TWI220935B - Diffractive optical element and optical apparatus having diffractive optical element - Google Patents
Diffractive optical element and optical apparatus having diffractive optical element Download PDFInfo
- Publication number
- TWI220935B TWI220935B TW091103968A TW91103968A TWI220935B TW I220935 B TWI220935 B TW I220935B TW 091103968 A TW091103968 A TW 091103968A TW 91103968 A TW91103968 A TW 91103968A TW I220935 B TWI220935 B TW I220935B
- Authority
- TW
- Taiwan
- Prior art keywords
- diffractive
- optical element
- diffraction
- diffractive optical
- height
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 112
- 230000007935 neutral effect Effects 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 238000002834 transmittance Methods 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 210000002784 stomach Anatomy 0.000 claims 1
- 230000006870 function Effects 0.000 description 18
- 230000000694 effects Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000004364 calculation method Methods 0.000 description 5
- 230000004075 alteration Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 235000005206 Hibiscus Nutrition 0.000 description 1
- 235000007185 Hibiscus lunariifolius Nutrition 0.000 description 1
- 241001075721 Hibiscus trionum Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005577 local transmission Effects 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10123230A DE10123230A1 (de) | 2001-05-12 | 2001-05-12 | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI220935B true TWI220935B (en) | 2004-09-11 |
Family
ID=7684613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091103968A TWI220935B (en) | 2001-05-12 | 2002-03-04 | Diffractive optical element and optical apparatus having diffractive optical element |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US6728036B2 (enExample) |
| EP (1) | EP1256821A3 (enExample) |
| JP (1) | JP2003029013A (enExample) |
| KR (1) | KR20020087003A (enExample) |
| DE (1) | DE10123230A1 (enExample) |
| TW (1) | TWI220935B (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10123230A1 (de) * | 2001-05-12 | 2002-11-28 | Zeiss Carl | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
| DE10254499B4 (de) * | 2002-11-22 | 2005-12-22 | Ovd Kinegram Ag | Schichtanordnung mit einer einen linsenartigen Effekt erzeugenden beugungsoptisch wirksamen Struktur |
| DE10322239B4 (de) * | 2003-05-17 | 2011-06-30 | Carl Zeiss SMT GmbH, 73447 | Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element |
| US20040263978A1 (en) * | 2003-06-18 | 2004-12-30 | Chipper Robert B. | Method and apparatus for forming an image using only diffractive optics |
| US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US20080151365A1 (en) * | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| KR101213831B1 (ko) | 2004-05-17 | 2012-12-24 | 칼 짜이스 에스엠티 게엠베하 | 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈 |
| JP2006071950A (ja) * | 2004-09-01 | 2006-03-16 | Canon Inc | 光学機器 |
| US7374569B2 (en) * | 2004-09-02 | 2008-05-20 | Dynatronics, Corporation | Dynamically distributing power of a light beam for use in light therapy |
| US20060056028A1 (en) * | 2004-09-13 | 2006-03-16 | Wildnauer Kenneth R | Apodized diffraction grating with improved dynamic range |
| CN1782743A (zh) * | 2004-12-04 | 2006-06-07 | 鸿富锦精密工业（深圳）有限公司 | 镜片 |
| US20070208396A1 (en) * | 2006-03-03 | 2007-09-06 | Gary Whatcott | Systems and methods for providing a dynamic light pad |
| US20070208289A1 (en) * | 2006-03-03 | 2007-09-06 | Jay Walther | Systems and methods for providing light therapy traction |
| WO2007132787A1 (ja) * | 2006-05-15 | 2007-11-22 | Panasonic Corporation | 回折撮像レンズと回折撮像レンズ光学系及びこれを用いた撮像装置 |
| JP2008058907A (ja) * | 2006-09-04 | 2008-03-13 | Canon Inc | 回折光学素子及びこれを有する光学系 |
| DE102007042672A1 (de) | 2007-09-10 | 2009-03-26 | Carl Zeiss Smt Ag | Diffraktives optisches Element, sowie Verfahren zur Herstellung eines diffraktiven optischen Elements |
| DE102008054737A1 (de) | 2008-01-10 | 2009-07-16 | Carl Zeiss Smt Ag | Mikrolithographische Projektionsbelichtungsanlage sowie Objektiv hierfür |
| TWI414827B (zh) * | 2009-12-16 | 2013-11-11 | Entire Technology Co Ltd | 複合式聚光裝置 |
| DE102012208906A1 (de) * | 2012-05-25 | 2013-11-28 | Carl Zeiss Jena Gmbh | Abbildendes Beugungsgitter |
| JP5895880B2 (ja) * | 2013-03-18 | 2016-03-30 | ソニー株式会社 | 光学素子、投射型画像表示装置および原盤 |
| US9442291B1 (en) * | 2013-06-28 | 2016-09-13 | Google Inc. | Segmented diffractive optical elements for a head wearable display |
| US9528906B1 (en) * | 2013-12-19 | 2016-12-27 | Apple Inc. | Monitoring DOE performance using total internal reflection |
| JP6958120B2 (ja) * | 2016-08-29 | 2021-11-02 | 大日本印刷株式会社 | 回折光学素子、光照射装置 |
| CN106125168A (zh) * | 2016-08-30 | 2016-11-16 | 乐视控股（北京）有限公司 | 一种菲涅尔透镜和虚拟现实设备 |
| US10073004B2 (en) | 2016-09-19 | 2018-09-11 | Apple Inc. | DOE defect monitoring utilizing total internal reflection |
| DE102017208340A1 (de) | 2017-05-17 | 2018-11-22 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsverfahren und Projektionsobjektiv mit Einstellung der Pupillentransmission |
| WO2020006411A1 (en) * | 2018-06-29 | 2020-01-02 | Arizona Board Of Regents On Behalf Of The University Of Arizona | A multi-order diffractive fresnel lens (mod-dfl) and systems that incorporate the mod-dfl |
| WO2020227675A2 (en) * | 2019-05-09 | 2020-11-12 | Trustees Of Boston University | Diffractive axilenses and uses thereof |
| US12019252B2 (en) | 2019-11-26 | 2024-06-25 | Analog Devices, Inc. | Optical element with diffractive focusing features and diffractive anti-reflection features |
| CN112835139A (zh) * | 2021-03-04 | 2021-05-25 | 浙江水晶光电科技股份有限公司 | 一种光学元件及光学模组 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3404810A1 (de) * | 1984-02-10 | 1985-08-14 | Siemens AG, 1000 Berlin und 8000 München | Fensterfunktion fuer ein aperturfenster |
| US5004673A (en) * | 1987-04-20 | 1991-04-02 | Environmental Research Institute Of Michigan | Method of manufacturing surface relief patterns of variable cross-sectional geometry |
| US4936665A (en) * | 1987-10-25 | 1990-06-26 | Whitney Theodore R | High resolution imagery systems and methods |
| JPH0315003A (ja) * | 1989-03-16 | 1991-01-23 | Omron Corp | グレーティング・レンズおよび集光グレーティング・カプラ |
| DE4213910A1 (de) * | 1991-05-03 | 1992-11-05 | Minnesota Mining & Mfg | Holographiespiegel mit superzonen |
| DE4314574C2 (de) * | 1993-04-29 | 1997-04-10 | Leica Lithographie Systeme Jen | Verfahren zur Herstellung einer Stufenlinse vom fresnelschen Typ |
| JPH06331941A (ja) | 1993-05-19 | 1994-12-02 | Olympus Optical Co Ltd | 投影レンズ系 |
| US5561558A (en) * | 1993-10-18 | 1996-10-01 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical device |
| US5496616A (en) * | 1994-12-27 | 1996-03-05 | Xerox Corporation | Optical element for correcting non-uniform diffraction efficiency in a binary diffractive optical element |
| US5682266A (en) * | 1995-04-05 | 1997-10-28 | Eastman Kodak Company | Blur filter for eliminating aliasing in electrically sampled images |
| US5801889A (en) * | 1995-08-16 | 1998-09-01 | Eastman Kodak Company | Technique to eliminate scattered light in diffractive optical elements |
| IL115295A0 (en) * | 1995-09-14 | 1996-12-05 | Yeda Res & Dev | Multilevel diffractive optical element |
| JPH11326617A (ja) * | 1998-05-13 | 1999-11-26 | Olympus Optical Co Ltd | 回折光学素子を含む光学系及びその設計方法 |
| US6262844B1 (en) * | 1998-08-28 | 2001-07-17 | Ksm Associates, Inc. | Optical systems employing stepped diffractive surfaces |
| IT1308799B1 (it) * | 1999-07-08 | 2002-01-10 | Fiat Ricerche | Elemento ottico atto ad operare in trasmissione nello spettroinfrarosso,munito di rivestimento di polietilene ad alta densita'. |
| JP2001176789A (ja) | 1999-12-21 | 2001-06-29 | Nikon Corp | 投影露光装置および該投影露光装置を用いたデバイスの製造方法 |
| DE10123230A1 (de) * | 2001-05-12 | 2002-11-28 | Zeiss Carl | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
-
2001
- 2001-05-12 DE DE10123230A patent/DE10123230A1/de not_active Ceased
-
2002
- 2002-02-25 EP EP02004081A patent/EP1256821A3/de not_active Ceased
- 2002-03-04 TW TW091103968A patent/TWI220935B/zh not_active IP Right Cessation
- 2002-05-10 US US10/144,452 patent/US6728036B2/en not_active Expired - Fee Related
- 2002-05-10 KR KR1020020025710A patent/KR20020087003A/ko not_active Withdrawn
- 2002-05-13 JP JP2002136968A patent/JP2003029013A/ja active Pending
-
2004
- 2004-04-06 US US10/818,614 patent/US20040190142A1/en not_active Abandoned
- 2004-11-11 US US10/904,466 patent/US7149030B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7149030B2 (en) | 2006-12-12 |
| US20040190142A1 (en) | 2004-09-30 |
| EP1256821A2 (de) | 2002-11-13 |
| EP1256821A3 (de) | 2004-01-02 |
| DE10123230A1 (de) | 2002-11-28 |
| US6728036B2 (en) | 2004-04-27 |
| US20050073746A1 (en) | 2005-04-07 |
| KR20020087003A (ko) | 2002-11-21 |
| JP2003029013A (ja) | 2003-01-29 |
| US20020196547A1 (en) | 2002-12-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |