KR20060044896A - 압력 센서 - Google Patents

압력 센서 Download PDF

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Publication number
KR20060044896A
KR20060044896A KR1020050025821A KR20050025821A KR20060044896A KR 20060044896 A KR20060044896 A KR 20060044896A KR 1020050025821 A KR1020050025821 A KR 1020050025821A KR 20050025821 A KR20050025821 A KR 20050025821A KR 20060044896 A KR20060044896 A KR 20060044896A
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KR
South Korea
Prior art keywords
diaphragm
sensor
pressure
displacement
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020050025821A
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English (en)
Korean (ko)
Inventor
보그슬로 가즈데츠코
케빈 제이. 비올레트
Original Assignee
에이에스엠엘 홀딩 엔.브이.
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Publication date
Application filed by 에이에스엠엘 홀딩 엔.브이. filed Critical 에이에스엠엘 홀딩 엔.브이.
Publication of KR20060044896A publication Critical patent/KR20060044896A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
KR1020050025821A 2004-03-30 2005-03-29 압력 센서 Ceased KR20060044896A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/812,098 2004-03-30
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020080063725A Division KR20080077057A (ko) 2004-03-30 2008-07-02 압력 센서

Publications (1)

Publication Number Publication Date
KR20060044896A true KR20060044896A (ko) 2006-05-16

Family

ID=34887676

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020050025821A Ceased KR20060044896A (ko) 2004-03-30 2005-03-29 압력 센서
KR1020080063725A Ceased KR20080077057A (ko) 2004-03-30 2008-07-02 압력 센서

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020080063725A Ceased KR20080077057A (ko) 2004-03-30 2008-07-02 압력 센서

Country Status (7)

Country Link
US (2) US7272976B2 (enExample)
EP (1) EP1582852A3 (enExample)
JP (2) JP2005283588A (enExample)
KR (2) KR20060044896A (enExample)
CN (2) CN101398336A (enExample)
SG (2) SG115819A1 (enExample)
TW (1) TWI276791B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법

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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
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US7437938B2 (en) * 2007-03-21 2008-10-21 Rosemount Inc. Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires
US7775118B2 (en) * 2008-04-24 2010-08-17 Custom Sensors & Technologies, Inc. Sensor element assembly and method
NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
JP5349997B2 (ja) * 2009-02-10 2013-11-20 株式会社ケネック 光学式変位計
WO2011012368A1 (en) * 2009-07-31 2011-02-03 Asml Holding N.V. Low and high pressure proximity sensors
US20110069291A1 (en) * 2009-09-11 2011-03-24 Sogard Michael R Physical sensor for autofocus system
CN102062665A (zh) * 2009-11-17 2011-05-18 刘保龙 一种镜面反射型真空度测量装置
DE112012002327T5 (de) 2011-05-31 2014-03-27 Nxstage Medical, Inc. Druckmessvorrichtung, Verfahren und Systeme
CN102824274A (zh) * 2012-08-30 2012-12-19 谭和平 自动饮水瓶
EP2901121B1 (en) * 2012-09-28 2017-03-29 BioFluidix GmbH Capacitive pressure sensor
CN104363935B (zh) * 2012-12-14 2017-06-20 甘布罗伦迪亚股份公司 利用位置感测的用于压力匣的隔膜重新定位
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
EP3468634B1 (en) * 2016-09-01 2024-12-11 Alcon Inc. Systems for non-invasive measurement of cassette pressure
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
JP2022524445A (ja) * 2019-03-15 2022-05-02 ネクステージ メディカル インコーポレイテッド 圧力測定デバイス、方法、およびシステム
CN110082026B (zh) * 2019-03-26 2021-01-01 中山大学 气压检测设备及其制作方法、气压检测方法
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법

Also Published As

Publication number Publication date
CN1680794A (zh) 2005-10-12
CN100430707C (zh) 2008-11-05
SG146616A1 (en) 2008-10-30
JP5033780B2 (ja) 2012-09-26
CN101398336A (zh) 2009-04-01
EP1582852A2 (en) 2005-10-05
US20080087094A1 (en) 2008-04-17
JP2005283588A (ja) 2005-10-13
SG115819A1 (en) 2005-10-28
TW200535406A (en) 2005-11-01
EP1582852A3 (en) 2008-02-27
US7272976B2 (en) 2007-09-25
KR20080077057A (ko) 2008-08-21
JP2009085968A (ja) 2009-04-23
TWI276791B (en) 2007-03-21
US20050217384A1 (en) 2005-10-06

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