TW561223B - Pump and its producing method - Google Patents
Pump and its producing method Download PDFInfo
- Publication number
- TW561223B TW561223B TW091107782A TW91107782A TW561223B TW 561223 B TW561223 B TW 561223B TW 091107782 A TW091107782 A TW 091107782A TW 91107782 A TW91107782 A TW 91107782A TW 561223 B TW561223 B TW 561223B
- Authority
- TW
- Taiwan
- Prior art keywords
- check valve
- patent application
- item
- scope
- membrane
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 14
- 239000012528 membrane Substances 0.000 claims abstract description 151
- 239000010409 thin film Substances 0.000 claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 239000010408 film Substances 0.000 claims description 100
- 125000006850 spacer group Chemical group 0.000 claims description 86
- 238000003466 welding Methods 0.000 claims description 33
- 239000012530 fluid Substances 0.000 claims description 25
- 230000002079 cooperative effect Effects 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 241001070941 Castanea Species 0.000 claims description 3
- 235000014036 Castanea Nutrition 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 2
- 230000004936 stimulating effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 230000003442 weekly effect Effects 0.000 claims 1
- 238000012545 processing Methods 0.000 description 10
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000004417 polycarbonate Substances 0.000 description 8
- 230000037303 wrinkles Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- QQONPFPTGQHPMA-UHFFFAOYSA-N Propene Chemical group CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001125904 | 2001-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW561223B true TW561223B (en) | 2003-11-11 |
Family
ID=18975035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091107782A TW561223B (en) | 2001-04-24 | 2002-04-16 | Pump and its producing method |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20030002995A1 (ko) |
| EP (1) | EP1253320B1 (ko) |
| KR (1) | KR100494262B1 (ko) |
| CN (1) | CN1212476C (ko) |
| DE (1) | DE60209054T2 (ko) |
| HK (1) | HK1051061B (ko) |
| TW (1) | TW561223B (ko) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI398577B (zh) * | 2007-08-31 | 2013-06-11 | Microjet Technology Co Ltd | 大流體輸送裝置 |
| TWI602996B (zh) * | 2016-01-29 | 2017-10-21 | 研能科技股份有限公司 | 壓電致動器 |
| US9976673B2 (en) | 2016-01-29 | 2018-05-22 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10371136B2 (en) | 2016-01-29 | 2019-08-06 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10378529B2 (en) | 2016-01-29 | 2019-08-13 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10385838B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10388850B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10615329B2 (en) | 2016-01-29 | 2020-04-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10242110A1 (de) * | 2002-09-11 | 2004-03-25 | Thinxxs Gmbh | Mikropumpe und Verfahren zu ihrer Herstellung |
| US6986649B2 (en) * | 2003-04-09 | 2006-01-17 | Motorola, Inc. | Micropump with integrated pressure sensor |
| DE102004002078A1 (de) * | 2004-01-15 | 2005-08-18 | Knf Flodos Ag | Ventil |
| WO2005075093A1 (en) * | 2004-02-09 | 2005-08-18 | Matsushita Electric Works, Ltd. | Electrostatic spraying device |
| US7790325B2 (en) * | 2004-03-31 | 2010-09-07 | Canon Kabushiki Kaisha | Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve |
| US7219848B2 (en) * | 2004-11-03 | 2007-05-22 | Meadwestvaco Corporation | Fluid sprayer employing piezoelectric pump |
| CN100406731C (zh) * | 2005-03-10 | 2008-07-30 | 张坤林 | 可防卡死的真空泵 |
| US20080106071A1 (en) * | 2006-11-03 | 2008-05-08 | Chien-Tien Huang | Air venting assembly of air pump |
| WO2008101196A1 (en) * | 2007-02-15 | 2008-08-21 | Osmetech Molecular Diagnostics | Fluidics devices |
| CN101255858B (zh) * | 2007-03-01 | 2010-05-26 | 讯凯国际股份有限公司 | 薄膜泵及具有薄膜泵的装置 |
| WO2009102989A1 (en) * | 2008-02-13 | 2009-08-20 | Solix Biofuels, Inc. | Low shear pumps for use with bioreactors |
| CN101608610A (zh) * | 2008-06-20 | 2009-12-23 | 微创医疗器械(上海)有限公司 | 一种微型泵 |
| JP5853587B2 (ja) * | 2011-10-26 | 2016-02-09 | オムロンヘルスケア株式会社 | 電子血圧計 |
| DE102012202103A1 (de) | 2012-02-13 | 2013-08-14 | Robert Bosch Gmbh | Druckausgleichselement mit einer Membran, Gehäuse, Batteriezellenmodul sowie Kraftfahrzeug |
| TWI475180B (zh) * | 2012-05-31 | 2015-03-01 | Ind Tech Res Inst | 合成噴流裝置 |
| KR20140147345A (ko) * | 2013-06-19 | 2014-12-30 | 삼성전기주식회사 | 마이크로 펌프 장치 |
| US20150057594A1 (en) * | 2013-08-24 | 2015-02-26 | Alcon Research, Ltd. | Bubble-free microfluidic valve systems and methods |
| JP2015117647A (ja) * | 2013-12-19 | 2015-06-25 | 東芝テック株式会社 | 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置 |
| JP6695154B2 (ja) * | 2016-01-28 | 2020-05-20 | 東芝テック株式会社 | インク循環装置及びプリンタ |
| KR101910932B1 (ko) * | 2016-08-31 | 2018-10-23 | 이오플로우(주) | 전기 삼투 펌프 |
| CN108071580A (zh) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | 微型气压动力装置 |
| CN108071577B (zh) * | 2016-11-10 | 2020-11-24 | 研能科技股份有限公司 | 微型流体控制装置 |
| CN108071578A (zh) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | 微型气压动力装置 |
| DE102018207858B4 (de) * | 2018-05-18 | 2021-06-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor |
| CN208950819U (zh) * | 2018-09-30 | 2019-06-07 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| WO2020062289A1 (zh) * | 2018-09-30 | 2020-04-02 | 深圳市大疆软件科技有限公司 | 隔膜泵及具有其的农业植保机 |
| CN113944614B (zh) * | 2018-09-30 | 2023-06-20 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| WO2020062245A1 (zh) * | 2018-09-30 | 2020-04-02 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| CN208950820U (zh) * | 2018-09-30 | 2019-06-07 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| CN216984886U (zh) * | 2021-11-25 | 2022-07-19 | 华为技术有限公司 | 一种微型压电泵及电子设备 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3107630A (en) * | 1955-01-31 | 1963-10-22 | Textron Inc | Non-magnetic electro-hydraulic pump |
| US4519751A (en) * | 1982-12-16 | 1985-05-28 | The Abet Group | Piezoelectric pump with internal load sensor |
| US4581624A (en) * | 1984-03-01 | 1986-04-08 | Allied Corporation | Microminiature semiconductor valve |
| JPH01174278A (ja) * | 1987-12-28 | 1989-07-10 | Misuzu Erii:Kk | インバータ |
| CH679555A5 (ko) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
| JPH03134274A (ja) * | 1989-10-17 | 1991-06-07 | Seiko Epson Corp | マイクロポンプの弁ユニット構造 |
| KR910008284A (ko) * | 1989-10-17 | 1991-05-31 | 야마무라 가쯔미 | 마이크로 펌프 |
| SE508435C2 (sv) * | 1993-02-23 | 1998-10-05 | Erik Stemme | Förträngningspump av membranpumptyp |
| CH689836A5 (fr) * | 1994-01-14 | 1999-12-15 | Westonbridge Int Ltd | Micropompe. |
| US5507318A (en) * | 1994-10-04 | 1996-04-16 | Walbro Corporation | Umbrella check valves |
| US5542821A (en) * | 1995-06-28 | 1996-08-06 | Basf Corporation | Plate-type diaphragm pump and method of use |
| EP0789146B1 (en) * | 1995-07-27 | 2002-04-10 | Seiko Epson Corporation | Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump |
| US5725017A (en) * | 1997-01-27 | 1998-03-10 | Medtronic, Inc. | In-line pressure check valve for drug-delivery systems |
| JPH10213077A (ja) * | 1997-01-30 | 1998-08-11 | Kasei Optonix Co Ltd | ポンプ用リード弁 |
| DE19711270C2 (de) * | 1997-03-18 | 2001-07-26 | Schwerionenforsch Gmbh | Mikropumpe für fluide Medien |
| DE19719861A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines Mikromembranpumpenkörpers |
| DE19720482C5 (de) * | 1997-05-16 | 2006-01-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Mikromembranpumpe |
| US6575715B1 (en) * | 1997-09-19 | 2003-06-10 | Omnitek Research & Development, Inc. | Structural elements forming a pump |
| US6164933A (en) * | 1998-04-27 | 2000-12-26 | Matsushita Electric Works, Ltd. | Method of measuring a pressure of a pressurized fluid fed through a diaphragm pump and accumulated in a vessel, and miniature pump system effecting the measurement |
| US6334761B1 (en) * | 2000-03-02 | 2002-01-01 | California Institute Of Technology | Check-valved silicon diaphragm pump and method of fabricating the same |
| US6554591B1 (en) * | 2001-11-26 | 2003-04-29 | Motorola, Inc. | Micropump including ball check valve utilizing ceramic technology and method of fabrication |
-
2002
- 2002-04-16 TW TW091107782A patent/TW561223B/zh not_active IP Right Cessation
- 2002-04-23 EP EP02008979A patent/EP1253320B1/en not_active Expired - Lifetime
- 2002-04-23 DE DE60209054T patent/DE60209054T2/de not_active Expired - Lifetime
- 2002-04-23 US US10/127,535 patent/US20030002995A1/en not_active Abandoned
- 2002-04-24 CN CNB021184593A patent/CN1212476C/zh not_active Expired - Fee Related
- 2002-04-24 KR KR10-2002-0022511A patent/KR100494262B1/ko not_active IP Right Cessation
-
2003
- 2003-03-14 HK HK03101906.8A patent/HK1051061B/zh not_active IP Right Cessation
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI398577B (zh) * | 2007-08-31 | 2013-06-11 | Microjet Technology Co Ltd | 大流體輸送裝置 |
| TWI602996B (zh) * | 2016-01-29 | 2017-10-21 | 研能科技股份有限公司 | 壓電致動器 |
| US9976673B2 (en) | 2016-01-29 | 2018-05-22 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10371136B2 (en) | 2016-01-29 | 2019-08-06 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10378529B2 (en) | 2016-01-29 | 2019-08-13 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10385838B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10388850B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10615329B2 (en) | 2016-01-29 | 2020-04-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1253320B1 (en) | 2006-02-08 |
| US20030002995A1 (en) | 2003-01-02 |
| CN1382909A (zh) | 2002-12-04 |
| EP1253320A2 (en) | 2002-10-30 |
| KR100494262B1 (ko) | 2005-06-13 |
| DE60209054D1 (de) | 2006-04-20 |
| KR20020082800A (ko) | 2002-10-31 |
| DE60209054T2 (de) | 2006-08-31 |
| CN1212476C (zh) | 2005-07-27 |
| EP1253320A3 (en) | 2004-02-04 |
| HK1051061A1 (en) | 2003-07-18 |
| HK1051061B (zh) | 2006-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |