TWI257118B - System and method for scheduling the movement of wafers in a wafer-processing tool - Google Patents
System and method for scheduling the movement of wafers in a wafer-processing toolInfo
- Publication number
- TWI257118B TWI257118B TW091107269A TW91107269A TWI257118B TW I257118 B TWI257118 B TW I257118B TW 091107269 A TW091107269 A TW 091107269A TW 91107269 A TW91107269 A TW 91107269A TW I257118 B TWI257118 B TW I257118B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- wafers
- processing tool
- movement
- scheduling
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 235000012431 wafers Nutrition 0.000 title abstract 4
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32265—Waiting, queue time, buffer
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32277—Agv schedule integrated into cell schedule
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32304—Minimize flow time, tact, shortest processing, machining time
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/844,582 US6535784B2 (en) | 2001-04-26 | 2001-04-26 | System and method for scheduling the movement of wafers in a wafer-processing tool |
Publications (1)
Publication Number | Publication Date |
---|---|
TWI257118B true TWI257118B (en) | 2006-06-21 |
Family
ID=25293127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW091107269A TWI257118B (en) | 2001-04-26 | 2002-04-10 | System and method for scheduling the movement of wafers in a wafer-processing tool |
Country Status (4)
Country | Link |
---|---|
US (2) | US6535784B2 (zh) |
JP (3) | JP2004526263A (zh) |
TW (1) | TWI257118B (zh) |
WO (1) | WO2002088859A2 (zh) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1255294A4 (en) * | 2000-01-17 | 2009-01-21 | Ebara Corp | SEMI-SLIDE TRANSPORT CONTROL APPARATUS AND METHOD OF TRANSPORTING SEMICONDUCTED DISCS |
JP4076762B2 (ja) * | 2001-11-29 | 2008-04-16 | 東京エレクトロン株式会社 | 半導体ウエハ処理装置 |
US20030171972A1 (en) * | 2002-01-28 | 2003-09-11 | James Heskin | Scheduling system and method |
EP1387249B1 (en) | 2002-07-31 | 2019-03-13 | Texas Instruments Incorporated | RISC processor having a stack and register architecture |
JP4233908B2 (ja) * | 2003-04-02 | 2009-03-04 | 東京エレクトロン株式会社 | 基板処理システム |
JP4272494B2 (ja) * | 2003-08-20 | 2009-06-03 | パナソニック株式会社 | 製造プロセスの開発方法 |
JP4279102B2 (ja) * | 2003-09-22 | 2009-06-17 | 大日本スクリーン製造株式会社 | 基板処理装置及び基板処理方法 |
US7269469B2 (en) * | 2004-03-09 | 2007-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool |
US7487448B2 (en) * | 2004-04-30 | 2009-02-03 | Microsoft Corporation | Document mark up methods and systems |
US7308329B2 (en) * | 2004-12-28 | 2007-12-11 | Olympus Corporation | Method and apparatus for inspecting semiconductor wafer |
JP4444154B2 (ja) * | 2005-05-02 | 2010-03-31 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4884801B2 (ja) * | 2005-10-06 | 2012-02-29 | 東京エレクトロン株式会社 | 処理システム |
US7206653B1 (en) * | 2005-11-29 | 2007-04-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer-based planning methods and systems for batch-based processing tools |
EP1965381B1 (en) * | 2007-03-02 | 2010-08-04 | Singulus Mastering B.V. | Control Method for Integrated Mastering System |
US8206197B2 (en) * | 2007-04-20 | 2012-06-26 | Ebara Corporation | Polishing apparatus and program thereof |
DE102007046848A1 (de) * | 2007-09-29 | 2009-04-02 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern der Transportsequenzen in einer Prozessanlage mittels eines vorausschauenden Modus |
JP4828503B2 (ja) * | 2007-10-16 | 2011-11-30 | 東京エレクトロン株式会社 | 基板処理装置、基板搬送方法、コンピュータプログラムおよび記憶媒体 |
JP5359285B2 (ja) * | 2009-01-07 | 2013-12-04 | 東京エレクトロン株式会社 | 処理装置及び処理装置の運転方法 |
CN101763098B (zh) * | 2009-12-24 | 2012-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种硅片优化调度的方法和装置 |
JP5168300B2 (ja) * | 2010-02-24 | 2013-03-21 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP5392190B2 (ja) * | 2010-06-01 | 2014-01-22 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
CN102800563B (zh) * | 2011-05-26 | 2014-11-05 | 中芯国际集成电路制造(上海)有限公司 | 晶片投片方法与晶片投片装置 |
US20130079913A1 (en) * | 2011-09-28 | 2013-03-28 | Globalfoundries Inc. | Methods and systems for semiconductor fabrication with local processing management |
JP6105982B2 (ja) * | 2012-09-21 | 2017-03-29 | 株式会社Screenホールディングス | スケジュール作成装置、基板処理装置、スケジュール作成プログラム、スケジュール作成方法、および基板処理方法 |
US20140236651A1 (en) * | 2013-02-15 | 2014-08-21 | The Boeing Company | Display of Process-Plan Execution |
CN105824293B (zh) * | 2015-01-06 | 2019-05-28 | 中芯国际集成电路制造(上海)有限公司 | 一种光罩派工方法及系统 |
CN111489986B (zh) * | 2019-01-28 | 2024-03-22 | 东京毅力科创株式会社 | 基片处理装置和基片处理方法 |
JP2022072570A (ja) * | 2020-10-30 | 2022-05-17 | 株式会社荏原製作所 | 基板処理装置においてカセットからの基板の取り出しタイミングを決定する方法、装置、プログラム、および基板処理装置 |
TWI846600B (zh) * | 2023-09-19 | 2024-06-21 | 英業達股份有限公司 | 具三維顯示的陪伴機器人之系統及其應用方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3212087B2 (ja) * | 1988-10-21 | 2001-09-25 | 株式会社日立製作所 | 多品種搬送方法及び装置 |
JPH06176032A (ja) * | 1992-12-03 | 1994-06-24 | Nippon Telegr & Teleph Corp <Ntt> | 生産管理システムおよび方法 |
TW276353B (zh) * | 1993-07-15 | 1996-05-21 | Hitachi Seisakusyo Kk | |
JP3419186B2 (ja) * | 1995-04-18 | 2003-06-23 | 株式会社デンソー | 半導体基板の生産制御装置 |
JPH096857A (ja) * | 1995-06-15 | 1997-01-10 | Nippondenso Co Ltd | 作業計画指令装置 |
US5801945A (en) * | 1996-06-28 | 1998-09-01 | Lam Research Corporation | Scheduling method for robotic manufacturing processes |
US5928389A (en) * | 1996-10-21 | 1999-07-27 | Applied Materials, Inc. | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
JPH10207525A (ja) * | 1997-01-21 | 1998-08-07 | Kokusai Electric Co Ltd | 処理制御装置 |
US5914879A (en) * | 1997-03-04 | 1999-06-22 | Advanced Micro Devices | System and method for calculating cluster tool performance metrics using a weighted configuration matrix |
US6243612B1 (en) * | 1998-11-09 | 2001-06-05 | Advanced Micro Devices, Inc. | Processing system having a scheduling system based on a composite ratio of process scheduling factors |
WO2000041048A1 (en) * | 1998-12-31 | 2000-07-13 | Silicon Valley Group, Inc. | Method and apparatus for synchronizing a substrate processing system |
JP2000286176A (ja) * | 1999-03-31 | 2000-10-13 | Hitachi Ltd | 半導体基板処理装置における処理状況の表示方法及び半導体基板処理装置 |
US6434443B1 (en) * | 1999-05-17 | 2002-08-13 | Taiwan Semiconductor Manufacturing Company | Method for performing dynamic re-scheduling of fabrication plant |
NL1015480C2 (nl) * | 1999-06-22 | 2002-08-22 | Hyundai Electronics Ind | Halfgeleider fabriekautomatiseringssysteem en werkwijze voor de verwerking van ten minste een halfgeleiderwafelcassette. |
US6470231B1 (en) * | 2000-04-21 | 2002-10-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for auto dispatching wafer |
US6418350B1 (en) * | 2000-06-09 | 2002-07-09 | Brooks Automation Inc. | Periodic scheduler for dual-arm robots in cluster tools with process-module residency constraints |
JP2002323918A (ja) * | 2001-04-25 | 2002-11-08 | Mitsubishi Electric Corp | 製造計画立案装置及びそれを用いた半導体装置の製造方法 |
-
2001
- 2001-04-26 US US09/844,582 patent/US6535784B2/en not_active Expired - Lifetime
-
2002
- 2002-04-10 TW TW091107269A patent/TWI257118B/zh not_active IP Right Cessation
- 2002-04-26 JP JP2002586094A patent/JP2004526263A/ja active Pending
- 2002-04-26 WO PCT/US2002/012964 patent/WO2002088859A2/en active Application Filing
-
2003
- 2003-02-11 US US10/364,959 patent/US6711454B2/en not_active Expired - Lifetime
-
2006
- 2006-08-25 JP JP2006229617A patent/JP2007005822A/ja not_active Withdrawn
-
2011
- 2011-12-28 JP JP2011287372A patent/JP5449310B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007005822A (ja) | 2007-01-11 |
US20020160621A1 (en) | 2002-10-31 |
US6711454B2 (en) | 2004-03-23 |
US6535784B2 (en) | 2003-03-18 |
JP5449310B2 (ja) | 2014-03-19 |
JP2004526263A (ja) | 2004-08-26 |
US20030120371A1 (en) | 2003-06-26 |
WO2002088859A2 (en) | 2002-11-07 |
WO2002088859A3 (en) | 2003-09-25 |
JP2012124499A (ja) | 2012-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI257118B (en) | System and method for scheduling the movement of wafers in a wafer-processing tool | |
ATE396551T1 (de) | Verfahren zur verringerung des stromverbrauchs in bluetooth- und cdma-betriebsarten | |
TW352453B (en) | Method and apparatus for priority based scheduling of wafer processing with a multiple chamber semiconductor wafer processing tool | |
WO2002095999A3 (en) | Method and apparatus for frame-based protocol processing | |
WO2004038587A8 (en) | Enterprise multi-agent software system | |
HK1079637A1 (en) | Event reminder method | |
WO2003067382A3 (en) | Service processor having a queue operations unit and an output scheduler | |
EP1496424A3 (en) | Controller for information processing apparatus | |
PT1290647E (pt) | Processo de criptografia e microcircuito para cartao inteligente | |
WO2003009164A3 (en) | Method and apparatus for calendaring reminders | |
EP1542506A4 (en) | WAFER HOLDER AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR | |
TW200502847A (en) | Control device and method for reducing number of interrupts in a processor | |
AU2003274045A1 (en) | Tool holding device and method for positioning a tool | |
AU2001259421A1 (en) | Periodic scheduler for robots in cluster tools | |
GB2352532B (en) | Semiconductor factory automation system and method for resetting process recipe by employing trace file | |
WO2005008741A3 (en) | System and method for automating integration of semiconductor work in process updates | |
TW200507087A (en) | Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces | |
WO2005124830A3 (en) | Apparatus and method for indexing of substrates and lead frames | |
AU2003243425A8 (en) | Method and system for scheduling transaction listings at a network-based transaction facility | |
MY142787A (en) | Process for removing ammonia from an ammonia-containing gas stream | |
TW200603312A (en) | Apparatus and method for indexing of substrates and lead frames | |
GB0308421D0 (en) | System,method,and program for robot control | |
TW200643756A (en) | Systems and methods for inspection control | |
SG111091A1 (en) | Handler for semiconductor singulation and method therefor | |
GB2393339B (en) | Multichip module and multichip shutdown method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |