shaft varies according to the ratio of the weight of the probe card held. 2: a probe card transfer device, which is used for testing a probe test device for a wafer, the probe card transfer device comprising: a probe card holding unit, the group of which constitutes a probe card, and is provided with a a load sensing unit for sensing the weight of the held probe card; - an arm unit 'grouped such that the probe card is held on the arm unit; & - rising and falling shafts The arm unit is fixedly lightly connected; and the load supporting unit is configured to use the force to cut the rising and falling shaft, the force corresponding to the probe card holding unit, the arm unit y 28 1354103 And the sum of the weight of the descending shaft and the probe card; wherein the rising and falling shaft is freely twisted relative to the load supporting unit and she is added to the load supporting unit to support the rising and falling shaft The force varies depending on the proportion of the weight of the probe card held. A probe card transfer device as claimed in claim 1 or 2, wherein. The mandrel arm has a number of stands so that its length varies with respect to the ascending and descending shaft. 〃 2. The probe card transfer device of claim 3, wherein the arm unit further comprises a fixing member for fixing the length thereof. " 5 ♦ The probe card transfer device of claim 4, wherein: the component comprises a plurality of recesses and a salivating component, the sounding component being provided in each of the arm units; The length of the first two and the early 70 is adjusted in the plurality of recesses and the engaging member, and the probe card holding unit includes: And providing the cutout 11 component for connection with or separated from the probe card; and opening-rotating the component to provide the rotation to freely rotate the arm unit. ~ The extractor component phase 7_ as in the scope of the patent application 帛 6 probe card probe card i main gg _ lower transfer S and prepare 'which holds the early 7L additionally includes the shock absorbing component, the use of the device component Pour M ^ ^>, attributable to the impact and movement of the slash. (S) 29 1354103 wherein the air discharged through the air outlet operates the auxiliary steam red. U. The probe card transfer guiding member of claim 9 includes: a π8t 13⁄4 plurality of guiding block members fixedly connected to the ascending and descending body, and/or a plurality of guide rails The rise and fall of the guiding block such as the plurality of guiding block mouths. The probe card transfer device including the U1 item of the I:::: profit range is guided, and the wooden card is placed early, which is configured such that one or more probe cards are accommodated therein.纣卞 纣卞 申请 申请 申请 申请 申请 申请 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针The frame can be provided with a plurality of sliding members that are provided to the individual probe card holders such that the probe card holders slide and protrude outward. ° 14 · The probe card of claim 13 of the patent scope includes: each of the sliding parts includes: a second guiding guide frame, and the straight-receiving Jfel riz is mounted on each side of the corresponding probe card holder丨, yak, which are provided in the guiding frames; and a plurality of balls housed in the ball fasteners: wherein the sliding members are each of the guiding structures. m' has a kind of two-stepped 'linear guide 31 (S;)