KR20020087003A - 회절 광학요소 및 회절광학요소로 구성된 광학장치 - Google Patents

회절 광학요소 및 회절광학요소로 구성된 광학장치 Download PDF

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Publication number
KR20020087003A
KR20020087003A KR1020020025710A KR20020025710A KR20020087003A KR 20020087003 A KR20020087003 A KR 20020087003A KR 1020020025710 A KR1020020025710 A KR 1020020025710A KR 20020025710 A KR20020025710 A KR 20020025710A KR 20020087003 A KR20020087003 A KR 20020087003A
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KR
South Korea
Prior art keywords
diffractive
optical element
diffractive optical
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width
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English (en)
Korean (ko)
Inventor
번트 클레만
한스-쥐르겐 로스탈스키
윌리 울리히
Original Assignee
칼 짜이스 세미컨덕터 매뉴팩츄어링 테크놀로지즈 악티엔게젤샤프트
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Publication of KR20020087003A publication Critical patent/KR20020087003A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
KR1020020025710A 2001-05-12 2002-05-10 회절 광학요소 및 회절광학요소로 구성된 광학장치 Withdrawn KR20020087003A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10123230A DE10123230A1 (de) 2001-05-12 2001-05-12 Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
DE10123230.6 2001-05-12

Publications (1)

Publication Number Publication Date
KR20020087003A true KR20020087003A (ko) 2002-11-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020025710A Withdrawn KR20020087003A (ko) 2001-05-12 2002-05-10 회절 광학요소 및 회절광학요소로 구성된 광학장치

Country Status (6)

Country Link
US (3) US6728036B2 (enExample)
EP (1) EP1256821A3 (enExample)
JP (1) JP2003029013A (enExample)
KR (1) KR20020087003A (enExample)
DE (1) DE10123230A1 (enExample)
TW (1) TWI220935B (enExample)

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DE10123230A1 (de) * 2001-05-12 2002-11-28 Zeiss Carl Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element
DE10254499B4 (de) * 2002-11-22 2005-12-22 Ovd Kinegram Ag Schichtanordnung mit einer einen linsenartigen Effekt erzeugenden beugungsoptisch wirksamen Struktur
DE10322239B4 (de) * 2003-05-17 2011-06-30 Carl Zeiss SMT GmbH, 73447 Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
US20040263978A1 (en) * 2003-06-18 2004-12-30 Chipper Robert B. Method and apparatus for forming an image using only diffractive optics
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151365A1 (en) * 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP2006071950A (ja) * 2004-09-01 2006-03-16 Canon Inc 光学機器
US7374569B2 (en) * 2004-09-02 2008-05-20 Dynatronics, Corporation Dynamically distributing power of a light beam for use in light therapy
US20060056028A1 (en) * 2004-09-13 2006-03-16 Wildnauer Kenneth R Apodized diffraction grating with improved dynamic range
CN1782743A (zh) * 2004-12-04 2006-06-07 鸿富锦精密工业（深圳）有限公司 镜片
US20070208396A1 (en) * 2006-03-03 2007-09-06 Gary Whatcott Systems and methods for providing a dynamic light pad
US20070208289A1 (en) * 2006-03-03 2007-09-06 Jay Walther Systems and methods for providing light therapy traction
WO2007132787A1 (ja) * 2006-05-15 2007-11-22 Panasonic Corporation 回折撮像レンズと回折撮像レンズ光学系及びこれを用いた撮像装置
JP2008058907A (ja) * 2006-09-04 2008-03-13 Canon Inc 回折光学素子及びこれを有する光学系
DE102007042672A1 (de) 2007-09-10 2009-03-26 Carl Zeiss Smt Ag Diffraktives optisches Element, sowie Verfahren zur Herstellung eines diffraktiven optischen Elements
DE102008054737A1 (de) 2008-01-10 2009-07-16 Carl Zeiss Smt Ag Mikrolithographische Projektionsbelichtungsanlage sowie Objektiv hierfür
TWI414827B (zh) * 2009-12-16 2013-11-11 Entire Technology Co Ltd 複合式聚光裝置
DE102012208906A1 (de) * 2012-05-25 2013-11-28 Carl Zeiss Jena Gmbh Abbildendes Beugungsgitter
JP5895880B2 (ja) * 2013-03-18 2016-03-30 ソニー株式会社 光学素子、投射型画像表示装置および原盤
US9442291B1 (en) * 2013-06-28 2016-09-13 Google Inc. Segmented diffractive optical elements for a head wearable display
US9528906B1 (en) * 2013-12-19 2016-12-27 Apple Inc. Monitoring DOE performance using total internal reflection
JP6958120B2 (ja) * 2016-08-29 2021-11-02 大日本印刷株式会社 回折光学素子、光照射装置
CN106125168A (zh) * 2016-08-30 2016-11-16 乐视控股（北京）有限公司 一种菲涅尔透镜和虚拟现实设备
US10073004B2 (en) 2016-09-19 2018-09-11 Apple Inc. DOE defect monitoring utilizing total internal reflection
DE102017208340A1 (de) 2017-05-17 2018-11-22 Carl Zeiss Smt Gmbh Projektionsbelichtungsverfahren und Projektionsobjektiv mit Einstellung der Pupillentransmission
WO2020006411A1 (en) * 2018-06-29 2020-01-02 Arizona Board Of Regents On Behalf Of The University Of Arizona A multi-order diffractive fresnel lens (mod-dfl) and systems that incorporate the mod-dfl
WO2020227675A2 (en) * 2019-05-09 2020-11-12 Trustees Of Boston University Diffractive axilenses and uses thereof
US12019252B2 (en) 2019-11-26 2024-06-25 Analog Devices, Inc. Optical element with diffractive focusing features and diffractive anti-reflection features
CN112835139A (zh) * 2021-03-04 2021-05-25 浙江水晶光电科技股份有限公司 一种光学元件及光学模组

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US5004673A (en) * 1987-04-20 1991-04-02 Environmental Research Institute Of Michigan Method of manufacturing surface relief patterns of variable cross-sectional geometry
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US5801889A (en) * 1995-08-16 1998-09-01 Eastman Kodak Company Technique to eliminate scattered light in diffractive optical elements
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JPH11326617A (ja) * 1998-05-13 1999-11-26 Olympus Optical Co Ltd 回折光学素子を含む光学系及びその設計方法
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JP2001176789A (ja) 1999-12-21 2001-06-29 Nikon Corp 投影露光装置および該投影露光装置を用いたデバイスの製造方法
DE10123230A1 (de) * 2001-05-12 2002-11-28 Zeiss Carl Diffraktives optisches Element sowie optische Anordnung mit einem diffraktiven optischen Element

Also Published As

Publication number Publication date
US7149030B2 (en) 2006-12-12
US20040190142A1 (en) 2004-09-30
EP1256821A2 (de) 2002-11-13
EP1256821A3 (de) 2004-01-02
DE10123230A1 (de) 2002-11-28
US6728036B2 (en) 2004-04-27
US20050073746A1 (en) 2005-04-07
TWI220935B (en) 2004-09-11
JP2003029013A (ja) 2003-01-29
US20020196547A1 (en) 2002-12-26

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PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20020510

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid