TWI226099B - Wafer processing apparatus capable of mapping wafer - Google Patents
Wafer processing apparatus capable of mapping wafer Download PDFInfo
- Publication number
- TWI226099B TWI226099B TW92134917A TW92134917A TWI226099B TW I226099 B TWI226099 B TW I226099B TW 92134917 A TW92134917 A TW 92134917A TW 92134917 A TW92134917 A TW 92134917A TW I226099 B TWI226099 B TW I226099B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- opening
- container
- door
- comparison
- Prior art date
Links
- 238000012545 processing Methods 0.000 title claims abstract description 49
- 238000013507 mapping Methods 0.000 title abstract 2
- 230000007246 mechanism Effects 0.000 claims abstract description 11
- 235000012431 wafers Nutrition 0.000 claims description 160
- 230000033001 locomotion Effects 0.000 claims description 14
- 239000000428 dust Substances 0.000 abstract description 10
- 238000011109 contamination Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000011553 magnetic fluid Substances 0.000 description 10
- 238000005192 partition Methods 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001158458A JP3953751B2 (ja) | 2001-05-28 | 2001-05-28 | ウェーハマッピング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200409275A TW200409275A (en) | 2004-06-01 |
| TWI226099B true TWI226099B (en) | 2005-01-01 |
Family
ID=19002184
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW92134917A TWI226099B (en) | 2001-05-28 | 2002-11-26 | Wafer processing apparatus capable of mapping wafer |
| TW91134333A TWI256100B (en) | 2001-05-28 | 2002-11-26 | Wafer processing apparatus capable of mapping wafer |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW91134333A TWI256100B (en) | 2001-05-28 | 2002-11-26 | Wafer processing apparatus capable of mapping wafer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3953751B2 (enExample) |
| TW (2) | TWI226099B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4669643B2 (ja) * | 2001-09-17 | 2011-04-13 | ローツェ株式会社 | ウエハマッピング装置およびそれを備えたロードポート |
| JP4027837B2 (ja) | 2003-04-28 | 2007-12-26 | Ｔｄｋ株式会社 | パージ装置およびパージ方法 |
| JP4012190B2 (ja) | 2004-10-26 | 2007-11-21 | Ｔｄｋ株式会社 | 密閉容器の蓋開閉システム及び開閉方法 |
| JP4664264B2 (ja) * | 2006-10-26 | 2011-04-06 | 東京エレクトロン株式会社 | 検出装置及び検出方法 |
| JP5093621B2 (ja) * | 2009-09-18 | 2012-12-12 | Ｔｄｋ株式会社 | ロードポート装置及び該ロードポート装置の排塵方法 |
| JP7154986B2 (ja) * | 2018-12-11 | 2022-10-18 | 平田機工株式会社 | 基板搬送装置及び基板搬送システム |
| JP7519822B2 (ja) * | 2020-06-19 | 2024-07-22 | 東京エレクトロン株式会社 | 収納モジュール、基板処理システムおよび消耗部材の搬送方法 |
| CN117594508B (zh) * | 2024-01-18 | 2024-04-09 | 沈阳元创半导体有限公司 | 一种用于晶圆装载机的旋转开门装置 |
-
2001
- 2001-05-28 JP JP2001158458A patent/JP3953751B2/ja not_active Expired - Lifetime
-
2002
- 2002-11-26 TW TW92134917A patent/TWI226099B/zh not_active IP Right Cessation
- 2002-11-26 TW TW91134333A patent/TWI256100B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP3953751B2 (ja) | 2007-08-08 |
| TWI256100B (en) | 2006-06-01 |
| TW200409275A (en) | 2004-06-01 |
| JP2002353293A (ja) | 2002-12-06 |
| TW200409266A (en) | 2004-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |