JP2005283588A - 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置 - Google Patents

圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置 Download PDF

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Publication number
JP2005283588A
JP2005283588A JP2005099342A JP2005099342A JP2005283588A JP 2005283588 A JP2005283588 A JP 2005283588A JP 2005099342 A JP2005099342 A JP 2005099342A JP 2005099342 A JP2005099342 A JP 2005099342A JP 2005283588 A JP2005283588 A JP 2005283588A
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JP
Japan
Prior art keywords
diaphragm
sensor
pressure
displacement
leg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005099342A
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English (en)
Japanese (ja)
Inventor
Boguslaw Gajdeczko
ガイデチュコ ボグスラフ
Kevin J Violette
ジェイ ヴァイオレット ケヴィン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of JP2005283588A publication Critical patent/JP2005283588A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
JP2005099342A 2004-03-30 2005-03-30 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置 Pending JP2005283588A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008314267A Division JP5033780B2 (ja) 2004-03-30 2008-12-10 圧力センサ

Publications (1)

Publication Number Publication Date
JP2005283588A true JP2005283588A (ja) 2005-10-13

Family

ID=34887676

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2005099342A Pending JP2005283588A (ja) 2004-03-30 2005-03-30 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置
JP2008314267A Expired - Fee Related JP5033780B2 (ja) 2004-03-30 2008-12-10 圧力センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008314267A Expired - Fee Related JP5033780B2 (ja) 2004-03-30 2008-12-10 圧力センサ

Country Status (7)

Country Link
US (2) US7272976B2 (enExample)
EP (1) EP1582852A3 (enExample)
JP (2) JP2005283588A (enExample)
KR (2) KR20060044896A (enExample)
CN (2) CN101398336A (enExample)
SG (2) SG115819A1 (enExample)
TW (1) TWI276791B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
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JP2010185710A (ja) * 2009-02-10 2010-08-26 Kenek Co Ltd 光学式変位計

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NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
WO2011012368A1 (en) * 2009-07-31 2011-02-03 Asml Holding N.V. Low and high pressure proximity sensors
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KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법
CN102062665A (zh) * 2009-11-17 2011-05-18 刘保龙 一种镜面反射型真空度测量装置
DE112012002327T5 (de) 2011-05-31 2014-03-27 Nxstage Medical, Inc. Druckmessvorrichtung, Verfahren und Systeme
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CN104363935B (zh) * 2012-12-14 2017-06-20 甘布罗伦迪亚股份公司 利用位置感测的用于压力匣的隔膜重新定位
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CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
EP3468634B1 (en) * 2016-09-01 2024-12-11 Alcon Inc. Systems for non-invasive measurement of cassette pressure
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
JP2022524445A (ja) * 2019-03-15 2022-05-02 ネクステージ メディカル インコーポレイテッド 圧力測定デバイス、方法、およびシステム
CN110082026B (zh) * 2019-03-26 2021-01-01 中山大学 气压检测设备及其制作方法、气压检测方法
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185710A (ja) * 2009-02-10 2010-08-26 Kenek Co Ltd 光学式変位計

Also Published As

Publication number Publication date
CN1680794A (zh) 2005-10-12
CN100430707C (zh) 2008-11-05
SG146616A1 (en) 2008-10-30
JP5033780B2 (ja) 2012-09-26
CN101398336A (zh) 2009-04-01
EP1582852A2 (en) 2005-10-05
US20080087094A1 (en) 2008-04-17
SG115819A1 (en) 2005-10-28
KR20060044896A (ko) 2006-05-16
TW200535406A (en) 2005-11-01
EP1582852A3 (en) 2008-02-27
US7272976B2 (en) 2007-09-25
KR20080077057A (ko) 2008-08-21
JP2009085968A (ja) 2009-04-23
TWI276791B (en) 2007-03-21
US20050217384A1 (en) 2005-10-06

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