M269115 212-〇〇7TWU-3/2(? 八、新型說明： 【新型所屬之技術領域】 本創作為有關一種高速離心式臭氧水產生裝置與系統，乃 係涉及包括半導體晶圓或光電材料與TFT顯示裝置之臭氧清洗 5的技術領域、殺菌清潔或污水之高級氧化處理等應用之臭氧水 產生裝置與系統領域，特別是指一種利用氣相臭氧與水溶劑在 一高速離心力場裝置中，產生高度f傳之氣、液相溶解形成清 ^ 洗溶液之臭氧水溶液’以快速產生穩定之高濃度臭氧水。 10【先前技術】 15 20 〜’臭氧常應用於快速氧化以及分解化學物質，主要源; 二刀子之不穩定特性及強氧化性。而臭氧對於人們日常生活 =實具有相當大的錢。其中之臭氧水，係為—種殺菌: 的滅菌消毒劑，其能分解醫藥，具有除臭、、除異味 =和淨化水等諸多功能。已知機械式臭氧水之產生裝置，: 化學性處理裝置之氣消毒等處理裝置相比較時，並不需 留物質蒸發之待機時間’故對於水中不易分解之物質」 ^之氧化處理等而言;將可得敎優良之絲。大部 置乃是水電解或魏電離生成臭氧，再經過 水^1裝置以便將臭氧混人水中’以取得臭氧水，因此臭; 裝置對臭氧水製造是一個相當重要的組件。 、 此外，目前臭氧水用於半導體石夕基板，液 屏歧用石英基板等的光電子材料表 土板，: 品質和成品上極重要，為此目的被廣泛在確保產品1 機物污染或金衫㈣肖除，適綠。⑽ 为強氧化力的洗滌液 25 M269115 212-007TWU-4/2^ 效’以往’被採用以硫酸或雙氧水的混合液（spM洗滌液），或 鹽^和一氧化氫和超純水的混合液（SC2洗滌液）等的高溫洗 滌近年，逐漸要求洗滌過程的簡化，省資源化，室溫化。臭 氧’谷解在水中可發揮極強氧化力，有效地消除電子材料表面的 5有機污木或金屬污染，遂逐漸被用於濕式洗務。 目刚已知之臭氧製造方式，包括光化學法，此項技術多使 用於裝仏；1臭氧的應用。放電法，是一種類似自然界電擊現 象因此對於空氣之濕度要求很高。以及所謂的電漿法，利用 • 纟鈍^之玻場真空管，在高能量下產生電子衝擊而製造臭氧。 10至於前述方式所製成的臭氧之用於殺菌及污水處理所能提供之 臭氧浴解里必須充足，方能應付較高之污染濃度及徹底殺菌。 而在晶圓或光電基材的清洗上，是必需將氣相臭氧溶解於純水 中形成潔淨/容液來進行清洗作業，且是不同於傳統工業所需的 低濃度臭氧（ippm以内至數個ppm)運用，半導體及光電清洗 I5製程需要長時間穩定供應的中高濃度臭氧水(數十ppm範圍）， 因此，氣相臭氧之水溶解度，對於製造含臭氧之超潔淨清洗溶 Φ 液是一環重要的瓶頸。且氣相臭氧之溶解度低，對環境變因極 敏感；而具體影響氣相臭氧水溶解度之主要因素，包括氣相臭 氧的濃度、溶液溫度及酸鹼度等。 20 現行之臭氧水溶解技術皆試圖單純以控制物理條件，使趨 近熱力學飽和濃度以提高臭氧溶解效率，由相關技術資料及專 利發表結果，在臭氧水產生系統方面，有US5971368 (臭氧 水產生系統設計，以pressurized vessel提高溶解度）及 DE19752769 (臭氧水產生糸統設計，以pipeiine 進 25行〇3溶解）。但對於臭氧溶解之質傳行為促進，普遍均有設 M269115 212-007TWU-5/2 石 計上之限制，亦即，無法快速達到熱力學上之平衡溶解濃度。 分析前述這些臭氧水溶解裝置相關研究的專利前案内容， 多以改良臭氧水氣液接觸系統及操作系統溫壓操 達到提高臭氧水濃度及增進反應速率目的；但是在實際應工用上 5之效率仍未盡理想，緣因單以改變物理條件以趨近埶力學的臭 氧飽和濃度對增進臭氧水漢度的改進有限，且屆至目前為止，、 =臭氧水供縣置研發也多射於低濃度（數個ppm)或低 流量(數公糾、時）的·，這是現階段純水製造技術發展遭 遇的最大技術瓶頸，也是造成至今無法在工業製程與日常使用 10 上普及應用的原因之*。 力一 15 20 里受的在於前述這些專利前案内容，應用於晶圓 清洗過程或污水與殺菌處理程序中，完全無法掌握臭氧濃产分 佈狀況或能自動進行調整；按，以往臭氧程序用在半導體^程 之晶圓清洗，主要藉由高濃度氣相臭氧，以分散授摔或曝氣裝 置將臭氧氣齡散成㈣、氣泡，以增力峨液接縣面積，進而 提高質=果’但氣泡仍受重力與浮力的限制，無法有效提供 快速之質傳效果與純水相溶解，形成高濃度液好氧水。告曰 圓浸入清洗槽時，會快料耗清洗缝巾的純，且在無= 握清洗槽體㈣氧濃度分佈狀況或能自動進行懸之狀況下， 往往導致反應過財後期之轉巾純濃度不足，料有效將 晶圓表面之有機物(如光阻)或其他氧化 的清洗時間’進而導致產量無法提升。更無法進行二= 量清洗製程作業。雖目前已有部分改 $仃心式之大 加速臭氧的氧化能力，但其促進的程:：要藉由照射7光 的臭氧濃度，並不僅只錢uv ^要取決於水溶液中 尤之“、、射所能具體之提昇氧化 25 M269115 212-007TWU-6/26 之能力；在目前已知的氣相臭氧與純水溶解技術上，仍無法獲 f有效的突破。另，有關殺g及污水處理部分，因大量有機污 染物或微生物之存在於欲處理之水體中，往往快速消耗所產生 之臭氧水，導致液相臭氧濃度降低，進而降低處理效能，並導 5 2有害物質殘留或病g之滋生。該現象實域存臭氧水裝置在 使用上之一大瓶頸。 【新型内容】 10 產生=作 1主要目的之―’在提供—種高速離心、式臭氧水 境中要在利用具有高速離心力之-系統運作環 兄中進❹度質傳之氣相純、液 生穩定之高濃度臭氧水。 合夜洛解以决速產 本創作的主要目的之一，在接 15 20 生系統，主要在利用一可由動力種高速離心式臭氧水產 力場環境，形成一可將液相水轉，產生高速離心 進而與逆向傳送之氣相臭氧，刀=成小液滴或霧狀條件， 快速地溶解氣相臭氧之一質傳機制、搜摔混合，並 液。 X传向/辰度液相臭氧水溶 為達到上述目的，根據本創 置，係在-由臭氧水產生機構、離心式臭氧水產生裝 臭氧產生器、排放水控制器及1:單 式臭氧水產生系統令進行，該裝置勺人早70、、且成的向速離心 啟動液相水溶液供應至離心式臭 啟動氣相臭氧供應至離心式^氧水水產生機構； 由動力構件驅動離心式臭着 > 生機構’ 、7產生機構產生内部高速離心 25 M269115 212-007TWU-7/2 6 力場環境； ^上述高速離^力場環境中，進行液相水溶液與氣相臭氧 目洛解反應’並隨時由感測饋控單元進行臭氧濃度監測 控注入量； 完成高濃度臭氧水經排放水控制輸出，並進行臭氧尾氣之 排放。M269115 212-〇〇7TWU-3 / 2 (? 8. Description of the new model: [Technical field to which the new model belongs] This creation relates to a high-speed centrifugal ozone water generating device and system, which involves semiconductor wafers or optoelectronic materials and The technical field of ozone cleaning of TFT display devices5, the field of ozone water generating devices and systems for sterilization cleaning or advanced oxidation treatment of sewage, especially refers to the use of gas phase ozone and water solvents in a high-speed centrifugal force field device to generate The highly f-transmitted gas and liquid phase dissolve to form an ozone aqueous solution of the cleaning solution 'to quickly produce stable high-concentration ozone water. 10 [Prior art] 15 20 ~' Ozone is often used for rapid oxidation and decomposition of chemical substances, the main source The unstable nature and strong oxidizing property of the two knives. Ozone has a considerable amount of money for people's daily life. Among them, the ozone water is a kind of sterilization: a disinfectant that can decompose medicine and has deodorant. ,, deodorizing = and purifying water and many other functions. Known mechanical ozone water generating device: chemical treatment device gas disinfection and other treatments In comparison, there is no need to leave the waiting time for the substance to evaporate, so for the oxidation treatment of substances that are not easily decomposed in water, etc .; excellent silk can be obtained. Most of it is produced by water electrolysis or Wei ionization. Ozone is passed through the water device to mix ozone into the water to obtain ozone water, so it smells bad; the device is a very important component for the production of ozone water. In addition, ozone water is currently used in semiconductor stone substrates, liquid screens Optoelectronic material topsoil plates, such as quartz substrates, are of high quality and finished products. For this purpose, they are widely used to ensure that product 1 is contaminated with organic materials or that it is golden-stained. It is green. 绿 is a strong oxidizing detergent 25 M269115 212-007TWU-4 / 2 ^ High-efficiency high temperature, such as mixed solution of sulfuric acid or hydrogen peroxide (spM washing solution), or salt ^ and hydrogen monoxide and ultrapure water (SC2 washing solution), etc. In recent years, the simplification of the washing process, resource saving, and room temperature have gradually been required. Ozone 'valley solution can exert extremely strong oxidizing power in water, effectively eliminating 5 organic dirt wood or metal pollution on the surface of electronic materials, and then gradually It is used for wet washing. The ozone manufacturing methods just known include photochemical methods. This technology is mostly used for decoration. 1 The application of ozone. The discharge method is similar to the electric shock phenomenon in nature and therefore requires humidity in the air. Very high. And the so-called plasma method, which uses • blunt glass field vacuum tubes to generate electronic impact under high energy to produce ozone. 10 As for the ozone produced by the aforementioned method, it can provide sterilization and sewage treatment. The ozone bath must be sufficient to cope with higher pollution concentrations and complete sterilization. For wafer or photovoltaic substrate cleaning, it is necessary to dissolve gas-phase ozone in pure water to form a clean / capacity solution. The cleaning operation is different from the use of low-concentration ozone (within ippm to several ppm) required by traditional industries. The semiconductor and optoelectronic cleaning I5 process requires long-term stable supply of medium-to-high concentration ozone water (in the range of tens of ppm). Therefore, The water solubility of gas phase ozone is an important bottleneck for the production of ultra-clean cleaning solution containing ozone. Moreover, the solubility of gas-phase ozone is low and it is extremely sensitive to environmental variables. The main factors that specifically affect the solubility of gas-phase ozone water include the concentration of gas-phase ozone, solution temperature, and pH. 20 The current ozone water dissolution technology attempts to control the physical conditions and make the thermodynamic saturation concentration approach to improve the ozone dissolution efficiency. According to related technical information and patent publication results, in terms of ozone water generation systems, there is US5971368 (ozone water generation system). Designed to improve solubility with pressurized vessel) and DE19752769 (designed with ozone water production system, dissolved in 25 rows with pipeiine). However, for the promotion of mass transfer behavior of ozone dissolution, there are generally restrictions on the M269115 212-007TWU-5 / 2 stone, that is, the thermodynamic equilibrium dissolution concentration cannot be reached quickly. Analyze the contents of the pre-patent cases related to the aforementioned research on ozone water dissolving devices. Most of them aim to improve the ozone water concentration and the reaction rate by improving the ozone water-gas-liquid contact system and the operating system temperature and pressure operation. The efficiency is still not ideal. The reason is that the change in physical conditions to approximate the ozone saturation concentration of 埶 mechanics has only limited improvement in increasing the ozone water salinity. Until now, the research and development of ozone water supply has also been more common. Low concentration (several ppm) or low flow (several hours, hours). This is the biggest technical bottleneck encountered in the development of pure water manufacturing technology at this stage. It is also the reason why it has not been widely used in industrial processes and daily use10. Reason *. Li Yi 15 20 suffers from the contents of the aforementioned pre-patent cases, which are used in wafer cleaning processes or sewage and sterilization processing procedures. It is completely impossible to grasp the concentration distribution of ozone production or can automatically adjust it. According to the previous ozone procedures used in Wafer cleaning in semiconductor processes mainly uses high-concentration gas-phase ozone to disperse ozone gas into radon and air bubbles by means of dispersing or aerating devices, so as to increase the area of E-liquid to increase the quality of the liquid. It is still limited by gravity and buoyancy, and cannot effectively provide a fast mass transfer effect with the pure water phase to dissolve, forming a high-concentration liquid aerobic water. It is said that when the circle is immersed in the cleaning tank, it will quickly consume the purity of the cleaning towel, and in the absence of the oxygen concentration distribution of the cleaning tank body or the condition of automatic suspension, it will often lead to the conversion of the towel after the financial period. Insufficient concentration, the effective cleaning time of organic matter (such as photoresist) or other oxidation on the surface of the wafer 'will lead to an increase in yield. What's more, it is impossible to perform the two-quantity cleaning process. Although it has been partially modified to greatly accelerate the oxidation of ozone, the process it promotes: It is not only the UV that depends on the concentration of ozone by irradiating 7 light. The radio can specifically improve the ability to oxidize 25 M269115 212-007TWU-6 / 26; in the currently known gas-phase ozone and pure water dissolution technology, there is still no effective breakthrough in f. In addition, related to killing g and sewage In the treatment part, due to the presence of a large amount of organic pollutants or microorganisms in the water body to be treated, the ozone water produced is often rapidly consumed, resulting in a decrease in the ozone concentration in the liquid phase, thereby reducing the treatment efficiency, and leading to the residue of 5 2 harmful substances or disease. Breeding. This phenomenon is a major bottleneck in the use of ozone water storage devices. [New content] 10 production = 1 main purpose-'in the provision of-a kind of high-speed centrifugal, ozone-type water environment must be used in high-speed Centrifugal Force-System Operation High-density, gas-phase pure, liquid-stable, and high-concentration ozone water in the system. Heye Luojie is one of the main goals of the production of fast-moving production. main Utilizing a high-speed centrifugal ozone aquatic productive field environment capable of being powered, a liquid-phase ozone capable of turning liquid-phase water to generate high-speed centrifugation and then transmitting in the reverse direction is formed, and the knife is dissolved into small droplets or mist conditions to rapidly dissolve the gas. One of the mass transfer mechanisms of phase ozone, search and mixing, and liquid. X-transmission / Chendu liquid-phase ozone water-soluble To achieve the above purpose, according to this creation, it is based on-ozone water generation mechanism, centrifugal ozone water generation equipment Ozone generator, discharge water controller and 1: single-type ozone water generation system order are carried out. This device is used to supply 70% to the centrifugal start-up liquid phase aqueous solution to the centrifugal odor start-up to the centrifugal phase. Oxygen water generating mechanism; centrifugal odor driven by power components > generating mechanism ', 7 generating mechanism generates internal high-speed centrifugation 25 M269115 212-007TWU-7 / 2 6 force field environment; In the environment, the liquid phase aqueous solution reacts with the gas phase ozone, and the sensing feed control unit performs ozone concentration monitoring and injection amount control at any time; completes the output of high-concentration ozone water through the discharged water control, and performs Oxygen of exhaust emissions.
根據本創作為執行上述高速離心式臭氧水產生裝置之高速 離心式臭氧水產生系統，該系統至少包含： 一臭氧水產生機構，含有-主體外殼為反應槽，利用一裝 10，主斷㈣之㈣錢較财置，縣人㈣相水溶液盘 氣相臭氧進行溶解反應； 動力構件’含有-動力構件驅動上述離心式氣液交換 置旋轉產生高速離心力場； 、 -水溶液供應單元，湘管路連接上述離心、式氣液交換 15置提供水溶液； 、t 臭氧產生器產生並供應上述離心式氣液交換裝置溶 反應所需之氣相臭氧； -排放水控制器，裝在上述主體外殼，控制產生之臭氧水 排放輸出與反應後臭氧尾氣之排放； 、 2〇 _感測饋控單元，監測上述離心式氣液交換裒置溶解反應 之臭氧濃度，並自動饋控臭氧濃度調整。 本創作-較佳實施例中，前述之離心式氣液交換装置是採 用一種高賴心_«充毅，此高效率⑽心氣液^ 換裝置，由高離心力技術運作以強化氣相臭氧與進料水溶液之 25質傳接觸與溶解效果，形成高液相溶解之高濃度臭氧水作為清 M269115 212-007TWU-8/2i? 洗或殺菌及分解之應用。並可利用該裝置之離心力場調整，控 制臭氧與水溶劑間之強制溶解度，來維持所產生臭氧水溶液之 濃度或適用不同之清洗、殺菌或分解標的物使用。 口本創作一較佳實施例中，該動力構件更包括一轉速控制 5器，以控制驅動離心式氣液交換裝置轉速而為離心力場調整。 本創作一車父佳實施例中，該系統更包括一過濾裝置，以過 濾排放水再注入離心式氣液交換裝置使用。 ”月參閱以下有關本創作一較佳實施例之詳細說明及其附 圖，將可進-步瞭解本創作之技術内容及其目的功效；有關該 10 實施例之附圖。 【實施方式】 本創作之較佳實施例，將前述目的之高速離心式臭氧水 產生裝置與系統的主要技術内容，適當揭示於以下所列舉的 15 -較佳實施财，並利用該較佳實施例裝置，將本創作之 主要技術内容予以適當實施。 第1〜4圖揭示本創作—較佳實施例高效能臭氧水產生系統 的架構方塊圖與系統具體結構圖。本案較佳實施例的高效能臭 20 氧水產生系統，該系統架構主要係由臭氧水產生機構卜提供 氣相臭氧與水溶液的溶解形成高濃度臭氧水的產生環境、動力 構件2，驅動前述臭氧水產生機構丄產生高速離心力場、供應 水溶液材料j溶液供應單元3、供應氣相臭氧材料之臭氧彦 生控：器5,控制產生之臭氧水排放輸出、 "感==6 ’隨時感測氣相臭氧濃度並自動饋控調整、 25及-過滤裝置了，以過據排放水再注入離心式 M269ll5 ’ 212-007TWU-9/2^ 5 鲁 10 15 20 用而組成，如第卜2圖所示。 溶、、上ί所提之臭氧水產生機構1 ’主要在提供氣相臭氧與水 ^的岭解形成高濃度臭氧水的反應槽，内部設置一高速旋轉 〈離心式奘罢 Β , 旋 、罝，具有在該反應槽的氣密空間内中，產生一高速 條杜I之離心式環境，形成一可將進料水切碎成小液滴或霧狀 氣，、二向外甩出’進而與逆向向離心式裝置傳送之氣相臭 質傳之溶解、㈣混合，並快速地溶解氣相臭氧之一 傳機制，獲得高濃度液相臭氧水溶液。 前述該臭氧水產生機構丨， 構中，如第2〜4圖所示，具有本1作一具體實施例組成結 溶解現何反應之反應槽，並暫時惠隼體*外喊11，形成為氣液相 較佳綱 軋液父換裝置12，利用氣密單元 Λη内，行組裝在前述主體外殼 内絲-W有進水口13與排放臭氧尾氣之排氣口 "， ^摄器15 4置於前述離心式氣液交換裝置Η之中央部，’ 管體151與進水口 13相連結，並由管體⑸設置之多 内形成噴關，如第3、4圖所干迷離::式氣:交換裝置12 ^排列設置在主體外殼以側壁^/^散供應器 氣口⑽連接上述臭氧產生器4，二⑹經進 =的多數喷頭162，用以將高濃度=氧氧:Ϊ = 主體=内，以提高離心式氣液交換裝 = 氧父換效率’如第2圖所示;-臭氧水出水口17，用以收2 由離心力甩出離心式氣液交換裴置 人 H 液；此外，該臭氧水產生機構！之^ ;⑴農度臭氧之水溶 各進水口、出水口、進氣 25 M269115 212-007TWU-10/2^ 口、排氣口，與其他需阻隔水、氣推ψ夕爲收+丄θ ^ 礼進出之官路或相關之細部氣 密性構造等，及-氣體壓力旁路，或透過管路連結—氣相臭氣 分析單元，在本專利裝置運作中隨時偵測分析所導入之臭氧氣 濃度參數等相關設施及配合儀器，因均直接採用常用之氣密構 5件配置與商業級設備與零組件，故均予省略未示。 前述該離心式氣液父換裝置12，在本創作一具體實施例結 構中，如第3、4圖所不，具有_中空的圓桶環狀旋轉主體 121成型，該旋轉主體121，較佳係由多孔性基材，如多孔性 金屬或非金屬材料成型之結構支揮内、外壁面122、123圍構 10組成，以提供氣相臭氧逆向進入離心式氣液交換裝置12，以及 所反應產生之臭氧水排出；在旋轉主體121内、外壁面122、 123間，則設置有氣液質傳交換介質丨24，該氣液質傳交換介 質124係為一多孔性基材、惰性材質之其一，如塑膠球、不鏽 鋼金屬網、玻璃球、陶瓷填充物、金屬氧化物錠材或其他可分 15散水溶液與氣體之材料結構。 前述主體外殼11内，更包括設置一重力式傾斜流動擋板 Π 0，並呈相對臭氧水出水口 17方向傾斜成型，以便將由離心 式氣液交換裝置12離心甩出的臭氧水，集中導向臭氧水出水 口 17排出。 20 前述該氣密單元18、19，在本創作一具體實施例結構 中，係為一氣密軸封，在氣密軸封内則設置有培林，以相對離 心式氣液交換裝置12上、下端組裝，而具有支撐與氣密功 能，用以在臭氧水產生過程中隨時保持離心式氣液交換裝置12 之密閉，減少臭氧氣體逸散而降低持傳效率。 上述所提之動力構件2，係為一驅動馬達配置，可直接由 25 ^269115 212-007TWU-ll/2^According to this creation, a high-speed centrifugal ozone water generating system for implementing the above-mentioned high-speed centrifugal ozone water generating device, the system includes at least: an ozone water generating mechanism, including a main body shell as a reaction tank, using a pack of 10, the main breaking of the Saving money is more expensive, and the county ’s aqueous phase is used to dissolve the gas phase ozone in the aqueous solution plate; the power component contains-the power component drives the centrifugal gas-liquid exchange device to rotate to generate a high-speed centrifugal force field; and-an aqueous solution supply unit connected to the Xiang pipeline The above-mentioned centrifugal, type gas-liquid exchange 15 provides an aqueous solution; a t ozone generator generates and supplies the gas-phase ozone required for the dissolution reaction of the above-mentioned centrifugal gas-liquid exchange device;-a discharge water controller installed in the main body shell to control the production The ozone water emission output and the emission of ozone tail gas after the reaction; 2, 20_ sensing feed control unit to monitor the ozone concentration of the above-mentioned centrifugal gas-liquid exchange unit dissolution reaction, and automatically feed and control the ozone concentration adjustment. In this creative-preferred embodiment, the aforementioned centrifugal gas-liquid exchange device uses a high-reliability, high-efficiency gas-liquid exchange device, which is operated by high centrifugal force technology to strengthen the gas-phase ozone and feed gas. 25 mass transfer contact and dissolving effect of the raw material aqueous solution, forming high-concentration ozone water with high liquid phase dissolution as the application of cleaning M269115 212-007TWU-8 / 2i? Washing or sterilization and decomposition. The centrifugal force field adjustment of the device can be used to control the mandatory solubility between ozone and water solvents to maintain the concentration of the ozone solution produced or to apply different cleaning, sterilizing or decomposing targets. In a preferred embodiment of the present invention, the power component further includes a rotation speed control device for controlling the rotation speed of the centrifugal gas-liquid exchange device for driving and adjusting the centrifugal force field. In this embodiment of the vehicle, the system further includes a filtering device for filtering the discharged water and injecting it into a centrifugal gas-liquid exchange device. Please refer to the following detailed description of a preferred embodiment of the present invention and its accompanying drawings, which will further understand the technical content of this creation and its purpose and effect; the drawings related to the 10th embodiment. [Embodiment] This The preferred embodiment of the invention is to appropriately disclose the main technical contents of the high-speed centrifugal ozone water generating device and system for the aforementioned purpose in the following 15-preferred implementation assets, and to use the device of the preferred embodiment to The main technical content of the creation should be properly implemented. Figures 1 to 4 reveal the creation of the creation—the preferred embodiment of the high-efficiency ozone water generation system architecture block diagram and system specific structure diagram. The high-efficiency odor 20 oxygen water of the preferred embodiment of the case The generation system, the system architecture is mainly provided by the ozone water generation mechanism to provide a high-concentration ozone water generation environment and power components by dissolving gas-phase ozone and aqueous solution to generate high-concentration ozone water, and drive the aforementioned ozone water generation mechanism to generate a high-speed centrifugal force field and supply aqueous solution materials. j solution supply unit 3, ozone Yansheng biological control supply of gas-phase ozone materials: device 5, control the output of ozone water emissions, & quo t; Sense == 6 'Sensor gas-phase ozone concentration at any time and automatically feed control adjustment, 25 and-filter device, and re-inject centrifugal M269ll5 with the discharged water according to' 212-007TWU-9 / 2 ^ 5 Lu 10 15 It is composed of 20, as shown in Fig. 2. The ozone water generating mechanism 1 mentioned in the above-mentioned solution is mainly used to provide a high-concentration ozone water in the reaction tank that provides gas phase ozone and water ^. A high-speed rotation (centrifugal type B), a rotary and a centrifugal type, has a centrifugal environment in the airtight space of the reaction tank to generate a high-speed stripe I to form a feed water that can be shredded into small droplets or Mist-like gas, two outwards, and then mixed with the gas phase odor mass transfer dissolution and tritium transported by the reverse centrifugal device, and quickly dissolve one mechanism of gas phase ozone to obtain a high-concentration liquid ozone solution The aforementioned ozone water generating mechanism, as shown in Figs. 2 to 4, has a reaction tank composed of the present embodiment as a specific embodiment, and reacts with the current reaction, and temporarily benefits the body * and shouts 11 to form For the gas-liquid phase, the preferred rolling fluid parent changing device 12 utilizes the airtight unit Λη, The wire-W assembled in the aforementioned main body housing has a water inlet 13 and an exhaust port for exhausting ozone tail gas, and a camera 15 4 is placed in the center of the centrifugal gas-liquid exchange device Η, and the tube body 151 and the water inlet 13 are connected, and the spray gate is formed by the tube body ⑸, as shown in Figures 3 and 4 :: style gas: exchange device 12 ^ arranged on the main body shell with side walls ^ / ^ diffuser air port 气Most of the nozzles 162 connected to the above-mentioned ozone generator 4 are used to transfer high concentration = oxygen: Ϊ = main body = inside to improve the centrifugal gas-liquid exchange device = oxygen exchange efficiency. As shown in the figure;-ozone water outlet 17 for receiving 2 centrifugal force to throw out the centrifugal gas-liquid exchange Pei Zhiren H liquid; In addition, the ozone water generating mechanism! ^; Water-soluble ozone in each of the water inlets, outlets, inlet 25 M269115 212-007TWU-10 / 2 ^ inlets, exhaust outlets, and other need to block water, gas push ψ is + + θ ^ The official way of entering and leaving or related detailed airtight structures, etc., and-gas pressure bypass, or through pipeline connection-gas phase odor analysis unit, to detect and analyze the introduced ozone gas at any time during the operation of this patented device Relevant facilities and supporting instruments, such as concentration parameters, are directly used because of the commonly used five-piece airtight configuration and commercial-grade equipment and components, so they are not shown. The foregoing centrifugal gas-liquid parent changing device 12 is formed in a specific embodiment of the present invention. As shown in Figs. 3 and 4, a hollow cylindrical ring-shaped rotating body 121 is formed. The rotating body 121 is preferably It is composed of a porous substrate, such as a porous metal or non-metal material. The structure supports the inner and outer wall surfaces 122, 123 and the surrounding structure 10 to provide gas phase ozone to enter the centrifugal gas-liquid exchange device 12 in reverse and the reaction The generated ozone water is discharged; between the inner and outer wall surfaces 122 and 123 of the rotating body 121, a gas-liquid mass exchange medium 124 is provided. The gas-liquid mass transfer medium 124 is a porous substrate and an inert material. One of them, such as plastic balls, stainless steel metal mesh, glass balls, ceramic fillers, metal oxide ingots, or other material structures that can be divided into 15 aqueous solutions and gases. The main body casing 11 further includes a gravity-type inclined flow baffle Π 0, and is formed in an inclined manner relative to the ozone water outlet 17 so that the ozone water centrifuged out by the centrifugal gas-liquid exchange device 12 is directed to the ozone. The water outlet 17 is discharged. 20 The air-tight units 18 and 19 described above are in the structure of a specific embodiment of the present invention, which are air-tight shaft seals. Inside the air-tight shaft seals, there is a Palin, which is relatively opposed to the centrifugal air-liquid exchange device 12, It is assembled at the lower end and has support and air-tight functions to keep the centrifugal gas-liquid exchange device 12 sealed at any time during the ozone water generation process, reducing the escape of ozone gas and reducing the holding efficiency. The power component 2 mentioned above is a drive motor configuration, which can be directly controlled by 25 ^ 269115 212-007TWU-ll / 2 ^
奉寿 Jl I 述離、Γ ’如第2圖所示，或利用皮帶等間接傳動元件連結上 交換=氣液交換裝置12，提供臭氧溶解過程中之離心式氣液 逮控制哭12離心力動力；、前述該動力構件2進—步包括一轉 出轉进二22連結’接受感測饋控單元6之轉速控制信號，輸 由對控制信號驅動動力構件2改變轉速，如此，即可藉 交換=構件的轉迷調變控制，用以相對控制前述離心式氣液 、又置12的轉速與離心力場調整。Fengshou Jl I Shuli, Γ 'as shown in Figure 2, or using an indirect transmission element such as a belt to connect to the exchange = gas-liquid exchange device 12 to provide centrifugal force for centrifugal gas-liquid control of ozone during the dissolution of ozone; The foregoing step of the power component 2 includes a turn out and a turn into two 22 links' receiving the speed control signal of the sensing feed control unit 6, and the power component 2 is driven by the control signal to change the speed, so that it can be exchanged = The turning control of the component is used to relatively control the centrifugal gas-liquid rotation speed and the centrifugal force field adjustment.
10 15 氣液、所提之水溶液供應Μ 3，透過管路連接上述離心式 液；^裝置1之進水口 13，以提供產生臭氧水之液相水溶 其^相液相讀液包括—般水質與RQ職水及超純水之 取氣々述所提之臭氧產生器4，一端連接氧氣進料口 41，以擷 之進^進仃臭氧的生成，另端連接上述離心式氣液交換裝置1 水之^ 口 160，提供離心式氣液交換裝置1溶解反應產生臭氧 上述所提之感測饋控單元6，如第5圖所示，含有一氣相 六氧濃度感測器01，如氣相臭氣分析儀，用以隨時監測氣相臭 氧的供應量；一臭氧水濃度感測器02，如液相臭氣分析儀，用 以隨時監測反應產生之液相臭氧濃度；以及一饋控單元63，根 20據前述氣相臭氧濃度感測器61與臭氧水濃度感測器62之感測 始果，經與設定值比對判斷，進而控制臭氧產生器4與水溶液 供應單元3之供應量。 根攄上述本創作前述一較佳實施例的高效能臭氧水產生系 統，在利用該系統產生高效能臭氧水產生裝置，請參閱第6圖 25之本創作之一較佳實施例的高效能臭氧水產生裝置的運作流程 212-007TWU-12/2^ M269115 圖，配合第1圖之系統架構進行說明。 啟動臭氧水產生機構1進水口 13連結之水溶液供應單元 3 ’以導入水溶液，如流程9〇〇，同時啟動臭氧水產生機構1 進氣口 160連結之氣相臭氧產生器4，以導入氣相臭氧，如流 5程902，使水溶液與氣相臭氧同時導入離心式氣液交換裝置 12，如流程904，藉由離心式氣液交換裝置12内喷灑器15多 數喷嘴152向旋轉主體121喷灑，透過旋轉主體121在動力構 件2之驅動高速旋轉產生離心力場，該離心力場不僅將水溶液 切碎成小液滴或霧狀條件，並利用離心力使其從多孔性内、外 10壁122、123及氣液質傳交換介質124向臭氧水產生機構1之 主體外殼11甩出，另該由進氣口 160導入的氣相臭氧，經臭 氧分散供應器16之多數喷嘴162均勻導入，並逆向傳送向離 心式氣液交換裝置12内，如此，即可在該主體外殼11的反應 槽中，配合離心式氣液交換裝置12之高速離心力旋轉運作， 15 進行氣液溶解反應，如流程906，該高速離心力旋轉運作，將 增加氣、液接觸的停留時間，並改變氣、液界面的微觀重力環 境，同時透過離心式氣液交換裝置12大量增加氣、液接觸之 質傳面積，可有效提升臭氧在水溶液中的溶解度，並降低質傳 臭氧至平衡液相臭氧丨展度所需之時間，；前述經離心式氣液交 換裝置12所產生之局^度臭氧水溶液，將透過排放水控制$ 之控制，由臭氧水出水口 17連結管路輸送，如流程9〇8丨至 於供應至主體外殼11反應殘餘之氣相臭氧，則會從排氣口 14 排放，如流程910，；另該經排放水控制的液體，可進一步經 本創作系統之過濾裝置7過濾後，饋送入臭氧水產生機構丨之 25離心式氣液交換裝置12再使用，如流程912。 212-007TWU-13/26 ^1269115 在上述臭氧水產生機構i暨離心式氣液交換裝置η之高 速離。力暴ί衣i兄進行臭氧水產生過程中，上述臭氧水產生機構 1令氣相臭氧的供應量暨濃度，以及產生之液向臭氧水濃度， k時由本創作系統之感測饋控單元6進行監測，如流程914， 5並根據前述其氣相臭氧濃度感測器61與臭氧水濃度感測器62 之感測結果，經與設定值比對判斷，進而由感測饋控單元6之 饋控單元63，或透過手動控制，如流程916，驅動轉速控制器 22 ’由轉速控制11 22控制臭氧產生H 4之供應量，如流程 918，或控獅力構件2轉速娜，而改變離心式氣液交換裝 10置12内之離心力場運作，以產生需求濃度之液向臭氧水。 ★再明參閱第7圖所不，係根據本創作前述一較佳實施例的 同效此臭氧水產生裝置，利用高效能臭氧水產生系統產生之臭 氧水，制以清洗半導體晶圓或TFT清洗製程之臭氧水溶氧濃 度測試實驗結果。 15 首先，由第7圖之溶氧效率試驗可發現，在不同之氣相臭 氧進料濃度下及動力構件2旋轉速度下，水溶液中的臭氧變化 • 冑形以12_Pm及氣相臭氧濃度為2〇mg/L時有最快之液相臭 氧濃度提升，且迅速達到飽和液相溶解度，然隨著氣相臭氧濃 度降低，則液相臭氧飽和濃度也隨之降低，且達到飽和濃度之 20時間相當，但動力構件2轉速維持不變，足見進料氣相臭氧濃 度並不影響液相臭氧飽和之速度；此外，亦進行本創作系統不 旋轉條件下之比較，從結果發現，以進料臭氧濃度同為 2〇mg/L之條件進行操作，發現欲達到臭氧飽和溶解度所花之 時間非常緩慢，纟40分鐘的操作下亦僅達成38%之飽和度， 25可見本創作利用高速離心力場之系統與產生裝置，對於溶解度 M269115 212-007Τ¥ϋ·14/2^ 之提升有十分顯著之影響，i 效率質傳之離心力場魏，核將^缝提供具高 5 上列詳細說明係針對本創作之一可行實施例之具體說 明’惟該實施例並非用以限制本創作之專利範圍，凡未脫 離本創作技藝精神所為之#效實施或變更，例如：等變化 之等效性實施例，均應包含於本案之專利範圍中。 綜上所述，本案不但在空間型態上確屬創新，並能較 習用物品增進上述多項功效，應已充分符合新穎性及進步 性之法定專利要件，爰依法提出申請，懇請貴局核准本 件專利申請案，以勵創作，至感德便。 10 M269115 212-007TWU.15/26 【圖式簡單說明】 第1圖係本創作之系統架構方塊圖； 第2圖係本創作臭氧水產生機構之結構組成剖視圖； 第3圖係本創作離心式氣液交換裝置之水平斷面剖視圖； 5 第4圖係本創作離心式氣液交換裝置之垂直斷面剖視圖° . 第5圖係本創作感測饋控單元之架構方塊圖； 第6圖係本創作運作流程架構圖； _ 第7圖係本創作產生之臭氧水溶氧濃度測試實驗結果。 10【主要元件符號說明】 1臭氧水產生機構，2動力構件；3水溶液供應單元； 4臭氧產生器；5排放水控制器；6感測饋控單元； 7過濾裝置；11主體外殼；12離心式氣液交換裝置； 13進水口 ； 14排氣口 ； 15喷灑器；16臭氧分散供應器； 15 17臭氧水出水口； 18、19氣密單元；21轉軸； 22轉速控制器；41氧氣進料口； 61氣相臭氧濃度感測器； • 62臭氧水濃度感測器；63饋控單元； 110重力式傾斜流動擋板；121旋轉主體；122内壁面； 123外壁面；124氣液質傳交換介質；151管體； 20 152喷嘴；160進氣口； 161氣管；162喷頭10 15 The gas-liquid and the mentioned aqueous solution are supplied to M 3, which is connected to the above-mentioned centrifugal liquid through a pipeline; ^ The water inlet 13 of the device 1 is to provide a liquid-phase aqueous solution that generates ozone water. The ozone generator 4 mentioned in the gas extraction with RQ professional water and ultrapure water, one end is connected to the oxygen feed port 41 to capture the feed gas, and the other end is connected to the above-mentioned centrifugal gas-liquid exchange device 1 Water port 160, providing a centrifugal gas-liquid exchange device 1 Dissolution reaction to generate ozone The above-mentioned sensing feed control unit 6, as shown in FIG. 5, contains a gas phase hexaoxygen concentration sensor 01, such as gas Phase odor analyzer to monitor the supply of ozone in the gas phase at any time; an ozone water concentration sensor 02, such as a liquid phase odor analyzer, to monitor the concentration of liquid ozone in the reaction at any time; and a feed control The unit 63, 20 controls the supply of the ozone generator 4 and the aqueous solution supply unit 3 according to the detection result of the gas phase ozone concentration sensor 61 and the ozone water concentration sensor 62 according to the comparison result with the set value. the amount. Based on the above-mentioned high-efficiency ozone water generation system of the above-mentioned preferred embodiment of the present invention, in using this system to generate a high-efficiency ozone water generating device, please refer to FIG. 6 and FIG. The operation flow of the water generating device is 212-007TWU-12 / 2 ^ M269115, and it will be described in conjunction with the system architecture of Figure 1. Start the aqueous solution supply unit 3 'connected to the water inlet 13 of the ozone water generating mechanism 1 to introduce an aqueous solution, such as the process 900. At the same time, start the gas phase ozone generator 4 connected to the air inlet 160 of the ozone water generating mechanism 1 to introduce the gas phase. Ozone, such as flow 902, causes the aqueous solution and the gas-phase ozone to be introduced into the centrifugal gas-liquid exchange device 12 at the same time. The centrifugal force field is generated by the high-speed rotation of the driving body 2 driven by the rotating main body 121. The centrifugal force field not only chops the aqueous solution into small droplets or mist conditions, but also uses centrifugal force to make it from the porous inner and outer 10 walls 122, 123 and gas-liquid mass transfer exchange medium 124 are thrown out to the main body shell 11 of the ozone water generating mechanism 1, and the gas phase ozone introduced from the air inlet 160 is evenly introduced through most of the nozzles 162 of the ozone dispersion supplier 16, and reversed Conveying to the centrifugal gas-liquid exchange device 12, so that, in the reaction tank of the main body casing 11, the high-speed centrifugal force of the centrifugal gas-liquid exchange device 12 can be rotated to operate. Gas-liquid dissolution reaction, such as flow 906, the high-speed centrifugal force rotation operation will increase the residence time of gas-liquid contact and change the micro-gravity environment at the gas-liquid interface. At the same time, a large amount of gas-liquid is increased through the centrifugal gas-liquid exchange device 12 The mass transfer area contacted can effectively increase the solubility of ozone in aqueous solution and reduce the time required for mass transfer of ozone to the equilibrium liquid phase ozone; the degree of localization produced by the aforementioned centrifugal gas-liquid exchange device 12 The ozone water solution will be controlled through the discharge water control $, and will be transported from the ozone water outlet 17 connected to the pipeline. For example, in the process 908, as for the gas-phase ozone remaining in the reaction to the main body shell 11, it will be discharged from the exhaust port 14. As shown in flow 910, the liquid controlled by the discharged water can be further filtered by the filtering device 7 of the creative system, and then fed into the 25 centrifugal gas-liquid exchange device 12 of the ozone water generating mechanism, and then used, as shown in flow 912. 212-007TWU-13 / 26 ^ 1269115 At high speed of the above ozone water generating mechanism i and centrifugal gas-liquid exchange device η. During the process of ozone water production by Li Fengyi, the ozone water generating mechanism 1 makes the supply and concentration of ozone in the gas phase, and the concentration of the generated liquid to the ozone water, and the sensor feed control unit 6 of the creative system at k. Perform monitoring, such as flow 914, 5 and according to the above-mentioned sensing results of the gas phase ozone concentration sensor 61 and the ozone water concentration sensor 62, compare and determine with the set value, and then the sensor feed control unit 6 The feed control unit 63, or through manual control, such as flow 916, drives the speed controller 22 'to control the supply of ozone H4 by the speed control 11 22, such as flow 918, or controls the speed of the lion force component 2 to change the centrifugation. The centrifugal force field in the type gas-liquid exchange device 10 and 12 is operated to generate the liquid with the required concentration to ozone water. ★ Refer to Fig. 7 again. It is based on the same effect of the ozone water generating device of the previous preferred embodiment of the present invention. The ozone water generated by the high-performance ozone water generating system is used to clean the semiconductor wafer or TFT. Test results of dissolved oxygen concentration test in ozone water. 15 First, from the dissolved oxygen efficiency test in Figure 7, it can be found that the ozone in the aqueous solution changes at different gas-phase ozone feed concentrations and the rotation speed of the power component 2 〇mg / L has the fastest increase in liquid phase ozone concentration, and quickly reaches the saturated liquid phase solubility, but as the gas phase ozone concentration decreases, the liquid ozone saturation concentration also decreases, and reaches 20 times the saturation concentration. Equivalent, but the rotation speed of the power component 2 remains unchanged, which shows that the feed gas ozone concentration does not affect the saturation speed of the liquid phase ozone. In addition, a comparison is made under the condition that the creative system is not rotated. From the results, it is found that the feed ozone The operation was performed at the same concentration of 20 mg / L. It was found that the time it took to reach the saturation saturation of ozone was very slow, and only 38% of the saturation was achieved in 40 minutes of operation. 25 It can be seen that this creation uses a high-speed centrifugal force field. The system and generating device have a very significant impact on the improvement of solubility M269115 212-007T ¥ ϋ · 14/2 ^. The centrifugal force field of the efficiency mass transfer is Wei, and the core will provide a high 5 The detailed description is a specific description of a feasible embodiment of this creation, but this embodiment is not intended to limit the scope of the patent for this creation. Any implementation or change that does not depart from the spirit of this creation technique, such as changes, etc. Effective embodiments should be included in the patent scope of this case. In summary, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple effects over conventional items. It should have fully met the statutory patent requirements of novelty and advancement, and submitted an application in accordance with the law. We ask your office to approve this. Patent applications, to encourage creativity, to the utmost. 10 M269115 212-007TWU.15 / 26 [Schematic description] Figure 1 is a block diagram of the system structure of this creation; Figure 2 is a sectional view of the structural composition of the ozone water generating mechanism of this creation; and Figure 3 is a centrifugal type of this creation Horizontal cross-sectional view of the gas-liquid exchange device; 5 Figure 4 is a vertical cross-sectional view of the creative centrifugal gas-liquid exchange device. Figure 5 is a block diagram of the structure of the creative sensing feed control unit; Figure 6 is The diagram of the flow chart of this creative operation; _ Figure 7 is the result of the test of the dissolved oxygen concentration of ozone water produced by this creative. 10 [Description of main component symbols] 1 ozone water generating mechanism, 2 power components; 3 aqueous solution supply unit; 4 ozone generator; 5 discharge water controller; 6 sensing feed control unit; 7 filtering device; 11 main body shell; 12 centrifugal Type gas-liquid exchange device; 13 water inlets; 14 exhaust outlets; 15 sprayers; 16 ozone dispersion supply; 15 17 ozone water outlets; 18 and 19 airtight units; 21 rotating shafts; 22 speed controller; 41 oxygen Feed inlet; 61 gas phase ozone concentration sensor; 62 ozone water concentration sensor; 63 feed control unit; 110 gravity-type inclined flow baffle; 121 rotating body; 122 inner wall surface; 123 outer wall surface; 124 gas-liquid Mass transfer exchange medium; 151 tube body; 20 152 nozzle; 160 air inlet; 161 air pipe; 162 nozzle