JPS63155139U - - Google Patents
Info
- Publication number
- JPS63155139U JPS63155139U JP1987048160U JP4816087U JPS63155139U JP S63155139 U JPS63155139 U JP S63155139U JP 1987048160 U JP1987048160 U JP 1987048160U JP 4816087 U JP4816087 U JP 4816087U JP S63155139 U JPS63155139 U JP S63155139U
- Authority
- JP
- Japan
- Prior art keywords
- light
- transmitting substrate
- transmitting
- pattern
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例を示す断面図である。 １…レテイクル、２…ペリクル、４…レテイク
ルパターン、５，８…ガラス基板、６…クロムパ
ターン、７…ＵＶ光照射による硬化型透光性接着
剤。
図は従来例を示す断面図である。 １…レテイクル、２…ペリクル、４…レテイク
ルパターン、５，８…ガラス基板、６…クロムパ
ターン、７…ＵＶ光照射による硬化型透光性接着
剤。
Claims (1)
- 遮光膜にてパターンを形成した第１の透光性基
板主面の全面を、透光性接着剤を挾んで第２の透
光性基板にて被覆してなることを特徴とするホト
マスク。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048160U JPS63155139U (ja) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048160U JPS63155139U (ja) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155139U true JPS63155139U (ja) | 1988-10-12 |
Family
ID=30869436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048160U Pending JPS63155139U (ja) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155139U (ja) |
-
1987
- 1987-03-30 JP JP1987048160U patent/JPS63155139U/ja active Pending