JP2009085968A5 - - Google Patents

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Publication number
JP2009085968A5
JP2009085968A5 JP2008314267A JP2008314267A JP2009085968A5 JP 2009085968 A5 JP2009085968 A5 JP 2009085968A5 JP 2008314267 A JP2008314267 A JP 2008314267A JP 2008314267 A JP2008314267 A JP 2008314267A JP 2009085968 A5 JP2009085968 A5 JP 2009085968A5
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JP
Japan
Prior art keywords
diaphragm
pressure
displacement
pressure sensor
inner portion
Prior art date
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Granted
Application number
JP2008314267A
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English (en)
Japanese (ja)
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JP5033780B2 (ja
JP2009085968A (ja
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Publication date
Priority claimed from US10/812,098 external-priority patent/US7272976B2/en
Application filed filed Critical
Publication of JP2009085968A publication Critical patent/JP2009085968A/ja
Publication of JP2009085968A5 publication Critical patent/JP2009085968A5/ja
Application granted granted Critical
Publication of JP5033780B2 publication Critical patent/JP5033780B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2008314267A 2004-03-30 2008-12-10 圧力センサ Expired - Fee Related JP5033780B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor
US10/812098 2004-03-30

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005099342A Division JP2005283588A (ja) 2004-03-30 2005-03-30 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置

Publications (3)

Publication Number Publication Date
JP2009085968A JP2009085968A (ja) 2009-04-23
JP2009085968A5 true JP2009085968A5 (enExample) 2010-12-09
JP5033780B2 JP5033780B2 (ja) 2012-09-26

Family

ID=34887676

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2005099342A Pending JP2005283588A (ja) 2004-03-30 2005-03-30 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置
JP2008314267A Expired - Fee Related JP5033780B2 (ja) 2004-03-30 2008-12-10 圧力センサ

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2005099342A Pending JP2005283588A (ja) 2004-03-30 2005-03-30 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置

Country Status (7)

Country Link
US (2) US7272976B2 (enExample)
EP (1) EP1582852A3 (enExample)
JP (2) JP2005283588A (enExample)
KR (2) KR20060044896A (enExample)
CN (2) CN101398336A (enExample)
SG (2) SG115819A1 (enExample)
TW (1) TWI276791B (enExample)

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NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
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KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
JP2022524445A (ja) * 2019-03-15 2022-05-02 ネクステージ メディカル インコーポレイテッド 圧力測定デバイス、方法、およびシステム
CN110082026B (zh) * 2019-03-26 2021-01-01 中山大学 气压检测设备及其制作方法、气压检测方法
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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