DE10123230A1 - Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element - Google Patents

Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element

Info

Publication number
DE10123230A1
DE10123230A1 DE10123230A DE10123230A DE10123230A1 DE 10123230 A1 DE10123230 A1 DE 10123230A1 DE 10123230 A DE10123230 A DE 10123230A DE 10123230 A DE10123230 A DE 10123230A DE 10123230 A1 DE10123230 A1 DE 10123230A1
Authority
DE
Germany
Prior art keywords
optical element
diffractive optical
diffraction
diffractive
diffraction structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10123230A
Other languages
German (de)
English (en)
Inventor
Bernd Kleemann
Juergen Rostalski
Willi Ulrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Priority to DE10123230A priority Critical patent/DE10123230A1/de
Priority to EP02004081A priority patent/EP1256821A3/de
Priority to TW091103968A priority patent/TWI220935B/zh
Priority to US10/144,452 priority patent/US6728036B2/en
Priority to KR1020020025710A priority patent/KR20020087003A/ko
Priority to JP2002136968A priority patent/JP2003029013A/ja
Publication of DE10123230A1 publication Critical patent/DE10123230A1/de
Priority to US10/818,614 priority patent/US20040190142A1/en
Priority to US10/904,466 priority patent/US7149030B2/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE10123230A 2001-05-12 2001-05-12 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element Ceased DE10123230A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE10123230A DE10123230A1 (de) 2001-05-12 2001-05-12 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
EP02004081A EP1256821A3 (de) 2001-05-12 2002-02-25 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
TW091103968A TWI220935B (en) 2001-05-12 2002-03-04 Diffractive optical element and optical apparatus having diffractive optical element
US10/144,452 US6728036B2 (en) 2001-05-12 2002-05-10 Diffractive optical element and also optical arrangement comprising a diffractive optical element
KR1020020025710A KR20020087003A (ko) 2001-05-12 2002-05-10 회절 광학요소 및 회절광학요소로 구성된 광학장치
JP2002136968A JP2003029013A (ja) 2001-05-12 2002-05-13 回折性光学要素および回折性光学要素を備えた光学装置
US10/818,614 US20040190142A1 (en) 2001-05-12 2004-04-06 Diffractive optical element and also optical arrangement comprising a diffractive optical element
US10/904,466 US7149030B2 (en) 2001-05-12 2004-11-11 Diffractive optical element and also optical arrangement comprising a diffractive optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10123230A DE10123230A1 (de) 2001-05-12 2001-05-12 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element

Publications (1)

Publication Number Publication Date
DE10123230A1 true DE10123230A1 (de) 2002-11-28

Family

ID=7684613

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10123230A Ceased DE10123230A1 (de) 2001-05-12 2001-05-12 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element

Country Status (6)

Country Link
US (3) US6728036B2 (enExample)
EP (1) EP1256821A3 (enExample)
JP (1) JP2003029013A (enExample)
KR (1) KR20020087003A (enExample)
DE (1) DE10123230A1 (enExample)
TW (1) TWI220935B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012208906A1 (de) * 2012-05-25 2013-11-28 Carl Zeiss Jena Gmbh Abbildendes Beugungsgitter

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10123230A1 (de) * 2001-05-12 2002-11-28 Zeiss Carl Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
DE10254499B4 (de) * 2002-11-22 2005-12-22 Ovd Kinegram Ag Schichtanordnung mit einer einen linsenartigen Effekt erzeugenden beugungsoptisch wirksamen Struktur
DE10322239B4 (de) * 2003-05-17 2011-06-30 Carl Zeiss SMT GmbH, 73447 Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
US20040263978A1 (en) * 2003-06-18 2004-12-30 Chipper Robert B. Method and apparatus for forming an image using only diffractive optics
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151365A1 (en) * 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP2006071950A (ja) * 2004-09-01 2006-03-16 Canon Inc 光学機器
US7374569B2 (en) * 2004-09-02 2008-05-20 Dynatronics, Corporation Dynamically distributing power of a light beam for use in light therapy
US20060056028A1 (en) * 2004-09-13 2006-03-16 Wildnauer Kenneth R Apodized diffraction grating with improved dynamic range
CN1782743A (zh) * 2004-12-04 2006-06-07 鸿富锦精密工业（深圳）有限公司 镜片
US20070208396A1 (en) * 2006-03-03 2007-09-06 Gary Whatcott Systems and methods for providing a dynamic light pad
US20070208289A1 (en) * 2006-03-03 2007-09-06 Jay Walther Systems and methods for providing light therapy traction
WO2007132787A1 (ja) * 2006-05-15 2007-11-22 Panasonic Corporation 回折撮像レンズと回折撮像レンズ光学系及びこれを用いた撮像装置
JP2008058907A (ja) * 2006-09-04 2008-03-13 Canon Inc 回折光学素子及びこれを有する光学系
DE102007042672A1 (de) 2007-09-10 2009-03-26 Carl Zeiss Smt Ag Diffraktives optisches Element, sowie Verfahren zur Herstellung eines diffraktiven optischen Elements
DE102008054737A1 (de) 2008-01-10 2009-07-16 Carl Zeiss Smt Ag Mikrolithographische Projektionsbelichtungsanlage sowie Objektiv hierfür
TWI414827B (zh) * 2009-12-16 2013-11-11 Entire Technology Co Ltd 複合式聚光裝置
JP5895880B2 (ja) * 2013-03-18 2016-03-30 ソニー株式会社 光学素子、投射型画像表示装置および原盤
US9442291B1 (en) * 2013-06-28 2016-09-13 Google Inc. Segmented diffractive optical elements for a head wearable display
US9528906B1 (en) * 2013-12-19 2016-12-27 Apple Inc. Monitoring DOE performance using total internal reflection
JP6958120B2 (ja) * 2016-08-29 2021-11-02 大日本印刷株式会社 回折光学素子、光照射装置
CN106125168A (zh) * 2016-08-30 2016-11-16 乐视控股（北京）有限公司 一种菲涅尔透镜和虚拟现实设备
US10073004B2 (en) 2016-09-19 2018-09-11 Apple Inc. DOE defect monitoring utilizing total internal reflection
DE102017208340A1 (de) 2017-05-17 2018-11-22 Carl Zeiss Smt Gmbh Projektionsbelichtungsverfahren und Projektionsobjektiv mit Einstellung der Pupillentransmission
WO2020006411A1 (en) * 2018-06-29 2020-01-02 Arizona Board Of Regents On Behalf Of The University Of Arizona A multi-order diffractive fresnel lens (mod-dfl) and systems that incorporate the mod-dfl
WO2020227675A2 (en) * 2019-05-09 2020-11-12 Trustees Of Boston University Diffractive axilenses and uses thereof
US12019252B2 (en) 2019-11-26 2024-06-25 Analog Devices, Inc. Optical element with diffractive focusing features and diffractive anti-reflection features
CN112835139A (zh) * 2021-03-04 2021-05-25 浙江水晶光电科技股份有限公司 一种光学元件及光学模组

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3404810A1 (de) * 1984-02-10 1985-08-14 Siemens AG, 1000 Berlin und 8000 München Fensterfunktion fuer ein aperturfenster
EP0312341A2 (en) * 1987-10-13 1989-04-19 Theodore Robert Whitney High resolution imagery systems
US5132843A (en) * 1989-03-16 1992-07-21 Omron Corporation Grating lens and focusing grating coupler
DE4213910A1 (de) * 1991-05-03 1992-11-05 Minnesota Mining & Mfg Holographiespiegel mit superzonen
US5496616A (en) * 1994-12-27 1996-03-05 Xerox Corporation Optical element for correcting non-uniform diffraction efficiency in a binary diffractive optical element
US5801889A (en) * 1995-08-16 1998-09-01 Eastman Kodak Company Technique to eliminate scattered light in diffractive optical elements

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004673A (en) * 1987-04-20 1991-04-02 Environmental Research Institute Of Michigan Method of manufacturing surface relief patterns of variable cross-sectional geometry
DE4314574C2 (de) * 1993-04-29 1997-04-10 Leica Lithographie Systeme Jen Verfahren zur Herstellung einer Stufenlinse vom fresnelschen Typ
JPH06331941A (ja) 1993-05-19 1994-12-02 Olympus Optical Co Ltd 投影レンズ系
US5561558A (en) * 1993-10-18 1996-10-01 Matsushita Electric Industrial Co., Ltd. Diffractive optical device
US5682266A (en) * 1995-04-05 1997-10-28 Eastman Kodak Company Blur filter for eliminating aliasing in electrically sampled images
IL115295A0 (en) * 1995-09-14 1996-12-05 Yeda Res & Dev Multilevel diffractive optical element
JPH11326617A (ja) * 1998-05-13 1999-11-26 Olympus Optical Co Ltd 回折光学素子を含む光学系及びその設計方法
US6262844B1 (en) * 1998-08-28 2001-07-17 Ksm Associates, Inc. Optical systems employing stepped diffractive surfaces
IT1308799B1 (it) * 1999-07-08 2002-01-10 Fiat Ricerche Elemento ottico atto ad operare in trasmissione nello spettroinfrarosso,munito di rivestimento di polietilene ad alta densita'.
JP2001176789A (ja) 1999-12-21 2001-06-29 Nikon Corp 投影露光装置および該投影露光装置を用いたデバイスの製造方法
DE10123230A1 (de) * 2001-05-12 2002-11-28 Zeiss Carl Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3404810A1 (de) * 1984-02-10 1985-08-14 Siemens AG, 1000 Berlin und 8000 München Fensterfunktion fuer ein aperturfenster
EP0312341A2 (en) * 1987-10-13 1989-04-19 Theodore Robert Whitney High resolution imagery systems
US5132843A (en) * 1989-03-16 1992-07-21 Omron Corporation Grating lens and focusing grating coupler
DE4213910A1 (de) * 1991-05-03 1992-11-05 Minnesota Mining & Mfg Holographiespiegel mit superzonen
US5496616A (en) * 1994-12-27 1996-03-05 Xerox Corporation Optical element for correcting non-uniform diffraction efficiency in a binary diffractive optical element
US5801889A (en) * 1995-08-16 1998-09-01 Eastman Kodak Company Technique to eliminate scattered light in diffractive optical elements

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
B.H. Kleemann, R. Güther: Zonal diffraction effc- iencies and imaging of micro-Fresnel lenses", in: Journal of Modern Optics, 1998, Vol. 45, No. 7, 1405-1420 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012208906A1 (de) * 2012-05-25 2013-11-28 Carl Zeiss Jena Gmbh Abbildendes Beugungsgitter

Also Published As

Publication number Publication date
US7149030B2 (en) 2006-12-12
US20040190142A1 (en) 2004-09-30
EP1256821A2 (de) 2002-11-13
EP1256821A3 (de) 2004-01-02
US6728036B2 (en) 2004-04-27
US20050073746A1 (en) 2005-04-07
KR20020087003A (ko) 2002-11-21
TWI220935B (en) 2004-09-11
JP2003029013A (ja) 2003-01-29
US20020196547A1 (en) 2002-12-26

Similar Documents

Publication Publication Date Title
DE10123230A1 (de) Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
DE69605116T2 (de) Mehrschichtiges dünnschichtbandpassfilter
DE60035834T2 (de) Diffraktives optisches Element
EP2761359B1 (de) Linse mit einem erweiterten fokusbereich
DE19533591A1 (de) Optisches Beugungselement
EP0537643B1 (de) Ophthalmische Linse
DE19926512A1 (de) Intraokularlinse
DE10200293B4 (de) Optische Anordnung sowie Verfahren zur Herstellung einer solchen
DE10025694C2 (de) Verwendung eines Beugungsgitters
WO2020212257A1 (de) Diffraktives optisches element, verfahren zum entwerfen einer effizienzachromatisierten diffraktiven struktur und verfahren zur herstellung eines effizienzachromatisierten diffraktiven elementes
DE10025214C2 (de) Littrow-Gitter sowie Verwendungen eines Littrow-Gitters
DE4442045A1 (de) Interferenzfilter
DE3824969A1 (de) Im Infrarotbereich arbeitende beugende Optik
EP3217201A1 (de) Umkehrsystem für ein zielfernrohr
DE10322239B4 (de) Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
DE10158638A1 (de) Optische Anordnung, Littrow-Gitter zur Verwendung in einer optischen Anordnung sowie Verwendung eines Littrow-Gitters
DE10322238B4 (de) Diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
EP0773458B1 (de) Auflicht-Phasengitter
DE3129324C2 (enExample)
DE102009031688A1 (de) Optische Anordnung, Verwendung einer optischen Anordnung sowie Verfahren zum Bestimmen eines Beugungsgitters
DE10313548B4 (de) Binär geblazetes diffraktives optisches Element sowie ein solches Element enthaltendes Objektiv
DE3689438T2 (de) Phasengitter des zusammengesetzten Muster-Refraktionstyps.
DE3102301A1 (de) "interferenzspiegel mit hoher reflexion fuer mehrere spektralbaender"
DE102009029324B4 (de) Reflektives Beugungsgitter
DE102005020944A1 (de) Diffraktive Elemente mit Antireflex-Eigenschaften

Legal Events

Date Code Title Description
ON Later submitted papers
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: CARL ZEISS SMT AG, 73447 OBERKOCHEN, DE

8131 Rejection