WO2002084118A1 - Micropompe - Google Patents

Micropompe Download PDF

Info

Publication number
WO2002084118A1
WO2002084118A1 PCT/JP2002/003438 JP0203438W WO02084118A1 WO 2002084118 A1 WO2002084118 A1 WO 2002084118A1 JP 0203438 W JP0203438 W JP 0203438W WO 02084118 A1 WO02084118 A1 WO 02084118A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
side walls
flow passage
fluid
pressure fluctuation
Prior art date
Application number
PCT/JP2002/003438
Other languages
English (en)
French (fr)
Inventor
Yukihisa Takeuchi
Hiroyuki Tsuji
Kazumasa Kitamura
Nobuo Takahashi
Original Assignee
Ngk Insulators,Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Insulators,Ltd. filed Critical Ngk Insulators,Ltd.
Priority to EP02714495A priority Critical patent/EP1375916B1/en
Priority to DE60204763T priority patent/DE60204763T2/de
Publication of WO2002084118A1 publication Critical patent/WO2002084118A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
PCT/JP2002/003438 2001-04-06 2002-04-05 Micropompe WO2002084118A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP02714495A EP1375916B1 (en) 2001-04-06 2002-04-05 Micro pump
DE60204763T DE60204763T2 (de) 2001-04-06 2002-04-05 Mikropumpe

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2001-108986 2001-04-06
JP2001108986 2001-04-06
JP2001-189718 2001-06-22
JP2001189718 2001-06-22
US09/935,087 US6752601B2 (en) 2001-04-06 2001-08-22 Micropump
US09/935,087 2001-08-22

Publications (1)

Publication Number Publication Date
WO2002084118A1 true WO2002084118A1 (fr) 2002-10-24

Family

ID=27346486

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/003438 WO2002084118A1 (fr) 2001-04-06 2002-04-05 Micropompe

Country Status (4)

Country Link
US (2) US6752601B2 (ja)
EP (1) EP1375916B1 (ja)
DE (1) DE60204763T2 (ja)
WO (1) WO2002084118A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7126254B2 (en) 2003-07-22 2006-10-24 Ngk Insulators, Ltd. Actuator element and device including the actuator element
US7141915B2 (en) 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030206834A1 (en) * 2000-11-16 2003-11-06 Chiao Dahshiarn Replaceable scent and multimedia storage medium for use with a playback apparatus having electrostatic scents release
US6699018B2 (en) * 2001-04-06 2004-03-02 Ngk Insulators, Ltd. Cell driving type micropump member and method for manufacturing the same
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication
JP4221184B2 (ja) * 2002-02-19 2009-02-12 日本碍子株式会社 マイクロ化学チップ
JP4422973B2 (ja) * 2002-08-27 2010-03-03 京セラ株式会社 積層圧電体、アクチュエータ及び印刷ヘッド
ITTO20020808A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Dispositivo integrato di analisi del dna.
ITTO20020809A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Micropompa, in particolare per un dispositivo integrato di analisi del dna.
JP4842520B2 (ja) * 2003-05-30 2011-12-21 日本碍子株式会社 セル駆動型圧電／電歪アクチュエータ及びその製造方法
CN100404121C (zh) * 2003-07-11 2008-07-23 日本碍子株式会社 微型反应器
WO2005060593A2 (en) * 2003-12-10 2005-07-07 Purdue Research Foundation Micropump for electronics cooling
US7276720B2 (en) * 2004-07-19 2007-10-02 Helicos Biosciences Corporation Apparatus and methods for analyzing samples
US20060012793A1 (en) * 2004-07-19 2006-01-19 Helicos Biosciences Corporation Apparatus and methods for analyzing samples
DE102004042578A1 (de) * 2004-09-02 2006-03-23 Roche Diagnostics Gmbh Mikropumpe zur Förderung von Flüssigkeiten mit niedrigen Förderraten im Druck/Saug-Betrieb
DE102004042987A1 (de) * 2004-09-06 2006-03-23 Roche Diagnostics Gmbh Push-Pull betriebene Pumpe für ein mikrofluidisches System
US20070070349A1 (en) * 2005-09-23 2007-03-29 Helicos Biosciences Corporation Optical train and method for TIRF single molecule detection and analysis
US20060286566A1 (en) * 2005-02-03 2006-12-21 Helicos Biosciences Corporation Detecting apparent mutations in nucleic acid sequences
US8097222B2 (en) * 2005-05-12 2012-01-17 Stmicroelectronics, S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
US8210830B2 (en) * 2005-07-27 2012-07-03 Kyushu Institute Of Technology Valveless micropump
US20070085449A1 (en) 2005-10-13 2007-04-19 Nanyang Technological University Electro-active valveless pump
US20080161779A1 (en) * 2006-12-27 2008-07-03 Chiming Wei Implantable nano pump for drug delivery
US8353682B2 (en) * 2007-11-23 2013-01-15 Stichting Imec Nederland Microfluidic-device systems and methods for manufacturing microfluidic-device systems
JP2013504008A (ja) * 2009-09-03 2013-02-04 ゲーム・チェンジャーズ・リミテッド・ライアビリティ・カンパニー ナノ分子固体電動スラスタ
KR20140014214A (ko) * 2011-03-02 2014-02-05 게임 체인저스, 엘엘씨 분산형 마이크로 추력기를 이용하는 비행 제어 장치
JP5636555B2 (ja) * 2012-04-02 2014-12-10 株式会社メトラン ポンプユニット、呼吸補助装置
CN112041171B (zh) 2018-07-23 2022-07-19 惠普发展公司，有限责任合伙企业 用微泵和基于压力差的流体流进行流体喷射的系统和方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598506A (en) * 1969-04-23 1971-08-10 Physics Int Co Electrostrictive actuator
DE3421082A1 (de) * 1984-06-06 1985-12-12 Siemens AG, 1000 Berlin und 8000 München Piezoelektrisches foerder- und dosiergeraet
JPS6357386U (ja) * 1986-09-30 1988-04-16
EP0455342A1 (en) * 1990-05-01 1991-11-06 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
JPH04183977A (ja) * 1990-11-16 1992-06-30 Olympus Optical Co Ltd 圧電ポンプ
JPH0727056A (ja) * 1993-07-06 1995-01-27 Hitachi Ltd ポンプ
DE19525087C1 (de) * 1995-07-10 1996-09-12 Daimler Benz Ag Piezoelektrische Flüssigkeitspumpe
WO1999008030A1 (de) * 1997-08-12 1999-02-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Schnellschaltendes ventil
EP1077330A1 (en) * 1999-03-03 2001-02-21 Ngk Insulators, Ltd. Pump
JP2001063035A (ja) * 1999-08-26 2001-03-13 Ricoh Co Ltd 液体吐出装置
JP2001284672A (ja) * 1999-10-01 2001-10-12 Ngk Insulators Ltd 圧電／電歪デバイス

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3630206A1 (de) * 1985-09-06 1987-03-19 Fuji Electric Co Ltd Tintenstrahldruckkopf
US5216631A (en) * 1990-11-02 1993-06-01 Sliwa Jr John W Microvibratory memory device
JP2855846B2 (ja) * 1990-11-22 1999-02-10 ブラザー工業株式会社 圧電ポンプ
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
JPH0939244A (ja) * 1995-05-23 1997-02-10 Fujitsu Ltd 圧電ポンプ
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
JP3629405B2 (ja) * 2000-05-16 2005-03-16 コニカミノルタホールディングス株式会社 マイクロポンプ
US6431212B1 (en) * 2000-05-24 2002-08-13 Jon W. Hayenga Valve for use in microfluidic structures
US6699018B2 (en) * 2001-04-06 2004-03-02 Ngk Insulators, Ltd. Cell driving type micropump member and method for manufacturing the same
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598506A (en) * 1969-04-23 1971-08-10 Physics Int Co Electrostrictive actuator
DE3421082A1 (de) * 1984-06-06 1985-12-12 Siemens AG, 1000 Berlin und 8000 München Piezoelektrisches foerder- und dosiergeraet
JPS6357386U (ja) * 1986-09-30 1988-04-16
EP0455342A1 (en) * 1990-05-01 1991-11-06 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
JPH04183977A (ja) * 1990-11-16 1992-06-30 Olympus Optical Co Ltd 圧電ポンプ
JPH0727056A (ja) * 1993-07-06 1995-01-27 Hitachi Ltd ポンプ
DE19525087C1 (de) * 1995-07-10 1996-09-12 Daimler Benz Ag Piezoelektrische Flüssigkeitspumpe
WO1999008030A1 (de) * 1997-08-12 1999-02-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Schnellschaltendes ventil
EP1077330A1 (en) * 1999-03-03 2001-02-21 Ngk Insulators, Ltd. Pump
JP2001063035A (ja) * 1999-08-26 2001-03-13 Ricoh Co Ltd 液体吐出装置
JP2001284672A (ja) * 1999-10-01 2001-10-12 Ngk Insulators Ltd 圧電／電歪デバイス

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1375916A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7126254B2 (en) 2003-07-22 2006-10-24 Ngk Insulators, Ltd. Actuator element and device including the actuator element
US7141915B2 (en) 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device

Also Published As

Publication number Publication date
EP1375916A1 (en) 2004-01-02
US20020146330A1 (en) 2002-10-10
EP1375916A4 (en) 2004-06-30
US20040202554A1 (en) 2004-10-14
DE60204763T2 (de) 2006-05-18
DE60204763D1 (de) 2005-07-28
US6752601B2 (en) 2004-06-22
EP1375916B1 (en) 2005-06-22

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