CN101398336A - 压力传感器 - Google Patents

压力传感器 Download PDF

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Publication number
CN101398336A
CN101398336A CNA2008101609721A CN200810160972A CN101398336A CN 101398336 A CN101398336 A CN 101398336A CN A2008101609721 A CNA2008101609721 A CN A2008101609721A CN 200810160972 A CN200810160972 A CN 200810160972A CN 101398336 A CN101398336 A CN 101398336A
Authority
CN
China
Prior art keywords
pressure
barrier film
pressure transducer
sensor
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008101609721A
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English (en)
Chinese (zh)
Inventor
波古斯劳·加德兹克
凯文·J·维奥莱特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of CN101398336A publication Critical patent/CN101398336A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
CNA2008101609721A 2004-03-30 2005-03-30 压力传感器 Pending CN101398336A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/812,098 2004-03-30
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100627663A Division CN100430707C (zh) 2004-03-30 2005-03-30 压力传感器

Publications (1)

Publication Number Publication Date
CN101398336A true CN101398336A (zh) 2009-04-01

Family

ID=34887676

Family Applications (2)

Application Number Title Priority Date Filing Date
CNA2008101609721A Pending CN101398336A (zh) 2004-03-30 2005-03-30 压力传感器
CNB2005100627663A Expired - Fee Related CN100430707C (zh) 2004-03-30 2005-03-30 压力传感器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNB2005100627663A Expired - Fee Related CN100430707C (zh) 2004-03-30 2005-03-30 压力传感器

Country Status (7)

Country Link
US (2) US7272976B2 (enExample)
EP (1) EP1582852A3 (enExample)
JP (2) JP2005283588A (enExample)
KR (2) KR20060044896A (enExample)
CN (2) CN101398336A (enExample)
SG (2) SG115819A1 (enExample)
TW (1) TWI276791B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102824274A (zh) * 2012-08-30 2012-12-19 谭和平 自动饮水瓶
CN104363935A (zh) * 2012-12-14 2015-02-18 甘布罗伦迪亚肾脏产品公司 利用位置感测的用于压力匣的隔膜重新定位
WO2015169217A1 (zh) * 2014-05-06 2015-11-12 无锡华润上华半导体有限公司 压力传感器及其制作方法
CN110082026A (zh) * 2019-03-26 2019-08-02 中山大学 气压检测设备及其制作方法、气压检测方法

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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
US7134321B2 (en) 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7437938B2 (en) * 2007-03-21 2008-10-21 Rosemount Inc. Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires
US7775118B2 (en) * 2008-04-24 2010-08-17 Custom Sensors & Technologies, Inc. Sensor element assembly and method
NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
JP5349997B2 (ja) * 2009-02-10 2013-11-20 株式会社ケネック 光学式変位計
WO2011012368A1 (en) * 2009-07-31 2011-02-03 Asml Holding N.V. Low and high pressure proximity sensors
US20110069291A1 (en) * 2009-09-11 2011-03-24 Sogard Michael R Physical sensor for autofocus system
KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법
CN102062665A (zh) * 2009-11-17 2011-05-18 刘保龙 一种镜面反射型真空度测量装置
DE112012002327T5 (de) 2011-05-31 2014-03-27 Nxstage Medical, Inc. Druckmessvorrichtung, Verfahren und Systeme
EP2901121B1 (en) * 2012-09-28 2017-03-29 BioFluidix GmbH Capacitive pressure sensor
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
EP3468634B1 (en) * 2016-09-01 2024-12-11 Alcon Inc. Systems for non-invasive measurement of cassette pressure
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
JP2022524445A (ja) * 2019-03-15 2022-05-02 ネクステージ メディカル インコーポレイテッド 圧力測定デバイス、方法、およびシステム
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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JP2000121323A (ja) * 1998-10-14 2000-04-28 Hitachi Ltd 表面高さ検査方法及びその検査装置並びにカラーフィルタ基板、その検査方法及びその製造方法
US6105436A (en) * 1999-07-23 2000-08-22 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6496265B1 (en) * 2000-02-16 2002-12-17 Airak, Inc. Fiber optic sensors and methods therefor
JP2001255225A (ja) * 2000-03-10 2001-09-21 Anelva Corp 静電容量型真空センサ
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CN2475015Y (zh) * 2001-03-02 2002-01-30 段祥照 电容差压/压力传感器
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CN2537970Y (zh) * 2002-05-09 2003-02-26 奥诚喜 光纤压力传感器
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US7010958B2 (en) * 2002-12-19 2006-03-14 Asml Holding N.V. High-resolution gas gauge proximity sensor
US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
ITMI20061000A1 (it) * 2006-05-22 2007-11-23 Milano Politecnico Giunto elastico a cerniera sferica traslante e sensore di forze e momenti perfezionato con tale giunto

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102824274A (zh) * 2012-08-30 2012-12-19 谭和平 自动饮水瓶
CN104363935A (zh) * 2012-12-14 2015-02-18 甘布罗伦迪亚肾脏产品公司 利用位置感测的用于压力匣的隔膜重新定位
CN104363935B (zh) * 2012-12-14 2017-06-20 甘布罗伦迪亚股份公司 利用位置感测的用于压力匣的隔膜重新定位
US9808567B2 (en) 2012-12-14 2017-11-07 Gambro Lundia Ab Diaphragm repositioning for pressure pod using position sensing
WO2015169217A1 (zh) * 2014-05-06 2015-11-12 无锡华润上华半导体有限公司 压力传感器及其制作方法
CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
US10101225B2 (en) 2014-05-06 2018-10-16 Csmc Technologies Fab1 Co., Ltd. Pressure sensor with light detection of diaphragm protrusion
CN110082026A (zh) * 2019-03-26 2019-08-02 中山大学 气压检测设备及其制作方法、气压检测方法

Also Published As

Publication number Publication date
CN1680794A (zh) 2005-10-12
CN100430707C (zh) 2008-11-05
SG146616A1 (en) 2008-10-30
JP5033780B2 (ja) 2012-09-26
EP1582852A2 (en) 2005-10-05
US20080087094A1 (en) 2008-04-17
JP2005283588A (ja) 2005-10-13
SG115819A1 (en) 2005-10-28
KR20060044896A (ko) 2006-05-16
TW200535406A (en) 2005-11-01
EP1582852A3 (en) 2008-02-27
US7272976B2 (en) 2007-09-25
KR20080077057A (ko) 2008-08-21
JP2009085968A (ja) 2009-04-23
TWI276791B (en) 2007-03-21
US20050217384A1 (en) 2005-10-06

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SE01 Entry into force of request for substantive examination
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Open date: 20090401