JPS6227346U - - Google Patents

Info

Publication number
JPS6227346U
JPS6227346U JP1985117931U JP11793185U JPS6227346U JP S6227346 U JPS6227346 U JP S6227346U JP 1985117931 U JP1985117931 U JP 1985117931U JP 11793185 U JP11793185 U JP 11793185U JP S6227346 U JPS6227346 U JP S6227346U
Authority
JP
Japan
Prior art keywords
pellicle
frame
attached
pellicle frame
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985117931U
Other languages
English (en)
Other versions
JPS6320989Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985117931U priority Critical patent/JPS6320989Y2/ja
Publication of JPS6227346U publication Critical patent/JPS6227346U/ja
Application granted granted Critical
Publication of JPS6320989Y2 publication Critical patent/JPS6320989Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａは本考案実施例の斜視図、第１図ｂは
本考案実施例の正面断面図、第１図ｃは本考案実
施例のパージと洗浄状態を示す断面図、第２図ａ
は従来例の斜視図、第２図ｂは従来例とレチクル
の断面図、第２図ｃは従来例のパージと洗浄状態
を示す断面図である。 第１図において、１１はペリクルフレーム、１
２はペリクル膜、１３はゴミである。

Claims (1)

  1. 【実用新案登録請求の範囲】 ペリクル膜１２を貼り付けた状態でレチクル、
    ホトマスクなどの保護のために用いるペリクルフ
    レーム１１にして、 該ペリクルフレーム１１はペリクル膜１２が貼
    り付けられた側から外方にテーパして末広がりに
    なつた形状の枠状体のものであることを特徴とす
    るペリクルフレーム１１。
JP1985117931U 1985-07-31 1985-07-31 Expired JPS6320989Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985117931U JPS6320989Y2 (ja) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985117931U JPS6320989Y2 (ja) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6227346U true JPS6227346U (ja) 1987-02-19
JPS6320989Y2 JPS6320989Y2 (ja) 1988-06-10

Family

ID=31003908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985117931U Expired JPS6320989Y2 (ja) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPS6320989Y2 (ja)

Also Published As

Publication number Publication date
JPS6320989Y2 (ja) 1988-06-10

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