TWI250203B - Thermal interface material - Google Patents
Thermal interface material Download PDFInfo
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- TWI250203B TWI250203B TW091137956A TW91137956A TWI250203B TW I250203 B TWI250203 B TW I250203B TW 091137956 A TW091137956 A TW 091137956A TW 91137956 A TW91137956 A TW 91137956A TW I250203 B TWI250203 B TW I250203B
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- thermal interface
- interface material
- heat
- heat sink
- thermal
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- 239000000463 material Substances 0.000 title claims abstract description 58
- 229920000642 polymer Polymers 0.000 claims abstract description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 11
- 239000011159 matrix material Substances 0.000 claims abstract 6
- 229910021392 nanocarbon Inorganic materials 0.000 claims description 20
- 239000010949 copper Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 239000012948 isocyanate Substances 0.000 claims description 3
- 229920000570 polyether Polymers 0.000 claims description 3
- 229920005862 polyol Polymers 0.000 claims description 3
- 150000003077 polyols Chemical class 0.000 claims description 3
- 150000002513 isocyanates Chemical class 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims 5
- 241000530268 Lycaena heteronea Species 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- -1 isocyanate compound Chemical class 0.000 claims 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000002088 nanocapsule Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 4
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000002077 nanosphere Substances 0.000 description 2
- QWOJMRHUQHTCJG-UHFFFAOYSA-N CC([CH2-])=O Chemical compound CC([CH2-])=O QWOJMRHUQHTCJG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- OWIKHYCFFJSOEH-UHFFFAOYSA-N Isocyanic acid Chemical compound N=C=O OWIKHYCFFJSOEH-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QAAXRTPGRLVPFH-UHFFFAOYSA-N [Bi].[Cu] Chemical compound [Bi].[Cu] QAAXRTPGRLVPFH-UHFFFAOYSA-N 0.000 description 1
- MIQWEMDDUPSLRW-UHFFFAOYSA-N [O].O=C=O Chemical compound [O].O=C=O MIQWEMDDUPSLRW-UHFFFAOYSA-N 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- XLJMAIOERFSOGZ-UHFFFAOYSA-N anhydrous cyanic acid Natural products OC#N XLJMAIOERFSOGZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Description
1250203 九、發明說明: 【發明所屬之技術領域】 之熱介 面材料 本發明係關於,齡面材料,尤指—種包含有奈米石炭球 【先前技術】 近年來,隨著半導體H件域工藝之絲發展, 成化程度越來越高,惟,H件體積卻變得越來越小,狀=之集 個非常重要之問題,且其對散熱之要求越i越高,為滿i:;忒為— 種散熱方式被大量運 需要,各 用,如利用風扇散熱、水冷辅助散熱及熱管散埶等 果。但因散熱器與半導體集成器件之接=之 性,未有一個理想之接觸介面,一妒 f田艾不+整 本上極大的影響了半導體科向散熱騎行熱傳遞之效 件Ϊ接觸介面間增加一導熱係數較高之熱介面材3 增加介面之接觸程度就顯得十分必要。 傳統熱介Φ材料系將—些導熱舰較高之獅 :形成複合材料:如石墨、氣化…夕、氧她、銀 此種材料之導紐能纽纽紅取決於聚合物賴之性質。兑 中=油脂、相紐料為賴之複合材料目級㈣為賴能與熱源表 城潤故接觸熱阻較小,而以和橡膠域體之複合㈣接觸熱^ 就比較大。賴材料的—㈣遍缺陷祕個材料熱係練小,典型 值在iw/m · Κ,這已經越來越不能適應半導體集成化程度之提高對散 =效果之需求,而增加聚合物載體中導熱顆粒之含量使顆粒與顆粒儘 ϊ相互接觸可增加整個複合材料之導熱雜,如某些特殊之介面材二 =可,4-8W/m · K,但#聚合物載體中導熱雜之含量增加到一 疋度h ’會找合物失去原本之性能,如油脂會變硬,從而浸潤效 果變差,橡膠亦會變得較硬,從而失去應有之_性,這都會使熱介 1250203 料大〜低。此外’導熱顆粒之尺寸較大,影響該熱介面材 實為ΙΪ於此,提供巧具優良之熱料效果、厚度薄之熱介面材料 【發明内容】 t明之目的在於提供-種導熱效果佳、厚度薄熱界面材料。 ,撕揭示的—種基於奈米碳球導熱之熱界面 材料係由聚合物材料及分佈於其令 …、界面 2m 、比表面積大,具較高熱傳導係數,因而所形成 之熱界面材料具較高熱導係數。 、… =先7杨概較,本發縣於奈米碳料熱的齡爾料具以 奈米面球製得的熱介面材料,因奈米碳球顆粒直 於聚合物材料中利于充分分佈均勻,可製得厚度極薄且導敎效 t :之熱介面材料;其二,因聚合物材射所填充之導熱顆粒為奈 t球’^奈米碳球本身顆粒較小,故增加聚合物材射所填充之奈 ^二求έ畺不會導至聚合物硬化等降低導熱效果之情形發生。 【貫施方式】 石—本之奈米碳球㈣層石墨_中球形成所組成之多面體 其可為中空奈米碳球與填充金屬碳球。形狀可為球形、橢球形 及膠囊結構,奈米碳球的直徑5〜50奈米,平均直徑係30奈米。 ^本發明所提供的熱界面材料係將奈米碳球分佈於聚合物材料 奈米碳球分佈聚合物之過程可先將聚合物液化,然后直接加入 之奈米碳球均勻混合,再將聚合物固化,該固化后聚合物可將 奈米碳球顆粒穩固於其中。 、,山本具施方式所產生熱界面材料之奈米碳球重量比為60%,所用之奈 米石反球其平均直徑在30〜40nm之間,結構主要為球形。其熱導係數大 、勺仏銅的兩倍,為770〜780 ψ/m.K,奈米碳球之具體熱導係數與其大 小、、結構(球中球有几層結構)及形狀相關。這上述僅為本發明實施 方式之’較好的方式係奈米碳球於該聚合物中均勻分布,且奈米碳 1250203 ^之間均相互接觸,形成—導熱通道,將熱源之熱量經此導熱通道傳 遞至散熱器散發。 人本發明熱界面材料所用之聚合物可為多元醇聚醚與異氰酸醋類化 &物反應— 而成纟中多元醇聚鱗的分子量範圍在,官能度為 =9,異氰酸S旨的分子量範圍在綱〜_,官能度為2〜6,其分子鍵節 結,可=是脂肪族,也可為㈣族,通過調節多_聚醚和異氰義 的分子量射能度之_,可以改變聚合物32之強度她性,本發明 所,之ΛΚδ物也可為其它材料,需具備如下之特性即可:(!)具彈性 I壓縮;⑵具較高之熱導係數;Ο}該聚合物之高分子鏈可接於 不米碳球上。 、 在奴2明熱界面材料之另—實施方式翻聚合物材料固持較高熱導 ^處、包彳 1之奈米碳球,該包覆可藉由氣化金屬氧化物與奈米碳球 祕心,生^金屬奈米碳球與二氧化碳氧體,經金屬包覆之奈米碳球可 t奈米姐之體積,從而增加熱導材料之接觸面積,以使該金屬奈 球具較高熱導魏,提高熱傳遞之效果,該包覆奈米碳球之材料 銅的氧化物等。此外,還可於聚合物中采用高導熱之金屬顆 米碳球,使奈米碳球之間更易于接觸,提高導熱效果,該填 ,之金屬可從以下材料中選取,如金屬銅、金屬銀等,其中銅 可選用青磷銅。所述青磷銅的組成成份為··銅(Cu) I%、錫㈤ ^〜U%、碟(Ρ) 0·03 〜〇·35%、# (pb) <〇·5%、鐵(Fe)〈〇 (Ζη)<〇·5%。 ㈣第-圖,本發明熱界面材料之制及其說明結合附圖之 置一併描述,該裝置包括一半導體芯片30,該半導體芯片30為 问在度熱源,經連結H 2〇藉由焊接球25固定於域1()上,熱 料40置,半導體芯片3〇與散熱器5〇之間。熱界面材料仙之第一表 面41及第二表面42分別與半導體芯片3〇之上表面3ι及散熱器^ =52接觸,提供半導體芯片3〇之上表面與散熱器如之下表面% 2佳接觸,將半導體芯片3〇產生之熱量有效、迅速傳遞至散熱器.50 月^然關所示僅縣發明應狀—具體實施方式,本發明之熱界 1250203 面材料之應用不受限于此。 因奈米魏具堅硬機械結構特性,且其分佈於具雜覽縮之 :::::旦於應:過程中’經一定壓力之作用,聚合物材料經該壓 L吏取八形變,使奈米碳球直接與熱源及散熱器之表面接觸, 本發賴供熱界&材料具健之雅,於 =粗糙或不仅情形,仍提供贿與散㈣ 動時起保護作用,防止器件因_振動=子, 整其它固體材料製得之熱界面材料輕,辑^ 惟 以上㈣符合發明專利要件,爱依法提出專利申請 援依本明之車父佳實施例,舉凡熟悉本案技藝之人士,在 利範=所作之等效修飾_,皆脱含㈣下之申請專 【圖式簡單說明】 主板 焊球 熱界面材料 第【二=號之=材料—輪意圖。 連結器 芯片 散熱器 20 30 50 10 25 40 9
Claims (1)
- 十、申請專利範圍: 1. 一熱界面材料,其包括: 聚合物基體; 複數奈米碳球’該複數奈米碳球分佈於該聚合物基體中。 2.如申請專㈣圍第1項所述之熱界面材料,其找聚合物基體包括多元 醇聚醚與異氰酸酯類之聚合物。 3·2=Γ範圍第2項所述之熱界面材料,其中該多元醇聚謎分子量為 4.^請專種圍第2顧述之解面材料,射衫元辦㈣官能度為 其中該異氰酸酯類化合物分 其中該異氰酸g旨類化合物官 其中該奈米碳球直徑為5〜50 5. 如申請專利範圍第2項所述之熱界面材料 子量為200〜800。 6. 如申請專利範圍第2項所述之熱界面材料 能度為2〜6。 7·如申睛專利範圍第1項所述之熱界面材料 奈米。 8.如咖卿撕娜蝴4,其_米碳球還包覆 綱所述之熱界面材料, 1Μ=^::嫩集材料七純_碳球之導 圍綱所述之财畔料,財雜界面機還填有 請專利範圍糾項所述之熱界面材料,其中該導熱金屬材料為包 13.如鋼申請專利範圍第η項所述之熱界面材料,其中該導熱金屬材料為包 以如申請專利範圍糾項所述之熱界面材料,其中該導熱金屬材料為包 10 1250203 青碌銅。 15.—散熱裝置,其包括: 一熱源; 一散熱裝置; 該熱界面材料置於熱源與散熱裝置之間; 槐、,U面材料由聚合物基體及分佈於該聚合物基體之奈米碳球 構成。 16·如申請專利範圍第15項所述之散熱裝置,其中奈米碳球直徑為㈣奈 米。 Π.如申請專鄕_15賴述之散魏置,ϋ雜界面材料還填敎 金屬材料。 ' … 18.如申凊專利範圍第17項所述之散熱裝置,其中導熱金屬材料包括銅、銀 及青填銅。 19·如申請專利範圍第15項所述之散熱裝置,其中該奈米碳球還包覆有導熱 材料。 20·如申請專利範圍第19項所述之散熱裝置,其中該導熱材料包括銦及銅之 氧化物。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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TW091137956A TWI250203B (en) | 2002-12-31 | 2002-12-31 | Thermal interface material |
US10/648,594 US6947285B2 (en) | 2002-12-31 | 2003-08-25 | Thermal interface material |
Applications Claiming Priority (1)
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US20040125565A1 (en) | 2004-07-01 |
US6947285B2 (en) | 2005-09-20 |
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