TWI220935B - Diffractive optical element and optical apparatus having diffractive optical element - Google Patents
Diffractive optical element and optical apparatus having diffractive optical element Download PDFInfo
- Publication number
- TWI220935B TWI220935B TW091103968A TW91103968A TWI220935B TW I220935 B TWI220935 B TW I220935B TW 091103968 A TW091103968 A TW 091103968A TW 91103968 A TW91103968 A TW 91103968A TW I220935 B TWI220935 B TW I220935B
- Authority
- TW
- Taiwan
- Prior art keywords
- diffractive
- optical element
- diffraction
- diffractive optical
- height
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 112
- 230000007935 neutral effect Effects 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 238000002834 transmittance Methods 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 210000002784 stomach Anatomy 0.000 claims 1
- 230000006870 function Effects 0.000 description 18
- 230000000694 effects Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000004364 calculation method Methods 0.000 description 5
- 230000004075 alteration Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 235000005206 Hibiscus Nutrition 0.000 description 1
- 235000007185 Hibiscus lunariifolius Nutrition 0.000 description 1
- 241001075721 Hibiscus trionum Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005577 local transmission Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10123230A DE10123230A1 (de) | 2001-05-12 | 2001-05-12 | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI220935B true TWI220935B (en) | 2004-09-11 |
Family
ID=7684613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091103968A TWI220935B (en) | 2001-05-12 | 2002-03-04 | Diffractive optical element and optical apparatus having diffractive optical element |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US6728036B2 (enExample) |
| EP (1) | EP1256821A3 (enExample) |
| JP (1) | JP2003029013A (enExample) |
| KR (1) | KR20020087003A (enExample) |
| DE (1) | DE10123230A1 (enExample) |
| TW (1) | TWI220935B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116500712A (zh) * | 2023-04-24 | 2023-07-28 | 清华大学 | 渐变闪耀面光栅 |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10123230A1 (de) * | 2001-05-12 | 2002-11-28 | Zeiss Carl | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
| DE10254499B4 (de) * | 2002-11-22 | 2005-12-22 | Ovd Kinegram Ag | Schichtanordnung mit einer einen linsenartigen Effekt erzeugenden beugungsoptisch wirksamen Struktur |
| DE10322239B4 (de) * | 2003-05-17 | 2011-06-30 | Carl Zeiss SMT GmbH, 73447 | Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element |
| US20040263978A1 (en) * | 2003-06-18 | 2004-12-30 | Chipper Robert B. | Method and apparatus for forming an image using only diffractive optics |
| US8208198B2 (en) * | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US20080151365A1 (en) * | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| KR101391470B1 (ko) | 2004-05-17 | 2014-05-07 | 칼 짜이스 에스엠티 게엠베하 | 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈 |
| JP2006071950A (ja) * | 2004-09-01 | 2006-03-16 | Canon Inc | 光学機器 |
| US7374569B2 (en) * | 2004-09-02 | 2008-05-20 | Dynatronics, Corporation | Dynamically distributing power of a light beam for use in light therapy |
| US20060056028A1 (en) * | 2004-09-13 | 2006-03-16 | Wildnauer Kenneth R | Apodized diffraction grating with improved dynamic range |
| CN1782743A (zh) * | 2004-12-04 | 2006-06-07 | 鸿富锦精密工业（深圳）有限公司 | 镜片 |
| US20070208396A1 (en) * | 2006-03-03 | 2007-09-06 | Gary Whatcott | Systems and methods for providing a dynamic light pad |
| US20070208289A1 (en) * | 2006-03-03 | 2007-09-06 | Jay Walther | Systems and methods for providing light therapy traction |
| CN101443689B (zh) * | 2006-05-15 | 2010-11-17 | 松下电器产业株式会社 | 衍射摄像透镜、衍射摄像透镜光学系统及使用其的摄像装置 |
| JP2008058907A (ja) * | 2006-09-04 | 2008-03-13 | Canon Inc | 回折光学素子及びこれを有する光学系 |
| DE102007042672A1 (de) | 2007-09-10 | 2009-03-26 | Carl Zeiss Smt Ag | Diffraktives optisches Element, sowie Verfahren zur Herstellung eines diffraktiven optischen Elements |
| DE102008054737A1 (de) | 2008-01-10 | 2009-07-16 | Carl Zeiss Smt Ag | Mikrolithographische Projektionsbelichtungsanlage sowie Objektiv hierfür |
| TWI414827B (zh) * | 2009-12-16 | 2013-11-11 | Entire Technology Co Ltd | 複合式聚光裝置 |
| DE102012208906A1 (de) * | 2012-05-25 | 2013-11-28 | Carl Zeiss Jena Gmbh | Abbildendes Beugungsgitter |
| JP5895880B2 (ja) * | 2013-03-18 | 2016-03-30 | ソニー株式会社 | 光学素子、投射型画像表示装置および原盤 |
| US9442291B1 (en) * | 2013-06-28 | 2016-09-13 | Google Inc. | Segmented diffractive optical elements for a head wearable display |
| US9528906B1 (en) * | 2013-12-19 | 2016-12-27 | Apple Inc. | Monitoring DOE performance using total internal reflection |
| JP6958120B2 (ja) * | 2016-08-29 | 2021-11-02 | 大日本印刷株式会社 | 回折光学素子、光照射装置 |
| CN106125168A (zh) * | 2016-08-30 | 2016-11-16 | 乐视控股（北京）有限公司 | 一种菲涅尔透镜和虚拟现实设备 |
| US10073004B2 (en) | 2016-09-19 | 2018-09-11 | Apple Inc. | DOE defect monitoring utilizing total internal reflection |
| DE102017208340A1 (de) | 2017-05-17 | 2018-11-22 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsverfahren und Projektionsobjektiv mit Einstellung der Pupillentransmission |
| US12189141B2 (en) | 2018-06-29 | 2025-01-07 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Multi-order diffractive Fresnel lens (MOD-DFL) and systems that incorporate the MOD-DFL |
| US10996383B2 (en) | 2019-05-09 | 2021-05-04 | Trustees Of Boston University | Diffractive axilenses and uses thereof |
| US12019252B2 (en) | 2019-11-26 | 2024-06-25 | Analog Devices, Inc. | Optical element with diffractive focusing features and diffractive anti-reflection features |
| CN112835139A (zh) * | 2021-03-04 | 2021-05-25 | 浙江水晶光电科技股份有限公司 | 一种光学元件及光学模组 |
| WO2026071045A1 (ja) * | 2024-09-27 | 2026-04-02 | 日東電工株式会社 | 回折光学素子およびその製造方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3404810A1 (de) * | 1984-02-10 | 1985-08-14 | Siemens AG, 1000 Berlin und 8000 München | Fensterfunktion fuer ein aperturfenster |
| US5004673A (en) * | 1987-04-20 | 1991-04-02 | Environmental Research Institute Of Michigan | Method of manufacturing surface relief patterns of variable cross-sectional geometry |
| US4936665A (en) * | 1987-10-25 | 1990-06-26 | Whitney Theodore R | High resolution imagery systems and methods |
| JPH0315003A (ja) * | 1989-03-16 | 1991-01-23 | Omron Corp | グレーティング・レンズおよび集光グレーティング・カプラ |
| DE4213910A1 (de) * | 1991-05-03 | 1992-11-05 | Minnesota Mining & Mfg | Holographiespiegel mit superzonen |
| DE4314574C2 (de) * | 1993-04-29 | 1997-04-10 | Leica Lithographie Systeme Jen | Verfahren zur Herstellung einer Stufenlinse vom fresnelschen Typ |
| JPH06331941A (ja) | 1993-05-19 | 1994-12-02 | Olympus Optical Co Ltd | 投影レンズ系 |
| US5561558A (en) * | 1993-10-18 | 1996-10-01 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical device |
| US5496616A (en) * | 1994-12-27 | 1996-03-05 | Xerox Corporation | Optical element for correcting non-uniform diffraction efficiency in a binary diffractive optical element |
| US5682266A (en) * | 1995-04-05 | 1997-10-28 | Eastman Kodak Company | Blur filter for eliminating aliasing in electrically sampled images |
| US5801889A (en) * | 1995-08-16 | 1998-09-01 | Eastman Kodak Company | Technique to eliminate scattered light in diffractive optical elements |
| IL115295A0 (en) * | 1995-09-14 | 1996-12-05 | Yeda Res & Dev | Multilevel diffractive optical element |
| JPH11326617A (ja) * | 1998-05-13 | 1999-11-26 | Olympus Optical Co Ltd | 回折光学素子を含む光学系及びその設計方法 |
| US6262844B1 (en) * | 1998-08-28 | 2001-07-17 | Ksm Associates, Inc. | Optical systems employing stepped diffractive surfaces |
| IT1308799B1 (it) * | 1999-07-08 | 2002-01-10 | Fiat Ricerche | Elemento ottico atto ad operare in trasmissione nello spettroinfrarosso,munito di rivestimento di polietilene ad alta densita'. |
| JP2001176789A (ja) | 1999-12-21 | 2001-06-29 | Nikon Corp | 投影露光装置および該投影露光装置を用いたデバイスの製造方法 |
| DE10123230A1 (de) * | 2001-05-12 | 2002-11-28 | Zeiss Carl | Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element |
-
2001
- 2001-05-12 DE DE10123230A patent/DE10123230A1/de not_active Ceased
-
2002
- 2002-02-25 EP EP02004081A patent/EP1256821A3/de not_active Ceased
- 2002-03-04 TW TW091103968A patent/TWI220935B/zh not_active IP Right Cessation
- 2002-05-10 KR KR1020020025710A patent/KR20020087003A/ko not_active Withdrawn
- 2002-05-10 US US10/144,452 patent/US6728036B2/en not_active Expired - Fee Related
- 2002-05-13 JP JP2002136968A patent/JP2003029013A/ja active Pending
-
2004
- 2004-04-06 US US10/818,614 patent/US20040190142A1/en not_active Abandoned
- 2004-11-11 US US10/904,466 patent/US7149030B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116500712A (zh) * | 2023-04-24 | 2023-07-28 | 清华大学 | 渐变闪耀面光栅 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1256821A3 (de) | 2004-01-02 |
| KR20020087003A (ko) | 2002-11-21 |
| DE10123230A1 (de) | 2002-11-28 |
| US6728036B2 (en) | 2004-04-27 |
| US7149030B2 (en) | 2006-12-12 |
| US20020196547A1 (en) | 2002-12-26 |
| US20040190142A1 (en) | 2004-09-30 |
| EP1256821A2 (de) | 2002-11-13 |
| US20050073746A1 (en) | 2005-04-07 |
| JP2003029013A (ja) | 2003-01-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3472097B2 (ja) | 回折光学素子及びそれを用いた光学系 | |
| CN1132025C (zh) | 分区透镜和分区反射镜 | |
| RU2508565C2 (ru) | Линза с увеличенной глубиной фокуса (edof) для усиления псевдоаккомодации с использованием динамики зрачка | |
| CN105278012B (zh) | 衍射透镜以及使用了该衍射透镜的光学装置 | |
| CN102197321B (zh) | 衍射光栅透镜及使用该衍射光栅透镜的摄像装置 | |
| JPH09127322A (ja) | 回折光学素子 | |
| US20140131586A1 (en) | Phase Grating For Mask Inspection System | |
| JPH07218709A (ja) | スーパーゾーンホログラフミラー | |
| TW200406822A (en) | An attenuator for attenuating wavelengths unequal to a used wavelength | |
| JP6650452B2 (ja) | ミラー、特にマイクロリソグラフィ用のコレクタミラー | |
| CN103858046A (zh) | 具有扩展的聚焦范围的透镜 | |
| US6480332B1 (en) | Diffractive optical element and optical system having the same | |
| JP2023534079A (ja) | 多焦点レンズ | |
| JPH10133149A (ja) | 回折光学素子及びそれを用いた光学系 | |
| JP4006362B2 (ja) | 回折光学素子、及びそれを有する光学系 | |
| JP5727152B2 (ja) | 誘電体層を用いたリフレクタ、および、発光装置 | |
| WO2023101013A1 (ja) | 露光システム、配向膜の形成方法、光学素子の製造方法、および、光学素子 | |
| US6937397B2 (en) | Diffractive optical element and optical system having the same | |
| WO2024248637A1 (en) | Method of increasing depth of field of imaging setup and diffractive-optical lens attachment to implementation of the method | |
| JP5676928B2 (ja) | 回折光学素子、光学系、及び、光学機器 | |
| US20060193641A1 (en) | Light modifier with spiral optical forms | |
| JP3010844B2 (ja) | Ｘ線反射鏡 | |
| KR102816982B1 (ko) | 다층 파장판으로 이루어진 콘택트 렌즈 | |
| JP2008058907A (ja) | 回折光学素子及びこれを有する光学系 | |
| Koreshev et al. | Holographic sight of the light-guide type with a synthesized pupil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |