TWI256100B - Wafer processing apparatus capable of mapping wafer - Google Patents

Wafer processing apparatus capable of mapping wafer

Info

Publication number
TWI256100B
TWI256100B TW91134333A TW91134333A TWI256100B TW I256100 B TWI256100 B TW I256100B TW 91134333 A TW91134333 A TW 91134333A TW 91134333 A TW91134333 A TW 91134333A TW I256100 B TWI256100 B TW I256100B
Authority
TW
Taiwan
Prior art keywords
wafer
pod
processing apparatus
emitter
detector
Prior art date
Application number
TW91134333A
Other languages
Chinese (zh)
Other versions
TW200409266A (en
Inventor
Hiroshi Igarashi
Tsutomu Okabe
Toshihiko Miyajima
Original Assignee
Tdk Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Corp filed Critical Tdk Corp
Publication of TW200409266A publication Critical patent/TW200409266A/en
Application granted granted Critical
Publication of TWI256100B publication Critical patent/TWI256100B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.
TW91134333A 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer TWI256100B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001158458A JP3953751B2 (en) 2001-05-28 2001-05-28 Wafer mapping equipment

Publications (2)

Publication Number Publication Date
TW200409266A TW200409266A (en) 2004-06-01
TWI256100B true TWI256100B (en) 2006-06-01

Family

ID=19002184

Family Applications (2)

Application Number Title Priority Date Filing Date
TW91134333A TWI256100B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer
TW92134917A TWI226099B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW92134917A TWI226099B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer

Country Status (2)

Country Link
JP (1) JP3953751B2 (en)
TW (2) TWI256100B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4669643B2 (en) 2001-09-17 2011-04-13 ローツェ株式会社 Wafer mapping apparatus and load port having the same
JP4027837B2 (en) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 Purge apparatus and purge method
JP4012190B2 (en) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 Closed container lid opening and closing system and opening and closing method
JP4664264B2 (en) * 2006-10-26 2011-04-06 東京エレクトロン株式会社 Detection apparatus and detection method
JP5093621B2 (en) * 2009-09-18 2012-12-12 Ｔｄｋ株式会社 Load port device and dust removal method for load port device
JP7154986B2 (en) * 2018-12-11 2022-10-18 平田機工株式会社 Substrate transfer device and substrate transfer system
CN117594508B (en) * 2024-01-18 2024-04-09 沈阳元创半导体有限公司 Rotary door opening device for wafer loader

Also Published As

Publication number Publication date
JP2002353293A (en) 2002-12-06
TW200409266A (en) 2004-06-01
JP3953751B2 (en) 2007-08-08
TW200409275A (en) 2004-06-01
TWI226099B (en) 2005-01-01

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Legal Events

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