TWI326675B - - Google Patents
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- Publication number
- TWI326675B TWI326675B TW094100573A TW94100573A TWI326675B TW I326675 B TWI326675 B TW I326675B TW 094100573 A TW094100573 A TW 094100573A TW 94100573 A TW94100573 A TW 94100573A TW I326675 B TWI326675 B TW I326675B
- Authority
- TW
- Taiwan
- Prior art keywords
- ozone
- gas
- ozone water
- water
- centrifugal
- Prior art date
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 237
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 159
- 239000007789 gas Substances 0.000 claims description 76
- 239000007788 liquid Substances 0.000 claims description 59
- 239000012071 phase Substances 0.000 claims description 53
- 239000007864 aqueous solution Substances 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 31
- 230000007246 mechanism Effects 0.000 claims description 26
- 239000007791 liquid phase Substances 0.000 claims description 20
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000012546 transfer Methods 0.000 claims description 16
- 238000004090 dissolution Methods 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 239000000243 solution Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 3
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 3
- 239000012498 ultrapure water Substances 0.000 claims description 3
- 230000009418 agronomic effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims description 2
- 230000009349 indirect transmission Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- QXJJQWWVWRCVQT-UHFFFAOYSA-K calcium;sodium;phosphate Chemical compound [Na+].[Ca+2].[O-]P([O-])([O-])=O QXJJQWWVWRCVQT-UHFFFAOYSA-K 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 18
- 230000008569 process Effects 0.000 description 16
- 230000001954 sterilising effect Effects 0.000 description 10
- 238000004659 sterilization and disinfection Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000010865 sewage Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 241000208422 Rhododendron Species 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000008346 aqueous phase Substances 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000004332 deodorization Methods 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002957 persistent organic pollutant Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- JOHZPMXAZQZXHR-UHFFFAOYSA-N pipemidic acid Chemical compound N1=C2N(CC)C=C(C(O)=O)C(=O)C2=CN=C1N1CCNCC1 JOHZPMXAZQZXHR-UHFFFAOYSA-N 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
- B01F27/118—Stirrers in the form of brushes, sieves, grids, chains or springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2321—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by moving liquid and gas in counter current
- B01F23/23211—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by moving liquid and gas in counter current the liquid flowing in a thin film to absorb the gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
- B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
- B01F23/237613—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/213—Measuring of the properties of the mixtures, e.g. temperature, density or colour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/22—Control or regulation
- B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
- B01F35/2214—Speed during the operation
- B01F35/22142—Speed of the mixing device during the operation
- B01F35/221422—Speed of rotation of the mixing axis, stirrer or receptacle during the operation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
- B01F27/116—Stirrers shaped as cylinders, balls or rollers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/78—Details relating to ozone treatment devices
- C02F2201/782—Ozone generators
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/23—O3
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/23—O3
- C02F2209/235—O3 in the gas phase
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/02—Fluid flow conditions
- C02F2301/024—Turbulent
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/02—Fluid flow conditions
- C02F2301/026—Spiral, helicoidal, radial
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094100573A TW200624387A (en) | 2005-01-07 | 2005-01-07 | High speed centrifugal type ozone water generating method and system |
| JP2005253401A JP2006187757A (ja) | 2005-01-07 | 2005-09-01 | 高速遠心式オゾン水生成方法とシステム |
| US11/217,504 US20060151896A1 (en) | 2005-01-07 | 2005-09-02 | Method of centrifugally generating ozonated water and system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094100573A TW200624387A (en) | 2005-01-07 | 2005-01-07 | High speed centrifugal type ozone water generating method and system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200624387A TW200624387A (en) | 2006-07-16 |
| TWI326675B true TWI326675B (cg-RX-API-DMAC7.html) | 2010-07-01 |
Family
ID=36652472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094100573A TW200624387A (en) | 2005-01-07 | 2005-01-07 | High speed centrifugal type ozone water generating method and system |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20060151896A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2006187757A (cg-RX-API-DMAC7.html) |
| TW (1) | TW200624387A (cg-RX-API-DMAC7.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7537644B2 (en) | 2003-10-24 | 2009-05-26 | Gastran Systems | Method for degassing a liquid |
| US20070034565A1 (en) * | 2003-10-24 | 2007-02-15 | Gastran Systems | Method for treating a contaminated fluid |
| US8187533B2 (en) * | 2004-12-21 | 2012-05-29 | Parah, Llc | Descenting systems and methods |
| US8329096B2 (en) * | 2004-12-21 | 2012-12-11 | Parah, Llc | Systems and methods for detecting descented material |
| US8257648B2 (en) | 2004-12-21 | 2012-09-04 | Scott Elrod | System and method for reducing odors in a blind |
| US20100289655A1 (en) * | 2004-12-21 | 2010-11-18 | Elrod Scott A | Detecting descented material |
| US7939015B1 (en) | 2004-12-21 | 2011-05-10 | Parah, Llc | Method of descenting hunter's clothing |
| TWI370778B (en) | 2008-12-31 | 2012-08-21 | Ind Tech Res Inst | Centrifugal force sensing device and reactoion system by centrifugal force |
| JP6003562B2 (ja) * | 2012-11-16 | 2016-10-05 | 株式会社Ihi | 活性汚泥処理装置 |
| US10314932B2 (en) | 2016-01-15 | 2019-06-11 | 2059492 Alberta Ltd. | Portable ozone generator |
| CN109828007B (zh) * | 2019-03-04 | 2021-12-17 | 温州美众医学检验实验室有限公司 | 一种基于生物溶液浓度的生物检测装置 |
| TW202112452A (zh) * | 2019-05-21 | 2021-04-01 | 日商東京威力科創股份有限公司 | 基板處理裝置及基板處理方法 |
| CN111559787A (zh) * | 2020-05-19 | 2020-08-21 | 重庆工商大学 | 一种震荡离心介质阻挡放电污染物处理装置 |
| US11807526B1 (en) * | 2021-09-24 | 2023-11-07 | Bruce Lockaby | Ozone replenishment system |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382980A (en) * | 1964-10-29 | 1968-05-14 | Welsbach Corp | Ozone water treatment plant |
| US4038353A (en) * | 1976-08-11 | 1977-07-26 | Shafranovsky Alexandr Vladimir | Rotor film column for making contact between gas and liquid |
| US4072613A (en) * | 1976-10-04 | 1978-02-07 | The United States Of America As Represented By The Secretary Of The Navy | Ozone reactor for liquids |
| ATE29677T1 (de) * | 1980-09-01 | 1987-10-15 | Ici Plc | Zentrifugalapparat zum gas-fluessigkeit-kontakt. |
| US4282172A (en) * | 1980-09-11 | 1981-08-04 | Howe-Baker Engineers, Inc. | Gas to liquid diffuser |
| US4657677A (en) * | 1985-02-15 | 1987-04-14 | Roubicek Rudolf V | Equipment for enhanced mass transfer and control of foaming in chemical and biochemical processes |
| US5043104A (en) * | 1987-11-04 | 1991-08-27 | Barrett Haentjens & Co. | Apparatus for gas absorption in a liquid |
| US5363909A (en) * | 1991-11-27 | 1994-11-15 | Praxair Technology, Inc. | Compact contacting device |
| JP3323217B2 (ja) * | 1991-12-27 | 2002-09-09 | 未来科学株式会社 | 水の浄化・活性化装置 |
| JP2749495B2 (ja) * | 1993-03-15 | 1998-05-13 | 長廣 仁蔵 | 高濃度オゾン水製造方法及び高濃度オゾン水製造装置 |
| US5686051A (en) * | 1994-11-11 | 1997-11-11 | Kabushiki Kaisha Kobe Seiko Sho | Ozone water production apparatus |
| US5897832A (en) * | 1996-04-30 | 1999-04-27 | Porter; Brooks S. | Cleaning method utilizing ozonated water and apparatus for producing ozonated water |
| US5951921A (en) * | 1997-01-31 | 1999-09-14 | Core Corporation | Apparatus for producing ozone water |
| US6702949B2 (en) * | 1997-10-24 | 2004-03-09 | Microdiffusion, Inc. | Diffuser/emulsifier for aquaculture applications |
| US5971368A (en) * | 1997-10-29 | 1999-10-26 | Fsi International, Inc. | System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized |
| KR100463896B1 (ko) * | 2002-03-29 | 2004-12-30 | 동우기연 주식회사 | 오존수 생성 시스템 및 그 제어방법 |
-
2005
- 2005-01-07 TW TW094100573A patent/TW200624387A/zh not_active IP Right Cessation
- 2005-09-01 JP JP2005253401A patent/JP2006187757A/ja active Pending
- 2005-09-02 US US11/217,504 patent/US20060151896A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20060151896A1 (en) | 2006-07-13 |
| TW200624387A (en) | 2006-07-16 |
| JP2006187757A (ja) | 2006-07-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |