DE60209054D1 - Pumpe und ihr Herstellungsverfahren - Google Patents

Pumpe und ihr Herstellungsverfahren

Info

Publication number
DE60209054D1
DE60209054D1 DE60209054T DE60209054T DE60209054D1 DE 60209054 D1 DE60209054 D1 DE 60209054D1 DE 60209054 T DE60209054 T DE 60209054T DE 60209054 T DE60209054 T DE 60209054T DE 60209054 D1 DE60209054 D1 DE 60209054D1
Authority
DE
Germany
Prior art keywords
pump
manufacturing process
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60209054T
Other languages
English (en)
Other versions
DE60209054T2 (de
Inventor
Yoji Urano
Tatsuji Kawaguchi
Harunori Kitahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of DE60209054D1 publication Critical patent/DE60209054D1/de
Application granted granted Critical
Publication of DE60209054T2 publication Critical patent/DE60209054T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE60209054T 2001-04-24 2002-04-23 Pumpe und ihr Herstellungsverfahren Expired - Lifetime DE60209054T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001125904 2001-04-24
JP2001125904 2001-04-24

Publications (2)

Publication Number Publication Date
DE60209054D1 true DE60209054D1 (de) 2006-04-20
DE60209054T2 DE60209054T2 (de) 2006-08-31

Family

ID=18975035

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60209054T Expired - Lifetime DE60209054T2 (de) 2001-04-24 2002-04-23 Pumpe und ihr Herstellungsverfahren

Country Status (7)

Country Link
US (1) US20030002995A1 (de)
EP (1) EP1253320B1 (de)
KR (1) KR100494262B1 (de)
CN (1) CN1212476C (de)
DE (1) DE60209054T2 (de)
HK (1) HK1051061B (de)
TW (1) TW561223B (de)

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US6986649B2 (en) * 2003-04-09 2006-01-17 Motorola, Inc. Micropump with integrated pressure sensor
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US7790325B2 (en) * 2004-03-31 2010-09-07 Canon Kabushiki Kaisha Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve
US7219848B2 (en) * 2004-11-03 2007-05-22 Meadwestvaco Corporation Fluid sprayer employing piezoelectric pump
CN100406731C (zh) * 2005-03-10 2008-07-30 张坤林 可防卡死的真空泵
US20080106071A1 (en) * 2006-11-03 2008-05-08 Chien-Tien Huang Air venting assembly of air pump
WO2008101196A1 (en) * 2007-02-15 2008-08-21 Osmetech Molecular Diagnostics Fluidics devices
CN101255858B (zh) * 2007-03-01 2010-05-26 讯凯国际股份有限公司 薄膜泵及具有薄膜泵的装置
TWI398577B (zh) * 2007-08-31 2013-06-11 Microjet Technology Co Ltd 大流體輸送裝置
WO2009102989A1 (en) * 2008-02-13 2009-08-20 Solix Biofuels, Inc. Low shear pumps for use with bioreactors
CN101608610A (zh) * 2008-06-20 2009-12-23 微创医疗器械(上海)有限公司 一种微型泵
JP5853587B2 (ja) * 2011-10-26 2016-02-09 オムロンヘルスケア株式会社 電子血圧計
DE102012202103A1 (de) 2012-02-13 2013-08-14 Robert Bosch Gmbh Druckausgleichselement mit einer Membran, Gehäuse, Batteriezellenmodul sowie Kraftfahrzeug
TWI475180B (zh) * 2012-05-31 2015-03-01 Ind Tech Res Inst 合成噴流裝置
KR20140147345A (ko) * 2013-06-19 2014-12-30 삼성전기주식회사 마이크로 펌프 장치
US20150057594A1 (en) * 2013-08-24 2015-02-26 Alcon Research, Ltd. Bubble-free microfluidic valve systems and methods
JP2015117647A (ja) * 2013-12-19 2015-06-25 東芝テック株式会社 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置
JP6695154B2 (ja) * 2016-01-28 2020-05-20 東芝テック株式会社 インク循環装置及びプリンタ
US9976673B2 (en) 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203079B1 (de) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelektrischer aktuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203080B1 (de) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Pneumatische miniaturvorrichtung
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203078B1 (de) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Pneumatische miniaturvorrichtung
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
TWM539008U (zh) * 2016-01-29 2017-04-01 Microjet Technology Co Ltd 微型氣壓動力裝置
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
KR101910932B1 (ko) * 2016-08-31 2018-10-23 이오플로우(주) 전기 삼투 펌프
CN108071580A (zh) * 2016-11-10 2018-05-25 研能科技股份有限公司 微型气压动力装置
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108071577B (zh) * 2016-11-10 2020-11-24 研能科技股份有限公司 微型流体控制装置
CN108071578A (zh) * 2016-11-10 2018-05-25 研能科技股份有限公司 微型气压动力装置
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
DE102018207858B4 (de) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
CN110869613B (zh) * 2018-09-30 2022-08-19 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN113944614B (zh) * 2018-09-30 2023-06-20 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN208950819U (zh) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
WO2020062289A1 (zh) * 2018-09-30 2020-04-02 深圳市大疆软件科技有限公司 隔膜泵及具有其的农业植保机
CN208950820U (zh) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN216984886U (zh) * 2021-11-25 2022-07-19 华为技术有限公司 一种微型压电泵及电子设备

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US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPH01174278A (ja) * 1987-12-28 1989-07-10 Misuzu Erii:Kk インバータ
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
JPH03134274A (ja) * 1989-10-17 1991-06-07 Seiko Epson Corp マイクロポンプの弁ユニット構造
EP0424087A1 (de) * 1989-10-17 1991-04-24 Seiko Epson Corporation Mikropumpe oder Mikrodurchflussmenge
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
US5507318A (en) * 1994-10-04 1996-04-16 Walbro Corporation Umbrella check valves
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
WO1997005385A1 (fr) * 1995-07-27 1997-02-13 Seiko Epson Corporation Microsoupape et son procede de realisation, micropompe utilisant cette microsoupape, et son procede de realisation, et dispositif utilisant cette micropompe
US5725017A (en) * 1997-01-27 1998-03-10 Medtronic, Inc. In-line pressure check valve for drug-delivery systems
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
DE19711270C2 (de) * 1997-03-18 2001-07-26 Schwerionenforsch Gmbh Mikropumpe für fluide Medien
DE19719861A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe
US6575715B1 (en) * 1997-09-19 2003-06-10 Omnitek Research & Development, Inc. Structural elements forming a pump
DE19918694C2 (de) * 1998-04-27 2002-03-14 Matsushita Electric Works Ltd Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens
US6334761B1 (en) * 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication

Also Published As

Publication number Publication date
KR20020082800A (ko) 2002-10-31
EP1253320A2 (de) 2002-10-30
EP1253320A3 (de) 2004-02-04
HK1051061A1 (en) 2003-07-18
US20030002995A1 (en) 2003-01-02
KR100494262B1 (ko) 2005-06-13
HK1051061B (zh) 2006-08-25
CN1382909A (zh) 2002-12-04
DE60209054T2 (de) 2006-08-31
CN1212476C (zh) 2005-07-27
EP1253320B1 (de) 2006-02-08
TW561223B (en) 2003-11-11

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Legal Events

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