DE60204763D1 - Mikropumpe - Google Patents

Mikropumpe

Info

Publication number
DE60204763D1
DE60204763D1 DE60204763T DE60204763T DE60204763D1 DE 60204763 D1 DE60204763 D1 DE 60204763D1 DE 60204763 T DE60204763 T DE 60204763T DE 60204763 T DE60204763 T DE 60204763T DE 60204763 D1 DE60204763 D1 DE 60204763D1
Authority
DE
Germany
Prior art keywords
micro pump
micro
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60204763T
Other languages
English (en)
Other versions
DE60204763T2 (de
Inventor
Yukihisa Takeuchi
Hiroyuki Tsuji
Kazumasa Kitamura
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60204763D1 publication Critical patent/DE60204763D1/de
Publication of DE60204763T2 publication Critical patent/DE60204763T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE60204763T 2001-04-06 2002-04-05 Mikropumpe Expired - Lifetime DE60204763T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2001108986 2001-04-06
JP2001108986 2001-04-06
JP2001189718 2001-06-22
JP2001189718 2001-06-22
US09/935,087 US6752601B2 (en) 2001-04-06 2001-08-22 Micropump
US935087 2001-08-22
PCT/JP2002/003438 WO2002084118A1 (fr) 2001-04-06 2002-04-05 Micropompe

Publications (2)

Publication Number Publication Date
DE60204763D1 true DE60204763D1 (de) 2005-07-28
DE60204763T2 DE60204763T2 (de) 2006-05-18

Family

ID=27346486

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60204763T Expired - Lifetime DE60204763T2 (de) 2001-04-06 2002-04-05 Mikropumpe

Country Status (4)

Country Link
US (2) US6752601B2 (de)
EP (1) EP1375916B1 (de)
DE (1) DE60204763T2 (de)
WO (1) WO2002084118A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030206834A1 (en) * 2000-11-16 2003-11-06 Chiao Dahshiarn Replaceable scent and multimedia storage medium for use with a playback apparatus having electrostatic scents release
US6699018B2 (en) * 2001-04-06 2004-03-02 Ngk Insulators, Ltd. Cell driving type micropump member and method for manufacturing the same
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication
JP4221184B2 (ja) * 2002-02-19 2009-02-12 日本碍子株式会社 マイクロ化学チップ
JP4422973B2 (ja) * 2002-08-27 2010-03-03 京セラ株式会社 積層圧電体、アクチュエータ及び印刷ヘッド
ITTO20020808A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Dispositivo integrato di analisi del dna.
ITTO20020809A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Micropompa, in particolare per un dispositivo integrato di analisi del dna.
JP4842520B2 (ja) * 2003-05-30 2011-12-21 日本碍子株式会社 セル駆動型圧電／電歪アクチュエータ及びその製造方法
EP1645329A4 (de) * 2003-07-11 2010-05-19 Ngk Insulators Ltd Mikroreaktor
US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
JP4746988B2 (ja) * 2003-07-22 2011-08-10 日本碍子株式会社 アクチュエータ素子及びアクチュエータ素子を有する装置
WO2005060593A2 (en) * 2003-12-10 2005-07-07 Purdue Research Foundation Micropump for electronics cooling
US7276720B2 (en) 2004-07-19 2007-10-02 Helicos Biosciences Corporation Apparatus and methods for analyzing samples
US20060012793A1 (en) * 2004-07-19 2006-01-19 Helicos Biosciences Corporation Apparatus and methods for analyzing samples
DE102004042578A1 (de) * 2004-09-02 2006-03-23 Roche Diagnostics Gmbh Mikropumpe zur Förderung von Flüssigkeiten mit niedrigen Förderraten im Druck/Saug-Betrieb
DE102004042987A1 (de) * 2004-09-06 2006-03-23 Roche Diagnostics Gmbh Push-Pull betriebene Pumpe für ein mikrofluidisches System
US20070070349A1 (en) * 2005-09-23 2007-03-29 Helicos Biosciences Corporation Optical train and method for TIRF single molecule detection and analysis
US20060286566A1 (en) * 2005-02-03 2006-12-21 Helicos Biosciences Corporation Detecting apparent mutations in nucleic acid sequences
EP1885646A1 (de) * 2005-05-12 2008-02-13 STMicroelectronics S.r.l. Mikrofluidvorrichtung mit integrierter mikropumpe, insbesondere biochemischer mikroreaktor, und herstellungsverfahren dafür
WO2007013287A1 (ja) * 2005-07-27 2007-02-01 Kyushu Institute Of Technology バルブレスマイクロポンプ
US20070085449A1 (en) * 2005-10-13 2007-04-19 Nanyang Technological University Electro-active valveless pump
US20080161779A1 (en) * 2006-12-27 2008-07-03 Chiming Wei Implantable nano pump for drug delivery
US8353682B2 (en) * 2007-11-23 2013-01-15 Stichting Imec Nederland Microfluidic-device systems and methods for manufacturing microfluidic-device systems
JP2013504008A (ja) * 2009-09-03 2013-02-04 ゲーム・チェンジャーズ・リミテッド・ライアビリティ・カンパニー ナノ分子固体電動スラスタ
KR20140014214A (ko) * 2011-03-02 2014-02-05 게임 체인저스, 엘엘씨 분산형 마이크로 추력기를 이용하는 비행 제어 장치
JP5636555B2 (ja) * 2012-04-02 2014-12-10 株式会社メトラン ポンプユニット、呼吸補助装置
EP3826854B1 (de) 2018-07-23 2023-10-25 Hewlett-Packard Development Company, L.P. Flüssigkeitsausstoss mit mikropumpen und druckdifferenzbasiertem flüssigkeitsstrom

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598506A (en) * 1969-04-23 1971-08-10 Physics Int Co Electrostrictive actuator
DE3421082A1 (de) * 1984-06-06 1985-12-12 Siemens AG, 1000 Berlin und 8000 München Piezoelektrisches foerder- und dosiergeraet
DE3645017C2 (de) * 1985-09-06 1990-07-12 Fuji Electric Co., Ltd., Kawasaki, Kanagawa, Jp
JPS6357386U (de) * 1986-09-30 1988-04-16
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5216631A (en) * 1990-11-02 1993-06-01 Sliwa Jr John W Microvibratory memory device
JPH04183977A (ja) * 1990-11-16 1992-06-30 Olympus Optical Co Ltd 圧電ポンプ
JP2855846B2 (ja) * 1990-11-22 1999-02-10 ブラザー工業株式会社 圧電ポンプ
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
JPH0727056A (ja) * 1993-07-06 1995-01-27 Hitachi Ltd ポンプ
JPH0939244A (ja) * 1995-05-23 1997-02-10 Fujitsu Ltd 圧電ポンプ
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
DE19525087C1 (de) * 1995-07-10 1996-09-12 Daimler Benz Ag Piezoelektrische Flüssigkeitspumpe
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
DE19734845C1 (de) * 1997-08-12 1998-11-12 Deutsch Zentr Luft & Raumfahrt Schnellschaltendes Ventil
JP2000314381A (ja) * 1999-03-03 2000-11-14 Ngk Insulators Ltd ポンプ
JP2001063035A (ja) * 1999-08-26 2001-03-13 Ricoh Co Ltd 液体吐出装置
JP3433160B2 (ja) * 1999-10-01 2003-08-04 日本碍子株式会社 圧電／電歪デバイス
JP3629405B2 (ja) * 2000-05-16 2005-03-16 コニカミノルタホールディングス株式会社 マイクロポンプ
US6431212B1 (en) * 2000-05-24 2002-08-13 Jon W. Hayenga Valve for use in microfluidic structures
US6699018B2 (en) * 2001-04-06 2004-03-02 Ngk Insulators, Ltd. Cell driving type micropump member and method for manufacturing the same
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump

Also Published As

Publication number Publication date
WO2002084118A1 (fr) 2002-10-24
US20040202554A1 (en) 2004-10-14
DE60204763T2 (de) 2006-05-18
EP1375916A1 (de) 2004-01-02
US6752601B2 (en) 2004-06-22
EP1375916A4 (de) 2004-06-30
EP1375916B1 (de) 2005-06-22
US20020146330A1 (en) 2002-10-10

Similar Documents

Publication Publication Date Title
DE60204763D1 (de) Mikropumpe
DE60222343D1 (de) Miniaturpumpe
DE50207312D1 (de) Kolbenpumpe
DE50204944D1 (de) Kolbenpumpe
DE60226377D1 (de) Vakuumpumpe
DE50201711D1 (de) Mikroventil
DE60139578D1 (de) Hubkolbenverdichter
DE60237872D1 (de) Knetapparat
DE50207920D1 (de) Radialpumpe
DE50101315D1 (de) Förderpumpe
DE60216425D1 (de) Ausgleichswellenzusammenbau
DE60129590D1 (de) Magnetpumpe
DE50103731D1 (de) Förderpumpe
ATE491886T1 (de) Spaltrohrpumpe
DE60209406D1 (de) Rohrpumpe
DE60227906D1 (de) Membranpumpe
DE60210287D1 (de) Pumpenanordnung
DE60214270T8 (de) Pumpeinheit
DE50200795D1 (de) Mikroventil
DE50212305D1 (de) Hydraulisches pumpenaggregat
DE50208630D1 (de) Vakuumpumpe
DE60101368D1 (de) Vakuumpumpe
DE50112030D1 (de) Förderpumpe
DE60206617D1 (de) Abwärtshub-spender
ATE232273T1 (de) Anschlusselement

Legal Events

Date Code Title Description
8364 No opposition during term of opposition