TW579371B - Soldering process for optical materials to metal mountings, and mounted assemblies - Google Patents

Soldering process for optical materials to metal mountings, and mounted assemblies Download PDF

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Publication number
TW579371B
TW579371B TW087112858A TW87112858A TW579371B TW 579371 B TW579371 B TW 579371B TW 087112858 A TW087112858 A TW 087112858A TW 87112858 A TW87112858 A TW 87112858A TW 579371 B TW579371 B TW 579371B
Authority
TW
Taiwan
Prior art keywords
layer
metal
scope
patent application
transparent material
Prior art date
Application number
TW087112858A
Other languages
English (en)
Chinese (zh)
Inventor
Hubert Holderer
Johannes Deyhle
Ulrich Dietenmeier
Original Assignee
Zeiss Stiftung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Stiftung filed Critical Zeiss Stiftung
Application granted granted Critical
Publication of TW579371B publication Critical patent/TW579371B/zh

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/04Joining glass to metal by means of an interlayer
    • C03C27/042Joining glass to metal by means of an interlayer consisting of a combination of materials selected from glass, glass-ceramic or ceramic material with metals, metal oxides or metal salts
    • C03C27/046Joining glass to metal by means of an interlayer consisting of a combination of materials selected from glass, glass-ceramic or ceramic material with metals, metal oxides or metal salts of metals, metal oxides or metal salts only
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
TW087112858A 1997-08-18 1998-08-05 Soldering process for optical materials to metal mountings, and mounted assemblies TW579371B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19735760A DE19735760A1 (de) 1997-08-18 1997-08-18 Lötverfahren für optische Materialien an Metallfassungen und gefaßte Baugruppen

Publications (1)

Publication Number Publication Date
TW579371B true TW579371B (en) 2004-03-11

Family

ID=7839306

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087112858A TW579371B (en) 1997-08-18 1998-08-05 Soldering process for optical materials to metal mountings, and mounted assemblies

Country Status (6)

Country Link
US (1) US6392824B1 (enExample)
EP (1) EP0901992B1 (enExample)
JP (1) JPH11228192A (enExample)
KR (1) KR100509181B1 (enExample)
DE (2) DE19735760A1 (enExample)
TW (1) TW579371B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10146863A1 (de) * 2001-09-22 2003-04-10 Zeiss Carl Fassung für ein optisches Element in einer optischen Abbildungseinrichtung
ATE464585T1 (de) 2002-02-09 2010-04-15 Zeiss Carl Smt Ag Facettenspiegel mit mehreren spiegelfacetten
DE10317616A1 (de) * 2003-04-11 2004-10-21 Carl Zeiss Jena Gmbh Verfahren und Vorrichtung zur Justage und Fixierung optischer Bauelemente
DE10339362A1 (de) 2003-08-27 2005-03-24 Carl Zeiss Smt Ag Vorrichtung zur Verhinderung des Kriechens eines optischen Elementes
US20050082348A1 (en) * 2003-10-17 2005-04-21 Maier Robert L. Method for bonding glass or metal fluoride optical materials to metal
US7545481B2 (en) * 2003-11-24 2009-06-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4747263B2 (ja) * 2003-11-24 2011-08-17 カール・ツァイス・エスエムティー・ゲーエムベーハー オブジェクティブにおける光学素子のための保持装置
US7265917B2 (en) * 2003-12-23 2007-09-04 Carl Zeiss Smt Ag Replacement apparatus for an optical element
WO2005103788A1 (de) * 2004-04-26 2005-11-03 Carl Zeiss Smt Ag Verfahren zum verbinden eines optischen elements mit einer haltestruktur
EP1796139A4 (en) * 2004-08-10 2009-08-26 Nikon Corp OPTICAL LIGHTING DEVICES, EXPOSURE SYSTEM AND METHOD
DE102005013187A1 (de) 2005-03-22 2006-09-28 Carl Zeiss Smt Ag Verfahren zum Verbinden zweier Bauteile, sowie Baugruppe
DE102005019716A1 (de) * 2005-04-28 2006-11-02 Carl Zeiss Smt Ag Optisches System mit einem optischen Element
DE102007005780A1 (de) * 2006-08-10 2008-02-14 Carl Zeiss Smt Ag Verbundstruktur für die Mikrolithographie und optische Anordnung
DE102006038992A1 (de) * 2006-08-21 2008-03-13 Carl Zeiss Smt Ag Anordnung aus zwei miteinander verbundenen Körpern
DE102006050653A1 (de) 2006-10-24 2008-04-30 Carl Zeiss Smt Ag Verfahren und Vorrichtung zum stoffschlüssigen Verbinden eines optischen Elementes mit einer Fassung
DE102007004185A1 (de) 2007-01-27 2008-07-31 Carl Zeiss Smt Ag Verfahren zur Herstellung einer Lötverbindung und optische Baugruppe
DE102007027679B4 (de) * 2007-06-15 2009-04-09 Coherent Gmbh Befestigungsvorrichtung für ein optisches Element
DE102007029031A1 (de) * 2007-06-23 2008-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum dauerhaften Verbinden zweier Komponenten durch Löten mit Glas- oder Metalllot
CN104328378B (zh) * 2014-11-04 2017-02-15 中国科学院光电技术研究所 一种逆向热蒸发银反射膜加介质保护膜层的制备方法
DE102015221674B4 (de) 2015-11-04 2018-06-21 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage mit gelöteter Dichtung
CN109683218B (zh) * 2018-01-25 2022-02-15 苏州旭创科技有限公司 光学元件、光学组件、光模块及其制造方法
US20240360023A1 (en) * 2023-04-28 2024-10-31 Kla Corporation Method and system for bonding high fluence optics to optomechanical assemblies

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1533542B1 (de) * 1967-02-15 1970-12-17 Inst Materialovedenija Loetverbindung von optischem Quarzglas mit Metallen und Verfahren zu deren Herstellung
US3632008A (en) * 1969-10-15 1972-01-04 Tektronix Inc Indium alloy seal and cathode-ray tube envelope employing such seal
FR2431900A1 (fr) * 1978-07-25 1980-02-22 Thomson Csf Systeme de soudure d'un laser a semiconducteur sur un socle metallique
US4210389A (en) * 1978-11-14 1980-07-01 Mcdonnell Douglas Corporation Bond and method of making the same
JPS58120578A (ja) * 1982-01-05 1983-07-18 松下電器産業株式会社 無機質基材の選択性鑞付け方法
DE3227898C2 (de) * 1982-07-26 1986-11-20 Siemens AG, 1000 Berlin und 8000 München Schichtsystem für optoelektronische Anzeigen
US4600682A (en) * 1984-07-06 1986-07-15 Storage Technology Corporation Optical storage structure
US4726507A (en) * 1984-08-29 1988-02-23 The United States Of America As Represented By The Secretary Of The Air Force Cryogenic glass-to-metal seal
US4649085A (en) * 1984-08-29 1987-03-10 The United States Of America As Represented By The Secretary Of The Air Force Cryogenic glass-to-metal seal
US4615951A (en) * 1984-12-18 1986-10-07 North American Philips Corporation Metallized rare earth garnet and metal seals to same
US4743302A (en) * 1986-06-06 1988-05-10 Vlsi Packaging Materials, Inc. Low melting glass composition
KR900003849B1 (ko) * 1986-07-11 1990-06-02 가부시기가이샤 히다찌세이사꾸쇼 배선 기판과 이를 사용한 서말 프린팅 헤드
GB8719498D0 (en) * 1987-08-18 1987-11-18 Ferranti Plc Seals
JPH0628227B2 (ja) * 1987-10-06 1994-04-13 株式会社日立製作所 半導体露光装置
US5038996A (en) * 1988-10-12 1991-08-13 International Business Machines Corporation Bonding of metallic surfaces
JP2528718B2 (ja) * 1989-11-30 1996-08-28 いすゞ自動車株式会社 セラミックスと金属の接合方法
IL106790A (en) * 1992-09-01 1996-08-04 Rosemount Inc A capacitive pressure sensation consisting of the bracket and the process of creating it
US5753972A (en) * 1993-10-08 1998-05-19 Stratedge Corporation Microelectronics package
US5518964A (en) * 1994-07-07 1996-05-21 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US5771562A (en) * 1995-05-02 1998-06-30 Motorola, Inc. Passivation of organic devices
DE19606101A1 (de) * 1996-02-19 1997-08-21 Siemens Ag Halbleiterkörper mit Lotmaterialschicht
US5858814A (en) * 1996-07-17 1999-01-12 Lucent Technologies Inc. Hybrid chip and method therefor
US5953623A (en) * 1997-04-10 1999-09-14 International Business Machines Corporation Ball limiting metal mask and tin enrichment of high melting point solder for low temperature interconnection
US5937320A (en) * 1998-04-08 1999-08-10 International Business Machines Corporation Barrier layers for electroplated SnPb eutectic solder joints

Also Published As

Publication number Publication date
KR19990023175A (ko) 1999-03-25
JPH11228192A (ja) 1999-08-24
EP0901992A2 (de) 1999-03-17
DE19735760A1 (de) 1999-02-25
EP0901992A3 (de) 2000-01-05
US6392824B1 (en) 2002-05-21
DE59808135D1 (de) 2003-06-05
EP0901992B1 (de) 2003-05-02
KR100509181B1 (ko) 2005-12-08

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MM4A Annulment or lapse of patent due to non-payment of fees