JPS61137948U - - Google Patents

Info

Publication number
JPS61137948U
JPS61137948U JP1985022101U JP2210185U JPS61137948U JP S61137948 U JPS61137948 U JP S61137948U JP 1985022101 U JP1985022101 U JP 1985022101U JP 2210185 U JP2210185 U JP 2210185U JP S61137948 U JPS61137948 U JP S61137948U
Authority
JP
Japan
Prior art keywords
frame
substrate surface
protective film
pellicle protective
reticles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985022101U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022101U priority Critical patent/JPS61137948U/ja
Publication of JPS61137948U publication Critical patent/JPS61137948U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図、第２図はそれぞれ本考案の一実施例を
示す斜視図、断面図、第３図は従来のペリクル保
護膜を装着したフオトマスクを示す斜視図である
。 図番の説明、１は透明基板、２はフレーム、３
はニトロセルロースの薄膜、４は粘着膜である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体装置の製造に用いられるフオトマスクや
    レクチル等の基板表面への異物付着防止のために
    基板面から一定の間隔をおいて薄い透明膜のカバ
    ーを装着する枠状のペリクル保護膜用フレームに
    おいて、該フレームの内側面に粘着膜を設けたこ
    とを特徴とするペリクル保護膜用フレーム。
JP1985022101U 1985-02-19 1985-02-19 Pending JPS61137948U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022101U JPS61137948U (ja) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022101U JPS61137948U (ja) 1985-02-19 1985-02-19

Publications (1)

Publication Number Publication Date
JPS61137948U true JPS61137948U (ja) 1986-08-27

Family

ID=30514094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022101U Pending JPS61137948U (ja) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPS61137948U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175874A (ja) * 2007-01-16 2008-07-31 Shin Etsu Chem Co Ltd ペリクルフレーム内面への粘着剤の塗布方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057841A (ja) * 1983-09-09 1985-04-03 Hitachi Ltd 異物固定方法及び装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057841A (ja) * 1983-09-09 1985-04-03 Hitachi Ltd 異物固定方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175874A (ja) * 2007-01-16 2008-07-31 Shin Etsu Chem Co Ltd ペリクルフレーム内面への粘着剤の塗布方法

Similar Documents

Publication Publication Date Title
JPS61137948U (ja)
JPH03110439U (ja)
JPS61173942U (ja)
JPH03110438U (ja)
JPS63122346U (ja)
JPH0221649U (ja)
JPS62149043U (ja)
JPS6265654U (ja)
JPH0275693U (ja)
JPH03114845U (ja)
JPS63122348U (ja)
JPS63155139U (ja)
JPS59104145U (ja) フオトマスク
JPH01108541U (ja)
JPS62106237U (ja)
JPS62149044U (ja)
JPS643847U (ja)
JPS6345548U (ja)
JPH01125439U (ja)
JPS62123648U (ja)
JPS6227346U (ja)
JPS59189643U (ja) ペリクル装着装置
JPH0343652U (ja)
JPH0373936U (ja)
JPH0431146U (ja)