HK1112293A1 - Pellicle storage container - Google Patents

Pellicle storage container

Info

Publication number
HK1112293A1
HK1112293A1 HK08107439.6A HK08107439A HK1112293A1 HK 1112293 A1 HK1112293 A1 HK 1112293A1 HK 08107439 A HK08107439 A HK 08107439A HK 1112293 A1 HK1112293 A1 HK 1112293A1
Authority
HK
Hong Kong
Prior art keywords
storage container
pellicle storage
pellicle
container
storage
Prior art date
Application number
HK08107439.6A
Other languages
English (en)
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1112293A1 publication Critical patent/HK1112293A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Closures For Containers (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packages (AREA)
HK08107439.6A 2006-11-02 2008-07-07 Pellicle storage container HK1112293A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006299460A JP4672636B2 (ja) 2006-11-02 2006-11-02 ペリクル収納容器

Publications (1)

Publication Number Publication Date
HK1112293A1 true HK1112293A1 (en) 2008-08-29

Family

ID=39422666

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08107439.6A HK1112293A1 (en) 2006-11-02 2008-07-07 Pellicle storage container

Country Status (5)

Country Link
JP (1) JP4672636B2 (ja)
KR (1) KR101389867B1 (ja)
CN (1) CN101174083B (ja)
HK (1) HK1112293A1 (ja)
TW (1) TWI332470B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5626850B2 (ja) * 2010-05-10 2014-11-19 旭化成イーマテリアルズ株式会社 ペリクル収納容器
CN114229229B (zh) * 2021-10-29 2023-04-07 东莞市金恒晟新材料科技有限公司 一种防割裂保护膜

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04367434A (ja) * 1991-06-05 1992-12-18 Mamoru Kamo 薄壁容器
JPH07223678A (ja) * 1994-02-09 1995-08-22 Hanshin Kasei Kogyo Kk 食品用容器
JPH09315431A (ja) * 1996-03-29 1997-12-09 Sumitomo Chem Co Ltd 合成樹脂製パレット
JPH10114388A (ja) * 1996-10-07 1998-05-06 Nikon Corp ペリクル容器
JP2000173887A (ja) * 1998-12-02 2000-06-23 Asahi Kasei Denshi Kk ペリクル収納ケース
JP4236535B2 (ja) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
CN101111802B (zh) 2005-01-27 2011-02-02 旭化成电子材料株式会社 大型光罩保护膜收纳容器
JP4391435B2 (ja) * 2005-03-22 2009-12-24 信越化学工業株式会社 ペリクル収納容器

Also Published As

Publication number Publication date
KR20080040564A (ko) 2008-05-08
JP4672636B2 (ja) 2011-04-20
KR101389867B1 (ko) 2014-04-29
TWI332470B (en) 2010-11-01
CN101174083B (zh) 2010-12-29
CN101174083A (zh) 2008-05-07
JP2008116667A (ja) 2008-05-22
TW200821233A (en) 2008-05-16

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20221031