TWI332470B - Pellicle storage container - Google Patents

Pellicle storage container Download PDF

Info

Publication number
TWI332470B
TWI332470B TW096140952A TW96140952A TWI332470B TW I332470 B TWI332470 B TW I332470B TW 096140952 A TW096140952 A TW 096140952A TW 96140952 A TW96140952 A TW 96140952A TW I332470 B TWI332470 B TW I332470B
Authority
TW
Taiwan
Prior art keywords
protective film
ribs
cover
container
storage container
Prior art date
Application number
TW096140952A
Other languages
English (en)
Chinese (zh)
Other versions
TW200821233A (en
Inventor
Kazutoshi Sekihara
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of TW200821233A publication Critical patent/TW200821233A/zh
Application granted granted Critical
Publication of TWI332470B publication Critical patent/TWI332470B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Closures For Containers (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packages (AREA)
TW096140952A 2006-11-02 2007-10-31 Pellicle storage container TWI332470B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006299460A JP4672636B2 (ja) 2006-11-02 2006-11-02 ペリクル収納容器

Publications (2)

Publication Number Publication Date
TW200821233A TW200821233A (en) 2008-05-16
TWI332470B true TWI332470B (en) 2010-11-01

Family

ID=39422666

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096140952A TWI332470B (en) 2006-11-02 2007-10-31 Pellicle storage container

Country Status (5)

Country Link
JP (1) JP4672636B2 (ja)
KR (1) KR101389867B1 (ja)
CN (1) CN101174083B (ja)
HK (1) HK1112293A1 (ja)
TW (1) TWI332470B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5626850B2 (ja) * 2010-05-10 2014-11-19 旭化成イーマテリアルズ株式会社 ペリクル収納容器
CN114229229B (zh) * 2021-10-29 2023-04-07 东莞市金恒晟新材料科技有限公司 一种防割裂保护膜

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04367434A (ja) * 1991-06-05 1992-12-18 Mamoru Kamo 薄壁容器
JPH07223678A (ja) * 1994-02-09 1995-08-22 Hanshin Kasei Kogyo Kk 食品用容器
JPH09315431A (ja) * 1996-03-29 1997-12-09 Sumitomo Chem Co Ltd 合成樹脂製パレット
JPH10114388A (ja) * 1996-10-07 1998-05-06 Nikon Corp ペリクル容器
JP2000173887A (ja) * 1998-12-02 2000-06-23 Asahi Kasei Denshi Kk ペリクル収納ケース
JP4236535B2 (ja) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP4176138B2 (ja) 2005-01-27 2008-11-05 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP4391435B2 (ja) * 2005-03-22 2009-12-24 信越化学工業株式会社 ペリクル収納容器

Also Published As

Publication number Publication date
KR20080040564A (ko) 2008-05-08
CN101174083B (zh) 2010-12-29
JP2008116667A (ja) 2008-05-22
CN101174083A (zh) 2008-05-07
TW200821233A (en) 2008-05-16
JP4672636B2 (ja) 2011-04-20
HK1112293A1 (en) 2008-08-29
KR101389867B1 (ko) 2014-04-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees