TWI276791B - Pressure sensor - Google Patents

Pressure sensor Download PDF

Info

Publication number
TWI276791B
TWI276791B TW094109658A TW94109658A TWI276791B TW I276791 B TWI276791 B TW I276791B TW 094109658 A TW094109658 A TW 094109658A TW 94109658 A TW94109658 A TW 94109658A TW I276791 B TWI276791 B TW I276791B
Authority
TW
Taiwan
Prior art keywords
diaphragm
displacement
sensor
pressure
pin
Prior art date
Application number
TW094109658A
Other languages
English (en)
Chinese (zh)
Other versions
TW200535406A (en
Inventor
Boguslaw F Gajdeczko
Kevin J Violette
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of TW200535406A publication Critical patent/TW200535406A/zh
Application granted granted Critical
Publication of TWI276791B publication Critical patent/TWI276791B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
TW094109658A 2004-03-30 2005-03-28 Pressure sensor TWI276791B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor

Publications (2)

Publication Number Publication Date
TW200535406A TW200535406A (en) 2005-11-01
TWI276791B true TWI276791B (en) 2007-03-21

Family

ID=34887676

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094109658A TWI276791B (en) 2004-03-30 2005-03-28 Pressure sensor

Country Status (7)

Country Link
US (2) US7272976B2 (enExample)
EP (1) EP1582852A3 (enExample)
JP (2) JP2005283588A (enExample)
KR (2) KR20060044896A (enExample)
CN (2) CN101398336A (enExample)
SG (2) SG115819A1 (enExample)
TW (1) TWI276791B (enExample)

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* Cited by examiner, † Cited by third party
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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
US7134321B2 (en) 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7437938B2 (en) * 2007-03-21 2008-10-21 Rosemount Inc. Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires
US7775118B2 (en) * 2008-04-24 2010-08-17 Custom Sensors & Technologies, Inc. Sensor element assembly and method
NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
JP5349997B2 (ja) * 2009-02-10 2013-11-20 株式会社ケネック 光学式変位計
WO2011012368A1 (en) * 2009-07-31 2011-02-03 Asml Holding N.V. Low and high pressure proximity sensors
US20110069291A1 (en) * 2009-09-11 2011-03-24 Sogard Michael R Physical sensor for autofocus system
KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법
CN102062665A (zh) * 2009-11-17 2011-05-18 刘保龙 一种镜面反射型真空度测量装置
DE112012002327T5 (de) 2011-05-31 2014-03-27 Nxstage Medical, Inc. Druckmessvorrichtung, Verfahren und Systeme
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EP2901121B1 (en) * 2012-09-28 2017-03-29 BioFluidix GmbH Capacitive pressure sensor
CN104363935B (zh) * 2012-12-14 2017-06-20 甘布罗伦迪亚股份公司 利用位置感测的用于压力匣的隔膜重新定位
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
EP3468634B1 (en) * 2016-09-01 2024-12-11 Alcon Inc. Systems for non-invasive measurement of cassette pressure
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
JP2022524445A (ja) * 2019-03-15 2022-05-02 ネクステージ メディカル インコーポレイテッド 圧力測定デバイス、方法、およびシステム
CN110082026B (zh) * 2019-03-26 2021-01-01 中山大学 气压检测设备及其制作方法、气压检测方法
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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JP2000121323A (ja) * 1998-10-14 2000-04-28 Hitachi Ltd 表面高さ検査方法及びその検査装置並びにカラーフィルタ基板、その検査方法及びその製造方法
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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
ITMI20061000A1 (it) * 2006-05-22 2007-11-23 Milano Politecnico Giunto elastico a cerniera sferica traslante e sensore di forze e momenti perfezionato con tale giunto

Also Published As

Publication number Publication date
CN1680794A (zh) 2005-10-12
CN100430707C (zh) 2008-11-05
SG146616A1 (en) 2008-10-30
JP5033780B2 (ja) 2012-09-26
CN101398336A (zh) 2009-04-01
EP1582852A2 (en) 2005-10-05
US20080087094A1 (en) 2008-04-17
JP2005283588A (ja) 2005-10-13
SG115819A1 (en) 2005-10-28
KR20060044896A (ko) 2006-05-16
TW200535406A (en) 2005-11-01
EP1582852A3 (en) 2008-02-27
US7272976B2 (en) 2007-09-25
KR20080077057A (ko) 2008-08-21
JP2009085968A (ja) 2009-04-23
US20050217384A1 (en) 2005-10-06

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