TWI335842B - Method of applying adhesive to inside surface of pellicle frame - Google Patents
Method of applying adhesive to inside surface of pellicle frame Download PDFInfo
- Publication number
- TWI335842B TWI335842B TW97101600A TW97101600A TWI335842B TW I335842 B TWI335842 B TW I335842B TW 97101600 A TW97101600 A TW 97101600A TW 97101600 A TW97101600 A TW 97101600A TW I335842 B TWI335842 B TW I335842B
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- frame
- protective film
- application
- adhesive
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007006903A JP4889510B2 (ja) | 2007-01-16 | 2007-01-16 | ペリクルフレーム内面への粘着剤の塗布方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200831196A TW200831196A (en) | 2008-08-01 |
TWI335842B true TWI335842B (en) | 2011-01-11 |
Family
ID=39702969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97101600A TWI335842B (en) | 2007-01-16 | 2008-01-16 | Method of applying adhesive to inside surface of pellicle frame |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4889510B2 (ja) |
KR (1) | KR101339746B1 (ja) |
CN (1) | CN101224456A (ja) |
TW (1) | TWI335842B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011034020A (ja) * | 2009-08-06 | 2011-02-17 | Shin-Etsu Chemical Co Ltd | ペリクル収納容器 |
JP5411666B2 (ja) * | 2009-11-19 | 2014-02-12 | 信越化学工業株式会社 | リソグラフィ用ペリクル |
JP5314631B2 (ja) * | 2010-04-20 | 2013-10-16 | 信越化学工業株式会社 | ペリクルフレームの通気孔内壁に粘着剤を塗布する方法 |
JP5743450B2 (ja) * | 2010-07-28 | 2015-07-01 | 株式会社東芝 | レチクルチャッククリーナー |
JP5432855B2 (ja) * | 2010-08-04 | 2014-03-05 | 信越化学工業株式会社 | ペリクルの製造方法および装置 |
JP5455871B2 (ja) * | 2010-11-17 | 2014-03-26 | 信越化学工業株式会社 | ペリクルの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61137948U (ja) * | 1985-02-19 | 1986-08-27 | ||
JP2642637B2 (ja) * | 1987-08-18 | 1997-08-20 | 三井石油化学工業 株式会社 | 防塵膜 |
JP3415683B2 (ja) * | 1994-09-05 | 2003-06-09 | 三井化学株式会社 | マスク保護装置のペリクル枠への保護膜の塗布方法 |
JPH08173891A (ja) * | 1994-12-26 | 1996-07-09 | Toray Ind Inc | 塗膜の製造方法 |
JPH09239976A (ja) * | 1996-03-05 | 1997-09-16 | Ricoh Co Ltd | インクジェットヘッドの接着剤塗布装置 |
JP3115236B2 (ja) * | 1996-09-02 | 2000-12-04 | ホーヤ株式会社 | マスク保護部材の装着方法及びマスク保護部材付きマスク部材 |
TW337002B (en) * | 1996-11-19 | 1998-07-21 | Mitsui Kagaku Kk | Pellicle |
JP2001222100A (ja) * | 1999-12-03 | 2001-08-17 | Mitsui Chemicals Inc | ペリクル |
JP4195550B2 (ja) * | 2000-12-27 | 2008-12-10 | 三井化学株式会社 | ペリクル |
-
2007
- 2007-01-16 JP JP2007006903A patent/JP4889510B2/ja not_active Expired - Fee Related
- 2007-11-28 KR KR1020070122173A patent/KR101339746B1/ko active IP Right Grant
-
2008
- 2008-01-16 CN CN 200810002088 patent/CN101224456A/zh active Pending
- 2008-01-16 TW TW97101600A patent/TWI335842B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2008175874A (ja) | 2008-07-31 |
KR101339746B1 (ko) | 2013-12-11 |
CN101224456A (zh) | 2008-07-23 |
KR20080067564A (ko) | 2008-07-21 |
TW200831196A (en) | 2008-08-01 |
JP4889510B2 (ja) | 2012-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |